JP2019177481A - Powder film forming device and powder film forming method - Google Patents

Abstract

To provide a powder film forming device and a powder film forming method which can enhance film thickness precision of a powder film to be formed.SOLUTION: A powder film forming device 1 comprises a porous-type powder filled member 2 which is filled with powder 10 and a filling machine 3 that fills the powder filled member 2 with the powder 10. The powder film forming device 1 comprises a film forming machine 4 that forms the powder 10 filled into the powder filled member 2 by the filling machine 3 into a powder film 11 formed on a substrate 12 by moving the powder to the substrate 12. The powder film forming device 1 further comprises a cleaning machine 5 that cleans the powder filled member 2 in which the powder 10 is moved by the film forming machine 4.SELECTED DRAWING: Figure 1

Description

  The present invention relates to a powder film forming apparatus and a powder film forming method.

  Electrostatic screen printing in which a powder film is formed by rubbing powder onto a screen with a rubbing body is known as a prior art (see, for example, Patent Document 1). The electrostatic film forming apparatus of Patent Document 1 that employs electrostatic screen printing includes a hopper that supplies powder to the screen, and a rubbing body (screen brush) that rubs the powder onto the screen. In the electrostatic film forming apparatus, the accuracy of the powder film to be formed is improved by enabling the hopper and the rubbing body to operate independently of each other.

JP 2012-179786 A

  However, in the electrostatic film forming apparatus described in Patent Document 1, the powder film formed on the substrate based on the powder rubbed into the screen by the rubbing body is the powder film supplied to the screen. The thickness is uneven due to the spraying state and the locus of movement of the rubbing body. In other words, the powder film formed by the electrostatic film forming apparatus has insufficient film thickness accuracy.

  Furthermore, in the electrostatic film forming apparatus described in Patent Document 1, although unnecessary powder accumulation by the cleaning member is prevented by the screen brush, unnecessary powder remains on the mesh portion of the screen. When used repeatedly, the film thickness accuracy of the formed powder film may become insufficient due to an adverse effect of the remaining powder.

  Accordingly, an object of the present invention is to provide a powder film forming apparatus and a powder film forming method capable of improving the film thickness accuracy of a powder film to be formed.

In order to solve the above problems, a powder film forming apparatus according to the first invention includes a porous powder filling member filled with powder,
A filling machine for filling the powder filling member with powder;
A film forming machine that forms powder film formed on the substrate by moving the powder filled in the powder filling member to the substrate by the filling machine;
And a cleaning machine for cleaning the powder filling member to which the powder has been moved by the film forming machine.

The powder film forming apparatus according to the second invention is the powder film forming apparatus according to the first invention, wherein there are a plurality of powder filling members,
A first transfer machine for transferring the powder filling member at the position of the filling machine to the position of the film forming machine;
A second transfer machine for transferring the powder filling member at the position of the film forming machine to the position of the cleaning machine;
And a third transporter that transports the powder filling member at the position of the cleaner to the position of the filler.

  Furthermore, in the powder film forming apparatus according to the third invention, the filling machine of the powder film forming apparatus according to the first or second invention uses the powder supplied from above to the powder filling member. It has a holding plate that does not drop downward from the filling member.

  In addition, in the powder film forming apparatus according to the fourth invention, the film forming machine of the powder film forming apparatus according to any one of the first to third inventions uses the powder filled in the powder filling member. And a drop promoting tool that is dropped on the substrate by vibration, rubbing, pushing, and / or electrostatic force.

  Further, in the powder film forming apparatus according to the fifth invention, the cleaning device of the powder film forming apparatus according to any one of the first to fourth inventions does not completely move from the powder filling member to the substrate. And a powder removing tool for removing the residual powder from the powder filling member.

In order to solve the above problems, a powder film forming method according to a sixth aspect of the present invention includes a filling step of filling powder into a porous powder filling member filled with powder,
A film forming step in which the powder filled in the powder filling member by the filling step is moved to the substrate to form a powder film formed on the substrate;
And a cleaning step of cleaning the powder filling member to which the powder has been moved by the film forming step.

The powder film forming method according to the seventh invention is the powder film forming method according to the sixth invention, wherein there are a plurality of powder filling members,
The powder filling member in the filling process is transported to the position where the film forming process is performed, the other powder filling member in the film forming process is transported to the position where the cleaning process is performed, and further powder in the cleaning process It is a method further provided with the conveyance process of conveying a body filling member to the position where a filling process is performed.

  According to the powder film forming apparatus and the powder film forming method, in order to form a powder film from the powder onto the substrate, the powder is once filled in the powder filling member and then moved to the substrate. The film thickness accuracy of the formed powder film can be improved. Furthermore, since the powder remaining on the powder filling member is removed by the cleaning machine, the film thickness accuracy can be stably improved even if it is used repeatedly.

1 is a cross-sectional perspective view schematically showing a powder film forming apparatus according to Embodiment 1 of the present invention. It is a partially cutaway perspective view of a screen plate provided in the powder film forming apparatus. It is a disassembled perspective view which shows the screen mesh part and emulsion part which the same screen plate has. It is a cross-sectional perspective view for demonstrating the filling machine with which the same powder film-forming apparatus is provided. It is a cross-sectional perspective view at the time of employ | adopting a pushing body instead of a rubbing body as the filling machine. It is a cross-sectional perspective view for demonstrating the film-forming machine with which the powder film-forming apparatus is provided. It is a cross-sectional perspective view at the time of employ | adopting a pushing body instead of a rubbing body as the film-forming machine. It is a cross-sectional perspective view for demonstrating the suction tool which is a specific example of the cleaning machine with which the powder film-forming apparatus is provided. It is a cross-sectional perspective view for demonstrating the slightly adhesive tape which is a specific example of the same cleaning machine. It is a perspective view which shows schematically the powder film-forming apparatus which concerns on Embodiment 2 of this invention. It is a perspective view which shows roughly the other example of the rotary conveying machine which conveys the powder filling member in the powder film-forming apparatus.

[Embodiment 1]
Hereinafter, a powder film forming apparatus and a powder film forming method according to Embodiment 1 of the present invention will be described with reference to the drawings.

  First, an outline of the powder film forming apparatus will be described with reference to FIG.

"Powder deposition system 1"
As shown in FIG. 1, this powder film forming apparatus 1 is an apparatus for uniformly forming a powder film 11 from a powder 10 on a substrate 12. The film thickness accuracy of the film 11 can also be improved. The powder film forming apparatus 1 includes a porous powder filling member 2 filled with a powder 10 and a filling machine 3 for filling the powder filling member 2 with the powder 10. Here, filling means filling in a vacant place and closing and holding in that state. The powder film forming apparatus 1 further forms the powder film 11 on the substrate 12 by moving the powder 10 filled in the powder filling member 2 by the filling machine 3 to the substrate 12. A membrane machine 4 is provided. When the powder film 11 is formed on the substrate 12 from the powder 10, the powder 10 is once filled in the powder filling member 2 and then moved to the substrate 12, thereby forming the film of the powder film 11. Thickness accuracy is improved. The powder film forming apparatus 1 further includes a cleaning machine 5 for cleaning the powder filling member 2 to which the powder 10 has been moved by the film forming machine 4. Even if the powder 10 is moved from the powder filling member 2 to the substrate 12, some powder 10 remains on the powder filling member 2. By removing the remaining powder 10 with the cleaning machine 5, even if the powder film 11 is formed again on the substrate 12 with the same powder filling member 2, the film thickness accuracy of the powder film 11 is good. become.

  Next, each of the powder filling member 2, the filling machine 3, the film forming machine 4 and the cleaning machine 5 provided in the powder film forming apparatus 1 will be described in detail with reference to the drawings.

"Powder filling member 2"
The powder filling member 2 is not particularly limited as long as the powder filling member 2 is of a porous type filled with the powder 10. For example, as shown in FIG. 2A, the powder filling member 2 is a screen plate 21. The screen plate 21 includes a filled portion 22 that can hold and pass the powder 10 and a covering portion 23 that does not hold and pass the powder 10 around the filled portion 22. The filling portion 22 is made of a screen mesh, and the covering portion 23 is a portion where an emulsion is injected into the screen mesh and dried. In other words, as shown in FIG. 2B, the screen plate 21 includes a screen mesh portion 26 having a thickness t1 and an emulsion portion 27 having a thickness t1 + t2 in which the center 20 is opened at a position corresponding to the filled portion 22. Composed. 2A, the screen mesh portion 26 and the emulsion portion 27 are flush with each other (on the upper side in FIG. 2A) and on the other side (the lower side in FIG. 2A). The emulsion portion 27 is configured to protrude from the screen mesh portion 26 by a thickness t2. Hereinafter, in the screen plate 21, one side (upper side in FIG. 2A) is referred to as a mesh side, and the other side (lower side in FIG. 2A) is referred to as an emulsion side.

"Filling machine 3"
Although the said filling machine 3 will not be specifically limited if the powder filling member 2 is filled with the powder 10, For example, as shown in FIG. 3, it has the hopper 31, the rubbing body 32, and the pressing board 33. As shown in FIG. The hopper 31 supplies the powder 10 to the filling portion 22 of the screen plate 21 while moving. The hopper 31 may supply the powder 10 to the filling portion 22 by a direct method in which the powder 10 is dropped from the hopper 31 onto the filling portion 22. The powder 10 is dropped from the hopper 31 onto the covering portion 23. Alternatively, an indirect method of moving to the filling portion 22 by the rubbing body 32 may be used. The rubbing body 32 is an elastic body that fills the filling portion 22 with the powder 10 by rubbing, and is made of polyurethane sponge, rubber, squeegee, brush, or the like. The pressing plate 33 seals the filling portion 22 from below when the powder 10 is supplied and rubbed, and reliably holds the filling portion 22 when filling the filling portion 22 with the powder 10. . In other words, the pressing plate 33 prevents the powder 10 filled in the filled portion 22 from dropping downward from the filled portion 22. The hopper 31, the rubbing body 32, and the presser plate 33 are not essential components of the filling machine 3. For example, even without the hopper 31, the powder 10 may be directly supplied from the container or bag containing the powder 10 to the filling portion 22. Even if the rubbing body 32 is not provided, the filling portion 22 may be filled with the powder 10 by the vibration of the screen plate 21 by a vibration tool (not shown). Further, even without the presser plate 33, the powder 10 is sufficiently held in the filled portion 22 depending on the density of the screen mesh in the filled portion 22 and the properties of the powder 10. Of course, the film thickness accuracy is better when the filling machine 3 has these. Instead of the rubbing body 32, as shown in FIG. 4, a pushing body 38 that can cover the filling portion 22 may be employed. The pushing body 38 is an elastic body that fills the filling portion 22 with the powder 10 by pushing. In order to improve the film thickness accuracy, as shown in FIGS. 3 and 4, in the screen plate 21, when the powder 10 is filled in the filling portion 22, the emulsion side should be kept up. Is preferred. Of course, in the screen plate 21, when the powder 10 is filled in the portion to be filled 22, the emulsion side may be faced down.

"Film deposition machine 4"
The film forming machine 4 is not particularly limited as long as it forms the powder film 11 on the substrate 12 by the movement of the powder 10 filled in the powder filling member 2. For example, as shown in FIG. Electrostatic screen printing using electric power is employed. The film forming machine 4 that employs electrostatic screen printing includes a rubbing body 42 that drops (is an example of movement) the powder 10 filled in the filling portion 22 from the filling portion 22 by pressure, and a screen. A DC power supply 44 for applying a voltage to the plate 21 and the substrate 12, a mounting table 43 for mounting the substrate 12, and an electric circuit 45 capable of flowing a current from the DC power supply 44 to the screen plate 21 and the mounting table 43. . The electric circuit 45 includes a ground 46 and a switch 47. Instead of the rubbing body 42, as shown in FIG. 6, a pushing body 48 that can cover the filling portion 22 may be employed. The pressing body 48 does not pressurize the powder 10 by rubbing like the rubbing body 42 but pressurizes the powder 10 by pressing. As the film forming machine 4, in addition to such electrostatic screen printing, the powder 10 is removed from the filling portion 22 only by pressing the rubbing body 42 or by vibration of the screen plate 21 by a vibration tool (not shown). Printing that drops onto the substrate 12 may be employed. The rubbing body 42 (or the pressing body 48) and the vibration tool in the film forming machine 4 may also serve as the rubbing body 32 (or the pressing body 38) and the vibration tool in the filling machine 3. Since the configuration of the film forming machine 4 employing the electrostatic screen printing described above, the rubbing body 42, and / or the vibration tool promotes the fall of the powder 10 onto the substrate 12, it is also called a fall promotion tool. I can say that. In order to improve the film thickness accuracy, when the powder film 11 is formed on the substrate 12 by dropping the powder 10 filled in the filling portion 22 in the screen plate 21, as shown in FIG. In addition, it is preferable to have the emulsion side down. Of course, when the powder film 11 is formed on the substrate 12 by dropping the powder 10 filled in the filled portion 22, the emulsion side may be turned up.

"Cleaning machine 5"
The cleaning machine 5 is not particularly limited as long as it cleans the powder filling member 2 to which the powder 10 has been moved by the film forming machine 4, but for example, a suction tool 51 as shown in FIG. It has a slightly adhesive tape 52 as shown in 7B. Although not shown, the cleaner 5 may include a blower that blows the powder filling member 2 (specifically, the portion to be filled 22) downward from above and a suction tool that sucks from below. The suction tool 51 and the slightly adhesive tape 52 both remove the remaining powder 10 without moving completely from the powder filling member 2 (specifically, the portion to be filled 22). It can also be said.

  After the powder 10 has fallen from the filling portion 22 by the film forming machine 4, the powder 10 tends to remain in the filling portion 22 on the opposite side of the direction in which the powder 10 has dropped, that is, in FIG. In the example, it is the upper part (near the mesh side). For this reason, if the said cleaner 5 cleans mainly the vicinity by the side of the mesh in the to-be-filled part 22, it is efficient. For example, in the example of FIGS. 7A and 7B, the suction tool 51 or the slightly adhesive tape 52 is efficient as long as the suction tool 51 or the slightly adhesive tape 52 is sucked or pasted from above the portion to be filled 22 (mesh side). Of course, if the suction tool 51 or the slightly adhesive tape 52 is configured to suck or stick from both the upper side (mesh side) and the lower side (emulsion side) of the filled portion 22, the remaining powder 10 is more reliably secured. Since it is removed, it is preferable from the viewpoint of improving the film thickness accuracy. Furthermore, since the powder 10 may adhere to the covering portion 23 due to scattering or the like, the suction tool 51 or the fine adhesive tape 52 cleans not only the portion to be filled 22 but also the covering portion 23 to remove the powder 10. It is preferable to remove.

"Powder film formation method"
Hereinafter, an operation of the powder film forming apparatus 1, that is, a powder film forming method will be described.

  First, a filling process for filling the powder filling member 2 with the powder 10 is performed. As a specific example, as shown in FIG. 3, the screen plate 21 is disposed so that the emulsion side is on the upper side (mesh side is the lower side), and the filled portion 22 is sealed from below with a pressing plate 33. Thereafter, the powder 10 is supplied to the filling portion 22 from above the filling portion 22 by the hopper 31, and the powder 10 of the filling portion 22 is rubbed by the rubbing body 32 from above (or FIG. 4). The to-be-filled part 22 is filled with the pushing body 38 shown in FIG.

  When the filling portion 22 is filled with the powder 10 in this way, that is, when the filling portion 22 is filled with the powder 10 and is held in that state, the screen plate 21 is turned upside down.

  Next, a film forming step for forming the powder film 11 on the substrate 12 by moving the powder 10 filled in the powder filling member 2 to the substrate 12 is performed. As a specific example, as shown in FIG. 5, a DC power supply 44 is connected to the screen plate 21 and the mounting table 43 by an electric circuit 45 so that one of them is a positive electrode and the other is a negative electrode. The substrate 12 is mounted on the mounting table 43, and the positional relationship between the mounting table 43 and the screen plate 21 is adjusted so that the substrate 12 is positioned directly below the filling portion 22 in the screen plate 21. Thereafter, the switch 47 of the electric circuit 45 is turned on, and the electrostatic force obtained by applying a voltage to the screen plate 21 and the substrate 12 and the rubbing of the rubbing body 42 (or the pressing body 38 shown in FIG. 6). The powder 10 in the filled portion 22 falls on the substrate 12 due to the pressurization by pressing.

  In this way, the powder film 11 with good film thickness accuracy is formed on the substrate 12, while some powder 10 remains on the filled portion 22.

  And the cleaning process which cleans the powder filling member 2 is performed. As a specific example, as shown in FIG. 7A, the filled portion 22 is sucked by the suction tool 51 from above. Moreover, as another specific example, as shown to FIG. 7B, it peels, after sticking the slightly adhesive tape 52 to the to-be-filled part 22 from upper direction. 7A and 7B, the powder 10 remaining in the filled portion 22 is removed.

  Thus, according to the powder film forming apparatus 1 and the powder film forming method, in order to form the powder film 11 from the powder 10 to the substrate 12, the powder 10 is once filled in the powder filling member 2. Then, by moving to the substrate 12, the film thickness accuracy of the formed powder film 11 can be improved. Furthermore, since the powder 10 remaining on the powder filling member 2 is removed by the cleaning machine 5, even if it is repeatedly used, the film thickness accuracy can be stably improved.

[Examples 1 to 6 and Comparative Example]
Hereinafter, the powder film forming apparatus 1 and the powder film forming method according to Examples 1 to 6 of the present invention, and comparative examples thereof will be described. A rough difference between these Examples 1 to 6 and the comparative example is that Examples 1 to 6 have the filling machine 3 and the filling process, whereas the comparative example has no filling machine 3 and the filling process. . The test conditions and evaluation results in Examples 1 to 6 and Comparative Example are as shown in Table 1 below.

粉体１０として、実施例１〜６よび比較例では、いずれも粒径（Ｄ５０）が４μｍの略球形をした乾燥粉体を採用した。

As the powder 10, in Examples 1 to 6 and the comparative example, a dry powder having a substantially spherical shape with a particle diameter (D50) of 4 μm was adopted.

  As the powder filling member 2, in Examples 1, 2, 4 to 6 and the comparative example, a screen plate 21 for screen printing was adopted. In this screen plate 21, the screen mesh portion 26 is a stainless mesh, the mesh wire diameter is 30 μm, the thickness t1 is 60 μm, the number of meshes is 300 / inch, the opening is 55 μm, and the filled portion 22 is a square shape of 50 mm × 50 mm. The solid pattern. On the other hand, in Example 3, a metal mask produced by electroforming was employed. This metal mask has a 50 mm × 50 mm square shape and has a solid pattern filled portion 22. The filled portion 22 has a large number of holes corresponding to the number of meshes of 300 / inch. In this metal mask, the thickness of the metal portion other than the portion to be filled 22 was 60 μm. By the way, as shown in Table 1, there are examples in which the thickness of the emulsion part 27 protruding from the screen mesh part 26 is different in Examples 1 to 6, but this is intended to change the volume in the filled part 22. .

  As the rubbing bodies 32 and 42 of the filling machine 3 and the film forming machine 4, as shown in Table 1, polyurethane sponges were adopted in Examples 1 to 3, and urethane squeegees were adopted in Examples 4 and 6. . In the comparative example, polyurethane sponges were used as the rubbing bodies 32 and 42 included in the film forming machine 4.

  As the presser plate 33 included in the filling machine 3, in Examples 1 to 5, a 70 mm × 70 mm square shape, a thickness of 300 μm, and a flatness of 50 μm or less were used. In Example 6, in the stainless steel plate in Examples 1 to 5, the thickness is 300 μm in the central region (40 mm × 40 mm), and the slope gradually decreases from the central region outward ( A slightly inclined stainless steel plate having an inclination of 6.7 μm / mm was employed.

  As the substrate 12 on which the powder film 11 is formed, the same stainless steel plate as in Examples 1 to 5 was employed in Examples 1 to 6 and Comparative Example.

  As the film forming machine 4, in Example 1, a method using only pressurization of the rubbing body 42 instead of electrostatic screen printing is adopted. In Examples 2 to 6 and the comparative example, the electric field strength is 1 kV / mm. Electrostatic screen printing was adopted.

  In Examples 1 to 6 and the comparative example, an arbitrary device that completely removes the powder 10 from the screen plate 21 and the filling portion 22 of the metal mask was adopted as the cleaning device 5. For this reason, the screen plate 21 and the metal mask employed in Examples 1 to 6 and the comparative example have the same functions as those of a new one even if they are already used.

  Then, using the screen plate 21 or the metal mask cleaned by the cleaning process, according to each test condition of Table 1, the substrate 12 is subjected to the filling process and the film forming process in Examples 1 to 6 and the film forming process in the comparative example. A powder film 11 was formed.

  In Examples 1 to 4 and 6, the powder film 11 composed of three layers was formed by performing film formation three times. On the other hand, in Example 5, the powder film 11 consisting of five layers was formed by performing film formation five times. Here, in Examples 1-6, the weight of the single layer which comprises these powder films | membranes 11 was computed by the weight difference of the stainless steel plate measured before and after forming the said single layer. In the comparative example, since the powder film 11 is composed of one layer, in other words, the powder film 11 is a single layer, the weight of the single layer was not measured.

  The in-plane thickness distribution in the powder film 11 in Examples 1 to 6 and the comparative example was confirmed by visual observation while irradiating the powder film 11 from the lateral direction.

In order to quantitatively confirm the variation in the in-plane thickness of the powder film 11 in Examples 1 to 6 and the comparative example, the powder film 11 is 10 ton / cm ² (9.8 × 10 ² MPa). Pressurization was performed for 30 seconds, and the four corners and the center of the pressed powder film 11 were punched with a hand punch having a diameter of 10 mm, and the weights of the punched four corners and the center were measured. An average value was calculated from the weights of these four corners and the central portion, and the range of variation based on the average value was calculated as a percentage (%) as shown in Table 1.

  Next, after describing a comparative example about the specific evaluation result of Table 1, Examples 1-6 are demonstrated.

[Comparative example]
In the comparative example, there is no filling step, that is, the film is formed without the powder 10 being held on the screen plate 21, so the film thickness accuracy of the powder film 11 was not good. Specifically, as shown in Table 1, in the powder film 11, the distribution of the in-plane thickness by visual observation was confirmed, and the variation in the in-plane thickness was 30.7%, which is compared with Examples 1-5. The value was extremely large.

  In Example 1, since it had a filling process, the film thickness accuracy of the powder film 11 was good. Specifically, as shown in Table 1, in the powder film 11, the in-plane thickness distribution was not confirmed visually, and the variation in the in-plane thickness was 9.4%, which is about 1/3% in the comparative example. Reduced to 3.

  In Example 2, electrostatic screen printing with an electric field strength of 1 kV / mm in Example 1 was employed. For this reason, the film thickness accuracy of the powder film 11 was better than that of Example 1. Specifically, as shown in Table 1, in the powder film 11, no in-plane thickness distribution was observed, and the in-plane thickness variation was further reduced to 6.7%.

  In Example 3, a metal mask was used instead of the screen plate 21 in Example 2. In the metal mask, since the filled portion 22 has a smaller capacity than the filled portion 22 of the screen plate 21, the weight of the single layer is reduced compared to the first and second embodiments. However, also in Example 3, as in Examples 1 and 2, in the powder film 11, the distribution of the in-plane thickness by visual observation was not confirmed, and the variation in the in-plane thickness was a preferable value of 10% or less. It was. As a result, it was confirmed that a metal mask can be adopted as the powder filling member 2 in addition to the screen plate 21.

  In Example 4, the squeegee (urethane) was used as the rubbing bodies 32 and 42 instead of the sponge (polyurethane) as in Examples 1 to 3. Also in Example 4, as in Examples 1 to 3, in the powder film 11, the in-plane thickness distribution was not confirmed visually, and the variation in the in-plane thickness was a preferable value of 10% or less. As a result, it was confirmed that as the rubbing bodies 32 and 42, various kinds of rubbing bodies other than the sponge can be adopted.

  In Example 5, the thickness t2 of the emulsion part 27 protruding from the screen mesh part 26 in Example 4 was set to 10 μm instead of 50 μm. As a result, the volume that can be filled with the powder 10 in the filled portion 22 is reduced, so that the weight of the single layer is reduced as compared with Example 4. As a result, it was confirmed that the film formation amount can be controlled by the volume of the filled portion 22. The film thickness accuracy of the powder film 11 was better than that of Example 4. Specifically, the in-plane thickness variation was lower than in Example 4.

  In Example 6, thickness distribution was provided in the holding plate 33 in Example 4. Specifically, as the presser plate 33, a uniform stainless steel plate having a thickness of 300 μm was employed in Example 4, but an inclined stainless steel plate having a thickness increased in the central region was employed in Example 6. Thereby, as shown in Table 1, in-plane thickness distribution was confirmed in the powder film 11, and the variation in the in-plane thickness was larger than that in Examples 1 to 5. As a result, it was confirmed that the in-plane thickness of the powder film 11 to be formed can be arbitrarily controlled by the presser plate 33.

[Embodiment 2]
A powder film forming apparatus 100 and a powder film forming method according to Embodiment 2 of the present invention are an apparatus and a method for continuously forming a powder film 11 on a substrate 12.

  In the following, the description will be focused on the parts different from the first embodiment, and the same components as those in the first embodiment will be denoted by the same reference numerals and the description thereof will be omitted.

"Powder deposition system 100"
As shown in FIG. 8, in the powder film forming apparatus 100 according to Embodiment 2 of the present invention, the number of powder filling members 2 is three (if there is a plurality). The filling machine 3, the film forming machine 4 and the cleaning machine 5 of the powder film forming apparatus 100 are arranged so as to perform a filling process, a film forming process and a cleaning process on different powder filling members 2, respectively. . The powder film forming apparatus 100 further includes a first transporter 61, a second transporter 62, and a third transporter 63 that transport the powder filling member 2. That is, the 1st conveyance machine 61, the 2nd conveyance machine 62, and the 3rd conveyance machine 63 perform the conveyance process which conveys the powder filling member 2. FIG. The first transporting device 61 transports the powder filling member 2 at the position of the filling machine 3 to the position of the film forming machine 4. The second transport device 62 transports another powder filling member 2 located at the position of the film forming device 4 to the position of the cleaning device 5. The third conveyor 63 conveys still another powder filling member 2 located at the cleaning machine 5 to the position of the filling machine 3.

  The powder film forming apparatus 100 includes a filling holder 73 that holds the powder filling member 2 in which the filling process is performed, and a film forming device that holds the powder filling member 2 in which the film forming process is performed. A holder and a cleaning holder 75 for holding the powder filling member 2 on which the cleaning process is performed are provided. In the filling process, it is preferable that the emulsion side is on the upper side, and in the film forming process and the cleaning process, the mesh side is preferably on the upper side. Inversion tools 83 and 85 are provided. These two reversing tools 83 and 85 are a reversing tool 83 after filling provided between the position of the filling machine 3 and the first transporter 61, and between the position of the cleaning machine 5 and the third transporter 63. This is a post-cleaning reversing tool 85 provided in the. Here, the filling holder 73 scoops up the powder filling member 2 from the third transfer device 63 and moves the powder filling member 2 to the position of the filling machine 3. The post-filling reversing tool 83 is for reversing and moving the powder filling member 2 from the position of the filling machine 3 to the first conveying machine 61. Although not shown, the film-forming holder scoops up the powder filling member 2 from the first transport device 61 and moves the powder filling member 2 to the position of the film-forming device 4. The powder filling member 2 is moved to the transport device 62. The cleaning holder 75 scoops up the powder filling member 2 from the second transport device 62 and moves the powder filling member 2 to the position of the cleaning device 5. The post-cleaning reversing tool 85 reverses and moves the powder filling member 2 from the position of the cleaning machine 5 to the third transporter 63. Of course, the positions where the post-filling reversing tool 83 and the post-cleaning reversing tool 85 are provided are not limited to those shown in FIG. 8, and may be changed as needed.

  The first transporter 61, the second transporter 62, and the third transporter 63 each have, for example, an endless belt and a transport destination roller and a transport source roller that are stretched over the endless belt. The filling holder 73, the film forming holder, and the cleaning holder 75 include, for example, a fork 77 that scoops up the powder filling member 2, and a drive mechanism 78 that can move the fork 77 up and down and rotate around the vertical axis V. Respectively. The reversing tools 83 and 85 have, for example, a gripping body that holds the powder filling member 2 from the mesh side and the emulsion side, and a rotation mechanism that can rotate the gripping body about the horizontal axis H, respectively.

  The powder film forming apparatus 100 includes a substrate carry-in machine 92 for continuously carrying the substrate 12 before the powder film 11 is formed into the position of the film forming machine 4, and the powder film 11 after the powder film 11 is formed. And a substrate unloader 93 that continuously unloads the substrate 12 from the position of the film forming apparatus 4.

  The rubbing body 32 included in the filling machine 3, the rubbing body 42 included in the film forming machine 4, and the suction tool 51 included in the cleaning machine 5 are all automatically moved along the guide rails 39, 49, and 59. May be configured.

"Powder film formation method"
Hereinafter, an operation of the powder film forming apparatus 100, that is, a powder film forming method will be described.

  As shown in FIG. 8, at the position of the filling machine 3, a filling process for filling the powder filling member 2, which has been scooped up by the filling holder 73 from the third transport machine 63, is performed continuously. . The powder filling member 2 that has been subjected to the filling process is continuously turned upside down by the turner 83 after the filling and is transported by the first transporting device 61.

  On the other hand, at the position of the film forming machine 4, the film forming process is continuously performed on the powder filling member 2 scooped up from the first transfer device 61 by the film forming holder. The powder filling member 2 subjected to the film forming process is continuously transported by the second transporter 62. In addition, the substrate 12 is continuously carried in and out by the substrate carry-in machine 92 and the substrate carry-out machine 93 below the powder filling member 2 at the position of the film forming machine 4.

  On the other hand, at the position of the cleaning machine 5, a cleaning process for continuously cleaning the powder filling member 2 scooped up by the cleaning holder 75 from the second transport machine 62 is performed. The powder filling member 2 that has been subjected to the cleaning process is continuously reversed up and down by the reversing tool 85 after the cleaning and is transported by the third transporter 63.

  As described above, according to the powder film forming apparatus 100 and the powder film forming method, since the powder film 11 is continuously formed on the substrate 12 supplied to the position of the cleaning machine 5, the embodiment is described. In addition to the effect 1, the substrate 12 on which the powder film 11 is formed can be manufactured in a short time.

  By the way, in the first and second embodiments, the positional relationship between the powder filling member 2 and the film forming machine 4 has been described on the assumption that the mounting table 43 is positioned under the powder filling member 2, but the present invention is not limited to this. It is not a thing. For example, the powder filling member 2 and the film forming machine 4 according to the first and second embodiments are set in a rollover posture, and the powder 10 filled in the powder filling member 2 is moved to the substrate 12 instead of falling. Thus, the powder film 11 may be formed on the substrate 12. Needless to say, the powder filling member 2 and the film forming machine 4 are not limited to the rolled-up posture, but may be tilted and the powder 10 may be moved obliquely to the substrate 12.

  In the second embodiment, the first transport device 61, the second transport device 62, and the third transport device 63 are described as different devices. However, these 61 to 63 may be integrated. For example, as a device in which a first transporter 61, a second transporter 62, and a third transporter 63 are integrated, there is a rotary transporter 60 shown in FIG. The rotary conveyor 60 includes a rotary shaft 65 along the vertical axis V, a motor 64 for driving the rotary shaft 65, a housing 66 provided on the rotary shaft 65, and a horizontal axis H extending from the housing 66. And a plurality of (three as an example in FIG. 9) rotating arms 67. Each rotating arm 67 includes a gripping arm body 68 that grips the powder filling member 2 and a reversing motor 69 that can rotate the gripping arm body 68 about the horizontal axis H. Therefore, the rotary transfer machine 60 has the functions of the first transfer machine 61, the second transfer machine 62, and the third transfer machine 63 shown in FIG. 8, and also has the functions of the reversing tools 83 and 85 shown in FIG. Although not shown in FIG. 9, the position 30 where the filling process is performed, the position 40 where the film forming process is performed, and the position 50 where the cleaning process is performed are not shown, but the filling machine 3, the film forming machine 4 and the cleaning machine. 5 is provided. In FIG. 9, the same components as those in FIG. 8 are denoted by the same reference numerals, and the description thereof is omitted. As described above, the powder film forming apparatus 100 according to the second embodiment includes the rotary conveyance device 60 shown in FIG. Since the reversing tools 83 and 85 are also incorporated into the rotary conveyance device 60 as well as being incorporated into the rotary conveyance device 60, a simple configuration can be achieved.

  Further, although the timing of the filling process, the film forming process, and the cleaning process has not been described in the second embodiment, it is preferable that the filling process, the film forming process, and the cleaning process are performed simultaneously. Thereby, the substrate 12 on which the powder film 11 is formed can be manufactured in a shorter time.

  In addition, in the first embodiment, as the filling machine 3 and the film forming machine 4, the pushing bodies 38 and 48 described as being usable instead of the rubbing bodies 32 and 42 are provided on the powder filling member 2. It does not slide against. That is, the pressing bodies 38 and 48 do not rub the powder 10 by sliding against the powder filling member 2 like the rubbing bodies 32 and 42 but press against the powder filling member 2. Thus, the powder 10 is pushed in.

  The first and second embodiments are illustrative in all respects and are not restrictive. The scope of the present invention is defined by the terms of the claims, rather than the description above, and is intended to include any modifications within the scope and meaning equivalent to the terms of the claims. Of the configurations described in the first and second embodiments, the configurations other than those described as the first or sixth invention in “Means for Solving the Problems” are arbitrary configurations, and are appropriately deleted and changed. It is possible.

DESCRIPTION OF SYMBOLS 1 Powder film-forming apparatus 2 Powder filling member 3 Filling machine 4 Film-forming machine 5 Cleaning machine 10 Powder 11 Powder film 12 Substrate 21 Screen plate 22 Filled part 23 Covering part 31 Hopper 32 Scraping body 33 Press plate 38 Push body 42 Rub body 43 Mounting table 44 DC power supply 45 Electric circuit 48 Push body 51 Suction tool 52 Slight adhesive tape 61 First transport device 62 Second transport device 63 Third transport device

Claims (7)

A porous powder filling member filled with powder;
A filling machine for filling the powder filling member with powder;
A film forming machine that forms powder film formed on the substrate by moving the powder filled in the powder filling member to the substrate by the filling machine;
A powder film forming apparatus, comprising: a cleaning machine that cleans a powder filling member to which powder has been moved by the film forming machine. There are multiple powder filling members,
A first transfer machine for transferring the powder filling member at the position of the filling machine to the position of the film forming machine;
A second transfer machine for transferring the powder filling member at the position of the film forming machine to the position of the cleaning machine;
The powder film forming apparatus according to claim 1, further comprising a third transporter that transports the powder filling member at the position of the cleaning machine to the position of the filling machine.   3. The powder film forming apparatus according to claim 1, wherein the filling machine has a pressing plate that does not drop the powder supplied from above into the powder filling member from the powder filling member. 4.   4. The film forming apparatus includes a drop promoting tool that drops powder filled in a powder filling member onto a substrate by vibration, rubbing, pushing, and / or electrostatic force. The powder film-forming apparatus as described in any one of these.   The cleaning device has a powder removing tool for removing powder remaining from the powder filling member without moving from the powder filling member to the substrate. The powder film-forming apparatus of description. A filling step of filling powder into a porous powder filling member filled with powder;
A film forming step in which the powder filled in the powder filling member by the filling step is moved to the substrate to form a powder film formed on the substrate;
And a cleaning step of cleaning the powder filling member to which the powder has been moved by the film forming step. There are multiple powder filling members,
The powder filling member in the filling process is transported to the position where the film forming process is performed, the other powder filling member in the film forming process is transported to the position where the cleaning process is performed, and further powder in the cleaning process The powder film forming method according to claim 6, further comprising a conveying step of conveying the body filling member to a position where the filling step is performed.

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