JP7398521B2 - Powder film forming equipment - Google Patents

Description

The present invention relates to a powder film forming apparatus and a powder film forming method.

Electrostatic screen printing, in which a powder film is formed by rubbing powder onto a screen with a rubbing body, is known as a conventional technique (for example, see Patent Document 1). The electrostatic film forming apparatus of Patent Document 1 that employs electrostatic screen printing includes a hopper that supplies powder to a screen, and a rubbing body (screen brush) that rubs powder onto the screen. The electrostatic film forming apparatus aims to improve the precision of the powder film formed by allowing the hopper and the rubbing body to operate independently of each other.

Japanese Patent Application Publication No. 2012-179786

However, in the electrostatic film forming apparatus described in Patent Document 1, the powder film formed on the substrate based on the powder rubbed on the screen by the rubbing body is the same as the powder supplied to the screen. The thickness will be uneven due to the dispersion state and the locus of movement of the rubbing body. In other words, the powder film formed by the electrostatic film forming apparatus has insufficient film thickness accuracy.

Furthermore, in the electrostatic film forming apparatus described in Patent Document 1, although the cleaning member of the screen brush prevents the accumulation of unnecessary powder, unnecessary powder remains in the mesh portion of the screen. When used repeatedly, there is a possibility that the thickness accuracy of the formed powder film becomes even more insufficient due to the adverse effects of the remaining powder.

SUMMARY OF THE INVENTION Therefore, an object of the present invention is to provide a powder film forming apparatus and a powder film forming method that can improve the film thickness accuracy of the powder film to be formed.

In order to solve the above problem, a powder film forming apparatus according to a first invention includes a porous powder filling member filled with powder;
a filling machine that fills the powder filling member with powder;
a film forming machine that moves the powder filled into the powder filling member by the filling machine to a substrate to form a powder film on the substrate;
a cleaning machine that cleans the powder filling member into which the powder has been moved by the film forming machine;
a first conveyance machine that conveys the powder filling member at the position of the filling machine to the position of the film forming machine;
a second conveyance machine that conveys the powder filling member at the position of the film forming machine to the position of the cleaning machine;
further comprising a third conveyance machine that conveys the powder filling member at the cleaning machine position to the filling machine position ,
The first conveying machine, the second conveying machine, and the third conveying machine are different devices or integrated devices .

Further, in the powder film forming apparatus according to the second invention, the powder filling member of the powder film forming apparatus according to the first invention is singular .

Further, in the powder film forming apparatus according to the third invention, the first conveying machine, the second conveying machine, and the third conveying machine of the powder film forming apparatus according to the first or second invention are integrated. equipment,
The integrated device has a rotating arm that grips the powder filling member .

According to the powder film forming apparatus and powder film forming method, in order to form a powder film from powder to a substrate, the powder is once filled in a powder filling member and then moved to the substrate. The thickness accuracy of the formed powder film can be improved. Furthermore, since the powder remaining in the powder filling member is removed by the cleaning machine, the film thickness accuracy can be stably maintained even after repeated use.

1 is a cross-sectional perspective view schematically showing a powder film forming apparatus according to Embodiment 1 of the present invention. FIG. 2 is a partially cutaway perspective view of a screen plate included in the powder film forming apparatus. It is an exploded perspective view showing a screen mesh part and an emulsion part which the same screen plate has. FIG. 2 is a cross-sectional perspective view for explaining a filling machine included in the powder film forming apparatus. It is a sectional perspective view at the time of employ|adopting a pushing body instead of a rubbing body as the same filling machine. FIG. 2 is a cross-sectional perspective view for explaining a film forming machine included in the powder film forming apparatus. FIG. 2 is a cross-sectional perspective view of the same film forming machine in which a pushing body is used instead of a rubbing body. FIG. 2 is a cross-sectional perspective view for explaining a suction tool that is a specific example of a cleaning machine included in the powder film forming apparatus. It is a cross-sectional perspective view for explaining the slightly adhesive tape which is a specific example of the same cleaning machine. FIG. 2 is a perspective view schematically showing a powder film forming apparatus according to Embodiment 2 of the present invention. It is a perspective view which shows schematically another example of the rotary conveyance machine which conveys the powder filling member in the same powder film-forming apparatus.

[Embodiment 1]
Hereinafter, a powder film forming apparatus and a powder film forming method according to Embodiment 1 of the present invention will be described based on the drawings.

First, the outline of the powder film forming apparatus will be explained based on FIG. 1.

"Powder film forming device 1"
As shown in FIG. 1, this powder film forming apparatus 1 is an apparatus that uniformly forms a powder film 11 from powder 10 on a substrate 12, and even if it is used repeatedly, It is also possible to improve the film thickness accuracy of the film 11. The powder film forming apparatus 1 includes a porous powder filling member 2 filled with powder 10 and a filling machine 3 filling this powder filling member 2 with powder 10. Here, "filling" means filling a vacant space to close it up and holding it in that state. The powder film forming apparatus 1 further includes a film forming apparatus for forming a powder film 11 on the substrate 12 by moving the powder 10 filled into the powder filling member 2 by the filling machine 3 to the substrate 12. A membrane machine 4 is provided. When forming the powder film 11 from the powder 10 on the substrate 12, the powder film 11 is formed by first filling the powder filling member 2 with the powder 10 and then moving it to the substrate 12. Thickness accuracy improves. The powder film forming apparatus 1 further includes a cleaning machine 5 that cleans the powder filling member 2 into which the powder 10 has been moved by the film forming machine 4. Even if the powder 10 is moved from the powder filling member 2 to the substrate 12, some powder 10 remains in the powder filling member 2. By removing this residual powder 10 with the cleaning machine 5, even if the powder film 11 is formed on the substrate 12 again using the same powder filling member 2, the film thickness accuracy of the powder film 11 is also good. become.

Next, each of the powder filling member 2, the filling machine 3, the film forming machine 4, and the cleaning machine 5 included in the powder film forming apparatus 1 will be specifically explained based on the drawings.

"Powder filling member 2"
The powder filling member 2 is not particularly limited as long as it is a porous type that can be filled with the powder 10, but for example, as shown in FIG. 2A, it is a screen plate 21. This screen plate 21 has a filled part 22 that can hold and allow the powder 10 to pass therethrough, and a covering part 23 that holds and does not allow the powder 10 to pass around the outer periphery of this filled part 22. The filled portion 22 is made of a screen mesh, and the covered portion 23 is a portion where an emulsion is injected into the screen mesh and dried. In other words, as shown in FIG. 2B, the screen plate 21 is made up of a screen mesh part 26 with a gauze thickness t1 and an emulsion part 27 with a thickness t1+t2 whose center 20 is open at a position corresponding to the filled part 22. configured. As shown in FIG. 2A, the screen plate 21 has the screen mesh portion 26 and the emulsion portion 27 flush with each other on one side (the upper side in FIG. 2A), and the screen mesh portion 26 and the emulsion portion 27 on the other side (the lower side in FIG. 2A). The emulsion portion 27 is configured to protrude beyond the screen mesh portion 26 by a thickness t2. Hereinafter, in the screen plate 21, one side (the upper side in FIG. 2A) will be referred to as the mesh side, and the other side (the lower side in FIG. 2A) will be referred to as the emulsion side.

"Filling machine 3"
The filling machine 3 is not particularly limited as long as it fills the powder filling member 2 with the powder 10, but as shown in FIG. 3, for example, it has a hopper 31, a rubbing body 32, and a press plate 33. This hopper 31 supplies the powder 10 to the filled portion 22 of the screen plate 21 while moving. The powder 10 may be supplied to the filling section 22 by the hopper 31 by a direct method of dropping the powder 10 from the hopper 31 onto the filling section 22, or by dropping the powder 10 from the hopper 31 onto the covering section 23. An indirect method may also be used in which the rubbing member 32 is used to move the filling material to the portion to be filled 22 after the rubbing body 32 is used. The rubbing body 32 is an elastic body that fills the filled portion 22 with the powder 10 by rubbing, and is made of a polyurethane sponge, rubber, a squeegee, a brush, or the like. The presser plate 33 seals the part 22 to be filled from below when supplying and rubbing the powder 10, and securely holds the part 22 to be filled with the powder 10 when filling the part 22 to be filled. . In other words, the presser plate 33 prevents the powder 10 filled in the portion to be filled 22 from falling downward from the portion to be filled 22 . These hopper 31, rubbing body 32, and presser plate 33 are not essential components of the filling machine 3. For example, even without the hopper 31, the powder 10 may be directly supplied to the filled portion 22 from a container or bag containing the powder 10. Furthermore, even without the rubbing body 32, the part to be filled 22 may be filled with the powder 10 by vibrating the screen plate 21 using a vibrating tool (not shown). Furthermore, even without the press plate 33, the powder 10 can be sufficiently held in the filled part 22 depending on the density of the screen mesh in the filled part 22 and the properties of the powder 10. Of course, if the filling machine 3 has these, the film thickness accuracy will be better. Instead of the rubbing body 32, as shown in FIG. 4, a pushing body 38 that can cover the portion to be filled 22 may be employed. The pushing body 38 is an elastic body that fills the filled portion 22 with the powder 10 by pushing. In addition, in order to improve the film thickness accuracy, as shown in FIGS. 3 and 4, when filling the powder 10 into the filling portion 22 of the screen plate 21, the emulsion side should be turned upward. is preferred. Of course, in the screen plate 21, when filling the filling portion 22 with the powder 10, the emulsion side may be placed downward.

"Film forming machine 4"
The film forming machine 4 is not particularly limited as long as it forms a powder film 11 on the substrate 12 by moving the powder 10 filled in the powder filling member 2, but for example, as shown in FIG. Electrostatic screen printing, which uses electricity, is used. The film forming machine 4 employing electrostatic screen printing includes a rubbing body 42 that causes the powder 10 filled in the filled portion 22 to fall from the filled portion 22 by pressure (this is an example of movement), and a screen. It has a DC power supply 44 that applies voltage to the screen plate 21 and the substrate 12, a mounting table 43 on which the substrate 12 is placed, and an electric circuit 45 that can flow current from the DC power supply 44 to the screen plate 21 and the mounting table 43. . This electrical circuit 45 includes a ground 46 and a switch 47. Instead of the rubbing body 42, as shown in FIG. 6, a pushing body 48 that can cover the portion to be filled 22 may be employed. The pushing body 48 does not press the powder 10 by rubbing as the rubbing body 42 does, but presses the powder 10 by pushing. In addition to such electrostatic screen printing, the film forming machine 4 can remove the powder 10 from the filled portion 22 by applying pressure only with the rubbing body 42 or by vibrating the screen plate 21 using a vibrating tool (not shown). Printing that is dropped onto the substrate 12 may be employed. The rubbing body 42 (or pushing body 48) and the vibrating tool in the film forming machine 4 may also serve as the rubbing body 32 (or pushing body 38) and the vibrating tool in the filling machine 3. The configuration of the film forming machine 4 employing the electrostatic screen printing described above, the rubbing body 42, and/or the vibrating tool promote the falling of the powder 10 onto the substrate 12, so they can also be referred to as falling promoting tools. I can say it. In addition, in order to improve the film thickness accuracy, in the screen plate 21, as shown in FIG. It is preferable to keep the emulsion side down. Of course, when forming the powder film 11 on the substrate 12 by dropping the powder 10 filled into the filled portion 22, the emulsion side may be turned upward.

"Cleaning machine 5"
The cleaning machine 5 is not particularly limited as long as it cleans the powder filling member 2 into which the powder 10 has been moved by the film forming machine 4, but for example, a suction tool 51 as shown in FIG. It has a slightly adhesive tape 52 as shown in 7B. Although not shown, the cleaner 5 may include a blower that blows air from above to the bottom of the powder filling member 2 (specifically, the portion to be filled 22) and a suction tool that sucks air from below. Note that both the suction tool 51 and the slightly adhesive tape 52 remove the remaining powder 10 that has not been completely moved from the powder filling member 2 (specifically, the part to be filled 22), so the powder removing tool is used. You can say that.

After the powder 10 falls from the filling part 22 by the film forming machine 4, the powder 10 tends to remain in the filling part 22 on the opposite side to the direction in which the powder 10 fell, that is, as shown in FIG. For example, it is the upper part (near the mesh side). Therefore, the cleaning machine 5 is efficient if it mainly cleans the vicinity of the mesh side of the portion 22 to be filled. For example, in the example of FIGS. 7A and 7B, the suction tool 51 or the slightly adhesive tape 52 is efficient if it is suctioned or attached from above (mesh side) of the portion to be filled 22. Of course, if the suction tool 51 or the slightly adhesive tape 52 is configured to be suctioned or attached from both the upper side (mesh side) and the lower side (emulsion side) of the part to be filled 22, the remaining powder 10 can be removed more reliably. Since it is removed, it is preferable from the viewpoint of improving the film thickness accuracy. Furthermore, since the powder 10 may also adhere to the covering part 23 due to scattering, etc., the suction tool 51 or the slightly adhesive tape 52 cleans not only the part to be filled 22 but also the covering part 23 to remove the powder 10. It is preferable that it be removed.

"Powder film formation method"
Hereinafter, the operation of the powder film forming apparatus 1, that is, the powder film forming method will be explained.

First, a filling step of filling the powder filling member 2 with the powder 10 is performed. As a specific example, as shown in FIG. 3, the screen plate 21 is arranged so that the emulsion side is on the upper side (the mesh side is on the lower side), and the filled part 22 is sealed from below with a presser plate 33. After that, the powder 10 is supplied to the filled part 22 from above by the hopper 31, and the powder 10 in the filled part 22 is rubbed from above with the rubbing body 32 (or The part to be filled 22 is filled by pushing with the pushing body 38 shown in FIG.

When the part to be filled 22 is filled with the powder 10 in this manner, that is, the part to be filled 22 is clogged with the powder 10 and held in that state, the screen plate 21 is turned upside down.

Next, a film forming step is performed in which the powder 10 filled in the powder filling member 2 is moved to the substrate 12 to form the powder film 11 on the substrate 12. As a specific example, as shown in FIG. 5, a DC power source 44 is connected to the screen plate 21 and the mounting table 43 through an electric circuit 45 so that one of them becomes a positive electrode and the other becomes a negative electrode. The substrate 12 is placed on the mounting table 43, and the positional relationship between the mounting table 43 and the screen plate 21 is adjusted so that the substrate 12 is located directly below the portion to be filled 22 on the screen plate 21. Thereafter, the switch 47 of the electric circuit 45 is turned on and a voltage is applied to the screen plate 21 and the substrate 12 to combine the electrostatic force obtained with the rubbing of the rubbing body 42 (or the pushing body 38 shown in FIG. 6). The powder 10 in the portion to be filled 22 falls onto the substrate 12 due to the pressurization caused by pressing (pushing).

In this way, while the powder film 11 with good film thickness accuracy is formed on the substrate 12, some powder 10 remains in the filled portion 22.

Then, a cleaning process for cleaning the powder filling member 2 is performed. As a specific example, as shown in FIG. 7A, the portion to be filled 22 is suctioned from above with a suction tool 51. Further, as another specific example, as shown in FIG. 7B, a slightly adhesive tape 52 is attached to the portion to be filled 22 from above and then peeled off. In both the specific examples shown in FIGS. 7A and 7B, the powder 10 remaining in the filled portion 22 is removed.

As described above, according to the powder film forming apparatus 1 and the powder film forming method, in order to form the powder film 11 on the substrate 12 from the powder 10, the powder 10 is once filled into the powder filling member 2. By moving the powder film 11 to the substrate 12 after that, it is possible to improve the film thickness accuracy of the powder film 11 that is formed. Furthermore, since the powder 10 remaining in the powder filling member 2 is removed by the cleaner 5, the film thickness accuracy can be stably maintained even after repeated use.

[Examples 1 to 6 and comparative examples]
The powder film forming apparatus 1 and powder film forming method according to Examples 1 to 6 of the present invention, and comparative examples thereof will be described below. The general difference between these Examples 1 to 6 and the comparative example is that Examples 1 to 6 have a filling machine 3 and a filling process, whereas the comparative example does not have a filling machine 3 and a filling process. . The test conditions and evaluation results in Examples 1 to 6 and Comparative Examples are shown in Table 1 below.

粉体１０として、実施例１～６よび比較例では、いずれも粒径（Ｄ５０）が４μｍの略球形をした乾燥粉体を採用した。

As the powder 10, in Examples 1 to 6 and the comparative example, a substantially spherical dry powder with a particle size (D50) of 4 μm was used.

As the powder filling member 2, a screen plate 21 for screen printing was used in Examples 1, 2, 4 to 6, and the comparative example. In this screen plate 21, the screen mesh portion 26 is made of stainless steel mesh, the wire diameter of the mesh is 30 μm, the gauze thickness t1 is 60 μm, the number of meshes is 300/inch, the opening is 55 μm, and the filled portion 22 is a square shape of 50 mm x 50 mm. It was made into a solid pattern. On the other hand, in Example 3, a metal mask produced by electroforming was used. This metal mask had a square shape of 50 mm x 50 mm and had a structure in which the filled portion 22 had a solid pattern. This filled portion 22 is formed with a large number of holes corresponding to a mesh number of 300/inch. In this metal mask, the thickness of the metal portion other than the filled portion 22 was set to 60 μm. By the way, as shown in Table 1, there are Examples 1 to 6 in which the thickness of the emulsion part 27 protruding from the screen mesh part 26 is different, but this is for the purpose of changing the volume in the filled part 22. .

As shown in Table 1, as the rubbing bodies 32 and 42 of the filling machine 3 and the film forming machine 4, a polyurethane sponge was used in Examples 1 to 3, and a urethane squeegee was used in Examples 4 and 6. . In the comparative example, polyurethane sponges were used as the rubbing bodies 32 and 42 of the film forming machine 4.

In Examples 1 to 5, a stainless steel plate with a square shape of 70 mm x 70 mm, a thickness of 300 μm, and a flatness of 50 μm or less was used as the presser plate 33 of the filling machine 3. In Example 6, in the stainless steel plates of Examples 1 to 5, the thickness was 300 μm in the central region (40 mm x 40 mm), and the thickness gradually decreased from the central region toward the outside ( A slightly inclined stainless steel plate with an inclination of 6.7 μm/mm was used.

In Examples 1 to 6 and Comparative Example, the same stainless steel plate as in Examples 1 to 5 was used as the substrate 12 on which the powder film 11 was formed.

As the film forming machine 4, in Example 1, a method using only the pressure of the rubbing body 42 instead of electrostatic screen printing was adopted, and in Examples 2 to 6 and the comparative example, a method with an electric field strength of 1 kV/mm was adopted. Adopted electrostatic screen printing.

As the cleaning machine 5, in Examples 1 to 6 and the comparative example, an arbitrary device that completely removes the powder 10 from the screen plate 21 and the filled portion 22 of the metal mask was adopted. Therefore, even if the screen plates 21 and metal masks employed in Examples 1 to 6 and Comparative Examples have been used, they have the same functions as new ones.

Then, using the screen plate 21 or the metal mask cleaned in the cleaning process, and according to each test condition in Table 1, the substrate 12 was cleaned by the filling process and the film forming process in Examples 1 to 6, and by the film forming process in the comparative example. A powder film 11 was formed thereon.

In Examples 1 to 4 and 6, the powder film 11 consisting of three layers was formed by performing film formation three times. On the other hand, in Example 5, the powder film 11 consisting of five layers was formed by performing film formation five times. Here, in Examples 1 to 6, the weight of the single layer constituting the powder film 11 was calculated from the difference in weight of the stainless steel plate measured before and after forming the single layer. In addition, in the comparative example, since the powder film 11 consisted of one layer, in other words, the powder film 11 had a single layer, the weight of the single layer was not measured.

The in-plane thickness distribution of the powder film 11 in Examples 1 to 6 and Comparative Example was confirmed by visual observation while irradiating the powder film 11 with light from the lateral direction.

In order to quantitatively confirm the variation in the in-plane thickness of the powder film 11 in Examples 1 to 6 and the comparative example, the powder film 11 was heated at 10 ton/cm ² (9.8×10 ² MPa). Pressure was applied for 30 seconds, the four corners and the center of the pressurized powder film 11 were punched out using a hand punch with a diameter of 10 mm, and the weights of these punched corners and the center were measured. An average value was calculated from the weights of the four corners and the center, and the range of variation based on this average value was calculated in percentage (%) as shown in Table 1.

Next, regarding the specific evaluation results in Table 1, a comparative example will be explained, and then Examples 1 to 6 will be explained.

[Comparative example]
In the comparative example, there was no filling step, that is, the film was formed without the powder 10 being held on the screen plate 21, so the film thickness accuracy of the powder film 11 was not good. Specifically, as shown in Table 1, the distribution of the in-plane thickness of the powder film 11 was confirmed by visual inspection, and the variation in the in-plane thickness was 30.7%, compared to Examples 1 to 5. This was an extremely large value.

In Example 1, since the filling process was included, the film thickness accuracy of the powder film 11 was good. Specifically, as shown in Table 1, in the powder film 11, the distribution of the in-plane thickness was not confirmed by visual inspection, and the variation in the in-plane thickness was 9.4%, which was about 1/1 of that in the comparative example. Reduced to 3.

In Example 2, electrostatic screen printing with an electric field strength of 1 kV/mm was used in Example 1. Therefore, the film thickness accuracy of the powder film 11 was better than in Example 1. Specifically, as shown in Table 1, in the powder film 11, no visible in-plane thickness distribution was observed, and the in-plane thickness variation was further reduced to 6.7%.

In Example 3, a metal mask was used instead of the screen plate 21 in Example 2. In the metal mask, the filled portion 22 had a smaller capacity than the filled portion 22 of the screen plate 21, so the weight of the single layer was smaller than in Examples 1 and 2. However, in Example 3, as in Examples 1 and 2, the distribution of the in-plane thickness was not visually confirmed in the powder film 11, and the variation in the in-plane thickness was a preferable value of 10% or less. Ta. As a result, it was confirmed that a metal mask could be used as the powder filling member 2 in addition to the screen plate 21.

In Example 4, a squeegee (urethane) was used as the rubbing bodies 32 and 42 instead of a sponge (polyurethane) as in Examples 1 to 3. In Example 4, as in Examples 1 to 3, no visual observation of the distribution of the in-plane thickness was observed in the powder film 11, and the variation in the in-plane thickness was a preferable value of 10% or less. As a result, it was confirmed that various types of rubbing bodies other than sponges can be used as the rubbing bodies 32 and 42.

In Example 5, the thickness t2 of the emulsion portion 27 protruding from the screen mesh portion 26 in Example 4 was set to 10 μm instead of 50 μm. As a result, the volume that can be filled with the powder 10 in the filled portion 22 was reduced, so the weight of the single layer was reduced compared to Example 4. As a result, it was confirmed that the amount of film formation could be controlled by the volume of the portion to be filled 22. Note that the film thickness accuracy of the powder film 11 was better than in Example 4. Specifically, the variation in in-plane thickness was lower than in Example 4.

In Example 6, the thickness distribution was provided for the presser plate 33 in Example 4. Specifically, as the presser plate 33, in Example 4, a stainless steel plate with a uniform thickness of 300 μm was used, but in Example 6, a sloped stainless steel plate with a thickness increasing in the central region was used. As a result, as shown in Table 1, the distribution of the in-plane thickness in the powder film 11 was confirmed by visual observation, and the variation in the in-plane thickness was larger than in Examples 1 to 5. As a result, it was confirmed that the in-plane thickness of the powder film 11 to be formed could be arbitrarily controlled by the presser plate 33.

[Embodiment 2]
A powder film forming apparatus 100 and a powder film forming method according to Embodiment 2 of the present invention are an apparatus and method for continuously forming a powder film 11 on a substrate 12.

Hereinafter, the explanation will focus on the parts that are different from the first embodiment, and the same components as the first embodiment will be given the same reference numerals and the explanation thereof will be omitted.

"Powder film forming apparatus 100"
As shown in FIG. 8, the powder film forming apparatus 100 according to the second embodiment of the present invention includes three powder filling members 2 (more than one is sufficient). The filling machine 3, film forming machine 4, and cleaning machine 5 of the powder film forming apparatus 100 are arranged to perform a filling process, a film forming process, and a cleaning process on different powder filling members 2, respectively. . The powder film forming apparatus 100 further includes a first conveyor 61, a second conveyor 62, and a third conveyor 63 that convey the powder filling member 2. That is, the first conveyance machine 61, the second conveyance machine 62, and the third conveyance machine 63 perform a conveyance process of conveying the powder filling member 2. The first transport machine 61 transports the powder filling member 2 located at the filling machine 3 to the film forming machine 4. The second conveyance machine 62 conveys another powder filling member 2 located at the position of the film forming machine 4 to the position of the cleaning machine 5. The third conveyor 63 conveys still another powder filling member 2 located at the cleaning machine 5 to the filling machine 3.

The powder film forming apparatus 100 includes a filling holder 73 that holds the powder filling member 2 undergoing the filling process, and a film forming holder 73 that holds the powder filling member 2 undergoing the film forming process. It includes a holder and a cleaning holder 75 that holds the powder filling member 2 undergoing the cleaning process. In the filling process, it is preferable to turn the emulsion side upward, and in the film forming process and cleaning process, it is preferable to turn the mesh side upward. Reversing tools 83 and 85 are provided. These two reversing tools 83 and 85 are a post-filling reversing tool 83 provided between the position of the filling machine 3 and the first conveyor 61, and a post-filling reversing tool 83 provided between the position of the cleaning machine 5 and the third conveyor 63. This is a post-cleaning reversing tool 85 provided in the. Here, the filling holder 73 scoops up the powder filling member 2 from the third conveyor 63 and moves the powder filling member 2 to the position of the filling machine 3. The post-filling reversing tool 83 is for reversing and moving the powder filling member 2 from the position of the filling machine 3 to the first conveying machine 61. Although not shown, the film forming holder scoops up the powder filling member 2 from the first conveyor 61, moves the powder filling member 2 to the position of the film forming machine 4, and transfers the powder filling member 2 from that position to the second transporter 61. The powder filling member 2 is moved to the conveyor 62. The cleaning holder 75 scoops up the powder filling member 2 from the second conveyor 62 and moves the powder filling member 2 to the position of the cleaner 5. The post-cleaning reversing tool 85 is for reversing and moving the powder filling member 2 from the position of the cleaning machine 5 to the third conveyor 63. Of course, the positions where the post-filling reversing tool 83 and the post-cleaning reversing tool 85 are provided are not limited to those shown in FIG. 8, and may be changed as necessary.

The first conveyance machine 61, the second conveyance machine 62, and the third conveyance machine 63 each include, for example, an endless belt, and a conveyance destination roller and a conveyance source roller that are stretched around the endless belt. The filling holder 73, the film forming holder, and the cleaning holder 75 include, for example, a fork 77 that scoops up the powder filling member 2, and a drive mechanism 78 that can raise and lower this fork 77 and rotate it around the vertical axis V. and respectively. The reversing tools 83 and 85 each have, for example, a gripping body that holds the powder filling member 2 between the mesh side and the emulsion side, and a rotation mechanism that can rotate the gripping body around the horizontal axis H.

The powder film forming apparatus 100 includes a substrate carrying machine 92 that continuously carries the substrate 12 before the powder film 11 is formed to the position of the film forming machine 4, and a substrate carrying machine 92 that continuously carries the substrate 12 before the powder film 11 is formed to the position of the film forming machine 4, and A substrate unloading machine 93 that continuously unloads the substrate 12 from the position of the film forming machine 4 is provided.

The rubbing body 32 of the filling machine 3, the rubbing body 42 of the film forming machine 4, and the suction tool 51 of the cleaning machine 5 all move automatically along guide rails 39, 49, 59. may be configured.

"Powder film formation method"
The operation of the powder film forming apparatus 100, that is, the powder film forming method will be described below.

As shown in FIG. 8, at the position of the filling machine 3, a filling step is continuously performed to fill the powder 10 into the powder filling member 2 scooped up by the filling holder 73 from the third conveyor 63. . The powder filling member 2 that has been subjected to the filling process is continuously turned upside down by the post-filling turning tool 83 and transported by the first transporting machine 61 .

On the other hand, at the position of the film forming machine 4, a film forming process is continuously performed on the powder filling member 2 scooped up by the film forming holder from the first conveyor 61. The powder filling member 2 that has been subjected to the film forming process is continuously transported by the second transport device 62. Furthermore, the substrates 12 are continuously carried in and out from below the powder filling member 2 at the position of the film forming machine 4 by a substrate carry-in machine 92 and a substrate carry-out machine 93.

On the other hand, at the position of the cleaning machine 5, a cleaning process is continuously performed to clean the powder filling member 2 scooped up by the cleaning holder 75 from the second conveyance machine 62. The powder filling member 2 that has been subjected to the cleaning process is continuously turned upside down by the cleaning turning tool 85 and transported by the third transporting machine 63.

In this way, according to the powder film forming apparatus 100 and the powder film forming method, the powder film 11 is continuously formed on the substrate 12 that is supplied to the position of the cleaning machine 5. In addition to the above effect, the substrate 12 on which the powder film 11 is formed can be manufactured in a short time.

Incidentally, in Embodiments 1 and 2, the positional relationship between the powder filling member 2 and the film forming machine 4 has been described assuming that the mounting table 43 is located below the powder filling member 2, but the present invention is not limited to this. It's not a thing. For example, the powder filling member 2 and film forming machine 4 of Embodiments 1 and 2 are placed in an overturned position, and the powder 10 filled in the powder filling member 2 is moved horizontally onto the substrate 12 instead of falling onto it. In this way, the powder film 11 may be formed on the substrate 12. Of course, the powder filling member 2 and the film forming machine 4 are not limited to being in an overturned position, but may be in an inclined position to obliquely move the powder 10 to the substrate 12.

Furthermore, in the second embodiment, the first conveyance machine 61, the second conveyance machine 62, and the third conveyance machine 63 are described as different devices, but these devices 61 to 63 may be integrated. For example, there is a rotary conveyance machine 60 shown in FIG. 9 as a device that integrates a first conveyance machine 61, a second conveyance machine 62, and a third conveyance machine 63. This rotary conveyor 60 includes a rotating shaft 65 along the vertical axis V, a motor 64 that drives the rotating shaft 65, a housing 66 provided on the rotating shaft 65, and a rotating shaft 65 extending along the horizontal axis H from the housing 66. The rotary arm 67 has a plurality of (three as an example in FIG. 9) rotary arms 67. Each rotating arm 67 has a gripping arm body 68 that grips the powder filling member 2, and a reversing motor 69 that can rotate this gripping arm body 68 around the horizontal axis H. Therefore, the rotary conveyance machine 60 has the functions of the first conveyance machine 61, the second conveyance machine 62, and the third conveyance machine 63 shown in FIG. 8, and also has the functions of the reversing tools 83 and 85 shown in FIG. Note that, although not shown, a filling machine 3, a film forming machine 4, and a cleaning machine are located at a position 30 where the filling process is performed, a position 40 where the film forming process is performed, and a position 50 where the cleaning process is performed shown in FIG. 5 are provided respectively. Further, in FIG. 9, the same components as those in FIG. 8 are given the same reference numerals, and the description thereof will be omitted. In this way, by providing the powder film forming apparatus 100 according to the second embodiment with the rotary conveyance machine 60 shown in FIG. Since it is incorporated into the rotary conveyance machine 60 and the reversing tools 83 and 85 are also incorporated into the rotary conveyance machine 60, the structure can be simplified.

Furthermore, although the timing of the filling process, film forming process, and cleaning process was not explained in the second embodiment, it is preferable that these filling process, film forming process, and cleaning process be performed at the same time. Thereby, the substrate 12 on which the powder film 11 is formed can be manufactured in a shorter time.

In addition, in the first embodiment, the pushing bodies 38 and 48, which were described as being able to be employed in place of the rubbing bodies 32 and 42 as the filling machine 3 and the film forming machine 4, are used in the powder filling member 2. It's not something to let slip. That is, the pushing bodies 38 and 48 do not rub the powder 10 by sliding it against the powder filling member 2 like the rubbing bodies 32 and 42, but press it against the powder filling member 2. This pushes the powder 10.

Furthermore, the first and second embodiments are illustrative in all respects and are not restrictive. The scope of the present invention is indicated by the claims rather than the above description, and it is intended that all changes within the meaning and range equivalent to the claims are included. Among the configurations described in Embodiments 1 and 2, the configurations other than those described as the first invention in "Means for Solving the Problems" are arbitrary configurations, and can be deleted and changed as appropriate. It is.

1 Powder film forming device 2 Powder filling member 3 Filling machine 4 Film forming machine 5 Cleaning machine 10 Powder 11 Powder film 12 Substrate 21 Screen plate 22 Filled portion 23 Covering portion 31 Hopper 32 Rubbing body 33 Holding plate 38 Pushing body 42 Rubbing body 43 Mounting table 44 DC power supply 45 Electric circuit 48 Pushing body 51 Suction tool 52 Slight adhesive tape 61 First conveyor 62 Second conveyor 63 Third conveyor

Claims (3)

a porous powder filling member filled with powder;
a filling machine that fills the powder filling member with powder;
a film forming machine that moves the powder filled into the powder filling member by the filling machine to a substrate to form a powder film on the substrate;
a cleaning machine that cleans the powder filling member into which the powder has been moved by the film forming machine;
a first conveyance machine that conveys the powder filling member at the position of the filling machine to the position of the film forming machine;
a second conveyance machine that conveys the powder filling member at the position of the film forming machine to the position of the cleaning machine;
further comprising a third conveyance machine that conveys the powder filling member at the cleaning machine position to the filling machine position ,
A powder film forming apparatus characterized in that the first conveying machine, the second conveying machine, and the third conveying machine are different devices or integrated devices . The powder film forming apparatus according to claim 1, wherein the powder filling member is singular . The first conveyor, the second conveyor, and the third conveyor are integrated equipment,
The powder film forming apparatus according to claim 1 or 2 , wherein the integrated device has a rotating arm that grips the powder filling member .

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