JP2019146425A5 - - Google Patents

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Publication number
JP2019146425A5
JP2019146425A5 JP2018030191A JP2018030191A JP2019146425A5 JP 2019146425 A5 JP2019146425 A5 JP 2019146425A5 JP 2018030191 A JP2018030191 A JP 2018030191A JP 2018030191 A JP2018030191 A JP 2018030191A JP 2019146425 A5 JP2019146425 A5 JP 2019146425A5
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Japan
Prior art keywords
drive
piezoelectric
driving
piezoelectric actuator
driven member
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JP2018030191A
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English (en)
Japanese (ja)
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JP2019146425A (ja
JP7069815B2 (ja
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Publication of JP2019146425A5 publication Critical patent/JP2019146425A5/ja
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JP2018030191A 2018-02-22 2018-02-22 圧電駆動装置、ロボットハンド、ロボット、電子部品搬送装置、プリンター、プロジェクターおよび圧電駆動装置の駆動方法 Active JP7069815B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2018030191A JP7069815B2 (ja) 2018-02-22 2018-02-22 圧電駆動装置、ロボットハンド、ロボット、電子部品搬送装置、プリンター、プロジェクターおよび圧電駆動装置の駆動方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2018030191A JP7069815B2 (ja) 2018-02-22 2018-02-22 圧電駆動装置、ロボットハンド、ロボット、電子部品搬送装置、プリンター、プロジェクターおよび圧電駆動装置の駆動方法

Publications (3)

Publication Number Publication Date
JP2019146425A JP2019146425A (ja) 2019-08-29
JP2019146425A5 true JP2019146425A5 (hu) 2021-03-11
JP7069815B2 JP7069815B2 (ja) 2022-05-18

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JP2018030191A Active JP7069815B2 (ja) 2018-02-22 2018-02-22 圧電駆動装置、ロボットハンド、ロボット、電子部品搬送装置、プリンター、プロジェクターおよび圧電駆動装置の駆動方法

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JP (1) JP7069815B2 (hu)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2022073193A (ja) 2020-10-30 2022-05-17 セイコーエプソン株式会社 ハンドの駆動方法およびハンド

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09247965A (ja) * 1996-03-06 1997-09-19 Minolta Co Ltd 電気機械変換素子を使用した移動ステ−ジ
JP3964256B2 (ja) * 2002-04-25 2007-08-22 京セラ株式会社 超音波モータを可動体の駆動源とする案内装置
JP4801433B2 (ja) * 2005-12-12 2011-10-26 太平洋セメント株式会社 超音波駆動装置およびそれに用いる被駆動部材
JP2010141949A (ja) * 2008-12-09 2010-06-24 Canon Inc 振動波駆動装置
US8698374B2 (en) * 2009-05-15 2014-04-15 New Scale Technologies Automated drive frequency control for resonant actuator systems and methods thereof
JP6478665B2 (ja) * 2015-01-30 2019-03-06 キヤノン株式会社 振動体の駆動制御回路、振動体の駆動方法、振動型駆動装置及び撮像装置
JP6511900B2 (ja) * 2015-03-25 2019-05-15 セイコーエプソン株式会社 圧電駆動装置及びその駆動方法、ロボット及びその駆動方法

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