JP2019150784A - Transport device, transport method, coating device and drying device - Google Patents

Abstract

To efficiently prevent cracks from occurring in a coating film when changing a transport direction of a long sheet-like base material with a partial deposition of the coating film.SOLUTION: A transport device comprises a drive part that transports a base material along a transport path and a direction change part arranged in the transport path to change a transport direction of the base material to float and support the base material, at a position just ahead where the base material is transported to the direction change part or at the direction change part, by jetting a gas to one main face of the base material transported by the drive part, and in a width direction orthogonal to the transport path, a gas jet amount per unit time jetted to one main face of the base material is varied with formation positions of a coating film to adjust the posture of the coating film.SELECTED DRAWING: Figure 4

Description

  The present invention relates to a technique for conveying a long sheet-like base material on which a coating film is partially formed.

  For example, the coating apparatus described in Patent Document 1 is a roll-to-roll method in which a long base material such as a conductor sheet such as a metal functioning as a current collector or a resin sheet having a metal thin film formed on its surface is used. The coating film is formed on the substrate while continuously transporting along the predetermined transport path. In this coating apparatus, in order to apply the first coating film on the surface of the base material, a coating liquid is supplied to the surface of the base material by the coating unit to form a wet film, and then the drying apparatus is used. Conveys and accelerates the volatilization of the solvent component of the coating liquid constituting the wet film, thereby drying and curing the coating liquid. Thus, the wet film is changed to the dry film, and the coating process of the coating film is completed. And the base material in which the coating film was formed is conveyed to the following application part.

JP-A-2006-186371 (see, for example, FIG. 1)

  In the conventional apparatus, not only the coating film is formed on the entire surface of the base material, but the coating film may be partially formed on the surface of the base material. In this case, a coating region where the coating film is formed and a non-coating region where the coating film is not formed coexist on the surface of the substrate. Since the coating region and the non-coating region have different weights and heat shrinkage ratios after drying, when the cross section of the substrate is viewed, the coating region has a bent shape (explained later) (See the upper part of FIG. 4). And in the said conventional apparatus, after winding a base material on the conveyance roller arrange | positioned at the last part of a drying apparatus and changing the conveyance direction of a base material, a base material is conveyed to the following application part. As described above, since the substrate is brought into contact with the conveyance roller while the coating film is bent, the conveyance direction of the substrate is changed, and thus the coating film may be cracked. In particular, cracks become serious as the coating film becomes thinner.

  The present invention has been made in view of the above-described problems, and is effective in generating cracks in the coating film when the conveying direction of the long sheet-like base material on which the coating film is partially formed is changed. It aims at providing the crack prevention technology which prevents it.

  1st aspect of this invention is a conveying apparatus which conveys the elongate sheet-like base material in which the coating film was partially formed along a conveyance path | route, Comprising: The drive which conveys a base material along a conveyance path | route And a direction changing unit that is arranged in the conveyance path and changes the conveyance direction of the substrate, and the substrate conveyed by the drive unit at a position immediately before the substrate is conveyed to the direction changing unit or the direction changing unit The amount of gas injected per unit time to be jetted toward one main surface of the base material in the width direction orthogonal to the transport path while the base material is levitated and supported by injecting gas onto the one main surface The position of the coating film is adjusted by changing the position of the coating film according to the formation position of the coating film.

  A second aspect of the present invention is a transport method for transporting a long sheet-like base material on which a coating film is partially formed along a transport path, and changes the transport direction of the base material in the transport path. In the width direction orthogonal to the conveyance path, the substrate is levitated and supported by injecting gas to one main surface of the substrate at the direction change position or the position immediately before the substrate is conveyed to the direction change position. It is characterized in that the posture of the coating film is adjusted by varying the amount of gas injected per unit time to be sprayed toward the one main surface of the substrate in accordance with the position where the coating film is formed.

  3rd aspect of this invention is a coating apparatus, Comprising: The said conveying apparatus, the application part which supplies a coating liquid to one main surface of the base material conveyed by a conveying apparatus, and forms a wet film | membrane, and conveyance Drying which has a heating part arranged between the position immediately before in the path and the application part, and forms the coating film by drying the wet film on the substrate conveyed from the application part by the conveying device by the heating part. It is characterized by providing a part.

  According to a fourth aspect of the present invention, there is provided a drying apparatus, wherein a wet film is dried by heating a long sheet-like substrate that is transported along a transport path while supporting the wet film on one main surface. A heating unit that forms a coating film, and a direction changing unit that is arranged in the transport path and changes the transport direction of the base material, and a position immediately before the base material is transported from the heating unit to the direction change unit or the direction change unit Thus, the base material is levitated and supported by injecting gas onto the one main surface of the base material transported along the transport path, and on the one main surface of the base material in the width direction orthogonal to the transport path. It is characterized in that the posture of the coating film is adjusted by varying the gas injection amount per unit time to be sprayed in accordance with the formation position of the coating film.

  In the invention configured as described above, the transport direction of the long sheet-like base material on which the coating film is partially formed is changed by the direction changing unit. At the position immediately before being transported to the direction changing portion or the direction changing portion, the base material is supported in a floating state by injecting gas onto one main surface of the base material. At this time, the amount of gas injected per unit time to be injected toward the one main surface of the base material in the width direction orthogonal to the transport path differs depending on the formation position of the coating film, and the posture of the coating film is Adjusted. Therefore, the conveyance direction of the base material is changed in a state where the posture of the base material is adjusted.

  As described above, the posture of the coating film is adjusted by injecting gas onto one main surface of the base material when the transport direction of the base material is changed or immediately before the change. As a result, it is possible to effectively prevent the coating film from being cracked.

It is a figure which shows schematic structure of the coating device equipped with 1st Embodiment of the conveying apparatus concerning this invention. It is a partial expansion perspective view of the coating apparatus shown in FIG. It is a perspective view which shows the structure of the air turn bar with which the coating apparatus shown in FIG. 1 was equipped. It is a figure which shows typically the turning operation | movement of the base material by an air turn bar. It is a figure which shows typically the condition of the base material in the 1st Embodiment immediately after drying and the time of passage of an air turn bar. It is a figure which shows schematic structure of the coating apparatus provided with 2nd Embodiment of the conveying apparatus concerning this invention. It is a figure which shows typically the condition of the base material in the 2nd Embodiment immediately after drying and the time of passage of an air turn bar. It is a figure which shows typically the condition of the base material in the 2nd Embodiment immediately after drying and the time of passage of an air turn bar. It is a figure which shows schematic structure of the coating apparatus provided with 3rd Embodiment of the conveying apparatus concerning this invention. It is a figure which shows schematic structure of the coating apparatus equipped with an example of the drying apparatus concerning this invention.

  FIG. 1 is a diagram showing a schematic configuration of a coating apparatus equipped with a first embodiment of a transport apparatus according to the present invention. FIG. 2 is a partially enlarged perspective view of the coating apparatus shown in FIG. FIG. 3A is a perspective view showing a configuration of an air turn bar installed in the coating apparatus shown in FIG. 1, and FIG. 3B is a view schematically showing a turning operation of the base material by the air turn bar. The coating apparatus 100 is an apparatus that applies a paste-like coating liquid to a sheet-like substrate S conveyed by a roll-to-roll method. For example, for a battery such as a lithium ion secondary battery. It can be used for the production of electrodes. In order to uniformly indicate directions in the following drawings, an XYZ orthogonal coordinate system is set as shown in FIG. Here, the XY plane is a horizontal plane, and the X axis is an axis extending in the width direction of the substrate S, while the Y axis is an axis orthogonal to the X axis and extending in the horizontal conveyance direction of the substrate S. The Z axis represents the vertical axis, and the (−Z) direction represents the vertically downward direction.

  The coating apparatus 100 includes an application unit 1 that supplies and applies a coating liquid to the substrate S. The application unit 1 includes a tank 11 that stores therein a coating liquid to be applied, and a single nozzle 12 that discharges the coating liquid supplied from the tank 11. The nozzle 12 extends in the X direction as shown in FIG. The nozzle 12 is connected to the tank 11 via a liquid feed system 13. As shown in FIG. 1, the liquid feeding system 13 has a pipe 131 that connects between the tank 11 and the nozzle 12, and a pump 132 that is inserted in the pipe 131 and distributes the coating liquid through the pipe 131. is doing. It is desirable that the pump 132 is capable of delivering a high-viscosity coating liquid at a stable flow rate. As such a pump, for example, a screw pump can be used, and for example, a MONO pump which is a kind of single screw pump can be suitably applied. The operation of the pump 132 is controlled by the control unit 3.

  The base material S is sent along a predetermined transport path PT by the transport unit 7 corresponding to the first embodiment of the transport apparatus according to the present invention at a position facing the discharge port of the nozzle 12. Specifically, the long sheet-like base material S wound in a roll shape is set on the supply roller 71 of the transport unit 7, and one end portion of the base material S drawn from the roll is a take-up roller 74. It is wound around. As the take-up roller 74 rotates in the direction of the arrow Dr in the figure, the substrate S is fed out from the supply roller 71 and conveyed in the direction of the arrow Ds, and the tension roller 72, the backup roller 73, the auxiliary roller 75, and the air turn bar 76 are moved. And is taken up by the take-up roller 74.

  The tension roller 72 applies a certain tension to the base material S transported along the transport path PT. Thereby, the slack of the base material S in the transport path PT is prevented, and the base material S is transported in a stable posture. In other words, the transport direction of the base material S is changed by the rollers disposed in the transport path PT, while the base material S is transported while maintaining a substantially flat posture between the rollers. In the example of FIG. 1, the base material S conveyed obliquely upward from the backup roller 73 is adjusted to a substantially horizontal posture by the auxiliary roller 75. The base material S is in a substantially horizontal posture between the auxiliary roller 75 and the air turn bar 76. The conveyance direction Ds of the base material S at this time is the (+ Y) direction. Further, the conveyance direction of the base material S is changed obliquely downward by the air turn bar 76, and the base material S is sent to the take-up roller 74 in this posture. The winding roller 74 is connected to a roller driving mechanism 77. The roller driving mechanism 77 rotates the winding roller 74 at a predetermined rotational speed in accordance with a control command from the control unit 3. The supply roller 71, the tension roller 72, the backup roller 73, and the auxiliary roller 75 are driven rollers having no drive mechanism. On the other hand, the air turn bar 76 is connected to the air supply mechanism 78 via a pipe 768 and the like, and the air supply mechanism 78 sends compressed air to the air turn bar 76 in accordance with a control command from the control unit 3 to draw air from the air turn bar 76. The transport direction is changed while spraying on the base material S to float and support the base material S. The detailed configuration and operation of the air turn bar 76 will be described later in detail.

  In this way, the nozzle 12 is arranged so that one side of the main surface of the base material S supported and transported by the transport unit 7 faces the other surface of the portion in contact with the backup roller 73. In other words, the base material S is opposed to the nozzle 12 by the base material S being wound around the surface of the backup roller 73 arranged to face the nozzle 12. The coating liquid discharged from the nozzle 12 is applied to the surface of the substrate S. By transporting the base material S in the direction of the arrow Ds, the coating liquid can be applied to the base material S while the nozzle 12 is scanned and moved relative to the base material S. By applying the coating liquid with the nozzle 12 facing the region of the surface of the substrate S where the back surface is in contact with the backup roller 73, the gap between the nozzle 12 and the surface of the substrate S is stably maintained. Application can be performed.

  The nozzle 12 has a slit-like discharge extending on the surface facing the surface of the substrate S wound around the backup roller 73 along the width direction of the substrate S, that is, the direction orthogonal to the transport path PT of the substrate S. Has an exit. When the coating liquid is continuously discharged from the discharge port in a fixed amount, for example, as shown in FIG. 2, three wet films WF made of the coating liquid are formed on the surface of the substrate S in the width direction X. It is formed to be spaced apart and extend in the Y direction. That is, three wet films WF are applied in stripes.

Here, for example, an active material layer is laminated on the surface of the current collector layer by using a conductive sheet such as a metal functioning as a current collector as the base material S and using a paste containing an active material as a coating liquid. It is possible to manufacture the battery electrode. Such a coating liquid generally has a relatively high viscosity. For example, a coating liquid having a viscosity of about 50 Pa · s to 300 Pa · s at a shear rate of 10 s ⁻¹ can be used. Moreover, as the base material S, for example, a metal thin film formed on the surface of a resin sheet may be used.

  Further, the drying unit 8 is provided at a position downstream of the backup roller 73 and upstream of the take-up roller 74 in the transport direction of the substrate S by the transport unit 7. The drying unit 8 has a heating unit 82 inside the housing 81. The heating unit 82 promotes the volatilization of the solvent component of the coating liquid by supplying, for example, dry air, hot air, infrared rays, or the like to the coating liquid applied to the base material S that is passed through the heating unit 82. As a result, the three wet films WF carried on the surface of the base material S (reference S1 in FIG. 4) are dried and hardened to form a dry film, that is, a coating film (reference F in FIG. 4 described below). It becomes.

  FIG. 4 is a diagram schematically showing the state of the substrate immediately after drying and at the time when the air turn bar passes in the first embodiment. As described above, when the substrate S is heated by the heating unit 82 of the drying unit 8, the weight differs between the coating region RF where the coating film F is formed and the non-coating region RN where the coating film F is not formed. Yes. Moreover, the thermal shrinkage rate is different between the substrate S and the coating liquid. Due to these factors, the coating film F is bent at a position P1 (see FIG. 1) immediately after the drying process by the heating unit 82 as shown in the upper part of FIG. Here, when the coating film F is transported along the transport path PT while being bent, and the transport direction of the base material S is changed by a transport roller as in the conventional apparatus, for example, the coating film F is cracked. May occur.

  Therefore, in the present embodiment, the above-described problem is solved by providing the air turn bar 76 configured as follows in the transport unit 7. Hereinafter, the configuration and operation of the air turn bar 76 will be described in detail with reference to FIGS. 1, 3A, 3B, and 4. FIG.

  As shown in FIG. 3A, the air turn bar 76 constitutes an upper surface, a front surface, and a lower surface, and a cross section of the air turn bar 76 is formed in a substantially C shape. The plate 761 includes two side plates 762 and 763 that cover both ends of the plate 761, and a back plate 764 that forms the back surface of the air turn bar 76 and covers the opening on the (−Y) direction side of the transport plate 761. The conveyance plate 761 includes a curved surface portion 761a that is curved in an arc shape and a flat surface portion 761b that extends from the curved surface portion 761a in the Y direction. The transport plate 761 is an ejection surface that ejects air to float and support the substrate S carrying the coating film F, and has a plurality of equal sizes on the entire surface of the curved surface portion 761a and the flat surface portion 761b. The air injection ports 765 are formed in a staggered pattern at a predetermined pitch in the vertical and horizontal directions.

Further, the internal space of the air turn bar 76, that is, the space surrounded by the transport plate 761, the side plates 762 and 763, and the back plate 764 is divided into a number corresponding to the number of coating films F (six in this embodiment). It is divided by plates 766a to 766f. More specifically, in the width direction X: a space SP1 sandwiched between the side plate 762 and the partition plate 766a and corresponding to the non-coating region RN (lower stage in FIG. 4; the same applies hereinafter),
A space SP2 sandwiched between the partition plates 766a and 766b and corresponding to the coating region RF,
A space SP3 sandwiched between the partition plates 766b and 766c and corresponding to the non-coating region RN,
A space SP4 sandwiched between the partition plates 766c and 766d and corresponding to the coating region RF,
A space SP5 sandwiched between the partition plates 766d and 766e and corresponding to the non-coating region RN,
A space SP6 sandwiched between the partition plates 766e and 766f and corresponding to the coating region RF,
A space SP7 sandwiched between the partition plate 766f and the side plate 763 and corresponding to the non-coating region RN
The air flow from one space to the other space is restricted.

  Air ducts 767a to 767g for sending air into each of these seven spaces SP1 to SP7 are attached to the back plate 764. Each of the air ducts 767a to 767g is connected to the air supply mechanism 78 via a pipe 768 (FIG. 1). The air supply mechanism 78 can send an appropriate amount of air into each of the spaces SP1 to SP7. More specifically, air is sent at a relatively low pressure to the spaces SP1, SP3, SP5, SP7 corresponding to the non-coating region RN, while to the spaces SP2, SP4, SP6 corresponding to the coating region RF. Air is sent in at a relatively high pressure. For this reason, as shown in the lower part of FIG. 4, the amount of air injected per unit time onto the back surface of the substrate S is large in the coating region RF, as indicated by the arrow in FIG. In the air turn bar 76, the coating film F is adjusted to a substantially flat posture together with the base material S in the non-coating region RN. And since the conveyance direction is changed from the substantially horizontal direction to the diagonally downward direction and conveyed at the turn position P2 with the posture, the conveyance along the conveyance path PT without causing the problem that the coating film F is broken. can do.

  As described above, according to the first embodiment, as shown in FIG. 4, air is jetted onto the back surface S <b> 2 of the base material S to float and support the base material S, and the base in the width direction X is supported. The injection amount of air per unit time injected toward the back surface S2 of the material S (the length of the arrow in the figure schematically shows the size of the injection amount) depends on the formation position of the coating film F Are different. Thereby, the posture of the coating film F is adjusted, and the transport direction of the substrate S is changed in the posture. Therefore, the base material S can be conveyed without causing the coating film F to crack, and a high-quality product can be manufactured.

  Thus, in the first embodiment, the transport unit 7 corresponds to an example of the “transport device” of the present invention, and the roller drive mechanism 77 corresponds to an example of a “drive unit”. The air turn bar 76 functions as an example of the “direction changing unit” of the present invention. Further, the front surface S1 and the back surface S2 of the base material S correspond to “the other main surface of the base material” and “one main surface of the base material” of the present invention, respectively. The turn position P2 corresponds to an example of the “direction changing position” in the present invention. Further, the drying unit 8 corresponds to an example of the “drying unit” in the present invention.

  FIG. 5 is a diagram showing a schematic configuration of a coating apparatus equipped with a second embodiment of a transport apparatus according to the present invention. Moreover, FIG. 6 is a figure which shows typically the condition of the base material in the 2nd Embodiment immediately after drying and the time of passage of an air turn bar. The second embodiment is greatly different from the first embodiment in that a first gas injection unit 79A is added, and other configurations are basically the same as those in the first embodiment. Therefore, in the following, the description will focus on the additional configuration, and the same configuration will be denoted by the same or corresponding reference numerals and description thereof will be omitted.

  79 A of 1st gas injection parts are arrange | positioned facing the air turn bar 76 on both sides of the base material S in the turn position P2, and inject air with respect to the surface S1 of the base material S from the opposite direction to the air turn bar 76. More specifically, as shown in FIG. 6, the first gas injection unit 79A includes a housing 791 having a rectangular parallelepiped shape that is hollow inside. The bottom surface 791a of the housing 791 is opposed to the surface S1 of the base material S, that is, the surface carrying the coating film F, and serves as an ejection surface that ejects air to the surface S1. On the bottom surface 791a, a plurality of air injection holes 791b having the same size are formed in a staggered pattern at a predetermined pitch in the vertical and horizontal directions.

  Further, the internal space of the housing 791 is divided by the number of partition plates 793a to 793f corresponding to the number of coating films F (six in this embodiment), and corresponds to the non-coating region RN like the air turn bar 76. Is divided into four spaces SP1A, SP3A, SP5A, SP7A and three spaces SP2A, SP4A, SP6A corresponding to the coating region RF, and the flow of air from one space to the other is restricted Yes.

  Air ducts 794a to 794g for sending air into each of these seven spaces SP1A to SP7A are attached to the side surface of the housing 791, and, like the air turn bar 76, an air supply mechanism via these air ducts 794a to 794g and a pipe 768. Air is sent from 78 to each of the spaces SP1A to SP7A. However, at the position P1 immediately after receiving the drying process by the heating unit 82, the coating film F is bent vertically downward as shown in the upper part of FIG. 7, so that the air injection amount is opposite to that of the air turn bar 76. ing. In other words, air is sent at a relatively high pressure to the spaces SP1A, SP3A, SP5A, SP7A corresponding to the non-coating region RN, while at a relatively low pressure to the spaces SP2A, SP4A, SP6A corresponding to the coating region RF. Air is being sent in. For this reason, as shown in the lower part of FIG. 7, the air injection amount per unit time onto the surface of the substrate S is small in the coating region RF, as shown by the arrows in FIG. It increases in the non-coating area RN. That is, the substrate S is sandwiched between the air from the air turn bar 76 and the air from the first gas injection unit 79A, and the flatness of the coating film F is enhanced. And the conveyance direction of the base material S is changed from the substantially horizontal direction to the diagonally downward direction at the turn position P2 in such a posture having high flatness. As a result, the crack of the coating film F can be more effectively suppressed.

  Thus, in 1st Embodiment and 2nd Embodiment, although the attitude | position adjustment of the base material S by air is performed in the turn position P2 which changes the conveyance direction of the base material S, for example, as shown in FIG. A second gas injection unit 79B may be additionally arranged adjacent to the air turn bar 76 at a position immediately before P2, that is, immediately before position P3 adjacent to the upstream side of the turn position P2 (left hand side in the figure) in the transport path PT. . As this 2nd gas injection part 79B, what turned the 1st gas injection part 79A upside down can be used. In other words, the second gas injection unit 79B airs from the air injection port provided on the upper surface toward the back surface S2 of the substrate S with the upper surface of the housing 791 facing the back surface S2 of the substrate S at the immediately preceding position P3. To float and support the substrate S. Further, similarly to the air turn bar 76, the amount of air sprayed per unit time to be sprayed toward the back surface S2 of the base material S in the width direction X is made different according to the formation position of the coating film F, whereby the coating is performed. The posture of the film F is adjusted to a substantially horizontal posture, and in this state, the substrate S is transported to the air turn bar 76, and the transport direction is changed at the turn position P2. Therefore, the crack of the coating film F can be more effectively suppressed. In addition, since the base material S is in a substantially horizontal posture when it is transported to the turn position P2 by arranging the second gas injection unit 79B at the immediately preceding position P3 in this way, the transport roller instead of the air turn bar 76. May be used. In this case, the conveyance roller corresponds to an example of the “direction changing unit” of the present invention, and the posture adjustment of the coating film F is performed by air supply only at the immediately preceding position P3.

  Moreover, you may add the structure similar to 2nd Embodiment. That is, a third gas injection unit 79C (broken line in FIG. 8) having the same configuration as the first gas injection unit 79A is additionally arranged so as to face the second gas injection unit 79B across the base material S at the immediately preceding position P3. Also good. In this case, similarly to the second embodiment, air whose injection amount has been adjusted is blown onto the base material S from the front surface side and the back surface side of the base material S, and the base material S can be adjusted to a higher horizontal posture. .

  The present invention is not limited to the above-described embodiment, and various modifications other than those described above can be made without departing from the spirit of the present invention. For example, in the above embodiment, the air turn bar 76 and the transport roller that function as the “direction changing unit” of the present invention are provided outside the drying unit 8, but these may be arranged inside the drying unit 8. For example, as shown in FIG. 9, the same function as the air turn bar 76 of the first embodiment, that is, the air injection amount in the width direction X is varied depending on the formation position of the coating film F to change the posture of the coating film F. An air turn bar 83 having a function of adjusting may be provided in the housing 81 together with the heating unit 82. It is possible to effectively prevent the coating film F from being cracked when the transporting direction of the substrate S is changed by the drying unit 8 configured as described above. As described above, the drying unit 8 shown in FIG. 9 corresponds to an example of the “drying apparatus” of the present invention. Of course, all or part of the first gas injection unit 79A, the second gas injection unit 79B, and the third gas injection unit 79C may be further arranged inside the drying unit 8.

  Moreover, in the said embodiment, although this invention is applied with respect to the coating apparatus 100 which coats the three coating films F on the surface S1 of the base material S, the number of the coating films F is arbitrary. is there.

  The present invention can be applied to all conveyance techniques that change the conveyance direction of a long sheet-like base material on which a coating film is partially formed by a direction changing unit.

DESCRIPTION OF SYMBOLS 1 ... Supply part 7 ... Conveyance unit (conveyance apparatus)
8 ... Drying unit (drying device)
76, 83 ... Air turn bar (direction changing part)
77. Roller drive mechanism (drive unit)
79A ... 1st gas injection part 79B ... 2nd gas injection part 79C ... 3rd gas injection part 82 ... Heating part 100 ... Coating apparatus F ... Coating film P2 ... Turn position (direction change position)
P3 ... Previous position PT ... Conveyance path S ... Base material S1 ... Surface (the other main surface of the base material)
S2 ... Back surface (one main surface of the substrate)
WF ... Wet film X ... Width direction

Claims (8)

A conveying device that conveys a long sheet-like base material partially formed with a coating film along a conveying path,
A drive unit for transporting the base material along the transport path;
A direction changing unit that is arranged in the transport path and changes the transport direction of the base material;
At the position immediately before the base material is transported to the direction changing unit or at the direction changing unit, the base material is levitated by injecting gas onto one main surface of the base material transported by the driving unit. The amount of gas injection per unit time to be injected toward the one main surface of the base material in the width direction orthogonal to the transport path is made different according to the formation position of the coating film. A conveying apparatus that adjusts the posture of the coating film. It is a conveying apparatus of Claim 1, Comprising:
The direction changing portion extends in the width direction and changes the transport direction of the base material while injecting the gas at an injection amount corresponding to the formation position of the coating film to float and support the base material. A turn bar that
A transfer device in which the turn bar adjusts the posture of the coating film. It is a conveyance apparatus of Claim 2, Comprising:
A first gas injection unit arranged to face the turn bar across the base material, and to inject the gas to the other main surface of the base material to which the gas is blown from the turn bar;
The first gas injection unit varies the injection amount of the gas per unit time to be injected toward the other main surface of the base material in the width direction according to a formation position of the coating film. A transfer device that adjusts the orientation of the film. It is a conveying apparatus as described in any one of Claim 1 thru | or 3, Comprising:
While extending in the width direction at the immediately preceding position, the gas is sprayed onto the one main surface of the base material at an injection amount according to the formation position of the coating film, and the base material is lifted and supported. A transport apparatus further comprising a second gas injection unit that adjusts the posture of the coating film. It is a conveyance apparatus of Claim 4, Comprising:
A third gas that is disposed to face the second gas injection unit across the base material and injects the gas to the other main surface of the base material to which the gas is blown from the second gas injection unit. Further comprising an injection part,
The third gas injection unit is configured to change the injection amount of the gas per unit time to be injected toward the other main surface of the base material in the width direction according to a formation position of the coating film. A conveying device for adjusting the posture of the coating film. A transport method for transporting a long sheet-shaped substrate partially formed with a coating film along a transport path,
By injecting gas to one main surface of the base material at a direction change position for changing the transport direction of the base material in the transport path or a position immediately before the base material is transported to the direction change position, the base is formed. Depending on the formation position of the coating film, the amount of the gas sprayed per unit time to be floated and supported, and sprayed toward the one main surface of the substrate in the width direction orthogonal to the transport path And adjusting the posture of the coating film in a different manner. A transport apparatus according to any one of claims 1 to 5;
An application unit that forms a wet film by supplying a coating liquid to the one main surface of the base material transported by the transport device;
A heating unit disposed between the immediately preceding position in the transport path and the coating unit; and the heating unit configured to form the wet film formed on the base material transported from the coating unit by the transport device. And a drying unit that forms the coating film by drying the coating film. On the other hand, a heating unit that forms a coating film by drying the wet film by heating the long sheet-like base material that is transported along the transport path while supporting the wet film on the main surface;
A direction changing unit that is arranged in the transport path and changes the transport direction of the base material;
By injecting gas to one main surface of the base material transported along the transport path at a position immediately before the base material is transported from the heating unit to the direction change unit or the direction change unit. The formation position of the coating film is an injection amount of the gas per unit time that is levitated and supported and sprayed toward the one main surface of the substrate in a width direction orthogonal to the transport path. The drying apparatus is characterized in that the posture of the coating film is adjusted in accordance with the temperature.

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