WO2015174152A1

WO2015174152A1 - Wrist structure of robot hand

Info

Publication number: WO2015174152A1
Application number: PCT/JP2015/060093
Authority: WO
Inventors: 崇行福島
Original assignee: 川崎重工業株式会社
Priority date: 2014-05-12
Filing date: 2015-03-31
Publication date: 2015-11-19
Also published as: TWI696533B; TW201603975A; JP2015213999A; JP6619922B2; CN106414004A

Abstract

This wrist structure of a robot hand (1) is provided with: a hollow outer wrist shaft (5) that extends along a common rotation axis (L) and is connected at the top to a lower hand (3); a hollow inner wrist shaft that extends along the common rotation axis (L) through the inside of the outer wrist shaft (5) and is connected at the top to an upper hand (2), said inner wrist shaft (4) having an opening part (8) opening to the inside of the lower hand (3); and a harness handling mechanism (9) that supports a harness (7) in a movable manner independently from the inner wrist shaft (4) and the lower hand (3), respectively, said harness extending from the inside of the inner wrist shaft (4) into the lower hand (3) through the opening part (8). According to this robot hand (1), the relative rotation angle between the upper hand (2) and the lower hand (3) can be increased more than before.

Description

Wrist structure of robot hand

The present invention relates to a wrist structure of a robot hand having an upper hand and a lower hand having a common rotational axis, and more particularly to a wrist structure of a robot hand provided with a harness processing mechanism routed around the robot hand.

Generally, a robot hand has a harness such as an electric wiring or air piping drawn therein (Patent Document 1). In the case of a single hand, the harness can be pulled into the hand from the upper end opening of a cylindrical wrist shaft whose upper end is connected to the robot hand.

On the other hand, in the case of a double hand having an upper hand and a lower hand, since the wrist shaft of both hands has a double tube structure, the harness can be routed in a simple structure as in the case of a single hand. Can not.

7 and 8 show an example of a wrist structure of a conventional double hand 50. FIG. The double hand 50 includes an upper hand 51 and a lower hand 52, a cylindrical inner wrist shaft 53 whose upper end is connected to the upper hand 51, and a cylindrical outer side whose upper end is connected to the lower hand 52. The wrist shaft 54 has a double tube structure.

Thus, in the double hand 50, since the wrist shaft has a double tube structure, the harness 55 can be pulled into the upper hand 51 in the same manner as the single hand, but the harness 56 to the lower hand 52 can be pulled. Retraction needs to be performed through an opening 57 formed in the inner wrist shaft 53.

As shown in FIG. 9, the opening 57 is formed in the middle of the longitudinal direction of the inner wrist shaft 53. For this reason, the inner wrist shaft 53 has a structure in which the upper portion 53A and the lower portion 53B are connected by the connecting portion 53C left after the opening is formed with the opening 57 interposed therebetween.

In the example shown in FIGS. 7 and 8, the harness 56 drawn into the lower hand 52 passes through the harness protection tube 58 fixed to the bottom surface inside the lower hand 52 and reaches the tip of the hand. It extends.

In the conventional double hand 50 described above, as shown in FIG. 10, when the upper hand 51 and the lower hand 52 are relatively rotated, the edge of the opening 57 of the inner wrist shaft 53 is not attached to the harness. It contacts the protective tube 58. Thereby, the edge part of the opening part 57 is contact | abutted to the harness 56, and it prevents that the harness 56 is disconnected.

JP 2005-246532 A

However, as described above, since the harness protection tube 58 is fixed to the bottom surface inside the lower hand 52, when the edge of the opening 57 of the inner wrist shaft 53 comes into contact with the harness protection tube 58, The relative rotation of both

hands

51 and 52 becomes impossible.

Thus, in the conventional double hand 50, the relative rotation range of the

hands

51 and 52 is limited to the range until the edge of the opening 57 of the inner wrist shaft 53 contacts the harness protection tube 58. Therefore, it has been impossible to set the relative rotation angle of both the

hands

51 and 52 to 180 ° or more.

If the relative rotation range of both

hands

51 and 52 is limited, the freedom of movement of the robot is limited. For example, when operating the robot using only one hand, a complicated movement pattern is unavoidable. There is a problem that.

The present invention has been made in view of the above-described problems of the prior art, and provides a wrist structure for a robot hand that can increase the relative rotation angle of the upper hand and the lower hand as compared with the conventional art. Objective.

In order to solve the above problems, the present invention according to the first aspect is a wrist structure of a robot hand having an upper hand and a lower hand having a common rotation axis, and extends along the common rotation axis. A hollow outer wrist shaft having an upper end connected to the lower hand, and a hollow inner wrist extending through the inside of the outer wrist shaft along the common rotation axis and having an upper end connected to the upper hand An wrist wrist shaft having an opening formed to open to the inside of the lower hand, and from the inside of the inner wrist shaft to the inside of the lower hand through the opening. And a harness processing mechanism for supporting the extended harness so as to be movable independently from each of the inner wrist shaft and the lower hand.

According to a second aspect of the present invention, in the present invention according to the first aspect, the harness processing mechanism includes a movable support member that is rotatable about the common rotation axis independently of the inner wrist shaft. Features.

According to a third aspect of the present invention, in the present invention according to the second aspect, the movable support member is inserted into the annular main body portion and the annular main body portion disposed inside the inner wrist shaft. And a harness support portion provided in the annular main body portion for supporting the harness extending inside the lower hand.

According to a fourth aspect of the present invention, in the present invention according to the third aspect, the harness processing mechanism is configured such that the opening portion of the inner wrist shaft is moved along with a relative rotational operation of the upper hand and the lower hand. When the edge portion is pressed against the harness support portion, the harness support portion is configured to rotate around the common rotation axis together with the annular main body portion.

The present invention according to a fifth aspect is the present invention according to the third or fourth aspect, wherein the annular main body is rotatable about the common rotation axis by a bearing member disposed inside the inner wrist shaft. It is supported by.

The present invention according to a sixth aspect is the present invention according to any one of the third to fifth aspects, wherein the harness support portion includes an extending portion extending in a radial direction from the annular main body portion, and the extending portion. And a holding portion that holds the harness.

According to a seventh aspect of the present invention, in the present invention according to any one of the first to sixth aspects, a range in which the upper hand and the lower hand are relatively rotatable is 180 ° or more. Features.

The present invention according to the eighth aspect is a harness processing mechanism in the wrist structure of the robot hand according to any one of the first to seventh aspects.

In the present specification, “upper (upper side)” and “lower (lower side)” mean the direction in which the upper hand is located when viewed from the lower hand along the common rotation axis of both hands. The direction in which the lower hand is located when viewed from the upper hand is referred to as “lower (lower)” and does not necessarily mean the upper and lower sides in the direction of gravity.

According to the present invention, it is possible to provide a wrist structure of a robot hand that can expand the relative rotation angle of the upper hand and the lower hand as compared with the conventional one.

The longitudinal cross-sectional view which showed the wrist structure of the robot hand by one Embodiment of this invention with the robot hand. FIG. 2 is a cross-sectional view taken along the line II-II in FIG. The perspective sectional view which expanded and showed a part of wrist structure of the robot hand shown in FIG. The schematic diagram for demonstrating the effect | action of the harness processing mechanism in the wrist structure of the robot hand shown in FIG. The other schematic diagram for demonstrating the effect | action of the harness processing mechanism in the wrist structure of the robot hand shown in FIG. The other schematic diagram for demonstrating the effect | action of the harness processing mechanism in the wrist structure of the robot hand shown in FIG. The schematic diagram which showed the state in which the relative rotation angle of an upper hand and a lower hand became the maximum in the robot hand shown in FIG. The schematic diagram which showed the state in which the relative rotation angle of an upper hand and a lower hand became the maximum in one modification of the wrist structure of the robot hand shown in FIG. The longitudinal cross-sectional view which showed the wrist structure of the conventional robot hand with the robot hand. FIG. 8 is a transverse sectional view taken along line XIII-XIII in FIG. 7. The perspective view which expanded and showed a part of wrist structure of the conventional robot hand shown in FIG. FIG. 8 is a schematic diagram illustrating a state in which the relative rotation angle between the upper hand and the lower hand is maximized in the conventional robot hand illustrated in FIG. 7.

Hereinafter, a wrist structure of a robot hand according to an embodiment of the present invention will be described with reference to the drawings.

As shown in FIGS. 1 and 2, the robot hand 1 in this embodiment includes an upper hand 2 and a lower hand 3 having a common rotation axis L. The wrist structure of the robot hand 1 includes a hollow inner wrist shaft 4 whose upper end is connected to the upper hand 2 and a hollow outer wrist shaft 5 whose upper end is connected to the lower hand 3. The inner wrist shaft 4 is inserted into the outer wrist shaft 5, and both

wrist shafts

4, 5 are extended along a rotation axis L common to both

hands

2, 3.

The upper hand 2 is pressed against the edge of the hollow hand base 2A, the blade member 2B mounted on the front end portion of the hand base 2A, and the substrate S (for example, a semiconductor manufacturing wafer) placed on the blade member 2B. Edge grip 2C.

Similarly, the lower hand 3 also has a hollow hand base 3A, a blade member 3B attached to the front end portion of the hand base 3A, and an edge grip pressed against the edge of the substrate S placed on the blade member 3B. 3C.

In the present embodiment, the inner wrist shaft 4 extends upward through the hand base 3 A of the lower hand 3, and the upper end of the inner wrist shaft 4 is connected to the hand base 2 A of the upper hand 2. .

Inside the inner wrist shaft 4, a harness 6 for the upper hand and a harness 7 for the lower hand are inserted. These

harnesses

6 and 7 are, for example, electric wires that supply electric power to drive motors (not shown) of the edge grips 2C and 3C.

The upper hand harness 6 is drawn into the hand base 2A of the upper hand 2 through the upper end opening of the inner wrist shaft 4. On the other hand, the harness 7 for the lower hand is halfway in the longitudinal direction of the inner wrist shaft 4 through the opening 8 formed in the inner wrist shaft 4 so as to open inside the hand base 3A of the lower hand 3. To the inside of the hand base 3A of the lower hand 3.

As shown in FIGS. 1 and 3, the opening 8 of the inner wrist shaft 4 through which the lower hand harness 7 is inserted is formed in the middle of the inner wrist shaft 4 in the longitudinal direction. For this reason, the inner wrist shaft 4 has a structure in which the upper portion 4A and the lower portion 4B across the opening 8 are connected by the connecting portion 4C remaining after the opening is formed.

As shown in FIGS. 1 to 3, the wrist structure of the robot hand 1 according to the present embodiment further includes a harness extending from the inside of the inner wrist shaft 4 to the inside of the lower hand 3 through the opening 8. 7 is provided with a harness processing mechanism 9. The harness processing mechanism 9 supports the lower hand harness 7 so as to be movable independently of the inner wrist shaft 4 and the lower hand 3 (floating).

As shown in FIG. 3, the harness processing mechanism 9 includes an annular bearing member 10 disposed on a step formed on the inner peripheral surface of the inner wrist shaft 4, and the inner wrist shaft 4 by the bearing member 10. And a movable support member 11 that is independent (floating) and is rotatably supported around a common rotation axis L. The movable support member 11 includes an annular main body portion 12 disposed inside the inner wrist shaft 4 and a harness support portion 13 formed integrally with the annular main body portion 12.

The harness support portion 13 includes an extension portion 13A extending in the radial direction from the annular main body portion 12 and a holding portion 13B formed on the extension portion 13A and holding the harness 7. The holding part 13 B is configured by a pair of protrusions that sandwich the harness 7. The harness 7 that is inserted through the annular main body 12 and extends into the hand base 3 A of the lower hand 3 is held by the holding portion 13 B of the harness support portion 13.

The extension portion 13A of the harness support portion 13 is formed to extend to the inside of the hand base portion 3A of the lower hand 3 through the opening portion 8 formed in the inner wrist shaft 4. For this reason, when the upper hand 2 and the lower hand 3 rotate relatively, the edge portion of the opening 8 formed in the inner wrist shaft 4 is brought into contact with the extending portion 13 A of the harness support portion 13.

Here, since the annular main body portion 12 of the movable support member 11 is supported by the bearing 10 so as to be rotatable around the common rotation axis L, the edge portion of the opening portion 8 of the inner wrist shaft 4 is the harness support portion 13. When the extension portion 13 A is pressed, the harness support portion 13 rotates around the common rotation axis L together with the annular main body portion 12.

FIG. 4A shows a state of the wrist structure in a state where the upper hand 2 and the lower hand 3 are aligned in the same direction. When the upper hand 2 and the lower hand 3 rotate relatively from this state, as shown in FIG. 4B, the edge of the opening 8 of the inner wrist shaft 4 abuts on the extending portion 13 A of the harness support portion 13. Is done.

4B, when the

hands

2 and 3 further rotate relative to each other, the harness support portion 13 rotates around the common rotation axis L together with the annular main body portion 12 as shown in FIG. 4C. Here, the harness 7 can be deformed as shown in FIG. 4C due to its own flexibility. When the harness 7 is extended inside the lower hand 3, the harness 7 can easily follow the rotational movement of the harness support portion 13 by providing a margin for the laying length of the harness 7 in advance. Make it deformable.

As can be seen from FIG. 4C, since the harness 7 is curved in a relatively wide section as the harness support portion 1 rotates, distortion applied to the harness 7 is reduced. Thereby, it is avoided that the harness 7 is momentarily disconnected, and it is also possible to avoid disconnection in the long term, thereby extending the life of the harness 7.

FIG. 5 shows a state in which the relative rotation angle between the upper hand 2 and the lower hand 3 is maximized in the robot hand 1 according to the present embodiment. Compared to the conventional robot hand 50 shown in FIG. Thus, in the present embodiment, it can be seen that the maximum relative angle of both

hands

2 and 3 is enlarged.

FIG. 6 shows a modification of the above embodiment. In this example, the circumferential dimension of the opening 8 formed in the inner wrist shaft 4 is made larger than that in the above embodiment. That is, the dimension (width) in the circumferential direction of the connecting portion 4C of the inner wrist shaft 4 is smaller than that in the above embodiment.

In this example, the range in which the upper hand 2 and the lower hand 3 can rotate relatively can be 180 ° or more.

As described above, according to the wrist structure of the robot hand 1 according to the present embodiment, the harness 7 that extends from the inside of the inner wrist shaft 4 to the inside of the hand base 3 A of the lower hand 3 through the opening 8. Is supported by the harness processing mechanism 9 so that it can move independently of the inner wrist shaft 4 and the lower hand 3 so that the upper hand 2 and the lower hand 3 rotate relative to each other. The possible range can be expanded compared to the conventional case.

By increasing the maximum relative angle between the two

hands

2 and 3, the degree of freedom of operation setting of the robot hand 1 is increased, and the complicated robot operation required in the conventional robot can be eliminated.

In addition, in the wrist structure of the robot hand 1 according to the present embodiment, a large space is not required for the routing process of the

harnesses

6 and 7, and the robot hand 1 and the robot arm (not shown) are prevented from being enlarged. Can do.

Furthermore, according to the wrist structure of the robot hand 1 according to the present embodiment, since a complicated mechanism is not required, the relative maximum angle between the

hands

2 and 3 is conventionally increased without increasing the number of parts and the number of assembly steps. Can be larger.

The robot hand 1 in the above-described embodiment and its modification is for holding a substrate (for example, a semiconductor manufacturing wafer) S. However, a robot hand to which the wrist structure according to the present invention can be applied is a substrate. The robot hand is not limited to the holding robot hand, and a double hand type robot hand having a so-called double pipe structure can be widely applied to the wrist structure.

DESCRIPTION OF SYMBOLS 1 Robot hand 2 Upper hand 3 Lower hand 4 Inner wrist axis 5 Outer wrist axis 6 Upper hand harness 7 Lower hand harness 8 Inner wrist axis opening 9 Harness processing mechanism 10 Bearing member 11 Movable support member 12 Ring-shaped support Main body 13 Harness support L Common rotation axis of both hands S Substrate (semiconductor wafer, etc.)

Claims

In the wrist structure of a robot hand having an upper hand and a lower hand having a common rotation axis,
A hollow outer wrist shaft extending along the common axis of rotation and having an upper end connected to the lower hand;
A hollow inner wrist shaft extending through the inside of the outer wrist shaft along the common rotation axis and having an upper end connected to the upper hand so as to open into the lower hand. An inner wrist shaft having a formed opening;
A harness for supporting a harness extending from the inside of the inner wrist shaft to the inside of the lower hand through the opening so as to be movable independently from each of the inner wrist shaft and the lower hand. A wrist structure of a robot hand equipped with a processing mechanism.
The wrist structure of the robot hand according to claim 1, wherein the harness processing mechanism includes a movable support member that is rotatable about the common rotation axis independently of the inner wrist axis.
The movable support member is configured to support an annular main body disposed inside the inner wrist shaft and the harness inserted through the annular main body and extending into the lower hand. The wrist structure of the robot hand according to claim 2, further comprising: a harness support portion provided on the annular main body portion.
The harness support mechanism is configured such that an edge portion of the opening portion of the inner wrist shaft is pressed against the harness support portion in accordance with a relative rotation operation of the upper hand and the lower hand. The wrist structure of the robot hand according to claim 3, wherein the wrist structure is configured to rotate about the common rotation axis together with the annular main body.
The wrist structure of the robot hand according to claim 3 or 4, wherein the annular main body is rotatably supported around the common rotation axis by a bearing member arranged inside the inner wrist shaft.
The said harness support part has the extension part extended in the radial direction from the said cyclic | annular main-body part, and the holding part which is formed in the said extension part and hold | maintains the said harness. The wrist structure of the robot hand according to claim 1.
The wrist structure of the robot hand according to any one of claims 1 to 6, wherein a range in which the upper hand and the lower hand are relatively rotatable is 180 ° or more.
The harness processing mechanism in the wrist structure of the robot hand according to any one of claims 1 to 7.