JP6813065B2 - Vibration devices, electronics, and mobiles - Google Patents

Description

The present invention relates to packages, vibrating devices, electronic devices, and mobiles.

Conventionally, a vibrating piece using quartz has been known. Such a vibrating piece is housed in a package and is widely used as a reference frequency source or an oscillation source for various electronic devices.

For example, Patent Document 1 includes a crystal vibrating piece and a package provided with an electrode pad, and electrically connects the crystal vibrating piece and the electrode pad using only a conductive adhesive, and conductive. It is described that the case where the crystal oscillator piece and the electrode pad are electrically connected by using a sex adhesive and a bonding wire and the case where the crystal oscillator pad is electrically connected are shared in one package.

JP-A-2010-161609

Patent Document 1 describes the sharing of packages between the case where only the conductive adhesive is used and the case where the conductive adhesive and the bonding wire are used. For example, for vibrating pieces having different sizes. Therefore, it is desired to share the package.

Furthermore, when the capacitance between the terminals of the different poles provided in the package is reduced, the load capacitance of the vibrating device is reduced and the fluctuation of the resonance frequency of the vibrating device is reduced. It is desired to reduce the capacitance.

One of the objects according to some aspects of the present invention is to provide a package that can be shared with vibrating pieces of different sizes while reducing the capacitance between terminals. In addition, one of the objects according to some aspects of the present invention is to provide a vibrating device, an electronic device, and a mobile body including the above-mentioned package.

The present invention has been made to solve at least a part of the above-mentioned problems, and can be realized as the following aspects or application examples.

[Application example 1]
The package related to this application example is
The first side and the second side which are arranged to face each other, and the third side and the fourth side which are arranged to face each other and extend in a direction intersecting the first side and the second side. With a substrate having a main surface and
Including the first terminal and the second terminal arranged along the third side,
The first terminal is
1st base and
It has a first protruding portion that protrudes from the first base portion toward the second terminal side and has a smaller length in a direction parallel to the first side than the first base portion.
The second terminal is
2nd base and
It has a second protruding portion that protrudes from the second base portion toward the first terminal side and has a smaller length in a direction parallel to the first side than the second base portion.
The first protruding portion and the second protruding portion are arranged along the third side and have a side extending in a direction along the third side.

In such a package, while reducing the capacitance between the first terminal and the second terminal, the terminals for arranging the vibration pieces for the vibration pieces of different sizes can be shared, so that the vibrations of different sizes can be shared. Even when one piece is used, the package can be shared.

[Application example 2]
In the package related to this application example
The side of the first protruding portion on the second terminal side, the side of the second protruding portion on the first terminal side, the side of the first base on the second terminal side, and the first terminal of the second base. The side side may be a side extending in a direction along the first side.

In such a package, while reducing the capacitance between the first terminal and the second terminal, the terminals for arranging the vibration pieces for the vibration pieces of different sizes can be shared, so that the vibrations of different sizes can be shared. Even when one piece is used, the package can be shared.

[Application example 3]
In the package related to this application example
The side extending in the direction along the third side of the first protrusion is connected to the side of the first protrusion on the second terminal side and the side of the first base on the second terminal side. Being done
The side extending in the direction along the third side of the second protruding portion is connected to the side of the second protruding portion on the first terminal side and the side of the second base portion on the first terminal side. It may have been done.

In such a package, a corner portion formed by a side extending in a direction along the third side of the first protruding portion and a side of the first base portion on the second terminal side is formed. When the joining member is provided on one terminal, it can be used as a reference for alignment. Further, the corner portion formed by the side extending in the direction along the third side of the second protruding portion and the side of the second base portion on the first terminal side is joined to the second terminal. When the member is provided, it can be used as a reference for alignment.

[Application example 4]
In the package related to this application example
The area between the first protrusion and the second protrusion is
The first area and
It has a second region and a third region provided so as to sandwich the first region in a direction parallel to the first side.
The length of the second region in the direction parallel to the third side is larger than that of the first region.
The length of the third region in the direction parallel to the third side may be smaller than that of the first region.

In such a package, while reducing the capacitance between the first terminal and the second terminal, the terminals for arranging the vibration pieces for the vibration pieces of different sizes can be shared, so that the vibrations of different sizes can be shared. Even when one piece is used, the package can be shared.

[Application example 5]
In the package related to this application example
The distance between the first protruding portion and the second protruding portion in the direction parallel to the third side may increase toward the direction parallel to the first side.

In such a package, while reducing the capacitance between the first terminal and the second terminal, the terminals for arranging the vibration pieces for the vibration pieces of different sizes can be shared, so that the vibrations of different sizes can be shared. Even when one piece is used, the package can be shared.

[Application example 6]
The vibration device according to this application example is
The package related to this application example and
The vibrating piece provided in the package and
It includes an oscillating circuit that is electrically connected to the vibrating piece.

Since such a vibration device includes the package according to this application example, the load capacitance can be reduced and the fluctuation of the resonance frequency can be reduced.

[Application 7]
The electronic device related to this application example is
The vibration device according to this application example is included.

Since such an electronic device includes the vibration device according to the present application example, the load capacitance can be reduced and the fluctuation of the resonance frequency can be reduced.

[Application Example 8]
The moving body according to this application example is
The vibration device according to this application example is included.

Since such a moving body includes the vibration device according to the present application example, the load capacitance can be reduced and the fluctuation of the resonance frequency can be reduced.

The plan view which shows typically the oscillator which concerns on this embodiment. The cross-sectional view which shows typically the oscillator which concerns on this embodiment. The plan view which shows typically the oscillator which concerns on this embodiment. The plan view which shows typically the oscillator which concerns on this embodiment. The plan view which shows typically the oscillator which concerns on the 1st modification of this embodiment. The plan view which shows typically the oscillator which concerns on the 2nd modification of this embodiment. The plan view which shows typically the oscillator which concerns on the 3rd modification of this embodiment. The plan view which shows typically the oscillator which concerns on the 4th modification of this embodiment. The plan view which shows typically the oscillator which concerns on the 5th modification of this embodiment. The cross-sectional view which shows typically the vibration device which concerns on this embodiment. The cross-sectional view which shows typically the vibration device which concerns on the modification of this embodiment. The functional block diagram of the electronic device which concerns on this embodiment. The plan view which shows typically the moving body which concerns on this embodiment.

Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the drawings. It should be noted that the embodiments described below do not unreasonably limit the contents of the present invention described in the claims. Moreover, not all of the configurations described below are essential constituent requirements of the present invention.

1. 1. Oscillator First, the oscillator according to this embodiment will be described with reference to the drawings. FIG. 1 is a plan view schematically showing the vibrator 100 according to the present embodiment. FIG. 2 is a sectional view taken along line II-II of FIG. 1 schematically showing the vibrator 100 according to the present embodiment. In addition, in FIGS. 1 and 2 and FIGS. 3 to 9 shown below, the X-axis, the Y-axis, and the Z-axis which are orthogonal to each other are illustrated.

As shown in FIGS. 1 and 2, the vibrator 100 includes a package 10, joining members 40 and 42, and a vibrating piece 50. For convenience, the seal ring 13 and the lid 14 of the package 10 are omitted in FIG.

The package 10 has a box-shaped substrate (base) 12 having a recess 11 and a plate-shaped lid 14 joined to the substrate 12 so as to close the opening of the recess 11. The package 10 has a storage space formed by closing the recess 11 with the lid 14, and the vibrating piece 50 is airtightly housed in the storage space. That is, the vibrating piece 50 is provided in the package 10. The accommodation space (recess 11) in which the vibrating piece 50 is accommodated may be in a reduced pressure (vacuum) state, or may be filled with an inert gas such as nitrogen, helium, or argon. Thereby, the vibration characteristic of the vibration piece 50 can be improved.

The material of the substrate 12 is, for example, various ceramics such as aluminum oxide. The material of the lid 14 is, for example, a material whose coefficient of linear expansion is similar to that of the substrate 12. Specifically, when the material of the substrate 12 is ceramics, the material of the lid 14 is an alloy such as Kovar.

The bonding between the substrate 12 and the lid 14 is performed by providing a seal ring 13 between the substrate 12 and the lid 14 and welding the substrate 12. The bonding between the substrate 12 and the lid 14 is not particularly limited, and may be performed by using an adhesive or by seam welding.

The substrate 12 has a main surface 16 which is a bottom surface of the recess 11 (the inner bottom surface of the package 10). In the illustrated example, the main surface 16 is a surface facing the + Z axis direction. Here, FIG. 3 is a plan view schematically showing the main surface 16 and the terminals 20 and 30 of the substrate 12. As shown in FIGS. 1 and 3, the main surface 16 includes a first side 16a, a second side 16b, a third side 16c, and a fourth side 16d when viewed from the Z-axis direction (in a plan view). In the illustrated example, the shape (planar shape) of the main surface 16 when viewed from the Z-axis direction is rectangular, but the shape is not limited as long as the sides 16a, 16b, 16c, and 16d are provided.

The first side 16a and the second side 16b of the main surface 16 of the substrate 12 are arranged so as to face each other. In the illustrated example, the sides 16a and 16b are parallel to the X-axis. The first side 16a is located on the −Y axis direction side with respect to the second side 16b. The third side 16c and the fourth side 16d of the main surface 16 are arranged so as to face each other. The sides 16c and 16d extend in the direction intersecting the sides 16a and 16b (in the illustrated example, the directions orthogonal to each other). In the illustrated example, the sides 16c and 16d are parallel to the Y-axis and are connected to the sides 16a and 16b. The third side 16c is located on the −X axis direction side with respect to the fourth side 16d.

A first terminal 20 and a second terminal 30 are provided on the main surface 16 of the substrate 12. The terminals 20 and 30 are arranged side by side along the third side 16c. In the illustrated example, the first terminal 20 is located closer to the −Y axis direction than the second terminal 30. The terminals 20 and 30 are arranged symmetrically with respect to a virtual straight line (not shown) parallel to the X axis in a plan view, for example. As the terminals 20 and 30, for example, a metal film in which each film of nickel, gold, silver, copper or the like is laminated on a metallized layer (base layer) of chromium, tungsten or the like is used.

As shown in FIG. 3, the first terminal 20 has a first base portion 22 and a first protruding portion 24. The second terminal 30 has a second base portion 32 and a second protruding portion 34. In the illustrated example, the planar shape of the bases 22 and 32 is a rectangle having a long side parallel to the X axis, but the shape is not limited. The protrusions 24 and 34 are arranged side by side along the third side 16c. In the illustrated example, the planar shapes of the protrusions 24 and 34 are square, but the shape is not limited.

The first protruding portion 24 protrudes from the first base portion 22 toward the second terminal 30 side. In the illustrated example, the side 24a on the + X-axis direction side of the first protruding portion 24 and the side 22a on the + X-axis direction side of the first base portion 22 are continuous. The sides 22a and 24a are sides extending in the direction along the third side 16c (sides parallel to the Y-axis in the illustrated example). The length L1 (in the X-axis direction) of the first protrusion 24 in the direction parallel to the first side 16a is smaller than the length L2 in the X-axis direction of the first base 22.

The side 24b on the −X-axis direction side of the first protruding portion 24 is the side (+ Y-axis direction side) 24c on the second terminal 30 side of the first protruding portion 24 and the second terminal 30 side of the first base portion 22. It is connected to the side (the side on the + Y-axis direction) 22b. The side 24b is a side extending in a direction along the third side 16c (a side parallel to the Y axis in the illustrated example). The sides 22b and 24c are sides extending in the direction along the first side 16a (sides parallel to the X-axis in the illustrated example). The sides 22b and 24b form a corner portion 23. The angle of the corner portion 23 is, for example, 90 ° (sides 22b and 24b are orthogonal to each other).

The second protruding portion 34 protrudes from the second base portion 32 toward the first terminal 20 side. In the illustrated example, the side 34a on the + X-axis direction side of the second protruding portion 34 and the side 32a on the + X-axis direction side of the second base portion 32 are continuous. The length L3 of the second protruding portion 34 in the X-axis direction is smaller than the length L4 of the second base portion 32 in the X-axis direction. The protrusions 24 and 34 are arranged along the third side 16c.

The side 34b on the −X axis direction side of the second protruding portion 34 is the side (the side on the −Y axis direction) 34c on the first terminal 20 side of the second protruding portion 34, and the first terminal 20 of the second base portion 32. It is connected to the side side (side in the −Y axis direction) 32b. The side 34b is a side extending in a direction along the third side 16c (a side parallel to the Y axis in the illustrated example). The sides 32b and 34c are sides extending in the direction along the first side 16a (sides parallel to the X-axis in the illustrated example). The sides 32b and 34b form a corner portion 33. The angle of the corner portion 33 is, for example, 90 °.

The side 24c of the first protrusion 24 and the side 34c of the second protrusion 34 are arranged so as to face each other. In the illustrated example, the sides 24c and 34c are arranged side by side along the Y axis. The side 22b of the first base 22 and the side 32b of the second base 32 are arranged so as to face each other. In the illustrated example, the sides 22b and 32b are arranged side by side along the Y axis. The distance D1 between the first base 22 and the second base 32 is larger than the distance D2 between the first protrusion 24 and the second protrusion 34.

The first terminal 20 and the second terminal 30 have a substantially L-shaped planar shape because they have the base portions 22 and 32 and the protruding portions 24 and 34 as described above, respectively. The terminals 20 and 30 have, for example, a planar shape in which one corner of the virtual quadrangle α shown in FIG. 3 is cut out. For example, the shape of the virtual quadrangle α is a rectangle, and the length of the virtual quadrangle α in the X-axis direction is the same as the maximum length of the terminals 20 and 30 in the X-axis direction. The length in the Y-axis direction is the same as the maximum length of the terminals 20 and 30 in the Y-axis direction.

The first joining member 40 is provided at the first terminal 20. In the illustrated example, the first joining member 40 is provided at the base 22 of the first terminal 20. The second joining member 42 is provided at the second terminal 30. In the illustrated example, the second joining member 42 is provided at the base 32 of the second terminal 30.

Examples of the first joining member 40 and the second joining member 42 include conductive joining such as solder, silver paste, and a conductive adhesive (an adhesive in which a conductive filler such as metal particles is dispersed in a resin material). Use members. The joining members 40 and 42 join the terminals 20 and 30 to the electrode pads of the vibrating piece 50. The terminals 20 and 30 are electrically connected to the external terminals 60 and 62 provided on the surface 18 of the package 10 (the surface opposite to the main surface 16 of the substrate 12) 18, respectively, and the external terminals 60 and 30 are connected to each other. A voltage can be applied to the vibrating piece 50 using 62.

The vibrating piece 50 is housed in the package 10 as shown in FIGS. 1 and 2. The vibrating piece 50 has a crystal substrate 52, excitation electrodes 54a and 54b, extraction electrodes 56a and 56b, and electrode pads 58a and 58b.

The crystal substrate 52 is, for example, an AT-cut crystal substrate cut out by AT-cut. That is, the vibrating piece 50 is an AT-cut crystal vibrating piece. The vibrating piece 50 can vibrate with the thickness sliding vibration as the main vibration.

The first excitation electrode 54a and the second excitation electrode 54b are provided so as to sandwich the crystal substrate 52 in the Z-axis direction. The first excitation electrode 54a is electrically connected to the first electrode pad 58a via the first extraction electrode 56a. The first electrode pad 58a is provided so as to face the first terminal 20, and is electrically connected to the first terminal 20 via the first joining member 40. The second excitation electrode 54b is electrically connected to the second electrode pad 58b via the second extraction electrode 56b. The second electrode pad 58b is provided so as to face the second terminal 30, and is electrically connected to the second terminal 30 via the second joining member 42. The excitation electrodes 54a, 54b, the extraction electrodes 56a, 56b, and the electrode pads 58a, 58b (hereinafter, also referred to as "excitation electrodes 54a, 54b, etc.") include, for example, chromium and gold in this order from the crystal substrate 52 side. Use a laminated one.

In the method of manufacturing the vibrator 100, for example, the AT-cut crystal substrate is patterned by photolithography and etching to form the crystal substrate 52. The etching may be dry etching or wet etching. Next, the excitation electrodes 54a, 54b and the like are formed on the crystal substrate 52. The excitation electrodes 54a, 54b and the like are formed, for example, by forming a conductive layer (not shown) into a film by a sputtering method or a vacuum vapor deposition method, and patterning the conductive layer by photolithography and etching. From the above, the vibrating piece 50 can be manufactured. Next, the vibrating piece 50 is joined to the substrate 12 via the joining members 40 and 42. Next, the lid 14 is joined to the substrate 12 via the seal ring 13. From the above, the oscillator 100 can be manufactured.

The package 10 of the oscillator 100 has, for example, the following features.

In the package 10, the first terminal 20 has a first base 22 and a first protrusion 24, and the second terminal 30 has a second base 32 and a second protrusion 34. Therefore, when the size of the vibrating piece 50 is large (when the length in the Y-axis direction is large), as shown in FIG. 3, joining members 40 and 42 are provided on the bases 22 and 32, and the vibrating piece 50 is joined to the joining member. It can be bonded to the substrate 12 via the 40, 42 and the bases 22, 32. When the size of the vibrating piece 50 is small (when the length in the Y-axis direction is small), as shown in FIG. 4, joining members 40 and 42 are provided on the protruding portions 24 and 34, and the vibrating piece 50 is attached to the joining member 40. , 42 and the protrusions 24, 34 can be joined to the substrate 12. In this way, in the package 10, the package 10 can be shared with respect to the vibrating pieces 50 having different sizes.

The first joining member 40 may be provided over the first base portion 22 and the first protruding portion 24, and the second joining member 40 may be provided over the second base portion 32 and the second protruding portion 34. Good.

Further, in the package 10, the first protruding portion 24 protrudes from the first base portion 22 toward the second terminal 30 side, and the second protruding portion 34 protrudes from the second base portion 32 toward the first terminal 20 side. Therefore, the distance D1 between the bases 22 and 32 is larger than the distance D2 between the protrusions 24 and 34. As a result, in the package 10, the region between the first terminal 20 and the second terminal 30 can have a portion (a portion that becomes D1) whose length in the direction parallel to the Y axis is longer than D2. .. Therefore, the terminals 20 and 30 are compared with the case where the region between the two terminals does not have a portion longer than D2 (specifically, when the planar shape of the terminal is the virtual quadrangle α shown in FIG. 3). The capacitance between them can be reduced. Further, since the area of the terminals 20 and 30 can be reduced in a plan view as compared with the case where the planar shape of the terminal is a virtual quadrangle α, the parasitic capacitance of the terminals 20 and 30 can be reduced. As a result, the load capacitance of the oscillator 100 can be reduced, and the fluctuation of the resonance frequency of the oscillator 100 can be reduced.

As described above, in the package 10, the terminals 20 and 30 for arranging the vibrating pieces with respect to the vibrating pieces of different sizes can be shared while reducing the capacitance between the terminals 20 and 30, so that the terminals have different sizes. Even when the vibrating piece of the above is used, the package 10 can be shared.

In the package 10, the side 24b of the first protruding portion 24 is connected to the side 22b of the first base portion 22, and the side 34b of the second protruding portion 34 is connected to the side 32b of the second base portion 32. Therefore, in the package 10, when the first joining member 40 is provided on the first terminal 20, the corner portion 23 formed by the sides 22b and 24b can be used as a reference for alignment. Further, after the first joining member 40 is provided on the first terminal 20, the position of the first joining member 40 with respect to the first terminal 20 can be easily confirmed by the corner portion 23. Similarly, when the second joining member 42 is provided on the second terminal 30, the corner portion 33 formed by the sides 32b and 34b can be used as a reference for alignment. Further, after the second joining member 42 is provided on the second terminal 30, the position of the second joining member 42 with respect to the second terminal 30 can be easily confirmed by the corner portion 33. The corner portions 23 and 33 may be recognized by an image.

Although the example in which the crystal substrate 52 is an AT-cut crystal substrate has been described above, the crystal substrate of the oscillator according to the present invention may be, for example, an SC-cut crystal substrate, a BT-cut crystal substrate, or the like. Further, the crystal substrate may be, for example, a mesa type in which the central portion (thick portion) is thicker than the peripheral portion and the central portion is the vibrating portion. Further, in the vibrator according to the present invention, the vibrating piece may be a SAW (Surface Acoustic Wave) resonator or a MEMS (Micro Electro Mechanical Systems) vibrator. As the substrate material for the vibrating piece, in addition to quartz, a piezoelectric single crystal such as lithium tantalate or lithium niobate, a piezoelectric material such as piezoelectric ceramics such as lead zirconate titanate, or a silicon semiconductor material should be used. You can also. Further, as the exciting means of the vibrating piece, one having a piezoelectric effect may be used, or electrostatic driving by a Coulomb force may be performed. Further, the vibrating piece may be an element for detecting a physical quantity, for example, an inertial sensor (acceleration sensor, gyro sensor, etc.) or a force sensor (tilt sensor, etc.).

Further, in the above description, the package 10 having the box-shaped substrate 12 having the recess 11 and the plate-shaped lid 14 joined to the substrate 12 so as to close the opening of the recess 11 has been described. The package according to the present invention may have a plate-like shape in which the lid has a recess for accommodating the vibrating piece and the substrate closes the opening of the recess.

2. 2. Deformation example of oscillator 2.1. First Modified Example Next, the vibrator according to the first modified example of the present embodiment will be described with reference to the drawings. FIG. 5 is a plan view schematically showing the vibrator 200 according to the first modification of the present embodiment. For convenience, in FIGS. 5 and 6 to 8 shown below, members other than the main surface 16 and the terminals 20 and 30 of the substrate 12 of the package 10 are not shown.

Hereinafter, the oscillator 200 according to the first modification of the present embodiment will be described with reference to points different from the example of the oscillator 100 according to the present embodiment, and the same points will be omitted. This also applies to the vibrators according to the second to fifth modifications of the present embodiment shown below.

In the above-mentioned oscillator 100, as shown in FIG. 3, the side 24a on the + X-axis direction side of the first protruding portion 24 and the side 22a on the + X-axis direction side of the first base portion 22 are continuous. Further, the side 34a on the + X-axis direction side of the second protruding portion 34 and the side 32a on the + X-axis direction side of the second base portion 32 were continuous.

On the other hand, in the vibrator 200, as shown in FIG. 5, the side 24b on the −X axis direction side of the first protruding portion 24 and the side 22c on the −X axis direction side of the first base portion 22 are continuous. ing. The side 24a on the + X-axis direction side of the first protruding portion 24 is connected to the side 24c on the + Y-axis direction side of the first protruding portion 24 and the side 22b on the + Y-axis direction side of the first base portion 22. The sides 22b and 24a form a corner portion 23.

Further, in the vibrator 200, the side 34b on the −X axis direction side of the second protruding portion 34 and the side 32c on the −X axis direction side of the second base portion 32 are continuous. The side 34a on the + X-axis direction side of the second protrusion 34 is connected to the side 34c on the −Y-axis direction side of the second protrusion 34 and the side 32b on the −Y-axis direction side of the second base portion 32. The sides 32b and 34a form a corner portion 33.

Similar to the package 10 of the vibrator 100, the package 10 of the vibrator 200 has the terminals 20 and 30 in which the vibration pieces are arranged with respect to the vibration pieces of different sizes while reducing the capacitance between the terminals 20 and 30. Can be shared, so that the package 10 can be shared even when vibration pieces of different sizes are used.

2.2. Second Modified Example Next, the vibrator according to the second modified example of the present embodiment will be described with reference to the drawings. FIG. 6 is a plan view schematically showing the vibrator 300 according to the second modification of the present embodiment.

In the above-mentioned oscillator 100, as shown in FIG. 3, the side 24a on the + X-axis direction side of the first protruding portion 24 and the side 22a on the + X-axis direction side of the first base portion 22 are continuous. Further, the side 34a on the + X-axis direction side of the second protruding portion 34 and the side 32a on the + X-axis direction side of the second base portion 32 were continuous.

On the other hand, in the vibrator 300, as shown in FIG. 6, the side 24a on the + X-axis direction side of the first protruding portion 24 and the side 22a on the + X-axis direction side of the first base portion 22 are continuous. Instead, the sides 22a and 24a are connected to the side 22c on the + Y-axis direction side of the first base portion 22. The side 22c is located on the + X axis direction side of the side 22b. The side 22c is a side extending in a direction along the first side 16a (a side parallel to the X axis in the illustrated example). The sides 22c and 24a form a corner portion 23.

Further, in the vibrator 300, the side 34a on the + X-axis direction side of the second protruding portion 34 and the side 32a on the + X-axis direction side of the second base portion 32 are not continuous, and the sides 32a and 34a are the first. The two bases 32 are connected to the side 32c on the −Y axis direction side. The side 32c is located on the + X axis direction side of the side 32b. The side 32c is a side extending in a direction along the first side 16a (a side parallel to the X axis in the illustrated example). The sides 32c and 34a form a corner portion 33.

Similar to the package 10 of the vibrator 100, the package 10 of the vibrator 300 has the terminals 20 and 30 in which the vibration pieces are arranged with respect to the vibration pieces of different sizes while reducing the capacitance between the terminals 20 and 30. Can be shared, so that the package 10 can be shared even when vibration pieces of different sizes are used.

2.3. Third Modified Example Next, the vibrator according to the third modified example of the present embodiment will be described with reference to the drawings. FIG. 7 is a plan view schematically showing the vibrator 400 according to the third modification of the present embodiment.

In the oscillator 100 described above, as shown in FIG. 3, the side 24c on the + Y-axis direction side of the first protrusion 24 and the side 34c on the −Y-axis direction side of the second protrusion 34 are the third sides of the main surface 16. It was a side extending in the direction along one side 16a.

On the other hand, in the vibrator 400, as shown in FIG. 7, the sides 24c and 34c are inclined with respect to the first side 16a. In the illustrated example, the planar shapes of the protrusions 24 and 34 are triangles (specifically, right triangles), and the planar shapes of the terminals 20 and 30 are trapezoidal.

In the vibrator 400, the region 70 between the first protruding portion 24 and the second protruding portion 34 is the first in the direction parallel to the first region 72 and the first side 16a (in the illustrated example, the X-axis direction). It has a second region 74 and a third region 76 provided so as to sandwich the region 72.

The second region 74 is adjacent to, for example, the first region 72. In the illustrated example, the second region 74 is located on the −X axis direction side of the first region 72. The second region 74 has a region whose length in the direction parallel to the third side 16c (Y-axis direction in the illustrated example) is larger than that of the first region 72. That is, the length D4 of the second region 74 in the Y-axis direction has a region larger than the length D3 of the first region 72 in the Y-axis direction. In other words, the average length of the second region 74 in the Y-axis direction is larger than the average length of the first region 72 in the Y-axis direction.

The third region 76 is adjacent to, for example, the first region 72. In the illustrated example, the third region 76 is located on the + X axis direction side of the first region 72. The third region 76 has a region whose length in the Y-axis direction is smaller than that of the first region 72. That is, the length D5 of the third region 76 in the Y-axis direction has a region smaller than the length D3 of the first region 72 in the Y-axis direction. In other words, the average length of the third region 76 in the Y-axis direction is smaller than the average length of the first region 72 in the Y-axis direction.

The distance in the Y-axis direction between the first protruding portion 24 and the second protruding portion 34 increases in the direction parallel to the first side 16a. In the illustrated example, the distance between the protrusions 24 and 34 in the Y-axis direction increases toward the −X-axis direction (from the side 16d toward the side 16c).

Similar to the package 10 of the vibrator 100, the package 10 of the vibrator 400 has the terminals 20 and 30 in which the vibration pieces are arranged with respect to the vibration pieces of different sizes while reducing the capacitance between the terminals 20 and 30. Can be shared, so that the package 10 can be shared even when vibration pieces of different sizes are used.

Further, in the oscillator 400, since the number of corners of the terminals 20 and 30 is smaller than that of the oscillator 100, for example, the number of portions where the electric field is concentrated in the terminals 20 and 30 can be reduced. Electric fields tend to concentrate at the corners of the terminals.

2.4. Fourth Modified Example Next, the oscillator according to the fourth modified example of the present embodiment will be described with reference to the drawings. FIG. 8 is a plan view schematically showing the vibrator 500 according to the fourth modification of the present embodiment.

In the oscillator 100 described above, as shown in FIG. 3, the side 24c on the + Y-axis direction side of the first protrusion 24 and the side 34c on the −Y-axis direction side of the second protrusion 34 are the third sides of the main surface 16. It was a side extending in the direction along one side 16a.

On the other hand, in the vibrator 500, as shown in FIG. 8, the sides 24c and 34c are inclined with respect to the first side 16a. In the oscillator 500, the distance between the protruding portions 24 and 34 in the Y-axis direction is basically the same as that of the oscillator 400 described above, except that the distance in the Y-axis direction decreases toward the −X-axis direction (from the side 16d toward the side 16c). Is the same as.

2.5. Fifth Deformation Example Next, the oscillator according to the fifth modification of the present embodiment will be described with reference to the drawings. FIG. 9 is a plan view schematically showing the vibrator 600 according to the fifth modification of the present embodiment. For convenience, the seal ring 13 and the lid 14 of the package 10 are omitted in FIG.

In the vibrator 100 described above, as shown in FIG. 1, the corners of the terminals 20 and 30 were corners (for example, portions formed by two straight lines orthogonal to each other) in a plan view.

On the other hand, in the vibrator 600, as shown in FIG. 9, the terminals 20 and 30 have a curved corner portion 610 in a plan view. In the illustrated example, in a plan view, the corners of the main surface 16 are also composed of curved lines.

In the vibrator 600, since the terminals 20 and 30 have a corner portion 610 made of a curved surface (made of a curved surface), the concentration of the electric field can be relaxed as compared with the vibrator 100, for example. The corner portion 610 formed of a curved surface may be other than the portion shown in FIG. 9 of the terminals 20 and 30.

3. 3. Vibration device Next, the vibration device according to this embodiment will be described with reference to the drawings. FIG. 10 is a cross-sectional view schematically showing the vibration device 700 according to the present embodiment.

The vibration device 700 includes an oscillator according to the present invention. Hereinafter, the vibration device 700 including the oscillator 100 will be described as the oscillator according to the present invention. As shown in FIG. 10, the vibration device 700 includes an oscillator 100 and an electronic component 80.

The electronic component 80 is provided in the recess 17 formed in the main surface 16. The recess 17 communicates with the recess 11. The electronic component 80 is electrically connected to the connection terminals 82 and 84 provided on the bottom surface of the recess 17 via, for example, a metal bump (not shown). The connection terminals 82 and 84 are electrically connected to, for example, the external terminals 60 and 62, respectively.

The electronic component 80 is electrically connected to the excitation electrodes 54a and 54b of the vibrating piece 50. The electronic component 80 is, for example, an IC (Integrated Circuit) chip including an oscillation circuit for driving the vibration piece 50. The oscillation circuit is electrically connected to the excitation electrodes 54a and 54b.

Since the vibration device 700 includes the vibrator 100, the load capacitance can be reduced and the fluctuation of the resonance frequency can be reduced.

4. Modification Example of Vibration Device Next, the vibration device according to the modification of the present embodiment will be described with reference to the drawings. FIG. 11 is a cross-sectional view schematically showing the vibration device 800 according to the present embodiment. For convenience, FIG. 11 shows the vibration piece 50 in a simplified manner.

Hereinafter, the vibration device 800 according to the modified example of the present embodiment will be described with reference to points different from the example of the vibration device 700 according to the present embodiment, and the same points will be omitted.

In the above-mentioned vibration device 700, as shown in FIG. 10, the electronic component 80 is housed in the same space as the vibration piece 50.

On the other hand, in the vibration device 800, as shown in FIG. 11, the electronic component 80 is housed in a space different from that of the vibration piece 50. In the illustrated example, the recess 19 is provided on the surface 18 side of the package 10, and the electronic component 80 is housed in the recess 19. The package 10 has a substantially H-shaped cross-sectional shape. The recess 19 is sealed with a sealing member 90. The material of the sealing member 90 is not particularly limited as long as the recess 19 can be sealed.

The vibration device of the above-described embodiment and modified example has an oscillator (VC-TCXO (Voltage Controlled Temple Oscillator) or the like) having a temperature compensation function and a voltage control function (frequency control function), and a temperature compensation function. No voltage control type oscillator (VCXO (Voltage Control Crystal Oscillator) etc.), temperature compensation type oscillator without voltage control function (frequency control function) (TCXO (Temperature Compensated Crystal Oscillator) etc.), temperature compensation function and voltage control It can be applied to oscillators such as oscillators that do not have both functions (frequency control functions) (SPXO (Simple Packaged Crystal Oscillator), etc.), constant temperature bath type oscillators (OCXO (Oven Controlled Crystal Oscillator), etc.). The electronic component 80 may include a circuit for controlling these oscillators.

5. Electronic Equipment Next, the electronic equipment according to the present embodiment will be described with reference to the drawings. FIG. 12 is a functional block diagram of the electronic device 1000 according to the present embodiment.

The electronic device 1000 includes a vibration device according to the present invention. Hereinafter, the electronic device 1000 including the vibration device 700 will be described as the vibration device according to the present invention.

The electronic device 1000 further includes a CPU (Central Processing Unit) 1020, an operation unit 1030, a ROM (Read Only Memory) 1040, a RAM (Random Access Memory) 1050, a communication unit 1060, and a display unit 1070. The electronic device of the present embodiment may have a configuration in which some of the components (each part) shown in FIG. 12 are omitted or changed, or other components are added.

The vibrating device 700 generates an oscillation signal based on the oscillation of the vibrating piece. This oscillation signal is output to the CPU 1020.

The CPU 1020 performs various calculation processes and control processes using the oscillation signal input from the vibration device 700 as a clock signal according to a program stored in the ROM 1040 or the like. Specifically, the CPU 1020 performs various processes according to the operation signal from the operation unit 1030, processes for controlling the communication unit 1060 for data communication with the external device, and causes the display unit 1070 to display various information. Performs processing such as transmitting the display signal of.

The operation unit 1030 is an input device composed of operation keys, button switches, and the like, and outputs an operation signal corresponding to the operation by the user to the CPU 1020.

The ROM 1040 stores programs, data, and the like for the CPU 1020 to perform various calculation processes and control processes.

The RAM 1050 is used as a work area of the CPU 1020, and temporarily stores programs and data read from the ROM 1040, data input from the operation unit 1030, calculation results executed by the CPU 1020 according to various programs, and the like.

The communication unit 1060 performs various controls for establishing data communication between the CPU 1020 and the external device.

The display unit 1070 is a display device composed of an LCD (Liquid Crystal Display) or the like, and displays various information based on a display signal input from the CPU 1020. The display unit 1070 may be provided with a touch panel that functions as an operation unit 1030.

Since the electronic device 1000 includes the vibration device 700, the load capacitance can be reduced and the fluctuation of the resonance frequency can be reduced.

Various electronic devices can be considered as such an electronic device 1000, for example, a personal computer (for example, a mobile personal computer, a laptop personal computer, a tablet personal computer), a mobile terminal such as a smartphone or a mobile phone, and the like. Digital cameras, inkjet ejection devices (for example, inkjet printers), storage area network devices such as routers and switches, local area network devices, mobile terminal base station devices, televisions, video cameras, video recorders, car navigation devices, real-time Clock devices, pagers, electronic notebooks (including those with communication functions), electronic dictionaries, calculators, electronic game devices, game controllers, word processors, workstations, videophones, security TV monitors, electronic binoculars, POS terminals, medical devices ( For example, electronic thermometer, blood pressure monitor, blood glucose meter, electrocardiogram measuring device, ultrasonic diagnostic device, electronic endoscope), fish finder, various measuring devices, instruments (for example, instruments for vehicles, aircraft, ships), flight simulator. , Head mount display, motion trace, motion tracking, motion controller, PDR (pedestrian position and orientation measurement) and the like.

Further, as an example of the electronic device 1000 according to the present embodiment, the above-mentioned vibration device 700 is used as a reference signal source, a voltage variable oscillator (VCO), or the like, and for example, a terminal base that communicates with a terminal by wire or wirelessly. A transmission device that functions as a station device or the like can be mentioned.

6. Moving body Next, the moving body according to the present embodiment will be described with reference to the drawings. FIG. 13 is a plan view schematically showing the moving body 1100 according to the present embodiment.

The moving body 1100 includes a vibration device according to the present invention. Hereinafter, the mobile body 1100 including the vibration device 700 will be described as the vibration device according to the present invention.

The moving body 1100 is further configured to include controllers 1120, 1130, 1140, batteries 1150, and backup batteries 1160 that perform various controls such as an engine system, a brake system, and a keyless entry system. The moving body of the present embodiment may be configured by omitting a part of the constituent elements (each part) of FIG. 13 or adding other constituent elements.

The vibrating device 700 generates an oscillation signal based on the oscillation of the vibrating piece. This oscillation signal is output from the vibration device 700 to the controllers 1120, 1130, 1140, and is used as, for example, a clock signal.

The battery 1150 powers the vibrating device 700 and the controllers 1120, 1130, 1140. The backup battery 1160 supplies power to the vibrating device 700 and the controllers 1120, 1130, 1140 when the output voltage of the battery 1150 drops below the threshold.

Since the mobile body 1100 includes the vibration device 700, the load capacitance can be reduced and the fluctuation of the resonance frequency can be reduced.

Various mobile bodies can be considered as such a mobile body 1100, and examples thereof include automobiles (including electric vehicles), aircraft such as jet aircraft and helicopters, ships, rockets, and artificial satellites.

The element mounted on the package according to the present invention is not limited to the vibrating piece, and for example, a semiconductor element may be mounted.

The above-described embodiments and modifications are merely examples, and the present invention is not limited thereto. For example, it is also possible to appropriately combine each embodiment and each modification.

The present invention includes substantially the same configurations as those described in the embodiments (eg, configurations with the same function, method and result, or configurations with the same purpose and effect). The present invention also includes a configuration in which a non-essential part of the configuration described in the embodiment is replaced. The present invention also includes a configuration that exhibits the same effects as the configuration described in the embodiment or a configuration that can achieve the same object. The present invention also includes a configuration in which a known technique is added to the configuration described in the embodiment.

10 ... Package, 11 ... Recessed, 12 ... Board, 13 ... Seal ring, 14 ... Lid, 16 ... Main surface, 16a ... 1st side, 16b ... 2nd side, 16c ... 3rd side, 16d ... 4th side , 17 ... concave, 18 ... surface, 19 ... concave, 20 ... first terminal, 22 ... first base, 22a, 22b, 22c ... side, 23 ... corner, 24 ... first protruding part, 24a, 24b, 24c ... Side, 30 ... Second terminal, 32 ... Second base, 32a, 32b, 32c ... Side, 33 ... Corner, 34 ... Second protrusion, 34a, 34b, 34c ... Side, 40 ... First joining member, 42 ... 2nd joining member, 50 ... Vibrating piece, 52 ... Crystal substrate, 54a ... 1st excitation electrode, 54b ... 2nd excitation electrode, 56a ... 1st extraction electrode, 56b ... 2nd extraction electrode, 58a ... 1st electrode Pad, 58b ... 2nd electrode pad, 60, 62 ... External terminal, 70 ... region, 72 ... 1st region, 74 ... 2nd region, 76 ... 3rd region, 80 ... Electronic component, 82, 84 ... Connection terminal, 90 ... Sealing member, 100, 200, 300, 400, 500, 600 ... Electrode, 610 ... Corner, 700, 800 ... Vibration device, 1000 ... Electronic device, 1020 ... CPU, 1030 ... Operation unit, 1040 ... ROM 1050 ... RAM, 1060 ... Communication unit, 1070 ... Display unit, 1100 ... Mobile body, 1120, 1130, 1140 ... Controller, 1150 ... Battery, 1160 ... Backup battery

Claims (4)

Package and
The vibrating piece provided in the package and
With the joining member fixing the vibrating piece to the package,
With
The package is
The first side and the second side which extend along the first direction and are arranged along the second direction orthogonal to the first direction, and extend along the second direction. A substrate having a main surface having a third side and a fourth side arranged along the first direction.
The first terminal and the second terminal, which are arranged along the second direction and are located closer to the third side than the fourth side,
Including
The first terminal is
A first base having a pair of sides extending along the second direction,
A first protrusion having a pair of sides extending along the second direction, protruding from the first base portion toward the second terminal side, and having a smaller length along the first direction than the first base portion. Department and
Have,
The second terminal is
A second base having a pair of sides extending along the second direction,
A second protrusion having a pair of sides extending along the second direction , projecting from the second base toward the first terminal, and having a smaller length along the first direction than the second base. Department and
Have,
Of the pair of sides of the first protruding portion, the side closer to the fourth side than the third side is the fourth side of the pair of sides of the first base portion than the third side. It is continuous with the side closer to the side,
Of the pair of sides of the second protruding portion, the side closer to the fourth side than the third side is the fourth side of the pair of sides of the second base portion than the third side. It is continuous with the side closer to the side ,
The joining member includes a first joining member that overlaps the first terminal in a plan view and a second joining member that overlaps the second terminal in a plan view.
The first joining member is arranged at the first base portion or the first protruding portion.
A vibration device characterized in that the second joining member is arranged at the second base portion or the second protruding portion . Oite to claim 1,
Including oscillation circuit that is pre-Symbol vibrating piece electrically connected, a vibration device. An electronic device including the vibration device according to claim 1 or 2 . A mobile body comprising the vibrating device according to claim 1 or 2 .

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