JPH0453693A - Joint device for clean robot - Google Patents

Abstract

PURPOSE:To surely attract the dust caused from the sheet tip and also to prevent the dusting from a hose into a clean room, by forming the inner room dimension in such a size as to make the inner room pressure to be a uniform attraction pressure, when the air inside the inner room is discharged by a discharge hose. CONSTITUTION:Plural air holes 21e where a turning body 21 is communicated with an inner room 21c from outer air side of the part supported on a base body 20 at the opposing part of the cylindrical wall of the turning body 21 and base body 20 are provided on either the base body 20 or turning body 21 and the inner room 21c is made in a size that it attains uniform attraction pressure at the time when the air inside the inner room 21c is discharged by the discharge hose 11a. When the air of the inner room 21c is discharged by the discharge hose 11a, a uniform attraction pressure is generated inside the inner room 21c, so the air of the outer air side of the part where the turning body 21 is supported on the base body 20 at the opposing part of the cylindrical wall of the turning body 21 and base body 20, is passed through the plural air holes 21e, flowed uniformly to the inner room 21c and discharged out of the inner room by the discharge hose 11a thereafter.

Description

DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] This invention relates to a joint device for a clean robot.

[Prior Art] In recent years, a large number of so-called clean robots, which prevent dust generation into clean rooms, have been used in semiconductor manufacturing factories.

Figures W46 to W48 show such conventional clean robots. In each figure, (1) is a clean robot,
(la) is the main body of the clean robot installed on the floor (5) with many through holes called grating in the clean room, (2) is the main body of the clean robot (1)
) is attached to the main body (la) so as to be able to rise and fall freely;
(3) is an arm.

The arm (3) is a first arm (3A) and a second arm (3B).
), the first arm (3A) and the elevating body (2) are at the first joint (4A), and the first arm (3A) and the second arm (3B) are at the second joint (4B). It is connected.

Furthermore, there is a third joint (4C) at the tip of the second arm (3B).
is attached, and generally a hand device (not shown) for gripping a workpiece (not shown) is attached to the lower surface of the third joint (4C).

Figures 6 and 8 are cross-sectional views of the third joint (4C), in which (6) is a base body fixed to the second arm (3B) and having a ring-shaped recess (6a) on the lower surface; A servo motor (7) is attached to (6) with the output shaft (7a) facing downward, and a planetary reducer (8) is attached to the output shaft (7a).
are connected.

(9) is a rotating body in which a cylindrical body (9b) is fixed to stand on a substantially disc-shaped bottom body (9a). The base body of (9) (
9a) is connected to the drive section (8a) of the planetary reduction gear (8).

Then, the servo motor (7) is operated and the planetary reducer (8)
) is configured so that when the drive unit (8a) of the drive unit (8a) is driven, the rotating body (9) connected thereto rotates by a predetermined amount.

Note that a hand or the like (not shown) is normally attached to the lower surface (9a'') of the rotating body (9).

(6b) is a cylindrical body (9b) in the recess (6a) of the base (6).
The second labyrinth groove (6b) is a labyrinth groove formed in a ring shape facing the outer wall of the second labyrinth groove (6b).
) and an exhaust pump (llb)
)It is connected to the.

When the exhaust system (11) is operated, the air in the clean room is pumped through the gap [9c] between the rotating body (9) and the base body (6).
) flows into the labyrinth groove (6b), and the labyrinth groove (
The same amount of air is exhausted from each of the three locations 6b) through the exhaust device to the lower part of the floor (5).

The joint device of a conventional clean robot is configured as described above, and is controlled by a control device (not shown) to move the elevating body (2), the first joint (4A), the second joint (4B), and the third joint. When the joint (4C) is driven, the clean robot (1)
performs a predetermined action.

When the robot operates, a large amount of dust is generated from the bearing (10).

However, since the exhaust system (11) is in operation.

For example, when the rotating body (9) of the third joint (4C) rotates.

The dust generated from the bearing (10) is exhausted to the lower part of the floor (5) through the labyrinth groove (6b) → exhaust hose (lla) → exhaust pump (llb) as shown by the arrow in FIG.

Therefore, dust generated from the bearing (10) is not discharged into the clean room.

In addition, although the third joint (4C) was explained here,
The structure of the first joint (4A) and the second joint (4B) also
Almost identical to joint (4C).

[Problems to be Solved by the Invention] In the conventional joint device for a clean robot as described above, the air in the clean room is connected to the rotating body (9).

From the gap (9c) with the base (6) to the labyrinth groove (6b)
By being sucked into the bearing (lO), dust generated from the bearing (lO) is also sucked in, thereby preventing it from entering the clean room.

However, from the above-mentioned gap (9c) to the labyrinth groove (6b)
The speed at which air is sucked into (hereinafter referred to as suction speed) is not constant9. For example, the suction speed Va at point A nearest to the exhaust hose (lla) is different from the suction speed Va at point B farthest from the exhaust hose (lla). Therefore, the relationship Va>Vb holds.

This means that the suction pressure Pa at point A and the suction pressure Pa at point B are in the relationship P a > P b, and point A is
This is because it sucks in more air in the clean room than a point.

Therefore, in order to prevent the suction speed vb at point B from decreasing below the critical speed required to prevent dust generation (for example, 0.3 m/s), exhaust hoses (Ua
) to ensure the suction pressure pb at point B.1 For example, in this conventional example, exhaust hoses (lla) are connected to three locations of the labyrinth groove (6b), respectively.

Of course, some robots may have three or more locations.

As explained above, in the conventional joint device of a clean robot, multiple exhaust hoses (lla) are connected, as in the third joint (4C) shown in Fig. 6, so that the robot can move. When the arms (3A) and (3B) rotate, the adjacent exhaust hoses (lla) come into contact with each other and rub against each other, causing a problem in that dust is generated in the clean room from the contact points.

This invention was made to solve this problem, and provides a joint device for a clean robot that prevents a plurality of exhaust hoses (lla) from coming into contact with each other and generating dust from the contact points. .

[Means for Solving the Problems] A joint device for a clean robot according to the present invention includes a base body fixed to an arm and a cylindrical body with a bottom. A portion where the rotating body is pivotally supported on the base body, which has a pivotally supported rotating body and one exhaust hose that exhausts air from the inner chamber to the outside, and the cylindrical wall of the rotating body faces the base body. A plurality of ventilation holes communicating with the inner chamber from the outside air side are provided on either the base body or the rotating body, and the size is such that when the air inside the inner chamber is exhausted from the inner chamber with an exhaust hose, the suction pressure in the inner chamber is uniform. It's Nishide.

[Function] The joint device of the clean robot configured as described above, when the air in the inner chamber is exhausted by one exhaust hose,
Since uniform suction pressure is generated in the inner chamber, the air is on the outside air side from the part where the rotating body is pivotally supported on the base at the opposing part between the cylindrical wall of the rotating body and the base.

The air flows uniformly into the interior through multiple ventilation holes, and is then exhausted to the outside through a single exhaust hose.

[Example] An example of the present invention will be described below with reference to FIGS. 1 and 2.

In the figure, the same or corresponding parts as those of the conventional apparatus shown in FIGS. 6 to 8 are designated by the same reference numerals, and the explanation thereof will be omitted, and only the different parts will be explained.

(20) is a base body fixed to the second arm (3B) and has a ring-shaped recess (20a) on the lower surface; (21) is a base body (21b) having a substantially disc-shaped bottom body (21a) with a cylindrical body (21b) standing thereon; A rotating body consisting of a cylindrical body with a bottom that is fixed to a cylindrical body.

The open end side of the cylindrical body (21b) is inserted into the recess (20a) of the base (20) to form an inner chamber (21c) within the cylinder, and the recess (20a) of the base (20) and the cylindrical body (21b) and the inner wall of the bearing (lO
) is pivotally supported on the base body (20).

(zob) is a labyrinth groove formed in an annular shape in the concave portion (20a) of the base (20), and is arranged facing the outer wall of the nine-cylindrical body (21b) and closer to the outside air than the bearing (lO).

(21d) is a ventilation hole provided in the cylindrical body (21b) from the part facing the labyrinth groove (20b) to the inner chamber (21c).
), and as shown in Figure 2, the rotating body (21)
They are arranged at three locations at approximately equal distances in the radial direction from the center of rotation (R).

(21e) is an exhaust hole provided in the bottom body (21a) of the rotating body (21), with the - side being the inner chamber (21c) and the other side being the bottom body (21a).
1a), and one exhaust hose (lla) is connected to the opening on the outer periphery of the bottom body (21a).

When the exhaust system (11) is operated, the air in the interior room (21c) is exhausted to the bottom of the floor (5) of the clean room, that is, to the outside of the interior room.

In addition, when the exhaust device (11) is operated, the inner chamber (21c) formed between the base body (20) and the rotating body (21) becomes negative pressure, and uniform suction pressure is maintained. It has a size (for example, 300 cubic centimeters).

Next, the operation of this embodiment will be explained.

The clean robot (1) operates and at the same time the exhaust system (1)
1) is operated, the inside of the interior chamber (21c) becomes negative pressure, so the air in the clean room flows into the rotating body (21) and the base body (21c).
It flows into the labyrinth groove (20b) from the gap (20c) with ) is exhausted to the bottom.

At this time, the suction pressure inside the inner chamber (21c) is equal, so 9
The amount of air flowing from the labyrinth groove (20b) to the inner chamber (21c) through the ventilation hole (21d) is determined by the amount of air flowing through the ventilation hole (21d) at three locations.
d) is also the same.

Therefore, a labyrinth groove (20b) is generated from the bearing (1G).
The dust that has flowed into the inner chamber (21c) equally flows into the inner chamber (21c) from the nearest ventilation hole (21d), and is then discharged outside the inner chamber (21c) through one exhaust hose (lla). .

That is, dust generated from the bearing (lO) of the third joint (4C) is discharged to the outside of the inner chamber (21c) by one exhaust hose (lla) connected to the third joint (4C).

Therefore, even when the robot operates, the plurality of exhaust hoses (lla) connected to the joints do not come into contact with each other and rub, unlike in the conventional device, and dust is not emitted from the contact points into the clean room.

FIG. 3 is a diagram corresponding to FIG. 2 showing another embodiment according to the present invention.

In this embodiment, the ventilation hole (23a) provided in the cylindrical body (23)
is set to 4 locations, which is more than in the second embodiment, and according to this, the 0 point closest to the ventilation hole (23a) and the 1st ventilation hole (23a)
) The difference in suction pressure between the labyrinth groove (20b) and the point D furthest from the gap (
20c) into the labyrinth groove (20b), the difference in the suction speed of the air sucked into the labyrinth groove (20b) is reduced, making it easier to manage the suction speed.

It goes without saying that increasing the number of ventilation holes (23a) will be more effective.

FIG. 4 relates to this invention. FIG. 2 is a diagram corresponding to FIG. 1 showing still another embodiment.

In the figure, (31) has a bottom body (31a) and a cylindrical body (31b).
) is fixed, and 20 rotating bodies (31
) is pivotally supported by the base (30) with a bearing (lO) provided at a position where the cylindrical body (31b) faces the base (30) from the outside.

Further, the first rotating body (31) is provided with a ring-shaped labyrinth groove (31d) facing the base body (30) and closer to the outside air than the bearing (10).

(30a) is the labyrinth groove (31d) and the inner chamber (31c)
A plurality of ventilation holes are provided in the base body (30) so as to communicate with each other.

(31e) is an exhaust hole provided in the bottom body (31a), and one exhaust hose (
lla) is connected.

When the exhaust system (11) is operated, uniform suction pressure is generated in the inner chamber (31c), so that the air in the clean room flows into the labyrinth from the gap (30c) between the base body (30) and the rotating body (31). It flows into the groove (31d), passes through the ventilation hole (30a) and the inner chamber (31c) as shown by the arrow in Fig. 4, and is then exhausted to the lower part of the floor (5) in the clean room via the exhaust hose (lla). Ru.

Therefore, in this embodiment as well, dust generated from the bearing (10) is removed from the inner chamber (21c) by one exhaust hose (lla).
) Since the exhaust hoses (lla) can be discharged to the outside, there is no possibility that the plurality of exhaust hoses (lla) come into contact with each other and rub against each other, unlike in conventional devices, and dust is not generated from the contact points into the clean room.

In this case, as shown in Figure 5, the exhaust hose (
lla) is connected to the exhaust hole (30b) on the base (30).
It is also possible to provide it on the side.

[Effects of the Invention] As explained above, in the joint device for a clean robot according to the present invention, the base body is fixed to the arm.

A rotating body made of a cylindrical body with a bottom is pivotally supported on the base so as to form an inner chamber between the inner surface of the cylinder and the base.

Furthermore, one exhaust hose is provided to exhaust air from the inner chamber to the outside of the inner chamber, and it communicates with the inner chamber from the outside air side from the part where the rotating body is pivotally supported on the base at the opposing part of the cylindrical wall of the rotating body and the base. A plurality of ventilation holes are provided in either the base body or the rotating body, and the inner chamber is sized so that when the air inside the inner chamber is exhausted by an exhaust hose, the suction pressure in the inner chamber is equalized. When the exhaust system is operated and the air inside the interior is exhausted to the outside through the exhaust hose, an even suction pressure is generated inside the interior, and the amount of air flowing into the interior through the multiple ventilation holes is Since all the ventilation holes are the same, the dust generated from the part where the rotary body is pivoted to the base body.

The same amount flows into the inner chamber through the nearest ventilation hole, and is then discharged outside the inner chamber with a single exhaust hose, eliminating the need to use multiple hoses. It has the effect of reliably suctioning dust and preventing it from entering the clean room from the hose.

[Brief explanation of drawings]

Fig. 1 is a cross-sectional view showing one embodiment of a joint device for a clean robot according to the present invention, Fig. 2 is a cross-sectional view taken along arrows -■ in Fig. Ii1, and Fig. 3 is a cross-sectional view showing another embodiment according to the present invention. FIG. 2 is a diagram corresponding to FIG. 2, FIG. 4 and FIG. 5 are diagrams corresponding to FIG. FIG. 8 is a view corresponding to FIG. 1 showing the apparatus, and FIG. 8 is a sectional view taken along the line ■-■ in FIG. 7. In the figure, 1...Clean robot, 3A, 3B...
...Arm, 6,20.30...Base, 9,21゜3
1-... Rotating body, 11a... Exhaust hose, 21c, 3
1c...Inner chamber, 21e, 31e...Vent holes. In addition. In the corner diagram. The same reference numerals indicate the same or equivalent parts.

Claims (1)

[Claims] a base fixed to the arm; a rotating body made of a cylindrical body with a bottom and pivoted to the base so as to form an inner chamber between the inner surface of the cylinder and the base; a plurality of exhaust hoses that communicate with the inner chamber from the outside air side of the part where the rotating body is pivotally supported on the base, at a portion where the cylindrical wall of the rotating body faces the base body; A ventilation hole is provided in either the base body or the rotating body, and is sized so that when the air in the interior chamber is exhausted by the exhaust hose, the suction pressure in the interior chamber is uniform. Features: Clean robot joint device.