JP2019219341A - Probe assembly - Google Patents

Abstract

To provide a probe assembly capable of flexibly positioning a probe matching an alignment state of inspection terminals.SOLUTION: The present invention comprises: a support member; a probe group in which a plurality of probes each including a first contact part coming into contact with a first contact object, and a second contact part coming into contact with a second contact object, are aligned along the longitudinal direction of the support member; and a plurality of positioning members supporting the respective probes with their penetrating through central regions of the respective probes of the probe group. The probe group includes: a plurality of first probes each having a fixing hole disposed from the central region toward the first contact part side, and a position adjusting hole disposed from the central region toward the second contact part side; and a plurality of second probes each having a position adjusting hole disposed from the central region toward the first contact part side, and a fixing hole disposed from the central region toward the second contact part side, where the probe group is characterized by alternately aligning the respective first probes and the respective second probes.SELECTED DRAWING: Figure 1

Description

  The present invention relates to a probe assembly, and can be applied to, for example, a probe assembly used for inspection of a flat inspection object such as a liquid crystal panel and an integrated circuit.

  For example, in a manufacturing process of a liquid crystal panel display device, a function inspection of a TFT array circuit on a glass substrate of a liquid crystal panel used for the liquid crystal panel display device and an inspection for detecting disconnection and short circuit of wiring (hereinafter, referred to as “array inspection”) Is called). In general, in an array inspection, an electric signal is applied to a plurality of inspection test pads (inspection terminals) of a circuit provided at an edge portion of a liquid crystal panel by using an inspection device so that each TFT on a glass substrate is correctly inspected. Check if it works.

  The inspection apparatus includes a probe unit, and the probe unit includes a probe assembly having a plurality of probes that are electrically connected to electrodes of a circuit of a liquid crystal panel (see Patent Document 1).

  FIG. 12 is a diagram showing an outline of a conventional probe assembly. FIG. 12A is a view of the probe assembly 300 as viewed from above, and FIG. 12B is a view of the probe assembly 300 as viewed from the side. As shown in FIG. 12, the probe assembly 300 is a main body of the probe assembly 300 and supports a plurality of probes 304 and 305, and a plurality of strip-shaped members arranged in parallel with the support 301. Probe 304 (304-1 to 304-n) and probe 305 (305-1 to 305-n) and two positioning members 303 that penetrate the probes 304 and 305 and determine the positions of the probes 304 and 305. (303-1, 303-2) and a pair of side covers 302 (302-1, 302-2) holding the positioning member 303 and fixed to the support portion 301.

  In FIG. 12, the test pads for inspection 80 (80-1 to 80-n) are arranged in a two-row staggered arrangement. In this example, two types of probes 304 and 305 having different sizes (different contact positions) are used for the probe assembly 300 in order to support the two-row staggered arrangement. That is, the probe 304 (larger than the probe 305) is brought into contact with the test test pads 80 (80-1, 80-3,...) Arranged in the first row, and An array inspection is performed by bringing the probe 305 (smaller than the probe 304) into contact with the test pad 80 (80-2, 80-4, ...).

JP-A-10-132853

  However, in the case of the two-row staggered arrangement, a probe of an appropriate size is required according to the terminal pitch in the terminal length direction of the test pad 80 for inspection (the terminal pitch P in FIG. 12). That is, if there is no suitable probe that matches the terminal pitch P, a probe corresponding to the terminal pitch P must be designed from scratch.

  In other words, whether or not a probe of which size can be used depends on the terminal pitch P. Therefore, in order to prepare the probe in advance, the specifications of the test pad for inspection need to be fixed. In addition, since a large number of probes are prepared in advance and the probes cannot be stocked, there is a risk that a delivery date is delayed with respect to a customer requested delivery date.

  Therefore, a probe assembly that can flexibly position the probe in accordance with the arrangement of the inspection terminals is desired.

  The present invention provides a plurality of probes each having (1) a support member, (2) a first contact portion that contacts a first contact object, and a second contact portion that contacts a second contact object. A probe group arranged along the longitudinal direction of the support member; and (3) a plurality of positioning members that support the probes by penetrating a central region of the probes in the probe group. A plurality of first probes each having a fixed hole arranged on the first contact portion side from the central region and a position adjustment hole arranged on the second contact portion side from the central region; And a plurality of second probes having a position adjustment hole arranged on the first contact portion side from the central region and a fixed hole arranged on the second contact portion side from the central region. Having the first probe and the second probe. Characterized in that each other are arranged.

  ADVANTAGE OF THE INVENTION According to this invention, positioning of the probe which matched the arrangement | positioning state of the inspection terminal can be performed flexibly.

It is a figure showing composition of a probe applied to a probe assembly concerning an embodiment. It is a figure explaining the usage of the probe (reference type, movable type) concerning an embodiment. It is the figure which looked at the probe assembly which concerns on embodiment from above. FIG. 2 is an exploded view of the probe assembly according to the embodiment. FIG. 3 is a diagram illustrating an example of a two-row staggered arrangement of test pads for inspection according to the embodiment. It is a lineblock diagram showing the composition of the side cover (table) concerning an embodiment. It is a lineblock diagram showing the composition of the side cover (back) concerning an embodiment. FIG. 7 is a configuration diagram illustrating another configuration of the side cover (front) according to the embodiment, which is different from FIG. 6. FIG. 3 is a perspective view illustrating a configuration of a probe unit in a measurement unit of the inspection device according to the embodiment. It is a lineblock diagram showing the main composition of the probe unit concerning an embodiment. FIG. 4 is a side sectional view showing a probe mechanism of the probe unit according to the embodiment. FIG. 9 is a diagram showing an outline of a conventional probe assembly.

(A) Principal Embodiment Hereinafter, an embodiment of a probe assembly according to the present invention will be described in detail with reference to the drawings.

  In this embodiment, a case where the present invention is applied to an inspection apparatus for inspecting a liquid crystal (LCD) panel will be exemplified. The object to be inspected is not limited to a liquid crystal panel, but can be applied to a flat panel such as an organic EL.

(A-1) Configuration of Embodiment [Inspection Apparatus and Probe Unit]
First, configurations of an inspection apparatus and a probe unit according to the embodiment will be described with reference to FIGS.

  An inspection apparatus that performs an array inspection of a liquid crystal panel mainly includes a panel set unit (not shown) and a measurement unit 100.

  The panel set unit is a device that conveys the LCD panel 5 from the outside to the measuring unit 100, and conveys the LCD panel 5 to the outside after the inspection in the measuring unit 100 is completed.

  The measurement unit 100 is a device that supports the LCD panel 5 transported from the panel set unit and performs inspection of the LCD panel 5.

  As shown in FIG. 9, the measuring section 100 has a probe unit 2 and a work table 50 that supports the LCD panel 5. The probe unit 2 includes a probe base 3, a plurality of probe assemblies 1, a plurality of support portions 4, and a plurality of connection cable portions 6.

  The probe base 3 is a member that supports a plurality of supports 4 that support the probe assembly 1. The probe base 3 is a plate-shaped member. A plurality of support portions 4 are supported at one end of the probe base 3 so as to be arranged, and the plurality of support portions 4 are set to face the LCD panel 5 on the work table 50.

  Each support part 4 is a member that supports the probe assembly 1 while being supported by the probe base 3. The base end of each support 4 is a portion supported by the probe base 3, and the tip of each support 4 is a portion that supports the probe assembly 1. As shown in FIG. 10, the support portion 4 is directly attached to the probe base 3 to support the whole, a slide block 8 supported at the tip of the suspension block 7, and a slide block 8. And a probe plate 9 integrally attached to the inner surface (the lower surface in FIG. 10).

  The probe assembly 1 contacts an electrode of the test test pad 80 connected to an electrode of the circuit of the LCD panel 5 to transmit a test signal to the circuit of the LCD panel 5 through the test pad 80 for test. It is a member. The probe assembly 1 is attached to a lower surface of the probe plate 9.

  Although a detailed description of the probe assembly 1 will be described later, the probe assembly 1 includes at least a support member 10 and a plurality of probes 11 and 21. The support member 10 is located on the lower surface of the probe plate 9, and the plurality of probes 11 and 21 are located below the support member 10. Each of the probes 11 and 21 is a plate-like member, and as shown in FIG. 11, each electrode of the test test pad 80 connected to the electrode of the circuit of the LCD panel 5 (hereinafter, referred to as a “first contact target”). .). Each of the terminals (hereinafter, referred to as a “second contact target”) 113 of the connection cable unit 6 and a first distal end portion (hereinafter, also referred to as a “first distal end portion”) 113 that is in electrical contact with the terminal. ), And a second distal end portion (hereinafter, also referred to as a “second distal end portion”) 114 that makes electrical contact.

  The connection cable section 6 is a member for electrically connecting the probes 11 and 21 to an external device (not shown). Specifically, the connection cable section 6 is directly connected to the second end portions 114 of the probes 11 and 21 and the circuit on the probe base 3 side, and the external device is connected via the circuit on the probe base 3 side. Is electrically connected to That is, the connection cable section 6 electrically connects the probes 11 and 21 of the probe assembly 1 and the external device via the printed circuit board of the probe base 3.

  As shown in FIG. 11, the connection cable unit 6 includes an FPC plate 51 and an FPC cable 53.

  The FPC plate 51 is a member for fixing the connection cable section 6 to the probe assembly 1 side, and is attached below the probe plate 9.

  The FPC cable 53 is a cable for transmitting an electric signal from an external device to the probes 11 and 21 of the probe assembly. One of the FPC cables 53 is fixed to the FPC plate 51 and electrically connected to the probes 11 and 21, and the other of the FPC cables 53 is connected to a printed board (not shown) provided below the probe base 3. It is connected. Thus, the FPC cable 53 is electrically connected to an external device via the printed circuit board.

[Probe assembly]
Next, the configuration of the probe assembly 1 according to the embodiment will be described in detail with reference to FIGS.

  The probe assembly 1 mainly includes a support member 10, a plurality of probes 11, a plurality of probes 21, side covers 12 and 13, and two positioning members 14 (14-1, 14-2).

[Supporting member]
The support member 10 is a member that supports the plurality of probes 11 and 21. As shown in FIG. 4, probe support portions 101 and 102 having a plurality of slits are provided at ends of the lower surface of the support member 10 extending in the longitudinal direction. Each slit provided in the probe support portions 101 and 102 has a corresponding positional relationship between the probe support portion 101 and the probe support portion 102, and both ends of each probe 11 and 21 are fitted into each slit. Thus, the probes 11 and 21 can be supported.

  The positioning member 14 is inserted into the guide holes 111 and 112 (guide holes 211 and 212) of the probes 11 and 21 with both ends of the probes 11 and 21 fitted in the slits of the probe support portions 101 and 102. Is done. Thereby, the positions of the probes 11 and 21 can be fixed.

  The support member 10 is a non-conductive member. For example, the support member 10 may be formed of an insulating member, or may be formed by coating an insulating layer on the entire surface of the support member 10 or a part of the surface in contact with the probes 11 and 21. Or you may.

[probe]
Each of the probes 11 and 21 is a member that transmits an electric signal between each electrode of the test pad 80 for inspection and each terminal on the connection cable section 6 side. Since the test test pad 80 is connected to each electrode of the circuit of the liquid crystal panel, each probe 11 and 21 is electrically connected to each electrode of the liquid crystal panel via each electrode of the test pad 80 for test. . Hereinafter, a plurality of probes that are in electrical contact with each electrode of the test pad 80 for inspection are also referred to as a probe group.

  As shown in FIG. 1, in the probe assembly 1, two types of probes having different shapes of the guide holes in the central region are used.

  The probe 11 shown in FIG. 1A has a first distal end 113, a second distal end 114, a guide hole 111, and a guide hole 112.

  The first tip portion 113 is a tip portion of a portion extending forward (toward the test test pad 80) from the central region of the probe 11, and is in electrical contact with each electrode of the test test pad 80. It is. On the other hand, the second tip portion 114 is a tip portion of a portion that extends rearward (toward the inspection device) from the central region of the probe 11 and electrically contacts each wiring that is electrically connected to the inspection device. Things.

  The first tip portion 113 is in electrical contact with the electrode of the test test pad 80, and the second tip portion 114 is in electrical contact with the terminal of the connection cable portion 6, which is necessary for the array inspection of the liquid crystal panel. Electrical signals are conducted. Each probe 11 can be formed by etching a conductive metal plate.

  The probe 11 is a band-shaped member having a plate-like conductivity (the band includes a plate-like and a blade-like concept). Two guide holes 111 and 112 through which each of the two positioning members 14 penetrate are provided in the central region of each of the strip-shaped probes 11.

  The shapes of the guide holes 111 and 112 of the probe 11 are different. The shape of the guide holes 111 and 112 can be a shape corresponding to the cross-sectional shape of each positioning member 14. In this embodiment, the guide hole 111 is circular in order to exemplify a case where the cross-sectional shape of the positioning member 14 is circular. However, the guide hole 112 has an elongated hole shape (slot), and has a structure in which the positioning member 14 can move by a predetermined amount. The positioning member 14 is locked by the arcs 141L and 141R of the guide hole 112.

  Further, the diameter of each of the guide holes 111 and 112 can be made slightly larger than the diameter of the cross-sectional shape of the positioning member 14 to allow the positioning member 14 to penetrate.

  The probe 21 shown in FIG. 1B has a first distal end 113, a second distal end 114, a guide hole 211, and a guide hole 212. The shape of the first tip 113 and the second tip 114 of the probe 21 is the same as the shape of the tip 113 and the second tip 114 of the probe 11. The shape of the guide hole 211 is the same as the guide hole 112 of the probe 11, and the shape of the guide hole 212 is the same as the guide hole 111 of the probe 11.

  As shown in FIG. 1, the probes 11 and 21 are different from each other in the arrangement of the guide holes 111 and 212 having the round holes and the guide holes 112 and 211 having the elongated holes. ing). Further, a plurality of probes 11 and 21 are alternately arranged as shown in FIG.

[Positioning member]
The positioning members 14 (14-1, 14-2) are provided with the respective guide holes of the probes 11 and 21 in a state where the respective probes 11 and 21 are fitted into the respective slits of the probe support portions 101 and 102 of the support member 10. The plurality of probes 11 and 21 are positioned by penetrating 111 and 112 (guide holes 211 and 212). Each of the positioning members 14-1 and 14-2 can be formed of an insulating member, or can be formed by coating an insulating layer.

  Further, as each of the positioning members 14-1 and 14-2, a round bar-shaped member that is long along the longitudinal direction can be used. The diameter of the cross-sectional shape of each of the positioning members 14-1 and 14-2 is not particularly limited, but can be about several mm, and each probe into which each of the positioning members 14-1 and 14-2 is inserted. The diameter of the guide holes 111 and 112 (guide holes 211 and 212) of 11 and 21 can also be made slightly larger than the diameter of the cross-sectional shape of each positioning member 14-1 and 14-2.

  By penetrating the two positioning members 14 (14-1, 14-2) through the probes 11 and 21, the first tip portions 113 of the probes 11 and 21 that come into contact with the test pad 80 for inspection are formed. The position is stabilized (electrical connection is stabilized).

[Probe position adjustment method]
Hereinafter, referring to FIGS. 2 and 3 as an example, the position adjustment of the first tip 113 of each of the probes 11 and 21 in contact with the test pad 80 for inspection is performed in accordance with the state of the arrangement of the test pads 80 for inspection. Give an explanation. In FIG. 2, the positioning member 14-2 is inserted into the guide hole 111 of the probe 11 and the guide hole 211 of the probe 21, and the positioning member 14-1 is inserted into the guide hole 112 of the probe 11 and the guide hole 212 of the probe 21. An example is shown. Note that FIG. 2 shows only one set of probes (one probe 11 and one probe 21) for simplicity of description, but actually a plurality (for example, There are several hundred probes 11 and 21. Further, in this embodiment, an example is shown in which the positioning member 14-1 moves and the positioning member 14-2 is fixed as shown in FIG. 3, but as a modified example, the positioning member 14-2 moves and performs positioning. The member 14-1 may be fixed.

  FIG. 2A is a diagram illustrating an arrangement (position) of the probes 11 and 21 when, for example, the electrodes of the test pad 80 for inspection are arranged in a line. That is, the first tip portions 113 of the probes 11 and 21 are arranged so as to simultaneously contact in a horizontal example. FIG. 2A shows an example in which the positioning member 14-1 is engaged with the arc 141 L of the guide hole 112 of the probe 11 and fitted into the guide hole 212 of the probe 21. Further, an example is shown in which the positioning member 14-2 is fitted in the guide hole 111 of the probe 11 and is locked in the arc 241R of the guide hole 212 of the probe 21.

  On the other hand, FIG. 2B is a diagram showing the arrangement (position) of the probes 11 and 21 when the electrodes to be contacted by the probes 11 and 21 are arranged in a staggered pattern (for example, FIG. 5 described later). It is. The change from the state of FIG. 2A to the state of FIG. 2B is caused by the movement of the positioning member 14-1. That is, when the positioning member 14-1 moves (moves to the right in FIG. 2 by the moving amount L), the probe 21 moves by the moving amount L so as to be dragged by the movement of the positioning member 14-1. As the probe 21 moves, the position of the positioning member 14-2 in the guide hole 211 of the probe 21 is shifted from the arc 241R to the arc 241L.

  On the other hand, in the probe 11, the positioning member 14-1 in the guide hole 112 moves from the arc 141L to the arc 141R by the moving amount L, but the probe 11 itself does not move. Further, as shown in FIG. 2, the movement amount L is from the position (center point) where the positioning member 14-1 is locked to the arc 141R of the guide hole 112 to the position (center point) locked to the arc 141R. It is a movable area.

  The probe 21 of this embodiment is a movable type that moves by a movement amount L, whereas the probe 11 is a reference type whose position does not always change. As described above, by using the probe 11 of the reference type and the probe 21 of the movable type as the probe assembly 1, the positioning (position adjustment) of the probes 11 and 21 corresponding to the two-row staggered arrangement can be performed flexibly. .

  FIG. 5 is a diagram illustrating an example of a two-row staggered arrangement of test test pads. As shown in FIG. 5, the test pads for inspection 80 are shown in two rows in a staggered manner. In FIG. 5, the pitch interval in the terminal width D1 direction of the test pads 80 (80-1, 80-3,...) In the same row (first row, second row) is a predetermined length A, but different rows. The pitch interval between the first row and the second row is half of the predetermined length A. The pitch between the test pads 80 (80-1, 80-3,...) Of the first row and the test pads 80 (80-2, 80-4,...) Of the second row in the terminal length D2 direction is a predetermined length. B.

  The first row of test pads 80 (80-1, 80-3,...) Are contacted by the first tip 113 of each probe 11, and the second row of test pads 80 (80-2, 80-4,...). ) Are contacted by the first tip 113 of each probe 21.

  By moving the positioning member 14-1 as described above, the first distal end 113 of the probe 11 and the first distal end 113 of the probe 21 are adjusted to the pitch interval (predetermined length B) in the terminal length D2 direction. Position (interval) can be adjusted. The movement of the positioning member 14-1 is performed, for example, by selecting and replacing suitable side covers 12 and 13 from a plurality of side covers 12 and 13 in which the positions of the support holes 123 into which the positioning members 14-1 are fitted are different in advance. .

[Side cover]
When the positioning members 14-1 and 14-2 are inserted through the guide holes 111 and 112 (guide holes 211 and 212) of the plurality of probes 11 and 21, the side covers 12 and 13 are positioned. In order to prevent -2 from coming off, both ends of each positioning member 14-1 and 14-2 are fixed.

  FIG. 6 shows the configuration of the side cover 13 provided on the right side of the probe assembly 1. The configuration of the right side cover 13 will be described with reference to FIGS. 4 and 6. It is a structure of.

  The side cover 13 is a substantially rectangular plate-like member. The side cover 13 supports two support holes 123 (123-1, 123-2) at positions corresponding to the positioning members 14-1 and 14-2 in order to support the ends of the positioning members 14-1 and 14-2. -2). Each of the two support holes 123 is counterbored as shown in FIG. That is, the diameter of the opening of the outer side surface 123a of the two support holes 123 is smaller than the diameter of the positioning members 14-1 and 14-2, thereby preventing the positioning members 14-1 and 14-2 from falling off. are doing. In the vicinity of both ends of the side cover 13, fixing portions 122 (122-1, 122-2) for fixing to the support member 10 are provided. In this manner, the side cover 13 is fixed to the support member 10 with the positioning members 14-1 and 14-2 inserted through the guide holes 111 and 112 of the plurality of probes 11, thereby fixing the positioning member. 14-1 and 14-2 can be prevented from coming off.

  In this embodiment, an appropriate side cover 13 can be applied to the probe assembly 1 from the plurality of side covers 13. As shown in FIG. 2 described above, in order to move the positioning member 14-1 by the movement amount L, the positioning member 14-1 is fitted into the support hole 123-1 located at the position moved by the movement amount L. The combined side cover 13 (FIG. 8) is applied. For example, when the movement amount L is 0.3 mm, the side cover 13 in which the support hole 123 is moved to the right by 0.3 mm from the initial position (the state of FIG. 6) is replaced with the probe assembly 1. .

(A-3) Effects of the Embodiment As described above, according to the above-described embodiment, the following effects can be obtained.

  In the probe assembly according to the above-described embodiment, the movable type probe moves at the same time as one of the two positioning members penetrating the two types of probes (reference type and movable type) arranged alternately. The probe can be flexibly positioned in accordance with the two-row staggered arrangement (the distance between the first row and the second row).

  Also, by using only two types of probes, the probe position can be adjusted in accordance with the state of an arbitrary two-row staggered arrangement, so that it is not necessary to design a probe each time. That is, since the standard type and the movable type probes can be mass-produced and stocked in advance, it is possible to reduce costs and provide the probe to the customer at an early stage.

(B) Other Embodiments In the above-described embodiment, an example in which two positioning members 14 are used in the probe assembly 1 (the positioning members 14-1 and the positioning members 14-2) has been described, but two or more positioning members are used. 14 may be used. For example, when three positioning members 14 are used, a positioning member 14-3 having the same function (always fixed) as the positioning member 14-2 as shown in FIG. 2 is used. The probe 11 and the probe 21 are provided with guide holes of the same shape on the left side of the guide holes 111 and 211. By inserting the positioning member 14-3 into the newly provided guide hole, the stability of the probes 11 and 21 is improved.

DESCRIPTION OF SYMBOLS 1 ... Probe assembly, 2 ... Probe unit, 3 ... Probe base, 4 ... Support part, 5 ... LCD panel, 6 ... Connection cable part, 7 ... Suspension block, 8 ... Slide block, 9 ... Probe plate, 10 ... Support Member, 11: Probe, 12, 13: Side cover, 14 (14-1, 14-2): Positioning member, 21: Probe, 50: Work table, 51: FPC plate, 53: FPC cable, 80: For inspection Test pad, 100: measuring unit, 101, 102: probe supporting unit, 111, 112: guide hole, 113: first distal end, 114: second distal end, 122: fixing unit, 123: supporting hole, 123a ... Outside surface, 141L, 141R ... Arc, 211, 212 ... Guide hole, 241L, 241R ... Arc, 300 ... Probe assembly, 30 ... support portion, 302 ... side cover 303 ... positioning member, 304, 305 ... probe.

Claims (5)

A support member;
A probe group in which a plurality of probes each having a first contact portion that contacts a first contact target and a second contact portion that contacts a second contact target are arranged along the longitudinal direction of the support member. And a plurality of positioning members that support the respective probes by penetrating the central region of the respective probes of the probe group,
The probe group is
A plurality of first probes each having a fixing hole disposed on the first contact portion side from the central region and a position adjusting hole disposed on the second contact portion side from the central region;
A plurality of second probes having a position adjustment hole arranged on the first contact portion side from the central region and a fixed hole arranged on the second contact portion side from the central region. A probe assembly, wherein the first probes and the second probes are alternately arranged. The first positioning members of the plurality of positioning members are alternately arranged, and pass through the fixing holes of the first probes and the position adjustment holes of the second probes,
A second positioning member of the plurality of positioning members penetrates the position adjustment holes of the first probes and the fixing holes of the first probes, which are alternately arranged. The probe assembly according to claim 1. The position adjustment holes of the first probe and the second probe each have a movable region that allows movement of the positioning member,
The plurality of positioning members are relatively moved to position the first contact portion and the second contact portion of each first probe, and the first contact portion and the second contact portion of each second probe. The probe assembly according to claim 2, wherein the position of the second contact portion is variable. The relative movement of the plurality of positioning members is to move the second positioning member in a state where the first positioning member is fixed, and the first contact portion of the second probe and the The position of the 2nd contact part is variable, The probe assembly of Claim 2 or 3 characterized by the above-mentioned.   The probe assembly according to any one of claims 1 to 4, wherein the position adjustment holes of each of the first probe and each of the second probes have an elongated hole shape.

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