JP2019218628A - 無電解銅めっき用組成物および基材上に銅を無電解めっきするための方法 - Google Patents
無電解銅めっき用組成物および基材上に銅を無電解めっきするための方法 Download PDFInfo
- Publication number
- JP2019218628A JP2019218628A JP2019103422A JP2019103422A JP2019218628A JP 2019218628 A JP2019218628 A JP 2019218628A JP 2019103422 A JP2019103422 A JP 2019103422A JP 2019103422 A JP2019103422 A JP 2019103422A JP 2019218628 A JP2019218628 A JP 2019218628A
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- JP
- Japan
- Prior art keywords
- electroless copper
- copper plating
- composition
- plating
- electroless
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 title claims abstract description 198
- 229910052802 copper Inorganic materials 0.000 title claims abstract description 198
- 239000010949 copper Substances 0.000 title claims abstract description 198
- 238000007747 plating Methods 0.000 title claims abstract description 187
- 239000000203 mixture Substances 0.000 title claims abstract description 100
- 239000000758 substrate Substances 0.000 title claims abstract description 52
- 238000000034 method Methods 0.000 title claims abstract description 36
- 238000007772 electroless plating Methods 0.000 title abstract description 8
- JUJWROOIHBZHMG-UHFFFAOYSA-N Pyridine Chemical class C1=CC=NC=C1 JUJWROOIHBZHMG-UHFFFAOYSA-N 0.000 claims abstract description 33
- -1 amino, carbonyl Chemical group 0.000 claims description 53
- 239000003054 catalyst Substances 0.000 claims description 40
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical group [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 claims description 24
- 239000003638 chemical reducing agent Substances 0.000 claims description 22
- 239000008139 complexing agent Substances 0.000 claims description 18
- 150000003839 salts Chemical class 0.000 claims description 18
- 239000003381 stabilizer Substances 0.000 claims description 14
- 229910052763 palladium Inorganic materials 0.000 claims description 13
- LJCNRYVRMXRIQR-OLXYHTOASA-L potassium sodium L-tartrate Chemical compound [Na+].[K+].[O-]C(=O)[C@H](O)[C@@H](O)C([O-])=O LJCNRYVRMXRIQR-OLXYHTOASA-L 0.000 claims description 13
- 235000011006 sodium potassium tartrate Nutrition 0.000 claims description 13
- JPVYNHNXODAKFH-UHFFFAOYSA-N Cu2+ Chemical compound [Cu+2] JPVYNHNXODAKFH-UHFFFAOYSA-N 0.000 claims description 12
- 229910001431 copper ion Inorganic materials 0.000 claims description 12
- 229940074439 potassium sodium tartrate Drugs 0.000 claims description 8
- 239000013078 crystal Substances 0.000 claims description 7
- 239000003966 growth inhibitor Substances 0.000 claims description 7
- QAOWNCQODCNURD-UHFFFAOYSA-L Sulfate Chemical compound [O-]S([O-])(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-L 0.000 claims description 6
- HJMZMZRCABDKKV-UHFFFAOYSA-N carbonocyanidic acid Chemical compound OC(=O)C#N HJMZMZRCABDKKV-UHFFFAOYSA-N 0.000 claims description 6
- HELHAJAZNSDZJO-OLXYHTOASA-L sodium L-tartrate Chemical compound [Na+].[Na+].[O-]C(=O)[C@H](O)[C@@H](O)C([O-])=O HELHAJAZNSDZJO-OLXYHTOASA-L 0.000 claims description 6
- 239000001433 sodium tartrate Substances 0.000 claims description 6
- 229960002167 sodium tartrate Drugs 0.000 claims description 6
- 235000011004 sodium tartrates Nutrition 0.000 claims description 6
- KCXVZYZYPLLWCC-UHFFFAOYSA-N EDTA Chemical class OC(=O)CN(CC(O)=O)CCN(CC(O)=O)CC(O)=O KCXVZYZYPLLWCC-UHFFFAOYSA-N 0.000 claims description 5
- 150000001469 hydantoins Chemical class 0.000 claims description 5
- 229910052739 hydrogen Inorganic materials 0.000 claims description 5
- 239000001257 hydrogen Substances 0.000 claims description 5
- 125000002887 hydroxy group Chemical group [H]O* 0.000 claims description 5
- RGHNJXZEOKUKBD-SQOUGZDYSA-N D-gluconic acid Chemical compound OC[C@@H](O)[C@@H](O)[C@H](O)[C@@H](O)C(O)=O RGHNJXZEOKUKBD-SQOUGZDYSA-N 0.000 claims description 4
- UORVGPXVDQYIDP-UHFFFAOYSA-N borane Chemical compound B UORVGPXVDQYIDP-UHFFFAOYSA-N 0.000 claims description 4
- 150000001875 compounds Chemical class 0.000 claims description 4
- 229920002554 vinyl polymer Polymers 0.000 claims description 4
- 229910052783 alkali metal Inorganic materials 0.000 claims description 3
- 125000003178 carboxy group Chemical group [H]OC(*)=O 0.000 claims description 3
- WJRBRSLFGCUECM-UHFFFAOYSA-N hydantoin Chemical compound O=C1CNC(=O)N1 WJRBRSLFGCUECM-UHFFFAOYSA-N 0.000 claims description 3
- 229940091173 hydantoin Drugs 0.000 claims description 3
- ACVYVLVWPXVTIT-UHFFFAOYSA-N phosphinic acid Chemical class O[PH2]=O ACVYVLVWPXVTIT-UHFFFAOYSA-N 0.000 claims description 3
- UEUXEKPTXMALOB-UHFFFAOYSA-J tetrasodium;2-[2-[bis(carboxylatomethyl)amino]ethyl-(carboxylatomethyl)amino]acetate Chemical compound [Na+].[Na+].[Na+].[Na+].[O-]C(=O)CN(CC([O-])=O)CCN(CC([O-])=O)CC([O-])=O UEUXEKPTXMALOB-UHFFFAOYSA-J 0.000 claims description 3
- 125000000391 vinyl group Chemical group [H]C([*])=C([H])[H] 0.000 claims description 3
- 125000000008 (C1-C10) alkyl group Chemical group 0.000 claims description 2
- 125000000041 C6-C10 aryl group Chemical group 0.000 claims description 2
- RGHNJXZEOKUKBD-SQOUGZDYSA-M D-gluconate Chemical compound OC[C@@H](O)[C@@H](O)[C@H](O)[C@@H](O)C([O-])=O RGHNJXZEOKUKBD-SQOUGZDYSA-M 0.000 claims description 2
- RGHNJXZEOKUKBD-UHFFFAOYSA-N D-gluconic acid Natural products OCC(O)C(O)C(O)C(O)C(O)=O RGHNJXZEOKUKBD-UHFFFAOYSA-N 0.000 claims description 2
- ABBQHOQBGMUPJH-UHFFFAOYSA-M Sodium salicylate Chemical compound [Na+].OC1=CC=CC=C1C([O-])=O ABBQHOQBGMUPJH-UHFFFAOYSA-M 0.000 claims description 2
- GSEJCLTVZPLZKY-UHFFFAOYSA-N Triethanolamine Chemical compound OCCN(CCO)CCO GSEJCLTVZPLZKY-UHFFFAOYSA-N 0.000 claims description 2
- 150000001299 aldehydes Chemical class 0.000 claims description 2
- 150000001408 amides Chemical class 0.000 claims description 2
- 125000001797 benzyl group Chemical group [H]C1=C([H])C([H])=C(C([H])=C1[H])C([H])([H])* 0.000 claims description 2
- 229910000085 borane Inorganic materials 0.000 claims description 2
- YIKPWSKEXRZQIY-UHFFFAOYSA-N butanedioic acid;ethane-1,2-diamine Chemical compound NCCN.OC(=O)CCC(O)=O.OC(=O)CCC(O)=O YIKPWSKEXRZQIY-UHFFFAOYSA-N 0.000 claims description 2
- 150000001720 carbohydrates Chemical class 0.000 claims description 2
- 229940050410 gluconate Drugs 0.000 claims description 2
- 239000000174 gluconic acid Substances 0.000 claims description 2
- 235000012208 gluconic acid Nutrition 0.000 claims description 2
- 229960004025 sodium salicylate Drugs 0.000 claims description 2
- QTBSBXVTEAMEQO-UHFFFAOYSA-N Acetic acid Chemical compound CC(O)=O QTBSBXVTEAMEQO-UHFFFAOYSA-N 0.000 claims 3
- 125000001072 heteroaryl group Chemical group 0.000 claims 1
- 125000004435 hydrogen atom Chemical class [H]* 0.000 claims 1
- 230000008021 deposition Effects 0.000 abstract description 3
- WSFSSNUMVMOOMR-UHFFFAOYSA-N Formaldehyde Chemical compound O=C WSFSSNUMVMOOMR-UHFFFAOYSA-N 0.000 description 34
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 24
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 23
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 18
- 229910052751 metal Inorganic materials 0.000 description 18
- 239000002184 metal Substances 0.000 description 18
- 239000004593 Epoxy Substances 0.000 description 15
- 239000000243 solution Substances 0.000 description 14
- 230000000052 comparative effect Effects 0.000 description 10
- 239000004094 surface-active agent Substances 0.000 description 10
- 239000002253 acid Substances 0.000 description 9
- 229920005989 resin Polymers 0.000 description 9
- 239000011347 resin Substances 0.000 description 9
- 239000002585 base Substances 0.000 description 8
- KWIUHFFTVRNATP-UHFFFAOYSA-N glycine betaine Chemical compound C[N+](C)(C)CC([O-])=O KWIUHFFTVRNATP-UHFFFAOYSA-N 0.000 description 8
- 229960000789 guanidine hydrochloride Drugs 0.000 description 8
- PJJJBBJSCAKJQF-UHFFFAOYSA-N guanidinium chloride Chemical compound [Cl-].NC(N)=[NH2+] PJJJBBJSCAKJQF-UHFFFAOYSA-N 0.000 description 8
- UMJSCPRVCHMLSP-UHFFFAOYSA-N pyridine Natural products COC1=CC=CN=C1 UMJSCPRVCHMLSP-UHFFFAOYSA-N 0.000 description 8
- 239000002904 solvent Substances 0.000 description 8
- 239000003795 chemical substances by application Substances 0.000 description 7
- POKOASTYJWUQJG-UHFFFAOYSA-M 1-butylpyridin-1-ium;chloride Chemical compound [Cl-].CCCC[N+]1=CC=CC=C1 POKOASTYJWUQJG-UHFFFAOYSA-M 0.000 description 6
- DFOUTGGPUPHEMO-UHFFFAOYSA-N 2-pyridin-1-ium-4-ylpyridine;chloride Chemical compound Cl.N1=CC=CC=C1C1=CC=NC=C1 DFOUTGGPUPHEMO-UHFFFAOYSA-N 0.000 description 6
- SJCDYZGKKDQMAR-UHFFFAOYSA-N 3-pyridin-1-ium-1-ylpropane-1-sulfonic acid;hydroxide Chemical compound [OH-].OS(=O)(=O)CCC[N+]1=CC=CC=C1 SJCDYZGKKDQMAR-UHFFFAOYSA-N 0.000 description 6
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 6
- MHAJPDPJQMAIIY-UHFFFAOYSA-N Hydrogen peroxide Chemical compound OO MHAJPDPJQMAIIY-UHFFFAOYSA-N 0.000 description 6
- KWYUFKZDYYNOTN-UHFFFAOYSA-M Potassium hydroxide Chemical compound [OH-].[K+] KWYUFKZDYYNOTN-UHFFFAOYSA-M 0.000 description 6
- RJTANRZEWTUVMA-UHFFFAOYSA-N boron;n-methylmethanamine Chemical compound [B].CNC RJTANRZEWTUVMA-UHFFFAOYSA-N 0.000 description 6
- 239000012776 electronic material Substances 0.000 description 6
- QNYGQGNCBRKGJN-UHFFFAOYSA-N 2-(1,2-dicarboxyethyldisulfanyl)butanedioic acid Chemical compound OC(=O)CC(C(O)=O)SSC(C(O)=O)CC(O)=O QNYGQGNCBRKGJN-UHFFFAOYSA-N 0.000 description 5
- QIGBRXMKCJKVMJ-UHFFFAOYSA-N Hydroquinone Chemical compound OC1=CC=C(O)C=C1 QIGBRXMKCJKVMJ-UHFFFAOYSA-N 0.000 description 5
- 239000004721 Polyphenylene oxide Substances 0.000 description 5
- 239000000654 additive Substances 0.000 description 5
- 150000001450 anions Chemical class 0.000 description 5
- JZCCFEFSEZPSOG-UHFFFAOYSA-L copper(II) sulfate pentahydrate Chemical compound O.O.O.O.O.[Cu+2].[O-]S([O-])(=O)=O JZCCFEFSEZPSOG-UHFFFAOYSA-L 0.000 description 5
- 230000003472 neutralizing effect Effects 0.000 description 5
- 239000008399 tap water Substances 0.000 description 5
- 235000020679 tap water Nutrition 0.000 description 5
- RTZKZFJDLAIYFH-UHFFFAOYSA-N Diethyl ether Chemical compound CCOCC RTZKZFJDLAIYFH-UHFFFAOYSA-N 0.000 description 4
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 4
- RHYBFKMFHLPQPH-UHFFFAOYSA-N N-methylhydantoin Chemical compound CN1CC(=O)NC1=O RHYBFKMFHLPQPH-UHFFFAOYSA-N 0.000 description 4
- GRYLNZFGIOXLOG-UHFFFAOYSA-N Nitric acid Chemical compound O[N+]([O-])=O GRYLNZFGIOXLOG-UHFFFAOYSA-N 0.000 description 4
- 229920003171 Poly (ethylene oxide) Polymers 0.000 description 4
- 125000000217 alkyl group Chemical group 0.000 description 4
- 229940053195 antiepileptics hydantoin derivative Drugs 0.000 description 4
- 229960003237 betaine Drugs 0.000 description 4
- YCIMNLLNPGFGHC-UHFFFAOYSA-N catechol Chemical compound OC1=CC=CC=C1O YCIMNLLNPGFGHC-UHFFFAOYSA-N 0.000 description 4
- 239000003822 epoxy resin Substances 0.000 description 4
- LNTHITQWFMADLM-UHFFFAOYSA-N gallic acid Chemical compound OC(=O)C1=CC(O)=C(O)C(O)=C1 LNTHITQWFMADLM-UHFFFAOYSA-N 0.000 description 4
- 150000004820 halides Chemical class 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- 229910021645 metal ion Inorganic materials 0.000 description 4
- 229910017604 nitric acid Inorganic materials 0.000 description 4
- ZMLDXWLZKKZVSS-UHFFFAOYSA-N palladium tin Chemical compound [Pd].[Sn] ZMLDXWLZKKZVSS-UHFFFAOYSA-N 0.000 description 4
- 229920000647 polyepoxide Polymers 0.000 description 4
- 229920006380 polyphenylene oxide Polymers 0.000 description 4
- 229920001343 polytetrafluoroethylene Polymers 0.000 description 4
- 239000004810 polytetrafluoroethylene Substances 0.000 description 4
- 239000002243 precursor Substances 0.000 description 4
- GHMLBKRAJCXXBS-UHFFFAOYSA-N resorcinol Chemical compound OC1=CC=CC(O)=C1 GHMLBKRAJCXXBS-UHFFFAOYSA-N 0.000 description 4
- 125000001424 substituent group Chemical group 0.000 description 4
- 230000008961 swelling Effects 0.000 description 4
- 239000012974 tin catalyst Substances 0.000 description 4
- KWSLGOVYXMQPPX-UHFFFAOYSA-N 5-[3-(trifluoromethyl)phenyl]-2h-tetrazole Chemical compound FC(F)(F)C1=CC=CC(C2=NNN=N2)=C1 KWSLGOVYXMQPPX-UHFFFAOYSA-N 0.000 description 3
- CIWBSHSKHKDKBQ-JLAZNSOCSA-N Ascorbic acid Chemical compound OC[C@H](O)[C@H]1OC(=O)C(O)=C1O CIWBSHSKHKDKBQ-JLAZNSOCSA-N 0.000 description 3
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- DGAQECJNVWCQMB-PUAWFVPOSA-M Ilexoside XXIX Chemical compound C[C@@H]1CC[C@@]2(CC[C@@]3(C(=CC[C@H]4[C@]3(CC[C@@H]5[C@@]4(CC[C@@H](C5(C)C)OS(=O)(=O)[O-])C)C)[C@@H]2[C@]1(C)O)C)C(=O)O[C@H]6[C@@H]([C@H]([C@@H]([C@H](O6)CO)O)O)O.[Na+] DGAQECJNVWCQMB-PUAWFVPOSA-M 0.000 description 3
- WMFOQBRAJBCJND-UHFFFAOYSA-M Lithium hydroxide Chemical compound [Li+].[OH-] WMFOQBRAJBCJND-UHFFFAOYSA-M 0.000 description 3
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- 230000002378 acidificating effect Effects 0.000 description 3
- XECAHXYUAAWDEL-UHFFFAOYSA-N acrylonitrile butadiene styrene Chemical compound C=CC=C.C=CC#N.C=CC1=CC=CC=C1 XECAHXYUAAWDEL-UHFFFAOYSA-N 0.000 description 3
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- 238000005406 washing Methods 0.000 description 3
- YXIWHUQXZSMYRE-UHFFFAOYSA-N 1,3-benzothiazole-2-thiol Chemical compound C1=CC=C2SC(S)=NC2=C1 YXIWHUQXZSMYRE-UHFFFAOYSA-N 0.000 description 2
- RFTORHYUCZJHDO-UHFFFAOYSA-N 1,3-dimethylimidazolidine-2,4-dione Chemical compound CN1CC(=O)N(C)C1=O RFTORHYUCZJHDO-UHFFFAOYSA-N 0.000 description 2
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- YIROYDNZEPTFOL-UHFFFAOYSA-N 5,5-Dimethylhydantoin Chemical compound CC1(C)NC(=O)NC1=O YIROYDNZEPTFOL-UHFFFAOYSA-N 0.000 description 2
- ROFVEXUMMXZLPA-UHFFFAOYSA-N Bipyridyl Chemical group N1=CC=CC=C1C1=CC=CC=N1 ROFVEXUMMXZLPA-UHFFFAOYSA-N 0.000 description 2
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- VEXZGXHMUGYJMC-UHFFFAOYSA-M Chloride anion Chemical compound [Cl-] VEXZGXHMUGYJMC-UHFFFAOYSA-M 0.000 description 2
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- CDBYLPFSWZWCQE-UHFFFAOYSA-L Sodium Carbonate Chemical compound [Na+].[Na+].[O-]C([O-])=O CDBYLPFSWZWCQE-UHFFFAOYSA-L 0.000 description 2
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- CHQMHPLRPQMAMX-UHFFFAOYSA-L sodium persulfate Substances [Na+].[Na+].[O-]S(=O)(=O)OOS([O-])(=O)=O CHQMHPLRPQMAMX-UHFFFAOYSA-L 0.000 description 1
- 159000000000 sodium salts Chemical class 0.000 description 1
- 239000000600 sorbitol Substances 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 239000005720 sucrose Substances 0.000 description 1
- 229910052717 sulfur Inorganic materials 0.000 description 1
- 239000011593 sulfur Substances 0.000 description 1
- 150000003892 tartrate salts Chemical class 0.000 description 1
- AWDBHOZBRXWRKS-UHFFFAOYSA-N tetrapotassium;iron(6+);hexacyanide Chemical compound [K+].[K+].[K+].[K+].[Fe+6].N#[C-].N#[C-].N#[C-].N#[C-].N#[C-].N#[C-] AWDBHOZBRXWRKS-UHFFFAOYSA-N 0.000 description 1
- 229920005992 thermoplastic resin Polymers 0.000 description 1
- UVZICZIVKIMRNE-UHFFFAOYSA-N thiodiacetic acid Chemical compound OC(=O)CSCC(O)=O UVZICZIVKIMRNE-UHFFFAOYSA-N 0.000 description 1
- 150000003573 thiols Chemical class 0.000 description 1
- 150000004764 thiosulfuric acid derivatives Chemical class 0.000 description 1
- 238000011282 treatment Methods 0.000 description 1
- 125000005270 trialkylamine group Chemical group 0.000 description 1
- 230000007306 turnover Effects 0.000 description 1
- 229910001935 vanadium oxide Inorganic materials 0.000 description 1
- 229920006163 vinyl copolymer Polymers 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
- C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
- C23C18/31—Coating with metals
- C23C18/38—Coating with copper
- C23C18/40—Coating with copper using reducing agents
- C23C18/405—Formaldehyde
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
- C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
- C23C18/1601—Process or apparatus
- C23C18/1633—Process of electroless plating
- C23C18/1675—Process conditions
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
- C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
- C23C18/18—Pretreatment of the material to be coated
- C23C18/20—Pretreatment of the material to be coated of organic surfaces, e.g. resins
- C23C18/28—Sensitising or activating
- C23C18/30—Activating or accelerating or sensitising with palladium or other noble metal
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
- C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
- C23C18/31—Coating with metals
- C23C18/38—Coating with copper
- C23C18/40—Coating with copper using reducing agents
Abstract
Description
a)誘電体を含む基材を提供する工程、
b)誘電体を含む基材に触媒を適用する工程、
c)誘電体を含む基材に無電解銅めっき用組成物を適用する工程であって、無電解銅めっき用組成物は、1種または複数の銅イオン源、1種または複数のピリジニウム化合物、1種または複数の錯化剤、1種または複数の還元剤および任意選択的に1種または複数のpH調節剤を含み、無電解銅めっき用組成物のpHは、7よりも大きい、工程、および
d)無電解銅めっき用組成物を用いて、誘電体を含む基材上に銅を無電解めっきする工程
を含む方法にも関する。
ピリジニウム化合物を含む無電解銅めっき浴の無電解銅めっき速度
10種の無電解銅めっき浴を調製する。10種のすべての浴は、以下の成分を含む。
1.10g/Lの硫酸銅五水和物
2.40g/Lのロッシェル塩
3.8g/Lの水酸化ナトリウム
4.4g/Lのホルムアルデヒド
5.0.5ppmの2,2’−ジチオ二コハク酸
6.水(バランス量)
(1)Conditioner 231を40℃で1.5分にわたって適用し;
(2)DI水を用い、室温で2分にわたって洗浄し;
(3)pH=2の硝酸を用い、室温で0.5分にわたってプレディップし;
(4)DI水を用い、室温で2分にわたって洗浄し;
(5)100ppmのCIRCUPOSIT(商標)6530触媒を40℃で1分にわたって添加し;
(6)DI水を用い、室温で1分にわたって洗浄し;
(7)5g/Lのホウ酸および0.6g/Lのジメチルアミンボランの水溶液を32℃で1分にわたって添加し;および
(8)DI水を用い、室温で1分にわたって洗浄する。
ピリジン(遊離の窒素塩基)を含む無電解銅めっき浴の無電解銅めっき速度
3種の無電解銅めっき浴を調製する。3種のすべての浴は、以下の成分を含む。
1.10g/Lの硫酸銅五水和物
2.40g/Lのロッシェル塩
3.8g/Lの水酸化ナトリウム
4.4g/Lのホルムアルデヒド
5.0.5ppmの2,2’−ジチオ二コハク酸
6.水(バランス量)
ピリジニウム化合物およびグアニジン塩酸塩を含む無電解銅めっき浴の無電解銅めっき速度
14種の無電解銅めっき浴を調製する。14種のすべての浴は、以下の成分を含む。
1.10g/Lの硫酸銅五水和物
2.40g/Lのロッシェル塩
3.8g/Lの水酸化ナトリウム
4.4g/Lのホルムアルデヒド
5.0.5ppmの2,2’−ジチオ二コハク酸
6.0.36ppmのグアニジン塩酸塩
7.水(バランス量)
ピリジン(遊離の窒素塩基)およびグアニジン塩酸塩を含む無電解銅めっき浴の無電解銅めっき速度
5種の無電解銅めっき浴を調製する。5種のすべての浴は、以下の成分を含む。
1.10g/Lの硫酸銅五水和物
2.40g/Lのロッシェル塩
3.8g/Lの水酸化ナトリウム
4.4g/Lのホルムアルデヒド
5.0.5ppmの2,2’−ジチオ二コハク酸
6.0.36ppmのグアニジン塩酸塩
7.水(バランス量)
ピリジニウム化合物を含む本発明のアルカリ性無電解銅水性組成物を用いたバックライト実験
下の表7に開示された成分と量とを有する以下の本発明のアルカリ性無電解銅水性組成物を調製する。
1.CIRCUPOSIT(商標)Hole Prep 3303溶液を用い、80℃で6分にわたってそれぞれのパネルのスルーホールの汚れ取りを行い;
2.次いで、水道の流水を用い、2分にわたってそれぞれのパネルのスルーホールを洗浄し;
3.次いで、CIRCUPOSIT(商標)MLB Promoter 3308の過マンガン酸塩水溶液を用い、80℃で8分にわたってスルーホールを処理し;
4.次いで、水道の流水を用い、4分にわたってスルーホールを洗浄し;
5.次いで、3重量%硫酸/3重量%過酸化水素中和剤を用い、室温で2分にわたってスルーホールを処理し;
6.次いで、水道の流水を用い、2分にわたってそれぞれのパネルのスルーホールを洗浄し;
7.次いで、CIRCUPOSIT(商標)Conditioner 231アルカリ性溶液を用い、60℃で1.5分にわたってそれぞれのパネルのスルーホールを処理し;
8.次いで、水道の流水を用い、2分にわたってスルーホールを洗浄し;
9.次いで、過硫酸ナトリウム/硫酸エッチング溶液を用い、室温で1分にわたってスルーホールを処理し;
10.次いで、DI水の流水を用い、1分にわたってそれぞれのパネルのスルーホールを洗浄し;
11.次いで、パネルを酸性のPre−Dip CIRCUPOSIT(商標)6520中に室温で0.5分浸漬させ、次いでCIRCUPOSIT(商標)6530 Catalyst(これは、イオン性のアルカリ性パラジウム触媒の水性濃縮物である)中に40℃で1分浸漬させ(Dow Electronic Materialsから入手可能)、触媒は、十分な量の炭酸ナトリウム、水酸化ナトリウムまたは硝酸を用いて緩衝処理されて、9〜9.5の触媒pHを達成し;
12.次いで、DI水の流水を用い、室温で1分にわたってそれぞれのパネルのスルーホールを洗浄し;
13.次いで、0.6g/Lのジメチルアミンボランおよび5g/Lのホウ酸の溶液中にパネルを32℃で1分浸漬させて、パラジウムイオンを還元させてパラジウム金属とし;
14.次いで、DI水の流水を用い、1分にわたってそれぞれのパネルのスルーホールを洗浄し;
15.次いで、表7の無電解銅めっき用組成物中にパネルを浸漬させ、34℃、pH13で銅をめっきさせて、スルーホールの壁面上に銅を5分にわたって析出させ;
16.次いで、水道の流水を用い、4分にわたって銅めっきしたパネルを洗浄し;
17.次いで、圧縮空気を用い、それぞれの銅めっきしたパネルを乾燥させ;および
18.以下に記載するバックライト法を使用して、めっきの被覆状態についてパネルのスルーホールの壁面を調べる。
Claims (11)
- 無電解銅めっき用組成物であって、1種または複数の銅イオン源、1種または複数のピリジニウム化合物、1種または複数の錯化剤、1種または複数の還元剤および任意選択的に1種または複数のpH調節剤を含み、前記無電解銅めっき用組成物のpHは、7よりも大きい、無電解銅めっき用組成物。
- 前記1種もしくは複数のピリジニウム化合物またはその塩は、少なくとも0.5ppmの量である、請求項1に記載の無電解銅めっき用組成物。
- 前記1種または複数のピリジニウム化合物は、式:
を有する、請求項1に記載の無電解銅めっき用組成物。 - 前記1種または複数の錯化剤は、酒石酸カリウムナトリウム、酒石酸ナトリウム、サリチル酸ナトリウム、エチレンジアミン四酢酸のナトリウム塩、ニトリロ酢酸およびそのアルカリ金属塩、グルコン酸、グルコン酸塩、トリエタノールアミン、変性エチレンジアミン四酢酸、S,S−エチレンジアミン二コハク酸、ヒダントインならびにヒダントイン誘導体から選択される、請求項1に記載の無電解銅めっき用組成物。
- 前記1種または複数の還元剤は、アルデヒド、ホウ水素化物、置換されたホウ水素化物、ボラン、サッカライドおよび次亜リン酸塩から選択される、請求項1に記載の無電解銅めっき用組成物。
- 二次促進剤、結晶成長抑制剤および安定剤から選択される1種または複数の化合物をさらに含む、請求項1に記載の無電解銅めっき用組成物。
- 無電解銅めっきの方法であって、
a)誘電体を含む基材を提供する工程、
b)前記誘電体を含む前記基材に触媒を適用する工程、
c)前記誘電体を含む前記基材に無電解銅めっき用組成物を適用する工程であって、前記無電解銅めっき用組成物は、1種または複数の銅イオン源、1種または複数のピリジニウム化合物、1種または複数の錯化剤、1種または複数の還元剤および任意選択的に1種または複数のpH調節剤を含み、前記無電解銅めっき用組成物のpHは、7よりも大きい、工程、および
d)前記無電解銅めっき用組成物を用いて、前記誘電体を含む前記基材上に銅を無電解めっきする工程
を含む方法。 - 前記1種もしくは複数のピリジニウム化合物またはその塩は、少なくとも0.5ppmの量である、請求項7に記載の方法。
- 前記無電解銅めっき用組成物は、安定剤および二次促進剤から選択される1種または複数の化合物をさらに含む、請求項7に記載の方法。
- 前記無電解銅めっき用組成物は、40℃以下である、請求項7に記載の方法。
- 前記触媒は、パラジウム触媒である、請求項7に記載の方法。
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NL7402422A (nl) * | 1974-02-22 | 1975-08-26 | Philips Nv | Universele verkoperingsoplossing. |
US4059451A (en) * | 1976-07-12 | 1977-11-22 | Matsushita Electric Industrial Co., Ltd. | Electroless copper plating solution |
FR2359215A1 (fr) * | 1976-07-19 | 1978-02-17 | Matsushita Electric Ind Co Ltd | Solutions de revetement non electrolytique de cuivre, renfermant un agent tensio-actif a groupe perfluorocarbone aliphatique |
CA1135903A (en) * | 1978-09-13 | 1982-11-23 | John F. Mccormack | Electroless copper deposition process having faster plating rates |
US4563217A (en) * | 1983-07-25 | 1986-01-07 | Hitachi, Ltd. | Electroless copper plating solution |
JP2004346381A (ja) * | 2003-05-23 | 2004-12-09 | Hitachi Ltd | プリント配線基板、その製造方法、電気銅めっき方法、及び電気銅めっき液 |
JP4644447B2 (ja) * | 2004-06-25 | 2011-03-02 | 株式会社日立製作所 | プリント配線板の製造方法 |
TW200813255A (en) * | 2006-07-07 | 2008-03-16 | Rohm & Haas Elect Mat | Environmentally friendly electroless copper compositions |
US9611550B2 (en) * | 2012-12-26 | 2017-04-04 | Rohm And Haas Electronic Materials Llc | Formaldehyde free electroless copper plating compositions and methods |
JP6620103B2 (ja) * | 2014-09-04 | 2019-12-11 | 日本高純度化学株式会社 | パラジウムめっき液及びそれを用いて得られたパラジウム皮膜 |
US20160312365A1 (en) * | 2015-04-24 | 2016-10-27 | Kanto Gakuin School Corporation | Electroless plating method and electroless plating film |
WO2017016965A1 (en) * | 2015-07-30 | 2017-02-02 | Basf Se | Process for metallizing plastic surfaces |
US10060034B2 (en) * | 2017-01-23 | 2018-08-28 | Rohm And Haas Electronic Materials Llc | Electroless copper plating compositions |
US10458032B2 (en) * | 2017-06-15 | 2019-10-29 | Rohm And Haas Electronic Materials Llc | Environmentally friendly nickel electroplating compositions and methods |
US10508348B2 (en) * | 2017-06-15 | 2019-12-17 | Rohm And Haas Electronic Materials Llc | Environmentally friendly nickel electroplating compositions and methods |
US10655227B2 (en) * | 2017-10-06 | 2020-05-19 | Rohm And Haas Electronic Materials Llc | Stable electroless copper plating compositions and methods for electroless plating copper on substrates |
US10590541B2 (en) * | 2018-06-15 | 2020-03-17 | Rohm And Haas Electronic Materials Llc | Electroless copper plating compositions and methods for electroless plating copper on substrates |
US20190382900A1 (en) * | 2018-06-15 | 2019-12-19 | Rohm And Haas Electronic Materials Llc | Electroless copper plating compositions and methods for electroless plating copper on substrates |
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- 2019-05-01 US US16/400,381 patent/US20190382901A1/en not_active Abandoned
- 2019-05-31 TW TW108119023A patent/TW202000988A/zh unknown
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- 2019-06-07 EP EP19179167.2A patent/EP3581677A1/en not_active Withdrawn
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