JP2019208284A - Package, oscillation device, electronic apparatus, and mobile - Google Patents

Abstract

To provide a package that can be shared by vibration pieces of different size, while reducing the capacitance between terminals.SOLUTION: A package 10 includes a board 12 having a principal surface 16, and a first terminal 20 and a second terminal 30 disposed along a third side 16c. The first terminal 20 has a first proximal part 22, and a first protrusion 24 protruding from the first proximal part 22 to the second terminal 30 side, and having a length in a direction parallel with the first side 16a smaller than the first proximal part 22. The second terminal 30 has a second proximal part 32, and a second protrusion 34 protruding from the second proximal part 32 to the first terminal 20 side, and having a length in a direction parallel with the first side 16a smaller than the second proximal part 32. The first protrusion 24 and second protrusion 34 are disposed along the third side 16c, and have the sides 24a, 24b, 34a, 34b extending in a direction along the third side 16c.SELECTED DRAWING: Figure 3

Description

  The present invention relates to a package, a vibration device, an electronic apparatus, and a moving object.

  Conventionally, a resonator element using quartz is known. Such a resonator element is housed in a package and is widely used as a reference frequency source or an oscillation source for various electronic devices.

  For example, Patent Literature 1 includes a crystal vibrating piece and a package provided with an electrode pad, and electrically connects the crystal vibrating piece and the electrode pad using only a conductive adhesive. And a case where a crystal vibrating piece and an electrode pad are electrically connected using a conductive adhesive and a bonding wire, and sharing a single package.

JP 2010-161609 A

  Patent Document 1 describes the sharing of packages in the case of using only a conductive adhesive and in the case of using a conductive adhesive and a bonding wire. For example, for vibrating pieces of different sizes, Therefore, it is desired to share the package.

  Furthermore, when the electrostatic capacitance between the terminals of different polarity provided in the package is reduced, the load capacity of the vibration device is reduced and the fluctuation of the resonance frequency of the vibration device is reduced. It is desired to reduce the capacitance.

  One of the objects according to some aspects of the present invention is to provide a package that can be shared for vibrating pieces of different sizes while reducing the capacitance between terminals. Another object of some aspects of the present invention is to provide a vibrating device, an electronic apparatus, and a moving body including the above package.

  SUMMARY An advantage of some aspects of the invention is to solve at least a part of the problems described above, and the invention can be implemented as the following aspects or application examples.

[Application Example 1]
The package according to this application example is
A first side and a second side which are arranged to face each other; a third side and a fourth side which are arranged to face each other and extend in a direction intersecting the first side and the second side; A substrate having a major surface comprising:
Including a first terminal and a second terminal arranged along the third side,
The first terminal is
A first base;
A first protrusion that protrudes from the first base toward the second terminal and has a smaller length in a direction parallel to the first side than the first base;
The second terminal is
A second base;
A second protrusion that protrudes from the second base toward the first terminal and has a smaller length in a direction parallel to the first side than the second base;
The first protrusion and the second protrusion have a side that is disposed along the third side and extends in a direction along the third side.

  In such a package, while reducing the capacitance between the first terminal and the second terminal, it is possible to share the terminal on which the resonator element is arranged with respect to the resonator element of different sizes, so that vibrations of different sizes can be obtained. Even when a piece is used, the package can be shared.

[Application Example 2]
In the package according to this application example,
The side on the second terminal side of the first protrusion, the side on the first terminal side of the second protrusion, the side on the second terminal side of the first base, and the first terminal of the second base The side may be a side extending in a direction along the first side.

  In such a package, while reducing the capacitance between the first terminal and the second terminal, it is possible to share the terminal on which the resonator element is arranged with respect to the resonator element of different sizes, so that vibrations of different sizes can be obtained. Even when a piece is used, the package can be shared.

[Application Example 3]
In the package according to this application example,
The side extending in the direction along the third side of the first protruding portion is connected to the side on the second terminal side of the first protruding portion and the side on the second terminal side of the first base portion. And
The side extending in the direction along the third side of the second projecting portion is connected to the side on the first terminal side of the second projecting portion and the side on the first terminal side of the second base portion. May be.

  In such a package, a corner formed by a side extending in the direction along the third side of the first projecting portion and a side of the first base on the second terminal side, When a joining member is provided on one terminal, it can be used as a reference for alignment. Further, a corner formed by a side extending in the direction along the third side of the second protrusion and a side of the second base on the first terminal side is joined to the second terminal. When providing the member, it can be used as a reference for alignment.

[Application Example 4]
In the package according to this application example,
The region between the first protrusion and the second protrusion is
A first region;
A second region and a third region provided so as to sandwich the first region in a direction parallel to the first side;
The second region has a length in a direction parallel to the third side larger than the first region,
The length of the third region in a direction parallel to the third side may be smaller than that of the first region.

  In such a package, while reducing the capacitance between the first terminal and the second terminal, it is possible to share the terminal on which the resonator element is arranged with respect to the resonator element of different sizes, so that vibrations of different sizes can be obtained. Even when a piece is used, the package can be shared.

[Application Example 5]
In the package according to this application example,
A distance in a direction parallel to the third side between the first protrusion and the second protrusion may increase in a direction parallel to the first side.

  In such a package, while reducing the capacitance between the first terminal and the second terminal, it is possible to share the terminal on which the resonator element is arranged with respect to the resonator element of different sizes, so that vibrations of different sizes can be obtained. Even when a piece is used, the package can be shared.

[Application Example 6]
The vibration device according to this application example is
A package according to this application example;
A vibrating piece provided in the package;
And an oscillation circuit electrically connected to the vibration piece.

  In such a vibration device, since the package according to this application example is included, the load capacity can be reduced, and the fluctuation of the resonance frequency can be reduced.

[Application Example 7]
The electronic device according to this application example is
The vibration device according to this application example is included.

  In such an electronic apparatus, since the vibration device according to the application example is included, it is possible to reduce the load capacity and reduce the fluctuation of the resonance frequency.

[Application Example 8]
The mobile object according to this application example is
The vibration device according to this application example is included.

  In such a moving body, since the vibration device according to the application example is included, the load capacity can be reduced and the fluctuation of the resonance frequency can be reduced.

FIG. 3 is a plan view schematically showing the vibrator according to the embodiment. FIG. 3 is a cross-sectional view schematically showing a vibrator according to the embodiment. FIG. 3 is a plan view schematically showing the vibrator according to the embodiment. FIG. 3 is a plan view schematically showing the vibrator according to the embodiment. FIG. 6 is a plan view schematically showing a vibrator according to a first modification of the embodiment. The top view which shows typically the vibrator | oscillator which concerns on the 2nd modification of this embodiment. FIG. 9 is a plan view schematically showing a vibrator according to a third modification example of the embodiment. The top view which shows typically the vibrator | oscillator which concerns on the 4th modification of this embodiment. The top view which shows typically the vibrator | oscillator which concerns on the 5th modification of this embodiment. FIG. 3 is a cross-sectional view schematically showing the vibration device according to the embodiment. Sectional drawing which shows typically the vibration device which concerns on the modification of this embodiment. The functional block diagram of the electronic device which concerns on this embodiment. The top view which shows typically the mobile body which concerns on this embodiment.

  DESCRIPTION OF EMBODIMENTS Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the drawings. The embodiments described below do not unduly limit the contents of the present invention described in the claims. In addition, not all of the configurations described below are essential constituent requirements of the present invention.

1. First, the vibrator according to the present embodiment will be described with reference to the drawings. FIG. 1 is a plan view schematically showing a vibrator 100 according to this embodiment. FIG. 2 is a cross-sectional view taken along the line II-II of FIG. 1 schematically showing the vibrator 100 according to the present embodiment. In FIGS. 1 and 2 and FIGS. 3 to 9 shown below, an X axis, a Y axis, and a Z axis that are orthogonal to each other are illustrated.

  As shown in FIGS. 1 and 2, the vibrator 100 includes a package 10, joining members 40 and 42, and a vibrating piece 50. For convenience, the seal ring 13 and the lid 14 of the package 10 are omitted in FIG.

  The package 10 has a box-shaped substrate (base) 12 having a recess 11 and a plate-shaped lid (lid) 14 joined to the substrate 12 so as to close the opening of the recess 11. The package 10 has an accommodation space formed by closing the recess 11 with the lid body 14, and the resonator element 50 is accommodated in the accommodation space in an airtight manner. That is, the vibrating piece 50 is provided in the package 10. The accommodation space (recess 11) in which the vibrating piece 50 is accommodated may be in a reduced pressure (vacuum) state, or may be filled with an inert gas such as nitrogen, helium, or argon. Thereby, the vibration characteristics of the resonator element 50 can be improved.

  The material of the substrate 12 is, for example, various ceramics such as aluminum oxide. The material of the lid 14 is, for example, a material whose linear expansion coefficient approximates that of the substrate 12. Specifically, when the material of the substrate 12 is ceramics, the material of the lid 14 is an alloy such as Kovar.

  The substrate 12 and the lid body 14 are joined by providing a seal ring 13 between the substrate 12 and the lid body 14 and welding. In addition, joining of the board | substrate 12 and the cover body 14 is not specifically limited, You may perform using an adhesive agent and may be performed by seam welding.

  The substrate 12 has a main surface 16 that becomes the bottom surface of the recess 11 (the inner bottom surface of the package 10). In the illustrated example, the main surface 16 is a surface facing the + Z-axis direction. Here, FIG. 3 is a plan view schematically showing the main surface 16 of the substrate 12 and the terminals 20 and 30. As shown in FIGS. 1 and 3, the main surface 16 includes a first side 16a, a second side 16b, a third side 16c, and a fourth side 16d when viewed from the Z-axis direction (in plan view). In the illustrated example, the shape (planar shape) viewed from the Z-axis direction of the main surface 16 is a rectangle, but the shape is not limited as long as the sides 16a, 16b, 16c, and 16d are provided.

  The first side 16a and the second side 16b of the main surface 16 of the substrate 12 are arranged to face each other. In the illustrated example, the sides 16a and 16b are parallel to the X axis. The first side 16a is located on the −Y axis direction side with respect to the second side 16b. The third side 16c and the fourth side 16d of the main surface 16 are arranged to face each other. The sides 16c and 16d extend in a direction intersecting with the sides 16a and 16b (a direction orthogonal in the illustrated example). In the illustrated example, the sides 16c and 16d are parallel to the Y axis and are connected to the sides 16a and 16b. The third side 16c is located on the −X axis direction side with respect to the fourth side 16d.

  A first terminal 20 and a second terminal 30 are provided on the main surface 16 of the substrate 12. The terminals 20 and 30 are arranged side by side along the third side 16c. In the illustrated example, the first terminal 20 is located closer to the −Y axis direction than the second terminal 30. For example, the terminals 20 and 30 are arranged symmetrically with respect to a virtual straight line (not shown) parallel to the X axis in plan view. As the terminals 20 and 30, for example, a metal film in which a film of nickel, gold, silver, copper or the like is laminated on a metallized layer (underlayer) such as chromium or tungsten is used.

  As shown in FIG. 3, the first terminal 20 has a first base portion 22 and a first protruding portion 24. The second terminal 30 has a second base portion 32 and a second protruding portion 34. In the illustrated example, the planar shapes of the base portions 22 and 32 are rectangles having long sides parallel to the X axis, but the shapes are not limited. The protrusions 24 and 34 are arranged side by side along the third side 16c. In the illustrated example, the planar shape of the protrusions 24 and 34 is a square, but the shape is not limited.

  The first protruding portion 24 protrudes from the first base portion 22 toward the second terminal 30 side. In the illustrated example, the + X-axis direction side 24 a of the first protrusion 24 and the + X-axis direction side 22 a of the first base 22 are continuous. The sides 22a and 24a are sides (sides parallel to the Y axis in the illustrated example) extending in the direction along the third side 16c. The length L1 (in the X-axis direction) of the first protrusion 24 in the direction parallel to the first side 16a is smaller than the length L2 of the first base 22 in the X-axis direction.

  The side 24b on the −X-axis direction side of the first protrusion 24 is a side (+ Y-axis direction side) 24c on the second terminal 30 side of the first protrusion 24 and the second terminal 30 side of the first base portion 22. Side (+ Y-axis direction side) 22b. The side 24b is a side (a side parallel to the Y axis in the illustrated example) extending in a direction along the third side 16c. The sides 22b and 24c are sides (sides parallel to the X axis in the illustrated example) extending in the direction along the first side 16a. The sides 22b and 24b form corners 23. The angle of the corner 23 is, for example, 90 ° (sides 22b and 24b are orthogonal).

  The second protruding portion 34 protrudes from the second base portion 32 to the first terminal 20 side. In the illustrated example, the + X-axis direction side 34a of the second protrusion 34 and the + X-axis direction side 32a of the second base 32 are continuous. The length L3 of the second protrusion 34 in the X-axis direction is smaller than the length L4 of the second base 32 in the X-axis direction. The protrusions 24 and 34 are disposed along the third side 16c.

  The side 34b on the −X-axis direction side of the second protrusion 34 is a side (side on the −Y-axis direction) 34c on the first terminal 20 side of the second protrusion 34 and the first terminal 20 of the second base 32. Is connected to the side (−Y-axis direction side) 32b. The side 34b is a side (a side parallel to the Y axis in the illustrated example) extending in a direction along the third side 16c. The sides 32b and 34c are sides (sides parallel to the X axis in the illustrated example) extending in the direction along the first side 16a. The sides 32 b and 34 b form a corner 33. The angle of the corner 33 is 90 °, for example.

  The side 24c of the first protrusion 24 and the side 34c of the second protrusion 34 are arranged to face each other. In the illustrated example, the sides 24c and 34c are arranged side by side along the Y axis. The side 22b of the first base portion 22 and the side 32b of the second base portion 32 are arranged to face each other. In the illustrated example, the sides 22b and 32b are arranged side by side along the Y axis. A distance D1 between the first base portion 22 and the second base portion 32 is greater than a distance D2 between the first protrusion portion 24 and the second protrusion portion 34.

  The first terminal 20 and the second terminal 30 have the base portions 22 and 32 and the protruding portions 24 and 34 as described above, and thus have a substantially L-shaped planar shape. The terminals 20 and 30 have, for example, a planar shape in which one corner of the virtual rectangle α shown in FIG. 3 is cut out. For example, the shape of the virtual rectangle α is a rectangle, and the length of the virtual rectangle α in the X-axis direction is the same as the maximum length of the lengths of the terminals 20 and 30 in the X-axis direction. The length in the Y-axis direction is the same as the maximum length of the terminals 20 and 30 in the Y-axis direction.

  The first joining member 40 is provided on the first terminal 20. In the illustrated example, the first joining member 40 is provided on the base 22 of the first terminal 20. The second bonding member 42 is provided on the second terminal 30. In the illustrated example, the second bonding member 42 is provided on the base 32 of the second terminal 30.

  Examples of the first bonding member 40 and the second bonding member 42 include conductive bonding such as solder, silver paste, and conductive adhesive (adhesive in which conductive fillers such as metal particles are dispersed in a resin material). Use members. The joining members 40 and 42 join the terminals 20 and 30 and the electrode pads of the vibrating piece 50 together. For example, the terminals 20 and 30 are electrically connected to external terminals 60 and 62 provided on a surface 18 of the package 10 (a surface opposite to the main surface 16 of the substrate 12) 18, respectively. A voltage can be applied to the resonator element 50 using 62.

  The vibration piece 50 is accommodated in the package 10 as shown in FIGS. 1 and 2. The resonator element 50 includes a quartz substrate 52, excitation electrodes 54a and 54b, extraction electrodes 56a and 56b, and electrode pads 58a and 58b.

  The quartz substrate 52 is, for example, an AT cut quartz substrate cut out by AT cut. That is, the vibrating piece 50 is an AT-cut quartz crystal vibrating piece. The vibrating piece 50 can vibrate with the thickness shear vibration as the main vibration.

  The first excitation electrode 54a and the second excitation electrode 54b are provided with the quartz crystal substrate 52 sandwiched in the Z-axis direction. The first excitation electrode 54a is electrically connected to the first electrode pad 58a through the first extraction electrode 56a. The first electrode pad 58 a is provided to face the first terminal 20, and is electrically connected to the first terminal 20 through the first bonding member 40. The second excitation electrode 54b is electrically connected to the second electrode pad 58b through the second extraction electrode 56b. The second electrode pad 58 b is provided to face the second terminal 30 and is electrically connected to the second terminal 30 via the second bonding member 42. As the excitation electrodes 54a and 54b, the extraction electrodes 56a and 56b, and the electrode pads 58a and 58b (hereinafter also referred to as “excitation electrodes 54a and 54b etc.”), for example, chromium and gold in this order from the quartz substrate 52 side. Use a laminate.

  In the method for manufacturing the vibrator 100, for example, the quartz substrate 52 is formed by patterning an AT-cut quartz substrate by photolithography and etching. Etching may be dry etching or wet etching. Next, excitation electrodes 54 a and 54 b and the like are formed on the quartz substrate 52. The excitation electrodes 54a, 54b and the like are formed, for example, by forming a conductive layer (not shown) by sputtering or vacuum vapor deposition and patterning the conductive layer by photolithography and etching. As described above, the resonator element 50 can be manufactured. Next, the resonator element 50 is bonded to the substrate 12 via the bonding members 40 and 42. Next, the lid 14 is bonded to the substrate 12 via the seal ring 13. Thus, the vibrator 100 can be manufactured.

  The package 10 of the vibrator 100 has the following features, for example.

  In the package 10, the first terminal 20 has a first base 22 and a first protrusion 24, and the second terminal 30 has a second base 32 and a second protrusion 34. Therefore, when the size of the vibrating piece 50 is large (when the length in the Y-axis direction is large), as shown in FIG. 3, the joining members 40 and 42 are provided on the base portions 22 and 32, and the vibrating piece 50 is joined to the joining member. It can be joined to the substrate 12 via 40, 42 and the bases 22, 32. When the size of the vibrating piece 50 is small (when the length in the Y-axis direction is small), as shown in FIG. 4, the joining members 40 and 42 are provided on the protrusions 24 and 34, and the vibrating piece 50 is joined to the joining member 40. , 42 and the protrusions 24, 34 can be bonded to the substrate 12. As described above, in the package 10, the package 10 can be shared for the vibrating pieces 50 having different sizes.

  The first joining member 40 may be provided over the first base portion 22 and the first projecting portion 24, and the second joining member 40 may be provided over the second base portion 32 and the second projecting portion 34. Good.

  Furthermore, in the package 10, the first protrusion 24 protrudes from the first base 22 toward the second terminal 30, and the second protrusion 34 protrudes from the second base 32 toward the first terminal 20. Therefore, the distance D1 between the base portions 22 and 32 is larger than the distance D2 between the protruding portions 24 and 34. Thereby, in the package 10, the region between the first terminal 20 and the second terminal 30 can have a portion in which the length in the direction parallel to the Y axis is longer than D2 (the portion that becomes D1). . Therefore, compared with the case where the region between the two terminals does not have a portion that is longer than D2 (specifically, when the planar shape of the terminal is the virtual rectangle α shown in FIG. 3), the terminals 20 and 30. The electrostatic capacity can be reduced. Furthermore, since the area of the terminals 20 and 30 can be reduced in plan view as compared with the case where the planar shape of the terminals is the virtual quadrangle α, the parasitic capacitance of the terminals 20 and 30 can be reduced. As a result, the load capacity of the vibrator 100 can be reduced, and fluctuations in the resonance frequency of the vibrator 100 can be reduced.

  As described above, in the package 10, since the capacitance between the terminals 20 and 30 is reduced, the terminals 20 and 30 on which the resonator elements are arranged can be shared with respect to the resonator elements of different sizes. Even when the vibrating piece is used, the package 10 can be shared.

  In the package 10, the side 24 b of the first protrusion 24 is connected to the side 22 b of the first base 22, and the side 34 b of the second protrusion 34 is connected to the side 32 b of the second base 32. Therefore, in the package 10, when the first bonding member 40 is provided on the first terminal 20, the corner portion 23 formed by the sides 22 b and 24 b can be used as a reference for alignment. Furthermore, after providing the 1st joining member 40 in the 1st terminal 20, the position of the 1st joining member 40 with respect to the 1st terminal 20 can be easily confirmed by the corner | angular part 23. FIG. Similarly, when providing the 2nd joining member 42 in the 2nd terminal 30, the corner | angular part 33 formed by edge | side 32b, 34b can be used as the reference | standard of alignment. Further, after the second bonding member 42 is provided on the second terminal 30, the position of the second bonding member 42 with respect to the second terminal 30 can be easily confirmed by the corner portion 33. The corners 23 and 33 may be recognized by an image.

  In the above, an example in which the quartz substrate 52 is an AT cut quartz substrate has been described. However, the quartz substrate of the vibrator according to the present invention may be, for example, an SC cut quartz substrate, a BT cut quartz substrate, or the like. Further, the quartz substrate may be, for example, a mesa type in which the central portion (thick portion) is thicker than the peripheral portion and this central portion is a vibrating portion. In the vibrator according to the present invention, the resonator element may be a SAW (Surface Acoustic Wave) resonator or a MEMS (Micro Electro Mechanical Systems) vibrator. In addition to quartz, piezoelectric single crystals such as lithium tantalate and lithium niobate, piezoelectric materials such as piezoelectric ceramics such as lead zirconate titanate, and silicon semiconductor materials are used as the substrate material for the resonator element. You can also. Further, as a vibrating piece excitation means, one based on a piezoelectric effect may be used, or electrostatic driving using a Coulomb force may be performed. Further, the vibration piece may be an element for detecting a physical quantity, for example, an element for an inertial sensor (acceleration sensor, gyro sensor, etc.) or a force sensor (tilt sensor, etc.).

  Moreover, although the above demonstrated the package 10 which has the box-shaped board | substrate 12 which has the recessed part 11, and the plate-shaped cover body 14 joined to the board | substrate 12 so that the opening of the recessed part 11 may be plugged up. The package according to the present invention may have a plate-like shape in which the lid has a recess for accommodating the resonator element and the substrate closes the opening of the recess.

2. 2. Modification of vibrator 2.1. First Modified Example Next, a vibrator according to a first modified example of the present embodiment will be described with reference to the drawings. FIG. 5 is a plan view schematically showing the vibrator 200 according to the first modification of the present embodiment. For convenience, in FIG. 5 and FIGS. 6 to 8 shown below, members other than the main surface 16 of the substrate 12 and the terminals 20 and 30 of the package 10 are omitted.

  Hereinafter, in the vibrator 200 according to the first modified example of the present embodiment, points different from the example of the vibrator 100 according to the present embodiment will be described, and description of similar points will be omitted. The same applies to the vibrators according to second to fifth modifications of the present embodiment described below.

  In the vibrator 100 described above, as shown in FIG. 3, the side 24a on the + X-axis direction side of the first protrusion 24 and the side 22a on the + X-axis direction side of the first base 22 are continuous. Further, the + X-axis direction side 34a of the second protrusion 34 and the + X-axis direction side 32a of the second base 32 were continuous.

  On the other hand, in the vibrator 200, as shown in FIG. 5, the side 24b on the −X-axis direction side of the first protrusion 24 and the side 22c on the −X-axis direction side of the first base 22 are continuous. ing. The side 24a on the + X-axis direction side of the first protrusion 24 is connected to the side 24c on the + Y-axis direction side of the first protrusion 24 and the side 22b on the + Y-axis direction side of the first base 22. The sides 22b and 24a form corners 23.

  Furthermore, in the vibrator 200, the −34 side side 34 b of the second protrusion 34 and the −32 side side 32 c of the second base part 32 are continuous. A side 34a on the + X-axis direction side of the second protrusion 34 is connected to a side 34c on the −Y-axis direction side of the second protrusion 34 and a side 32b on the −Y-axis direction side of the second base 32. The sides 32 b and 34 a form a corner 33.

  Similarly to the package 10 of the vibrator 100, the package 10 of the vibrator 200 reduces the electrostatic capacity between the terminals 20 and 30, and the terminals 20 and 30 are arranged with respect to the vibrator pieces having different sizes. Therefore, the package 10 can be shared even when using vibrating pieces having different sizes.

2.2. Second Modified Example Next, a vibrator according to a second modified example of the present embodiment will be described with reference to the drawings. FIG. 6 is a plan view schematically showing a vibrator 300 according to the second modification example of the present embodiment.

  In the vibrator 100 described above, as shown in FIG. 3, the side 24a on the + X-axis direction side of the first protrusion 24 and the side 22a on the + X-axis direction side of the first base 22 are continuous. Further, the + X-axis direction side 34a of the second protrusion 34 and the + X-axis direction side 32a of the second base 32 were continuous.

  On the other hand, in the vibrator 300, as shown in FIG. 6, the side 24a on the + X-axis direction side of the first protrusion 24 and the side 22a on the + X-axis direction side of the first base 22 are not continuous. The sides 22 a and 24 a are connected to the side 22 c on the + Y-axis direction side of the first base portion 22. The side 22c is located on the + X axis direction side of the side 22b. The side 22c is a side (side parallel to the X axis in the illustrated example) extending in a direction along the first side 16a. The sides 22c and 24a form a corner 23.

  Furthermore, in the vibrator 300, the side 34a on the + X-axis direction side of the second protrusion 34 and the side 32a on the + X-axis direction side of the second base 32 are not continuous, and the sides 32a and 34a are The two base portions 32 are connected to the side 32c on the −Y axis direction side. The side 32c is located on the + X axis direction side of the side 32b. The side 32c is a side (side parallel to the X axis in the illustrated example) extending in a direction along the first side 16a. The sides 32 c and 34 a form a corner 33.

  Similarly to the package 10 of the vibrator 100, the package 10 of the vibrator 300 reduces the electrostatic capacitance between the terminals 20 and 30, and the terminals 20 and 30 for arranging the vibrator pieces with respect to the vibrator pieces of different sizes. Therefore, the package 10 can be shared even when using vibrating pieces having different sizes.

2.3. Third Modification Next, a vibrator according to a third modification of the present embodiment will be described with reference to the drawings. FIG. 7 is a plan view schematically showing a vibrator 400 according to the third modification of the present embodiment.

  In the vibrator 100 described above, as shown in FIG. 3, the side 24 c on the + Y-axis direction side of the first protrusion 24 and the side 34 c on the −Y-axis direction side of the second protrusion 34 are It was a side extending in a direction along one side 16a.

  On the other hand, in the vibrator 400, as shown in FIG. 7, the sides 24c and 34c are inclined with respect to the first side 16a. In the illustrated example, the planar shape of the protrusions 24 and 34 is a triangle (specifically, a right triangle), and the planar shape of the terminals 20 and 30 is a trapezoid.

  In the vibrator 400, the region 70 between the first projecting portion 24 and the second projecting portion 34 is first in the direction parallel to the first region 72 and the first side 16a (X-axis direction in the illustrated example). A second region 74 and a third region 76 are provided so as to sandwich the region 72.

  The second region 74 is adjacent to the first region 72, for example. In the illustrated example, the second region 74 is located on the −X axis direction side of the first region 72. The second region 74 has a region whose length in the direction parallel to the third side 16c (in the illustrated example, the Y-axis direction) is larger than that of the first region 72. That is, the length D4 of the second region 74 in the Y-axis direction has a region larger than the length D3 of the first region 72 in the Y-axis direction. In other words, the average length of the second region 74 in the Y-axis direction is larger than the average length of the first region 72 in the Y-axis direction.

  The third region 76 is adjacent to the first region 72, for example. In the illustrated example, the third region 76 is located on the + X axis direction side of the first region 72. The third region 76 has a region whose length in the Y-axis direction is smaller than that of the first region 72. That is, the length D5 of the third region 76 in the Y axis direction is smaller than the length D3 of the first region 72 in the Y axis direction. In other words, the average length of the third regions 76 in the Y-axis direction is smaller than the average length of the first regions 72 in the Y-axis direction.

  The distance in the Y-axis direction between the first projecting portion 24 and the second projecting portion 34 increases in the direction parallel to the first side 16a. In the illustrated example, the distance in the Y-axis direction between the protrusions 24 and 34 increases in the −X-axis direction (from the side 16d toward the side 16c).

  Similarly to the package 10 of the vibrator 100, the package 10 of the vibrator 400 reduces the electrostatic capacitance between the terminals 20 and 30, and the terminals 20 and 30 arrange the vibrator pieces with respect to the vibrator pieces having different sizes. Therefore, the package 10 can be shared even when using vibrating pieces having different sizes.

  Furthermore, since the number of corners of the terminals 20 and 30 is smaller in the vibrator 400 than in the vibrator 100, for example, the number of portions where the electric field concentrates in the terminals 20 and 30 can be reduced. The electric field tends to concentrate at the corners of the terminals.

2.4. Fourth Modified Example Next, a vibrator according to a fourth modified example of the embodiment will be described with reference to the drawings. FIG. 8 is a plan view schematically showing a transducer 500 according to the fourth modification example of the present embodiment.

  In the vibrator 100 described above, as shown in FIG. 3, the side 24 c on the + Y-axis direction side of the first protrusion 24 and the side 34 c on the −Y-axis direction side of the second protrusion 34 are It was a side extending in a direction along one side 16a.

  On the other hand, in the vibrator 500, as shown in FIG. 8, the sides 24c and 34c are inclined with respect to the first side 16a. The vibrator 500 is basically the same as the vibrator 400 described above except that the distance in the Y-axis direction between the protrusions 24 and 34 decreases in the −X-axis direction (from the side 16d toward the side 16c). Is the same.

2.5. Fifth Modification Next, a vibrator according to a fifth modification of the present embodiment will be described with reference to the drawings. FIG. 9 is a plan view schematically showing a vibrator 600 according to the fifth modification of the present embodiment. For convenience, the seal ring 13 and the lid 14 of the package 10 are omitted in FIG.

  In the vibrator 100 described above, as shown in FIG. 1, the corners of the terminals 20 and 30 are corners (for example, a part formed by two straight lines orthogonal to each other) in plan view.

  On the other hand, in the vibrator 600, as shown in FIG. 9, the terminals 20 and 30 have corners 610 made of curves in plan view. In the illustrated example, the corners of the main surface 16 are also composed of curves in plan view.

  In the vibrator 600, since the terminals 20 and 30 have corner portions 610 made of a curve (made of a curved surface), the concentration of the electric field can be reduced compared to the vibrator 100, for example. The corner portion 610 made of a curved surface may be other than the portion of the terminals 20 and 30 shown in FIG.

3. Next, the vibration device according to the present embodiment will be described with reference to the drawings. FIG. 10 is a cross-sectional view schematically showing the vibration device 700 according to this embodiment.

  The vibration device 700 includes the vibrator according to the present invention. Hereinafter, a vibrating device 700 including the vibrator 100 will be described as the vibrator according to the present invention. As shown in FIG. 10, the vibration device 700 includes a vibrator 100 and an electronic component 80.

  The electronic component 80 is provided in the recess 17 formed in the main surface 16. The recess 17 communicates with the recess 11. The electronic component 80 is electrically connected to connection terminals 82 and 84 provided on the bottom surface of the recess 17 via, for example, metal bumps (not shown). For example, the connection terminals 82 and 84 are electrically connected to the external terminals 60 and 62, respectively.

  The electronic component 80 is electrically connected to the excitation electrodes 54 a and 54 b of the vibrating piece 50. The electronic component 80 is, for example, an IC (Integrated Circuit) chip that includes an oscillation circuit for driving the resonator element 50. The oscillation circuit is electrically connected to the excitation electrodes 54a and 54b.

  Since the vibration device 700 includes the vibrator 100, the load capacity can be reduced and the fluctuation of the resonance frequency can be reduced.

4). Next, a vibration device according to a modification of the present embodiment will be described with reference to the drawings. FIG. 11 is a cross-sectional view schematically showing the vibration device 800 according to the present embodiment. For convenience, in FIG. 11, the resonator element 50 is illustrated in a simplified manner.

  Hereinafter, in the vibration device 800 according to the modified example of the present embodiment, points different from the example of the vibration device 700 according to the present embodiment will be described, and description of similar points will be omitted.

  In the vibration device 700 described above, as illustrated in FIG. 10, the electronic component 80 is accommodated in the same space as the vibration piece 50.

  On the other hand, in the vibration device 800, as shown in FIG. 11, the electronic component 80 is accommodated in a space different from the vibration piece 50. In the illustrated example, a recess 19 is provided on the surface 18 side of the package 10, and the electronic component 80 is accommodated in the recess 19. The package 10 has a substantially H-shaped cross-sectional shape. The recess 19 is sealed with a sealing member 90. The material of the sealing member 90 is not particularly limited as long as the concave portion 19 can be sealed.

  Note that the vibration device according to the embodiment and the modification described above has an oscillator having a temperature compensation function and a voltage control function (frequency control function) (VC-TCXO (Voltage Controlled Compensated Crystal Oscillator, etc.)) and a temperature compensation function. Voltage controlled oscillators (VCXO (Voltage Controlled Crystal Oscillator), etc.), temperature compensated oscillators without voltage control function (frequency control function) (TCXO (Temperature Compensated Crystal Oscillator), etc.), temperature compensation function and voltage control Oscillator (SPXO (Simple Packaged Crystal) with no function (frequency control function) The present invention can be applied to an oscillator such as a constant temperature oven (such as an OCXO (Oven Controlled Crystal Oscillator)). The electronic component 80 may include a circuit for controlling these oscillators.

5. Next, an electronic device according to the present embodiment will be described with reference to the drawings. FIG. 12 is a functional block diagram of the electronic apparatus 1000 according to the present embodiment.

  The electronic apparatus 1000 includes the vibration device according to the present invention. Hereinafter, an electronic apparatus 1000 including the vibration device 700 will be described as the vibration device according to the invention.

  The electronic device 1000 further includes a CPU (Central Processing Unit) 1020, an operation unit 1030, a ROM (Read Only Memory) 1040, a RAM (Random Access Memory) 1050, a communication unit 1060, and a display unit 1070. Note that the electronic device of the present embodiment may have a configuration in which some of the components (each unit) in FIG. 12 are omitted or changed, or other components are added.

  The vibration device 700 generates an oscillation signal based on the oscillation of the resonator element. This oscillation signal is output to the CPU 1020.

  The CPU 1020 performs various calculation processes and control processes using the oscillation signal input from the vibration device 700 as a clock signal according to a program stored in the ROM 1040 or the like. Specifically, the CPU 1020 performs various processes according to operation signals from the operation unit 1030, processes for controlling the communication unit 1060 to perform data communication with an external device, and displays various types of information on the display unit 1070. The process of transmitting the display signal is performed.

  The operation unit 1030 is an input device including operation keys, button switches, and the like, and outputs an operation signal corresponding to an operation by the user to the CPU 1020.

  The ROM 1040 stores programs, data, and the like for the CPU 1020 to perform various calculation processes and control processes.

  The RAM 1050 is used as a work area of the CPU 1020, and temporarily stores programs and data read from the ROM 1040, data input from the operation unit 1030, calculation results executed by the CPU 1020 according to various programs, and the like.

  The communication unit 1060 performs various controls for establishing data communication between the CPU 1020 and the external device.

  The display unit 1070 is a display device configured by an LCD (Liquid Crystal Display) or the like, and displays various types of information based on a display signal input from the CPU 1020. The display unit 1070 may be provided with a touch panel that functions as the operation unit 1030.

  Since the electronic device 1000 includes the vibration device 700, the load capacity can be reduced and the fluctuation of the resonance frequency can be reduced.

  Various electronic devices can be considered as such an electronic device 1000, for example, personal computers (for example, mobile personal computers, laptop personal computers, tablet personal computers), mobile terminals such as smartphones and mobile phones, Digital cameras, inkjet discharge devices (for example, inkjet printers), storage area network devices such as routers and switches, local area network devices, mobile terminal base station devices, televisions, video cameras, video recorders, car navigation devices, real-time Clock devices, pagers, electronic notebooks (including those with communication functions), electronic dictionaries, calculators, electronic game machines, game controllers, word processors, word processors Station, video phone, crime prevention TV monitor, electronic binoculars, POS terminal, medical equipment (for example, electronic thermometer, blood pressure monitor, blood glucose meter, electrocardiogram measuring device, ultrasonic diagnostic device, electronic endoscope), fish detector, various Measurement equipment, instruments (for example, vehicle, aircraft, ship instruments), flight simulator, head mounted display, motion trace, motion tracking, motion controller, PDR (pedestrian position measurement), and the like.

  In addition, as an example of the electronic apparatus 1000 according to the present embodiment, the above-described vibrating device 700 is used as a reference signal source, a voltage variable oscillator (VCO), or the like, for example, a terminal base that performs wired or wireless communication with a terminal. A transmission device that functions as a station device or the like can be used.

6). Next, the moving body according to the present embodiment will be described with reference to the drawings. FIG. 13 is a plan view schematically showing the moving body 1100 according to this embodiment.

  The moving body 1100 includes the vibration device according to the present invention. Below, the moving body 1100 including the vibration device 700 will be described as the vibration device according to the present invention.

  The moving body 1100 further includes controllers 1120, 1130, 1140 that perform various controls such as an engine system, a brake system, and a keyless entry system, a battery 1150, and a backup battery 1160. Note that the mobile body of this embodiment may have a configuration in which some of the components (each unit) in FIG. 13 are omitted or other components are added.

  The vibration device 700 generates an oscillation signal based on the oscillation of the resonator element. This oscillation signal is output from the vibration device 700 to the controllers 1120, 1130, and 1140, and is used as, for example, a clock signal.

  The battery 1150 supplies power to the vibration device 700 and the controllers 1120, 1130, and 1140. The backup battery 1160 supplies power to the vibration device 700 and the controllers 1120, 1130, and 1140 when the output voltage of the battery 1150 falls below a threshold value.

  Since the moving body 1100 includes the vibration device 700, the load capacity can be reduced and the fluctuation of the resonance frequency can be reduced.

  As such a moving body 1100, various moving bodies can be considered, and examples thereof include automobiles (including electric automobiles), airplanes such as jets and helicopters, ships, rockets, and artificial satellites.

  The element mounted on the package according to the present invention is not limited to the resonator element, and for example, a semiconductor element may be mounted.

  The above-described embodiments and modifications are merely examples, and the present invention is not limited to these. For example, it is possible to appropriately combine each embodiment and each modification.

  The present invention includes configurations that are substantially the same as the configurations described in the embodiments (for example, configurations that have the same functions, methods, and results, or configurations that have the same objects and effects). In addition, the invention includes a configuration in which a non-essential part of the configuration described in the embodiment is replaced. In addition, the present invention includes a configuration that achieves the same effect as the configuration described in the embodiment or a configuration that can achieve the same object. Further, the invention includes a configuration in which a known technique is added to the configuration described in the embodiment.

DESCRIPTION OF SYMBOLS 10 ... Package, 11 ... Recessed part, 12 ... Board | substrate, 13 ... Seal ring, 14 ... Cover body, 16 ... Main surface, 16a ... 1st edge | side, 16b ... 2nd edge | side, 16c ... 3rd edge | side, 16d ... 4th edge | side , 17 ... recess, 18 ... surface, 19 ... recess, 20 ... first terminal, 22 ... first base, 22a, 22b, 22c ... side, 23 ... corner, 24 ... first projection, 24a, 24b, 24c ... side, 30 ... second terminal, 32 ... second base, 32a, 32b, 32c ... side, 33 ... corner, 34 ... second protrusion, 34a, 34b, 34c ... side, 40 ... first joining member, 42 ... second joining member, 50 ... vibrating piece, 52 ... quartz substrate, 54a ... first excitation electrode, 54b ... second excitation electrode, 56a ... first extraction electrode, 56b ... second extraction electrode, 58a ... first electrode Pad, 58b ... second electrode pad, 60,62 ... external terminal, 70 ... region, 72 ... 1 region, 74 ... 2nd region, 76 ... 3rd region, 80 ... electronic component, 82, 84 ... connection terminal, 90 ... sealing member, 100, 200, 300, 400, 500, 600 ... vibrator, 610 ... Corner, 700, 800 ... Vibration device, 1000 ... Electronic device, 1020 ... CPU, 1030 ... Operation part, 1040 ... ROM, 1050 ... RAM, 1060 ... Communication part, 1070 ... Display part, 1100 ... Mobile object, 1120, 1130 , 1140 ... Controller, 1150 ... Battery, 1160 ... Backup battery

Claims (8)

A first side and a second side which are arranged to face each other; a third side and a fourth side which are arranged to face each other and extend in a direction intersecting the first side and the second side; A substrate having a major surface comprising:
Including a first terminal and a second terminal arranged along the third side,
The first terminal is
A first base;
A first protrusion that protrudes from the first base toward the second terminal and has a smaller length in a direction parallel to the first side than the first base;
The second terminal is
A second base;
A second protrusion that protrudes from the second base toward the first terminal and has a smaller length in a direction parallel to the first side than the second base;
The package in which the first projecting portion and the second projecting portion are arranged along the third side and have sides extending in a direction along the third side. In claim 1,
The side on the second terminal side of the first protrusion, the side on the first terminal side of the second protrusion, the side on the second terminal side of the first base, and the first terminal of the second base The side side is a package extending in a direction along the first side. In claim 2,
The side extending in the direction along the third side of the first protruding portion is connected to the side on the second terminal side of the first protruding portion and the side on the second terminal side of the first base portion. And
The side extending in the direction along the third side of the second projecting portion is connected to the side on the first terminal side of the second projecting portion and the side on the first terminal side of the second base portion. Being a package. In claim 1,
The region between the first protrusion and the second protrusion is
A first region;
A second region and a third region provided so as to sandwich the first region in a direction parallel to the first side;
The second region has a length in a direction parallel to the third side larger than the first region,
The package in which the third region is smaller in length in a direction parallel to the third side than the first region. In claim 4,
The distance between the first protrusion and the second protrusion in the direction parallel to the third side increases in the direction parallel to the first side. A package according to any one of claims 1 to 5;
A vibrating piece provided in the package;
An oscillation device comprising: an oscillation circuit electrically connected to the oscillation piece.   An electronic apparatus comprising the vibration device according to claim 6.   A moving body comprising the vibrating device according to claim 6.

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