JP2019118962A - Industrial robot - Google Patents

Abstract

To provide an industrial robot which can inhibit outflow of dust occurring therein from a joint part while simplifying a structure of a seal part provided at the joint part.SOLUTION: In this industrial robot, a joint part 10 is formed with a seal part 43 for inhibiting outflow of a gas from an interior of the industrial robot to an exterior of the industrial robot. A first arm part 7 includes an arm part body 21 for forming the seal part 43. A body part 5 includes a fixing member 17 and a pulley 18 for forming the seal part 43. The seal part 43 comprises: a first space S1 being a radial space between the arm part body 21 and the fixing member 17; and a second space S2 being a vertical space between the arm part body 21 and the pulley 18 and leading to an upper end of the first space S1. The arm part body 21, the fixing member 17, and the pulley 18 are formed by the same material.SELECTED DRAWING: Figure 3

Description

  The present invention relates to an industrial robot provided with a joint.

  Conventionally, a horizontal articulated robot installed in a clean room is known (see, for example, Patent Document 1). The robot described in Patent Document 1 includes a hand, an arm with which the hand is pivotally connected to the distal end side, and a base with which the proximal end side of the arm is pivotally connected. A labyrinth seal is provided at the joint portion, which is a connection portion between the hand and the arm, for suppressing the flow of gas from the inside of the arm to the clean room.

  In the robot described in Patent Document 1, the labyrinth seal is formed between a first seal member provided on the hand side and a second seal member provided on the arm side. Specifically, the first seal member is formed with a plurality of annular upwardly projecting annular portions disposed concentrically, and the second seal member is formed with a plurality of upwardly projecting annular portions in the radial direction. A plurality of annular downwardly projecting annular portions are formed to be disposed therebetween. Further, a gap formed between the upper projecting annular portion and the lower projecting annular portion is a labyrinth seal.

JP, 2015-123551, A

  In the robot described in Patent Document 1, since the labyrinth seal is provided at the joint, it is possible to suppress the dust generated inside the robot from flowing out from the joint into the clean room. However, in the case of the robot described in Patent Document 1, a labyrinth is formed by a plurality of concentrically arranged annular upper projecting annular parts and a plurality of concentrically disposed annular lower projecting annular parts. The formation of the seal complicates the configuration of the seal provided at the joint.

  Then, the subject of this invention is providing the industrial robot which can suppress the outflow from the joint part of the dust which generate | occur | produces inside, simplifying the structure of the seal part provided in a joint part.

  In order to solve the above-mentioned subject, the industrial robot of the present invention is an industrial robot provided with a joint part which is a connection part of the 1st member and the 2nd member which can be rotated to the 1st member. In the above, the seal portion for suppressing the outflow of the gas from the inside of the industrial robot to the outside of the industrial robot is formed, and the first member is provided with the first seal member for forming the seal portion, The two members are provided with a second seal member for forming a seal portion, and when the direction orthogonal to the axial direction of the rotation of the second member with respect to the first member is a radial direction, the seal portion is the first seal member and A first gap, which is a radial gap with the second seal member, and a second gap, which is an axial gap between the first seal member and the second seal member and is connected to one end of the first gap in the axial direction The first seal member and the second seal member Characterized in that it is formed of the same material.

  In the industrial robot according to the present invention, the seal portion formed in the joint portion is a first gap, which is a gap in the radial direction between the first seal member and the second seal member, and the first seal member and the second seal member. And a second gap connected to one end of the first gap in the axial direction. Therefore, in the present invention, it is possible to simplify the configuration of the seal portion provided in the joint portion.

  On the other hand, in the seal portion of the present invention, a first gap which is a gap in the radial direction between the first seal member and the second seal member, and a gap which is the gap in the axial direction between the first seal member and the second seal member. Because of the simple structure composed of two gaps, if the environmental temperature of the industrial robot fluctuates and the first gap widens or the second gap widens, the sealing function of the seal portion deteriorates, There is a possibility that the outflow of gas from the inside of the industrial robot to the outside of the industrial robot can not be suppressed. Further, in the case of the seal portion of the present invention, when the environmental temperature of the industrial robot fluctuates and the first gap narrows or the second gap narrows, the first seal member and the second seal member contact with each other. Since there is a possibility that the operation of the joint portion may be hindered, the sealing function of the sealing portion may not be secured without being able to narrow the design first and second gaps.

  However, in the present invention, since the first seal member and the second seal member are formed of the same material, even if the environmental temperature of the industrial robot fluctuates, the first gap and the second gap in design are also obtained. The first and second gaps can be kept constant so that the first and second seal members do not come in contact with each other even if Therefore, in the present invention, it is possible to suppress the flow of gas from the inside of the industrial robot to the outside of the industrial robot by the seal while simplifying the configuration of the seal provided in the joint. As a result, in the present invention, it is possible to suppress the flow of dust generated from the inside of the industrial robot from the joint while simplifying the configuration of the seal provided in the joint.

  In the present invention, for example, the first seal member has an inner circumferential surface whose shape when viewed in the axial direction is circular, and an annular and flat surface connected to one end of the inner circumferential surface in the axial direction and orthogonal to the axial direction And the second seal member has a circular shape when viewed in the axial direction and an inner circumferential surface of the first seal member with a constant first gap in the radial direction. And an annular and planar surface that is connected to one end of the outer peripheral surface in the axial direction and is orthogonal to the axial direction and has a second flat surface opposed to the first plane with a constant second gap in the axial direction It is formed.

  In the present invention, for example, the first gap is narrower than the second gap, and the length of the first gap in the axial direction is longer than the length of the second gap in the radial direction. In this case, the first gap mainly functions to suppress the flow of gas from the inside of the industrial robot to the outside of the industrial robot.

  In the present invention, the first seal member and the second member seal are preferably made of an aluminum alloy. With this configuration, the processing of the first member and the second member is facilitated, and the weight of the first member and the second member can be reduced.

  In the present invention, the industrial robot includes, for example, a hand as a second member on which the object to be transferred is mounted, and an arm to which the hand is pivotably connected to the tip end, and the arm is the tip end side A distal end side arm portion as a first member rotatably connected to the first arm portion and a first arm portion rotatably connected to a proximal end side of the distal end side arm portion.

  Further, in the present invention, the industrial robot includes, for example, a hand on which the object to be transferred is mounted, and an arm to which the hand is pivotably connected to the tip end, and the arm pivots the hand to the tip end A distal end side arm portion as a second member capable of being coupled and a first arm portion as a first member in which a proximal end side of the distal end side arm portion is rotatably coupled.

  Further, in the present invention, in the industrial robot, for example, the hand on which the object to be transferred is mounted, the arm to which the hand is pivotably connected to the tip end, and the proximal end of the arm are pivotably connected The arm includes a first arm portion as a first member rotatably connected at the base end side to the main body portion, and a distal end side of the first arm portion. And a distal end side arm portion to be connected.

  As described above, in the industrial robot of the present invention, it is possible to suppress the flow of dust generated from the inside of the industrial robot from the joint while simplifying the configuration of the seal provided in the joint. .

FIG. 1 is a perspective view of an industrial robot according to an embodiment of the present invention. It is a fragmentary sectional view of a part of a hand and an arm which are shown in FIG. (A) is an enlarged view of E part of FIG. 2, (B) is an enlarged view of H part of (A). (A) is an enlarged view of F part of FIG. 2, (B) is an enlarged view of J part of (A). (A) is an enlarged view of G part of FIG. 2, (B) is an enlarged view of K part of (A).

  Hereinafter, embodiments of the present invention will be described with reference to the drawings.

(Schematic configuration of industrial robot)
FIG. 1 is a perspective view of an industrial robot 1 according to an embodiment of the present invention. FIG. 2 is a partial cross-sectional view of a part of the hand 3 and the arm 4 shown in FIG.

  The industrial robot 1 of this embodiment (hereinafter referred to as “robot 1”) is a horizontal articulated robot for transporting an object to be transported such as a glass substrate or a semiconductor wafer. The robot 1 is installed in a clean room. The robot 1 includes a hand 3 on which an object to be transported is mounted, an arm 4 to which the hand 3 is rotatably connected to the tip end, and a main body 5 to which the base end of the arm 4 is rotatably connected. Have. The robot 1 of this embodiment includes two hands 3 and two arms 4, and one hand 3 is rotatably connected to each of the two arms 4. The base end sides of the two arms 4 are rotatably connected to the main body portion 5. In addition, illustration of the hand 3 is abbreviate | omitted in FIG.

  The arm 4 is constituted by two arm portions of a first arm portion 7 and a second arm portion 8 which are coupled to each other so as to be rotatable relative to each other. The first arm 7 and the second arm 8 are hollow. The base end side of the first arm 7 is rotatably connected to the main body 5. The proximal end side of the second arm portion 8 is rotatably connected to the distal end side of the first arm portion 7. The hand 3 is rotatably connected to the tip end side of the second arm portion 8. The first arm 7 is disposed above the main body 5, and the second arm 8 is disposed above the first arm 7. The hand 3 is disposed above the second arm unit 8. The 2nd arm part 8 of this form is a tip side arm part.

  A connecting portion between the first arm 7 and the main body 5 is a joint 10, and the joint 10 is capable of rotating relative to the first arm 7 and the first arm 7. Are linked. A connecting portion between the first arm 7 and the second arm 8 is a joint 11, and the joint 11 is rotatable relative to the first arm 7 and the first arm 7. The arm unit 8 is connected. The connecting portion between the second arm portion 8 and the hand 3 is a joint portion 12, and the joint portion 12 connects the second arm portion 8 and the hand 3 rotatable relative to the second arm portion 8. doing.

  The first arm 7 rotates with respect to the main body 5 with the vertical direction as an axial direction of rotation. That is, the vertical direction is the axial direction of rotation of the first arm 7 with respect to the main body 5. Similarly, the second arm portion 8 is pivoted with respect to the first arm portion 7 as the pivoting axial direction, and the hand 3 is pivoted in the vertical direction with respect to the second arm portion 8. It turns as a direction. That is, the vertical direction is the axial direction of the rotation of the second arm portion 8 with respect to the first arm portion 7 and the axial direction of the rotation of the hand 3 with respect to the second arm portion 8.

(Configuration of body, arm and hand)
FIG. 3A is an enlarged view of a portion E of FIG. 2, and FIG. 3B is an enlarged view of a portion H of FIG. 3A. FIG. 4 (A) is an enlarged view of a part F of FIG. 2, and FIG. 4 (B) is an enlarged view of a part J of FIG. 4 (A). FIG. 5A is an enlarged view of a part G of FIG. 2, and FIG. 5B is an enlarged view of a part K of FIG. 5A.

  The main body portion 5 includes a case body 14 formed in a hollow shape. Inside the case body 14, a hollow rotational shaft 15 which can rotate with respect to the case body 14 is disposed. Further, the main body portion 5 includes a cylindrical fixing member 17 fixed to the upper end portion of the case body 14 and a pulley 18 fixed to the fixing member 17.

  The pivot shaft 15 is formed in an elongated cylindrical shape whose axial direction is in the vertical direction. The base end side of the first arm portion 7 is fixed to the upper end of the pivot shaft 15. The upper end portion of the pivot shaft 15 protrudes upward beyond the upper end surface of the case body 14, and the portion of the pivot shaft 15 excluding the upper end portion is accommodated inside the case body 14. Inside the case body 14, a motor (not shown) for rotating the pivot shaft 15 with respect to the case body 14 is disposed. The lower end side of the rotating shaft 15 is connected to this motor via, for example, a pulley, a belt, and a reduction gear.

  The first arm unit 7 includes an arm unit main body 21 formed in an elongated hollow box shape and two flat lid members 22 and 23. The upper surface of the arm portion main body 21 is open except for the tip end portion of the arm portion main body 21. The lower surface of the arm portion main body 21 is open except for the base end portion of the arm portion main body 21. The lid member 22 is fixed to the upper surface side of the arm portion main body 21 so as to close the opening formed on the upper surface of the arm portion main body 21. The lid member 23 is fixed to the lower surface side of the arm portion main body 21 so as to close the opening formed in the lower surface of the arm portion main body 21.

  As shown in FIG. 3, a through hole penetrating in the vertical direction is formed on the lower surface of the base end side of the arm portion main body 21. As shown in FIG. 4, a through hole penetrating in the vertical direction is formed on the top surface of the tip end side of the arm portion main body 21. Further, the first arm unit 7 includes a fixing member 24 fixed to the proximal end of the arm unit main body 21, a hollow fixed shaft 25 fixed to the distal end of the arm unit main body 21, and a bearing pressing member 26. And a pulley 27 fixed to the fixed shaft 25.

  The second arm portion 8 includes an arm portion main body 29 formed in an elongated hollow box shape, and two flat lid members 30 and 31. The upper surface of the arm body 29 is open except for the tip of the arm body 29. The lower surface of the arm body 29 is open except for the base end of the arm body 29. The lid member 30 is fixed to the upper surface side of the arm portion main body 29 so as to close the opening formed on the upper surface of the arm portion main body 29. The lid member 31 is fixed to the lower surface side of the arm portion main body 29 so as to close the opening formed in the lower surface of the arm portion main body 29.

  As shown in FIG. 4, a through hole penetrating in the vertical direction is formed on the lower surface of the base end side of the arm portion main body 29. As shown in FIG. 5, a through hole penetrating in the vertical direction is formed on the top surface of the tip end side of the arm portion main body 29. Further, the second arm portion 8 is fixed to the tubular fixing member 32 fixed to the base end portion of the arm portion main body 29, the pulley 33 fixed to the fixing member 32, and the tip end portion of the arm portion main body 29. And a sealing member 34.

  The hand 3 includes a hand base 37 constituting a base end of the hand 3, a fixing member 38 fixed to the hand base 37, and a pulley 39 fixed to the fixing member 38. The hand base 37 is formed in a hollow shape. A mounting portion (not shown) of the object to be transported is fixed to the hand base 37. The mounting portion is formed, for example, in a Y-shaped flat plate shape.

(Structure of joints)
In the joint portion 10, a pivot shaft 15 is disposed on the inner peripheral side of a fixing member 17 fixed to the upper end portion of the case body 14. The rotating shaft 15 is rotatably supported by the fixed member 17 via a bearing 42. The pulley 18 is fixed to the upper end of the fixing member 17. The upper end portion of the pivot shaft 15 and the upper end portion of the fixing member 17 are inserted into a through hole formed in the lower surface of the proximal end side of the arm portion main body 21 and disposed inside the proximal end side of the arm portion main body 21 It is done. The pulley 18 and the bearing 42 are also disposed inside the proximal end side of the arm portion main body 21.

  The fixing member 24 is fixed to the proximal end portion of the arm portion main body 21 inside the proximal end side of the arm portion main body 21. The fixing member 24 is fixed to the upper end of the rotating shaft 15 and is rotatably supported by the fixing member 17 via a bearing 42. Therefore, the arm portion main body 21 is rotatable with respect to the fixing member 17. That is, the first arm 7 is rotatable with respect to the fixing member 17 and the case body 14.

  The inner peripheral surface 21a (see FIG. 3B) of the through hole formed on the lower surface of the base end side of the arm portion main body 21 has a circular shape when viewed in the vertical direction. Further, the shape of the outer peripheral surface 17a (see FIG. 3B) on the lower side of the pulley 18 of the upper end portion of the fixing member 17 as viewed in the vertical direction is circular. The through hole formed on the lower surface on the base end side of the arm portion main body 21 and the upper end portion of the fixing member 17 are coaxially arranged, and the outer peripheral surface 17 a and the inner peripheral surface 21 a are orthogonal to the vertical direction It faces in the radial direction via a fixed gap S1. The gap S1 is, for example, 0.1 (mm).

  An annular convex portion 21 b (see FIG. 3B) which forms an upper end portion of the inner circumferential surface 21 a is formed at a base end portion of the arm portion main body 21. The convex portion 21 b protrudes upward (that is, toward the inside of the arm portion main body 21). The upper surface 21 c of the convex portion 21 b is an annular flat surface orthogonal to the vertical direction. The radially outer end of the pulley 18 is disposed radially outward of the outer circumferential surface 17 a of the fixing member 17. The lower surface 18a (see FIG. 3B) of the pulley 18 is an annular flat surface orthogonal to the vertical direction. The upper surface 21c and the lower surface 18a are opposed in the vertical direction via a fixed gap S2.

  The upper surface 21 c is connected to the upper end of the inner circumferential surface 21 a. The lower surface 18a is connected to the upper end of the outer peripheral surface 17a. Therefore, the gap S2 is connected to the upper end of the gap S1. The gap S2 is wider than the gap S1. That is, the gap S1 is narrower than the gap S2. Further, the length of the gap S2 in the radial direction is shorter than the length of the gap S1 in the vertical direction. That is, the length in the vertical direction of the gap S1 is longer than the length in the radial direction of the gap S2.

  In this embodiment, a clearance S1 which is a radial gap between the arm portion main body 21 and the fixing member 17 (specifically, a radial gap between the through hole of the arm portion main body 21 and the upper end portion of the fixing member 17) The gap S2 of the robot 1 is a gap between the arm portion main body 21 and the pulley 18 in the vertical direction (specifically, the gap between the convex portion 21b and the pulley 18 in the vertical direction) and connected to the upper end of the gap S1. A seal portion 43 for suppressing the flow of gas from the inside to the outside of the robot 1 is formed. That is, the joint portion 10 is formed with a seal portion 43 whose longitudinal cross-sectional shape is L-shaped. In the joint unit 10, the gap S2 and the gap S1 are arranged in this order from the inside of the robot 1 to the outside of the robot 1. The seal portion 43 functions to suppress the flow of gas from the inside of the main body 5 and the inside of the first arm 7.

  In the joint portion 10, the arm portion main body 21 is a first seal member for forming the seal portion 43, and the fixing member 17 and the pulley 18 are second seal members for forming the seal portion 43. In the present embodiment, the fixing member 17, the pulley 18 and the arm portion main body 21 are formed of an aluminum alloy. That is, the arm portion main body 21 as the first seal member, and the fixing member 17 and the pulley 18 as the second seal member are formed of the same material. Further, in the joint portion 10, the gap S1 is a first gap, the gap S2 is a second gap, the upper surface 21c of the convex portion 21b is a first plane, and the lower surface 18a of the pulley 18 is a second It is a plane. Moreover, in the joint unit 10, the first arm unit 7 is a first member, and the main body unit 5 is a second member.

  In the joint portion 11, the fixed shaft 25 is disposed inside the distal end side of the arm portion main body 21. The fixed shaft 25 is formed in an elongated cylindrical shape whose axial direction is in the vertical direction. The pulley 27 is fixed to the upper end of the fixed shaft 25. The pulley 27 is disposed inside the proximal end side of the arm body 29. The bearing holding member 26 is formed in an annular shape. The bearing holding member 26 is fixed to the upper surface side of the tip portion of the arm portion main body 21 by a plurality of stainless steel screws 40. A portion of the bearing pressing member 26 is disposed in a through hole formed on the upper surface of the tip end portion of the arm portion main body 21. The bearing pressing member 26 has a function of pressing a bearing 45 described later from the upper side.

  The fixing member 32 is fixed to the lower surface on the proximal end side of the arm portion main body 29. The outer peripheral surface of the upper end portion of the fixing member 32 is in contact with the inner peripheral surface of the through hole formed on the lower surface of the base end portion of the arm portion main body 29. The pulley 33 is fixed to the lower end of the fixing member 32. The fixing member 32 is inserted on the inner peripheral side of the bearing pressing member 26, and the lower end portion of the fixing member 32 and the pulley 33 are disposed inside the distal end side of the arm portion main body 21. A belt (not shown) is stretched over the pulleys 33 and 18.

  The fixed shaft 25 is disposed on the inner peripheral side of the fixed member 32 and the pulley 33. The fixed member 32 and the pulley 33 are rotatably supported by the fixed shaft 25 via a bearing 44. Further, the fixing member 32 and the pulley 33 are rotatably supported at the tip of the arm portion main body 21 via a bearing 45. Therefore, the fixing member 32 is rotatable with respect to the arm portion main body 21 and the fixing shaft 25. That is, the second arm 8 is rotatable relative to the first arm 7.

  The shape of the inner circumferential surface 26a (see FIG. 4B) of the bearing holding member 26 when viewed in the vertical direction is circular. Further, the shape of the outer peripheral surface 32a (see FIG. 4B) of the portion of the fixing member 32 facing the inner peripheral surface 26a when viewed from the up and down direction is circular. The bearing holding member 26 and the fixing member 32 are coaxially disposed, and the inner circumferential surface 26 a and the outer circumferential surface 32 a are opposed to each other in the radial direction orthogonal to the up and down direction via a constant gap S3. The gap S3 is, for example, 0.1 (mm).

  The bearing holding member 26 is formed with an annular convex portion 26 b which constitutes an upper end portion of the inner circumferential surface 26 a. The convex portion 26 b protrudes upward (i.e., toward the second arm portion 8). The upper surface 26c of the convex portion 26b is an annular flat surface orthogonal to the vertical direction. The portion of the lower surface of the base end portion of the arm body 29 which is disposed radially outward of the fixing member 32 (hereinafter referred to as "lower surface 29a") is an annular plane orthogonal to the vertical direction. There is. The upper surface 26c and the lower surface 29a are opposed in the vertical direction via a fixed gap S4. The upper surface 26c is connected to the upper end of the inner circumferential surface 26a. The lower surface 29a is connected to the upper end of the outer peripheral surface 32a. Therefore, the gap S4 is connected to the upper end of the gap S3. The gap S3 is narrower than the gap S4. Further, the length in the vertical direction of the gap S3 is longer than the length in the radial direction of the gap S4.

  In this embodiment, a clearance S3 which is a radial clearance between the bearing holding member 26 and the fixing member 32, and a vertical clearance between the bearing holding member 26 and the arm main body 29 (specifically, the convex portion 26b and the arm A seal portion 46 for suppressing the flow of gas from the inside of the robot 1 to the outside of the robot 1 is formed by the clearance S4 which is the clearance in the vertical direction with the main part body 29 and connected to the upper end of the clearance S3. There is. That is, the joint portion 11 is formed with the seal portion 46 whose longitudinal cross-sectional shape is L-shaped. In the joint portion 11, the gap S3 and the gap S4 are arranged in this order from the inside of the robot 1 to the outside of the robot 1. The seal portion 46 functions to suppress the flow of gas from the inside of the first arm 7 and the inside of the second arm 8.

  In the joint portion 11, the bearing pressing member 26 is a first seal member for forming the seal portion 46, and the arm portion main body 29 and the fixing member 32 are a second seal member for forming the seal portion 46. . In the present embodiment, the bearing pressing member 26, the arm portion main body 29, and the fixing member 32 are formed of an aluminum alloy. That is, the bearing pressing member 26 as the first seal member, and the arm portion main body 29 and the fixing member 32 as the second seal member are formed of the same material. Further, in the joint portion 11, the gap S3 is a first gap, the gap S4 is a second gap, the upper surface 26c of the convex portion 26b is a first plane, and the lower surface 29a of the arm portion main body 29 is It is a second plane. In the joint 11, the first arm 7 is a first member, and the second arm 8 is a second member.

  In the joint portion 12, a cylindrical hollow shaft portion 29 b which protrudes upward from the lower end side of the arm portion main body 29 is formed inside the arm portion main body 29. The seal member 34 is formed in an annular shape. The seal member 34 is fixed to the upper surface side of the tip portion of the arm portion main body 29 by a stainless steel screw 41. The seal member 34 is disposed in a through hole formed on the upper surface of the tip of the arm body 29.

  The fixing member 38 is fixed to the lower surface of the hand base 37. The pulley 39 is fixed to the lower end of the fixing member 38. The upper end portion of the pulley 39 is inserted on the inner peripheral side of the seal member 34, and the lower end portion of the pulley 39 is disposed inside the distal end side of the arm portion main body 29. A belt (not shown) is stretched over the pulleys 39 and 27. The hollow shaft portion 29 b is disposed on the inner peripheral side of the pulley 39. The fixing member 38 and the pulley 39 are rotatably supported by the hollow shaft portion 29 b via a bearing 47. Therefore, the fixing member 38 and the pulley 39 are rotatable with respect to the arm portion main body 29. That is, the hand 3 is rotatable with respect to the second arm unit 8.

  The shape of the inner peripheral surface 34a (see FIG. 5B) of the seal member 34 when viewed from the vertical direction is circular. The shape of the outer peripheral surface 39a (see FIG. 5B) of the portion of the pulley 39 facing the inner peripheral surface 34a, as viewed in the vertical direction, is circular. The seal member 34 and the pulley 39 are coaxially arranged, and the inner circumferential surface 34a and the outer circumferential surface 39a are opposed to each other via a constant gap S5 in the radial direction orthogonal to the vertical direction. The gap S5 is, for example, 0.1 (mm).

  The inner peripheral end of the lower end surface of the seal member 34 is formed with a recess 34 b which is recessed upward. The upper surface 34c of the recess 34b is an annular flat surface orthogonal to the vertical direction. An annular step surface 39 b is formed below the outer peripheral surface 39 a of the pulley 39. The step surface 39 b is a plane perpendicular to the vertical direction. The upper surface 34c and the step surface 39b are opposed in the vertical direction via a fixed gap S6. The upper surface 34c is connected to the lower end of the inner circumferential surface 34a. Further, the step surface 39b is connected to the lower end of the outer peripheral surface 39a. Therefore, the gap S6 is connected to the lower end of the gap S5. The gap S5 is narrower than the gap S6. Further, the length in the vertical direction of the gap S5 is longer than the length in the radial direction of the gap S6.

  In this embodiment, the clearance S5 which is a radial clearance between the seal member 34 and the pulley 39, and the clearance in the vertical direction between the seal member 34 and the pulley 39 (specifically, the vertical direction between the recess 34b and the step surface 39b) The seal portion 49 for suppressing the flow of gas from the inside of the robot 1 to the outside of the robot 1 is formed by the clearance S6 and the space S6 connected to the lower end of the space S5. That is, the joint portion 12 is formed with a seal portion 49 whose longitudinal cross-sectional shape is L-shaped. In the joint portion 12, the gap S6 and the gap S5 are arranged in this order from the inside of the robot 1 to the outside of the robot 1. The seal portion 49 functions to suppress the flow of gas from the inside of the second arm 8 and the inside of the hand 3.

  In the joint portion 12, the seal member 34 is a first seal member for forming the seal portion 49, and the pulley 39 is a second seal member for forming the seal portion 49. In the present embodiment, the seal member 34 and the pulley 39 are formed of an aluminum alloy. That is, the seal member 34 which is the first seal member and the pulley 39 which is the second seal member are formed of the same material. Further, in the joint portion 12, the gap S5 is a first gap, the gap S6 is a second gap, the upper surface 34c of the recess 34b is a first plane, and the step surface 39b of the pulley 39 is a second It is a plane. In the joint unit 12, the second arm unit 8 is a first member, and the hand 3 is a second member.

  In the robot 1, a predetermined wiring or the like is passed so as to pass through the inside of the arm portion main bodies 21, 29, the inner peripheral side of the rotating shaft 15, the inner peripheral side of the fixed shaft 25 and the inner peripheral side of the hollow shaft portion 29 b The piping is drawn around.

(Main effects of this form)
As described above, in the present embodiment, the seal portion 43 formed in the joint portion 10 is a gap S1 which is a radial gap between the arm portion main body 21 and the fixing member 17, the arm portion main body 21 and the pulley 18 And a clearance S2 connected to the upper end of the clearance S1. Similarly, in the present embodiment, the seal portion 46 formed in the joint portion 11 has a gap S3 which is a gap in the radial direction between the bearing pressing member 26 and the fixing member 32, the bearing pressing member 26 and the arm portion main body 29. The seal portion 49 which is a gap in the vertical direction and is connected to the upper end of the gap S3 and is formed in the joint portion 12 is a gap S5 which is a gap in the radial direction between the seal member 34 and the pulley 39; A clearance S6 is formed between the seal member 34 and the pulley 39 in the vertical direction, and is connected to the lower end of the clearance S5. Therefore, in the present embodiment, it is possible to simplify the configuration of the seal portions 43, 46, 49 provided in the joint portions 10-12.

  On the other hand, since the seal portion 43 of this embodiment has a simple structure including the gap S1 and the gap S2, when the environmental temperature of the robot 1 fluctuates and the gap S1 is expanded, the seal function of the seal portion 43 There is a possibility that the flow of the gas from the inside of the robot 1 to the outside of the robot 1 can not be suppressed. Further, since the seal portion 43 of this embodiment has a simple structure including the gap S1 and the gap S2, when the environmental temperature of the robot 1 fluctuates and the gap S1 narrows, the arm portion main body 21 and the fixing member There is a possibility that the movement of the joint portion 10 may be disturbed by coming into contact with the portion 17. Therefore, there is a possibility that the sealing function of the sealing portion 43 can not be secured without narrowing the designed gap S1.

  However, in the present embodiment, since the arm portion main body 21 and the fixing member 17 are formed of the same material, even if the environmental temperature of the robot 1 changes or the design gap S1 is narrowed, the arm portion It is possible to keep the gap S1 constant so that the main body 21 and the fixing member 17 do not contact.

  Similarly, in the present embodiment, when the environmental temperature of the robot 1 fluctuates and the gap S3 widens, the sealing function of the seal portion 46 is reduced, and the flow of gas from the inside of the robot 1 to the outside of the robot 1 can be suppressed. The bearing holding member 26 and the fixing member 32 may come into contact with each other to interfere with the operation of the joint portion 11 if the environment temperature of the robot 1 fluctuates and the gap S3 narrows. There is a possibility that the upper gap S3 can not be narrowed, but since the bearing holding member 26 and the fixing member 32 are formed of the same material, even if the environmental temperature of the robot 1 fluctuates, the design also Even if the gap S3 is narrowed, the gap S3 can be kept constant so that the bearing pressing member 26 and the fixing member 32 do not contact with each other.

  Further, if the environment temperature of the robot 1 fluctuates and the gap S5 widens, the seal function of the seal portion 49 may be reduced, and the flow of gas from the inside of the robot 1 to the outside of the robot 1 may not be suppressed. Because, if the environment temperature of the robot 1 fluctuates and the gap S5 narrows, the seal member 34 and the pulley 39 may come into contact with each other to interfere with the operation of the joint 12, so the design gap S5 is narrowed. Although the seal member 34 and the pulley 39 are formed of the same material, the seal is produced even if the environmental temperature of the robot 1 fluctuates or the design gap S5 is narrowed. It is possible to keep the gap S5 constant so that the member 34 and the pulley 39 do not contact.

  Therefore, in the present embodiment, the flow of gas from the inside of the robot 1 to the outside of the robot 1 can be sealed at the sealing portions 43, 46, 49 while simplifying the configuration of the sealing portions 43, 46, 49 provided at the joints 10-12. Can be suppressed by As a result, in the present embodiment, while the configurations of the seal parts 43, 46, 49 provided in the joint parts 10 to 12 are simplified, the outflow of dust generated inside the robot 1 from the joint parts 10 to 12 is suppressed. Becomes possible. In the inside of the robot 1, dust is generated by the influence of the pulleys 18, 27, 33, 39, the belt, the wiring drawn around the inside of the arm portion main bodies 21, 29, and the like.

  In this embodiment, the fixing members 17 and 32, the pulleys 18 and 39, the arm portion bodies 21 and 29, the bearing pressing member 26 and the seal member 34 are formed of an aluminum alloy. Therefore, in the present embodiment, the processing of the fixing members 17 and 32, the pulleys 18 and 39, the arm portion main bodies 21 and 29, the bearing pressing member 26 and the seal member 34 is facilitated. Further, in this embodiment, it is possible to reduce the weight of the fixing members 17, 32, the pulleys 18, 39, the arm portion bodies 21, 29, the bearing pressing member 26 and the seal member 34.

  In the present embodiment, the case body 14 and the pivot shaft 15 are also formed of an aluminum alloy. Further, the lid members 22 and 23, the fixing member 24, the fixed shaft 25 and the pulley 27 are also formed of an aluminum alloy. That is, the first arm 7 is formed of an aluminum alloy. Further, the lid members 30, 31 and the pulley 33 are also formed of an aluminum alloy, and the second arm portion 8 is formed of an aluminum alloy. The hand base 37 and the fixing member 38 are also formed of an aluminum alloy.

(Other embodiments)
The embodiment described above is an example of the preferred embodiment of the present invention, but is not limited to this, and various modifications can be made without departing from the scope of the present invention.

  In the embodiment described above, the arm portion main body 21, the fixing member 17 and the pulley 18 may be formed of the same material other than the aluminum alloy. In the embodiment described above, the bearing holding member 26, the arm portion main body 29 and the fixing member 32 may be formed of the same material other than the aluminum alloy, and the seal member 34 and the pulley 39 are the aluminum alloy. It may be formed of the same material other than.

  In the embodiment described above, the gap S2 and the gap S1 may be equal to each other, or the gap S2 may be narrower than the gap S1. Similarly, the gap S4 and the gap S3 may be equal to each other, or the gap S4 may be narrower than the gap S3. Further, the gap S6 may be equal to the gap S5, or the gap S6 may be narrower than the gap S5.

  In the embodiment described above, the radial length of the gap S2 may be equal to the vertical length of the gap S1, or may be longer than the vertical length of the gap S1. Similarly, the radial length of the gap S4 may be equal to the vertical length of the gap S3 or may be longer than the vertical length of the gap S3. Further, the length of the gap S6 in the radial direction may be equal to the length of the gap S5 in the vertical direction, or may be longer than the length of the gap S5 in the vertical direction.

  In the embodiment described above, the arm 4 may be configured by three or more arm portions rotatably connected to each other. Further, in the above-described embodiment, the robot 1 is a robot for transporting the object to be transported, but the robot to which the present invention is applied may be a robot used for another application.

1 Robot (industrial robot)
3 hand (second member)
4 arm 5 body (second member)
7 First arm (first member)
8 Second arm part (tip end side arm part, first member, second member)
10 to 12 joints 17 fixing member (second sealing member)
17a, 32a, 39a Outer peripheral surface 18 Pulley (second seal member)
18a, 29a lower surface (second plane)
21 arm body (first seal member)
21a, 26a, 34a Inner circumferential surface 21c, 26c, 34c Upper surface (first plane)
26 Bearing retainer (first seal)
29 arm body (second seal member)
32 Fixing member (second seal member)
34 Seal member (1st seal member)
39 Pulley (2nd seal member)
39b Stepped surface (second plane)
43, 46, 49 Seal part S1, S3, S5 Clearance (first clearance)
S2, S4, S6 Gap (second gap)

Claims (7)

In an industrial robot provided with a joint portion which is a connecting portion between a first member and a second member rotatable relative to the first member,
The joint portion is formed with a seal portion for suppressing the flow of gas from the inside of the industrial robot to the outside of the industrial robot.
The first member includes a first seal member for forming the seal portion,
The second member includes a second seal member for forming the seal portion,
Assuming that the direction orthogonal to the axial direction of the rotation of the second member with respect to the first member is a radial direction,
The seal portion is a first gap, which is a gap in the radial direction between the first seal member and the second seal member, and a gap in the axial direction, between the first seal member and the second seal member. And a second gap connected to one end of the first gap in the axial direction,
An industrial robot, wherein the first seal member and the second seal member are formed of the same material. The first seal member has an inner circumferential surface whose shape when viewed in the axial direction is a circular shape, and an annular flat surface connected to one end of the inner circumferential surface in the axial direction and orthogonal to the axial direction And the first plane of the
The second seal member has a circular shape when viewed in the axial direction and an outer circumferential surface facing the inner circumferential surface via the first gap which is constant in the radial direction, and the axial direction And a second flat surface connected to one end of the outer peripheral surface and having an annular and planar shape orthogonal to the axial direction and facing the first flat surface with the second gap being constant in the axial direction The industrial robot according to claim 1, characterized in that: The first gap is narrower than the second gap,
The industrial robot according to claim 1, wherein a length of the first gap in the axial direction is longer than a length of the second gap in the radial direction.   The industrial robot according to any one of claims 1 to 3, wherein the first seal member and the second seal member are formed of an aluminum alloy. A hand as the second member on which the object to be conveyed is mounted, and an arm to which the hand is pivotably connected to the front end side,
The arm includes a distal end side arm portion as the first member in which the hand is rotatably coupled to the distal end side, and a first arm portion in which the proximal end side of the distal end side arm portion is rotatably coupled. The industrial robot according to any one of claims 1 to 4, comprising: A hand on which an object to be transferred is mounted, and an arm rotatably connected to the tip end side of the hand;
The arm is a distal end side arm portion as the second member in which the hand is pivotably connected to the distal end side, and the first member in which a proximal end side of the distal end side arm portion is pivotably connected An industrial robot according to any one of claims 1 to 4, comprising: a first arm portion of It has a hand on which the object to be transported is mounted, an arm to which the hand is rotatably connected to the tip end, and a main body as the second member to which the base end of the arm is rotatably connected. ,
The arm is a first arm as the first member whose proximal end is pivotally connected to the main body, and a distal end arm that is pivotally connected to the distal end of the first arm. The industrial robot according to any one of claims 1 to 4, comprising:

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