JP2019502025A5 - - Google Patents
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- Publication number
- JP2019502025A5 JP2019502025A5 JP2018532098A JP2018532098A JP2019502025A5 JP 2019502025 A5 JP2019502025 A5 JP 2019502025A5 JP 2018532098 A JP2018532098 A JP 2018532098A JP 2018532098 A JP2018532098 A JP 2018532098A JP 2019502025 A5 JP2019502025 A5 JP 2019502025A5
- Authority
- JP
- Japan
- Prior art keywords
- wall
- processing
- process separation
- vacuum chamber
- closure plate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000000034 method Methods 0.000 claims 42
- 238000000926 separation method Methods 0.000 claims 22
- 238000002955 isolation Methods 0.000 claims 16
- 230000003014 reinforcing effect Effects 0.000 claims 2
- 239000000758 substrate Substances 0.000 claims 2
- 239000010409 thin film Substances 0.000 claims 2
- 230000003213 activating effect Effects 0.000 claims 1
- 238000011144 upstream manufacturing Methods 0.000 claims 1
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| PCT/EP2015/080841 WO2017108081A1 (en) | 2015-12-21 | 2015-12-21 | Film forming apparatus |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2019502025A JP2019502025A (ja) | 2019-01-24 |
| JP2019502025A5 true JP2019502025A5 (https=) | 2019-04-25 |
| JP6626977B2 JP6626977B2 (ja) | 2019-12-25 |
Family
ID=55071009
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2018532098A Active JP6626977B2 (ja) | 2015-12-21 | 2015-12-21 | 膜形成装置及び膜形成方法 |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US20180363130A1 (https=) |
| EP (1) | EP3394313A1 (https=) |
| JP (1) | JP6626977B2 (https=) |
| KR (1) | KR20180096728A (https=) |
| CN (1) | CN108474112B (https=) |
| TW (1) | TWI647743B (https=) |
| WO (1) | WO2017108081A1 (https=) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6681524B1 (ja) * | 2019-03-12 | 2020-04-15 | 株式会社アルバック | 真空蒸着装置 |
| SG11202100867RA (en) * | 2019-03-12 | 2021-03-30 | Ulvac Inc | Vacuum deposition apparatus |
| CN110791744A (zh) * | 2019-11-27 | 2020-02-14 | 无锡光润真空科技有限公司 | 分体式多工序真空镀膜装置 |
| CN118497698B (zh) * | 2024-07-19 | 2024-09-17 | 成都国泰真空设备有限公司 | 一种多功能卷绕镀膜机 |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB8309324D0 (en) * | 1983-04-06 | 1983-05-11 | Gen Eng Radcliffe | Vacuum coating apparatus |
| EP0122092A3 (en) * | 1983-04-06 | 1985-07-10 | General Engineering Radcliffe Limited | Vacuum coating apparatus |
| DE4207525C2 (de) * | 1992-03-10 | 1999-12-16 | Leybold Ag | Hochvakuum-Beschichtungsanlage |
-
2015
- 2015-12-21 KR KR1020187020768A patent/KR20180096728A/ko not_active Ceased
- 2015-12-21 WO PCT/EP2015/080841 patent/WO2017108081A1/en not_active Ceased
- 2015-12-21 EP EP15820514.6A patent/EP3394313A1/en not_active Withdrawn
- 2015-12-21 US US16/062,072 patent/US20180363130A1/en not_active Abandoned
- 2015-12-21 CN CN201580085470.5A patent/CN108474112B/zh active Active
- 2015-12-21 JP JP2018532098A patent/JP6626977B2/ja active Active
-
2016
- 2016-12-20 TW TW105142199A patent/TWI647743B/zh not_active IP Right Cessation
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