JP2019503486A - 拡張赤外分光エリプソメトリシステム及び方法 - Google Patents
拡張赤外分光エリプソメトリシステム及び方法 Download PDFInfo
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Abstract
Description
本件特許出願は、「拡張赤外エリプソメトリ装置及び方法」(Apparatus and Methods of Extended Infrared Ellipsometry)と題する2016年1月15日付米国仮特許出願第62/279,469号に基づき、米国特許法第119条の規定による優先権を主張するものであるので、この参照を以て当該仮特許出願の主題を遍く本願に繰り入れることにする。
Claims (24)
- 広帯域照明光群を生成するよう構成された1個又は複数個の照明源と、
照明源からの照明光群を、計測下標本の表面上の計測スポットへと、ある入射面内で一通り又は複数通りの入射角にて差し向けるよう構成された照明光学系サブシステムと、
標本の表面上の計測スポットから集光光群を集光するよう構成された集光光学系サブシステムと、
入射光に感応する平坦で二次元的な表面を有する第1検出器であり、第1波長域内の照明光群に対する標本の応答を検出するよう構成された第1検出器と、
入射光に感応する平坦で二次元的な表面を有する第2検出器であり、第2波長域内の照明光群に対する標本の応答を、第1検出器が第1波長域内の照明光群に対する標本の応答を検出するのと同時に検出するよう構成された第2検出器と、
集光光群のうち第1波長域内の第1部分を第1検出器の表面に向かい分散させるよう構成された第1回折素子と、
集光光群のうち第2波長域内の第2部分を第2検出器の表面に向かい分散させるよう構成された第2回折素子と、
を備える計量システム。 - 請求項1に記載の計量システムであって、第1検出器上に射影された入射面に整列している方向が第1検出器の表面上での波長分散の方向に対し垂直な方向を向くよう、集光光学系サブシステムが計測スポットを第1検出器の表面上に結像させる計量システム。
- 請求項2に記載の計量システムであって、第2検出器上に射影された入射面に整列している方向が第2検出器の表面上での波長分散の方向に対し垂直な方向を向くよう、集光光学系サブシステムが計測スポットを第2検出器の表面上に結像させる計量システム。
- 請求項1に記載の計量システムであって、第2検出器が、異なる光感度をそれぞれ呈する2個以上の相異なる表面エリアを有し、当該2個以上の相異なる表面エリアが第2検出器の表面を横断する波長分散方向に整列している計量システム。
- 請求項1に記載の計量システムであって、更に、
入射光に感応する平坦で二次元的な表面を有する第3検出器であり、第3波長域内の照明光群に対する標本の応答を、第1検出器が第1波長域内の照明光群に対する標本の応答を検出するのと同時に検出するよう構成された第3検出器と、
集光光群のうち第3波長域内の第3部分を第3検出器の表面に向かい分散させるよう構成された第3回折素子と、
を備える計量システム。 - 請求項1に記載の計量システムであって、更に、
集光光群のうち一部分を検出するよう構成されたファインフォーカスセンサと、
集光光群のうち上記一部分をファインフォーカスセンサに差し向けるよう構成されたビーム分岐素子と、を備え、そのファインフォーカスセンサが、第1及び第2検出器が照明光群に対する標本の応答を検出するのと同時に標本合焦誤差が検出されるよう構成されている、
計量システム。 - 請求項1に記載の計量システムであって、照明光群が、赤外、可視及び紫外波長を含む波長域を有する広帯域照明光である計量システム。
- 請求項1に記載の計量システムであって、照明光群のうち少なくとも一部分が標本に垂直入射角にて供給される計量システム。
- 請求項1に記載の計量システムであって、照明光群のうち少なくとも一部分が標本に斜め入射角にて供給される計量システム。
- 請求項1に記載の計量システムであって、分光エリプソメータ及び分光リフレクトメータのうちいずれか1個又は複数個として構成された計量システム。
- 請求項1に記載の計量システムであって、計測下標本が高アスペクト比計量ターゲットである計量システム。
- 請求項1に記載の計量システムであって、計測下標本が三次元NAND構造又はダイナミックランダムアクセスメモリ構造である計量システム。
- 請求項1に記載の計量システムであって、更に、
計測下標本の注目パラメタの推定値を、第1及び第2検出器の出力の結合分析を踏まえ生成するよう構成された情報処理システムを備える計量システム。 - 広帯域照明光群を生成するよう構成された1個又は複数個の照明源と、
照明源からの照明光群を、計測下標本の表面上の計測スポットへと、ある入射面内で一通り又は複数通りの入射角にて差し向けるよう構成された照明光学系サブシステムと、
標本の表面上の計測スポットから集光光群を集光するよう構成された集光光学系サブシステムと、
入射光に感応する平坦で二次元的な表面を有する第1検出器であり、第1波長域内の照明光群に対する標本の応答を検出するよう構成された第1検出器であり、異なる光感度をそれぞれ呈する2個以上の相異なる表面エリアを有し、当該2個以上の相異なる表面エリアが自第1検出器の表面を横断する波長分散方向に整列している第1検出器と、
集光光群のうち第1波長域内の第1部分を、第1検出器の表面を過ぎり分散させるよう構成された第1回折素子と、
を備える計量システム。 - 請求項14に記載の計量システムであって、更に、
入射光に感応する平坦で二次元的な表面を有する第2検出器であり、第2波長域内の照明光群に対する標本の応答を、第1検出器が第1波長域内の照明光群に対する標本の応答を検出するのと同時に検出するよう構成された第2検出器と、
集光光群のうち第2波長域内の第2部分を、第2検出器の表面を過ぎり分散させるよう構成された第2回折素子と、
を備える計量システム。 - 請求項14に記載の計量システムであって、第1検出器上に射影された入射面に整列している方向が第1検出器の表面上での波長分散の方向に対し垂直な方向を向くよう、集光光学系サブシステムが計測スポットを第1検出器の表面上に結像させる計量システム。
- 請求項14に記載の計量システムであって、更に、
入射光に感応する平坦で二次元的な表面を有する第3検出器であり、第3波長域内の照明光群に対する標本の応答を、第1検出器が第1波長域内の照明光群に対する標本の応答を検出するのと同時に検出するよう構成された第3検出器と、
集光光群のうち第3波長域内の第3部分を、第3検出器の表面を過ぎり分散させるよう構成された第3回折素子と、
を備える計量システム。 - 請求項14に記載の計量システムであって、更に、
集光光群のうち一部分を検出するよう構成されたファインフォーカスセンサと、
集光光群のうち上記一部分をファインフォーカスセンサに差し向けるよう構成されたビーム分岐素子と、
を備える計量システム。 - 請求項14に記載の計量システムであって、計測下標本が三次元NAND構造又はダイナミックランダムアクセスメモリ構造である計量システム。
- 照明源からの広帯域照明光群を、計測下標本の表面上の計測スポットへと、ある入射面内で一通り又は複数通りの入射角にて差し向けるステップと、
標本の表面上の計測スポットから集光光群を集光するステップと、
集光光群のうち第1波長域内の第1部分を第1検出器の表面へと差し向け且つ集光光群のうち第2波長域内の第2部分を第2検出器の表面へと差し向けるステップと、
第1波長域内の照明光群に対する標本の応答を検出するステップと、
第2波長域内の照明光群に対する標本の応答を、第1波長域内の照明光群に対する標本の応答の検出と同時に検出するステップと、
を有する方法。 - 請求項20に記載の方法であって、更に、
第1検出器上に射影された入射面に整列している方向が第1検出器の表面上での波長分散の方向に対し垂直な方向を向くよう、計測スポットを第1検出器の表面上に結像させるステップを有する方法。 - 請求項20に記載の方法であって、第2検出器が、異なる光感度をそれぞれ呈する2個以上の相異なる表面エリアを有し、当該2個以上の相異なる表面エリアが第2検出器の表面を横断する波長分散方向に整列している方法。
- 請求項20に記載の方法であって、更に、
集光光群のうち第3波長域内の第3部分を第3検出器の表面へと差し向けるステップと、
第3波長域内の照明光群に対する標本の応答を、第1波長域内の照明光群に対する標本の応答の検出と同時に検出するステップと、
を有する方法。 - 請求項20に記載の方法であって、計測下標本が三次元NAND構造又はダイナミックランダムアクセスメモリ構造である方法。
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