JP2019197604A5 - - Google Patents
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- Publication number
- JP2019197604A5 JP2019197604A5 JP2018091696A JP2018091696A JP2019197604A5 JP 2019197604 A5 JP2019197604 A5 JP 2019197604A5 JP 2018091696 A JP2018091696 A JP 2018091696A JP 2018091696 A JP2018091696 A JP 2018091696A JP 2019197604 A5 JP2019197604 A5 JP 2019197604A5
- Authority
- JP
- Japan
- Prior art keywords
- component
- phosphate
- aqueous medium
- sodium
- ion
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000012736 aqueous medium Substances 0.000 description 5
- 229910019142 PO4 Inorganic materials 0.000 description 4
- 150000002500 ions Chemical class 0.000 description 4
- 235000021317 phosphate Nutrition 0.000 description 4
- 238000005498 polishing Methods 0.000 description 4
- 150000003839 salts Chemical class 0.000 description 4
- 230000006866 deterioration Effects 0.000 description 3
- NBIIXXVUZAFLBC-UHFFFAOYSA-K phosphate Chemical compound [O-]P([O-])([O-])=O NBIIXXVUZAFLBC-UHFFFAOYSA-K 0.000 description 3
- 239000010452 phosphate Substances 0.000 description 3
- 230000003746 surface roughness Effects 0.000 description 3
- 239000001577 tetrasodium phosphonato phosphate Substances 0.000 description 3
- 229910052783 alkali metal Inorganic materials 0.000 description 2
- -1 alkali metal hydrogen phosphate Chemical class 0.000 description 2
- 235000019799 monosodium phosphate Nutrition 0.000 description 2
- 229910000403 monosodium phosphate Inorganic materials 0.000 description 2
- AJPJDKMHJJGVTQ-UHFFFAOYSA-M sodium dihydrogen phosphate Chemical compound [Na+].OP(O)([O-])=O AJPJDKMHJJGVTQ-UHFFFAOYSA-M 0.000 description 2
- FQENQNTWSFEDLI-UHFFFAOYSA-J sodium diphosphate Chemical compound [Na+].[Na+].[Na+].[Na+].[O-]P([O-])(=O)OP([O-])([O-])=O FQENQNTWSFEDLI-UHFFFAOYSA-J 0.000 description 2
- 229940048086 sodium pyrophosphate Drugs 0.000 description 2
- 235000019818 tetrasodium diphosphate Nutrition 0.000 description 2
- QXNVGIXVLWOKEQ-UHFFFAOYSA-N Disodium Chemical compound [Na][Na] QXNVGIXVLWOKEQ-UHFFFAOYSA-N 0.000 description 1
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- 230000002378 acidificating effect Effects 0.000 description 1
- 229910000318 alkali metal phosphate Inorganic materials 0.000 description 1
- LFVGISIMTYGQHF-UHFFFAOYSA-N ammonium dihydrogen phosphate Chemical compound [NH4+].OP(O)([O-])=O LFVGISIMTYGQHF-UHFFFAOYSA-N 0.000 description 1
- 229910000387 ammonium dihydrogen phosphate Inorganic materials 0.000 description 1
- MNNHAPBLZZVQHP-UHFFFAOYSA-N diammonium hydrogen phosphate Chemical compound [NH4+].[NH4+].OP([O-])([O-])=O MNNHAPBLZZVQHP-UHFFFAOYSA-N 0.000 description 1
- 229910000388 diammonium phosphate Inorganic materials 0.000 description 1
- 235000019838 diammonium phosphate Nutrition 0.000 description 1
- XPPKVPWEQAFLFU-UHFFFAOYSA-J diphosphate(4-) Chemical compound [O-]P([O-])(=O)OP([O-])([O-])=O XPPKVPWEQAFLFU-UHFFFAOYSA-J 0.000 description 1
- 235000011180 diphosphates Nutrition 0.000 description 1
- ZPWVASYFFYYZEW-UHFFFAOYSA-L dipotassium hydrogen phosphate Chemical compound [K+].[K+].OP([O-])([O-])=O ZPWVASYFFYYZEW-UHFFFAOYSA-L 0.000 description 1
- 235000019820 disodium diphosphate Nutrition 0.000 description 1
- BNIILDVGGAEEIG-UHFFFAOYSA-L disodium hydrogen phosphate Chemical compound [Na+].[Na+].OP([O-])([O-])=O BNIILDVGGAEEIG-UHFFFAOYSA-L 0.000 description 1
- GYQBBRRVRKFJRG-UHFFFAOYSA-L disodium pyrophosphate Chemical compound [Na+].[Na+].OP([O-])(=O)OP(O)([O-])=O GYQBBRRVRKFJRG-UHFFFAOYSA-L 0.000 description 1
- 239000004615 ingredient Substances 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 235000019837 monoammonium phosphate Nutrition 0.000 description 1
- 235000019796 monopotassium phosphate Nutrition 0.000 description 1
- 229910000402 monopotassium phosphate Inorganic materials 0.000 description 1
- 150000003013 phosphoric acid derivatives Chemical class 0.000 description 1
- PJNZPQUBCPKICU-UHFFFAOYSA-N phosphoric acid;potassium Chemical compound [K].OP(O)(O)=O PJNZPQUBCPKICU-UHFFFAOYSA-N 0.000 description 1
- 229940048084 pyrophosphate Drugs 0.000 description 1
- GCLGEJMYGQKIIW-UHFFFAOYSA-H sodium hexametaphosphate Chemical compound [Na]OP1(=O)OP(=O)(O[Na])OP(=O)(O[Na])OP(=O)(O[Na])OP(=O)(O[Na])OP(=O)(O[Na])O1 GCLGEJMYGQKIIW-UHFFFAOYSA-H 0.000 description 1
- 235000019982 sodium hexametaphosphate Nutrition 0.000 description 1
- 235000019832 sodium triphosphate Nutrition 0.000 description 1
Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2018091696A JP7158889B2 (ja) | 2018-05-10 | 2018-05-10 | ガラスハードディスク基板用研磨液組成物 |
| MYPI2020005860A MY203297A (en) | 2018-05-10 | 2019-04-23 | Polishing liquid composition for glass hard disk substrate |
| PCT/JP2019/017242 WO2019216205A1 (ja) | 2018-05-10 | 2019-04-23 | ガラスハードディスク基板用研磨液組成物 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2018091696A JP7158889B2 (ja) | 2018-05-10 | 2018-05-10 | ガラスハードディスク基板用研磨液組成物 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2019197604A JP2019197604A (ja) | 2019-11-14 |
| JP2019197604A5 true JP2019197604A5 (enExample) | 2021-04-30 |
| JP7158889B2 JP7158889B2 (ja) | 2022-10-24 |
Family
ID=68468259
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2018091696A Active JP7158889B2 (ja) | 2018-05-10 | 2018-05-10 | ガラスハードディスク基板用研磨液組成物 |
Country Status (3)
| Country | Link |
|---|---|
| JP (1) | JP7158889B2 (enExample) |
| MY (1) | MY203297A (enExample) |
| WO (1) | WO2019216205A1 (enExample) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111085901B (zh) * | 2019-12-23 | 2021-12-21 | 江西沃格光电股份有限公司 | 玻璃面板的抛光方法及玻璃面板 |
| EP4499766A1 (en) * | 2022-03-24 | 2025-02-05 | CMC Materials LLC | Dual additive polishing composition for glass substrates |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2004027042A (ja) | 2002-06-26 | 2004-01-29 | Yuka Sangyo Kk | 微粒子分散ゲル化体及びそれから得られた微粒子分散液 |
| JP2014141667A (ja) | 2012-12-27 | 2014-08-07 | Sanyo Chem Ind Ltd | 電子材料用研磨液 |
| JP2014203503A (ja) | 2013-04-10 | 2014-10-27 | 株式会社オハラ | ハードディスク用基板の製造方法 |
| JP6146113B2 (ja) | 2013-05-07 | 2017-06-14 | コニカミノルタ株式会社 | ガラス物品の製造方法 |
-
2018
- 2018-05-10 JP JP2018091696A patent/JP7158889B2/ja active Active
-
2019
- 2019-04-23 MY MYPI2020005860A patent/MY203297A/en unknown
- 2019-04-23 WO PCT/JP2019/017242 patent/WO2019216205A1/ja not_active Ceased
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