JP2019515279A - ガスセンサ - Google Patents
ガスセンサ Download PDFInfo
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- JP2019515279A JP2019515279A JP2018556499A JP2018556499A JP2019515279A JP 2019515279 A JP2019515279 A JP 2019515279A JP 2018556499 A JP2018556499 A JP 2018556499A JP 2018556499 A JP2018556499 A JP 2018556499A JP 2019515279 A JP2019515279 A JP 2019515279A
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- electrode
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- gas
- gas sensing
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
- G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
- G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid
- G01N27/128—Microapparatus
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
- G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
- G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid
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- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Electrochemistry (AREA)
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
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- Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
Abstract
Description
ステップ905において、担体膜105が提供される。この場合、担体膜105に加熱装置110が予め取り付けられていることが好ましい。ステップ910において、導体構造115および135が取り付けられる。ステップ915において、絶縁体155が取り付けられる。導体構造115、135の部分は、ステップ915において絶縁体155を取り付けた後に担体膜105に取り付けられてもよい。
105 担体膜
110 加熱装置
115 第1導体構造
120 第1電極
125 第1電気リード線、第1リード線
135 第2導体構造
140 第2電極
145 第2電気リード線、第2リード線
150 ガス検知層
155 絶縁体、絶縁層
160 最大サイズ
162 軸線
165 凸面領域
900 方法
905、910、915、920 ステップ
Claims (9)
- 平らな担体膜(105)、
担体膜(105)上のガス検知層(150)、
それぞれガス検知層(150)に導電可能に位置する、第1電極(120)および少なくとも1つの第2電極(140)、
第1電極(120)への第1電気リード線(125)および第2電極(140)への第2電気リード線(145)、
を含むガスセンサ(100)において、
第2電極(140)は第1電極(120)の半径方向外側に位置し、第1リード線(125)はガス検知層(150)に対して絶縁されているガスセンサ(100)。 - 担体膜(105)の平面内に凸面の領域(165)が位置し、第1電極(120)は領域(165)の内側に限定され、および第2電極(140)は外側の少なくとも3つの側に位置する、請求項1に記載のガスセンサ(100)。
- 第2電極(140)は、第1電極(120)を、担体膜(105)の平面内において少なくとも270°の角度にわたり包囲する、請求項1または2に記載のガスセンサ(100)。
- ガス検知層(150)の、電極(120、140)間に位置する電気作用領域は、ほぼ第2電極(140)の内部領域に限定されている、請求項1ないし3のいずれかに記載のガスセンサ(100)。
- 第1電極(120)は、他の第2電極(140)の半径方向外側に位置する、請求項1ないし4のいずれかに記載のガスセンサ(100)。
- 第1電極(120)および第2電極(140)は、第2電極(140)の半径方向内側で櫛状に相互にかみ合わされている、請求項1ないし5のいずれかに記載のガスセンサ(100)。
- 第1電極(120)は、ところどころで絶縁体(155)により第2電極(140)の1つから分離されている、請求項1ないし6のいずれかに記載のガスセンサ(100)。
- 電極(120、140)の少なくとも1つのリード線(125、145)は、絶縁体(155)によりガス検知層(150)から分離されている、請求項1ないし7のいずれかに記載のガスセンサ(100)。
- ガスセンサ(100)の製造方法(900)であって、
平らな担体膜(105)を提供するステップ(905)、
第1および第2導体構造(115、135)を取り付けるステップ(910)、
第1導体構造(115)の一部分に絶縁体(155)を取り付けるステップ(915)、
を含み、
これにより、第2導体構造(135)は第1導体構造(115)の絶縁されていない部分の半径方向外側に位置し、および
絶縁されていない導体構造(115、135)の領域内における担体膜(105)へガス検知層(150)を取り付けるステップ(920)を含む、ガスセンサ(100)の製造方法(900)。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE102016207252.8A DE102016207252A1 (de) | 2016-04-28 | 2016-04-28 | Gassensor |
DE102016207252.8 | 2016-04-28 | ||
PCT/EP2017/059871 WO2017186766A1 (de) | 2016-04-28 | 2017-04-26 | Gassensor |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2019515279A true JP2019515279A (ja) | 2019-06-06 |
JP6943880B2 JP6943880B2 (ja) | 2021-10-06 |
Family
ID=58640865
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2018556499A Active JP6943880B2 (ja) | 2016-04-28 | 2017-04-26 | ガスセンサおよびガスセンサの製造方法 |
Country Status (4)
Country | Link |
---|---|
US (1) | US10914699B2 (ja) |
JP (1) | JP6943880B2 (ja) |
DE (1) | DE102016207252A1 (ja) |
WO (1) | WO2017186766A1 (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20210262967A1 (en) * | 2018-06-08 | 2021-08-26 | Omron Corporation | Micro-hotplate and mems gas sensor |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3983527A (en) * | 1973-08-14 | 1976-09-28 | Nippon Sheet Glass Co., Ltd. | Humidity-sensitive sensor |
JPS52133295A (en) * | 1976-05-01 | 1977-11-08 | Omron Tateisi Electronics Co | External atmosphere detector |
JPS60115837A (ja) * | 1983-11-29 | 1985-06-22 | Ngk Spark Plug Co Ltd | ヒ−タ付ガスセンサとその製造法 |
JPH0755743A (ja) * | 1993-08-06 | 1995-03-03 | Tdk Corp | 湿度センサ用電極 |
US7189360B1 (en) * | 2002-01-24 | 2007-03-13 | Sandia Corporation | Circular chemiresistors for microchemical sensors |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100529233B1 (ko) | 2003-09-06 | 2006-02-24 | 한국전자통신연구원 | 센서 및 그 제조 방법 |
US20100050735A1 (en) | 2006-07-21 | 2010-03-04 | Mark Varney | Gas Sensor |
EP2533037B1 (en) * | 2011-06-08 | 2019-05-29 | Alpha M.O.S. | Chemoresistor type gas sensor having a multi-storey architecture |
KR101344738B1 (ko) * | 2011-12-12 | 2013-12-26 | 한국과학기술연구원 | 고감도 투명 가스 센서 및 그 제조방법 |
US8802568B2 (en) | 2012-09-27 | 2014-08-12 | Sensirion Ag | Method for manufacturing chemical sensor with multiple sensor cells |
-
2016
- 2016-04-28 DE DE102016207252.8A patent/DE102016207252A1/de active Pending
-
2017
- 2017-04-26 JP JP2018556499A patent/JP6943880B2/ja active Active
- 2017-04-26 US US16/096,055 patent/US10914699B2/en active Active
- 2017-04-26 WO PCT/EP2017/059871 patent/WO2017186766A1/de active Application Filing
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3983527A (en) * | 1973-08-14 | 1976-09-28 | Nippon Sheet Glass Co., Ltd. | Humidity-sensitive sensor |
JPS52133295A (en) * | 1976-05-01 | 1977-11-08 | Omron Tateisi Electronics Co | External atmosphere detector |
JPS60115837A (ja) * | 1983-11-29 | 1985-06-22 | Ngk Spark Plug Co Ltd | ヒ−タ付ガスセンサとその製造法 |
JPH0755743A (ja) * | 1993-08-06 | 1995-03-03 | Tdk Corp | 湿度センサ用電極 |
US7189360B1 (en) * | 2002-01-24 | 2007-03-13 | Sandia Corporation | Circular chemiresistors for microchemical sensors |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20210262967A1 (en) * | 2018-06-08 | 2021-08-26 | Omron Corporation | Micro-hotplate and mems gas sensor |
Also Published As
Publication number | Publication date |
---|---|
US10914699B2 (en) | 2021-02-09 |
US20190128831A1 (en) | 2019-05-02 |
WO2017186766A1 (de) | 2017-11-02 |
DE102016207252A1 (de) | 2017-11-02 |
JP6943880B2 (ja) | 2021-10-06 |
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