JP2019111600A - Damper gear and damping device - Google Patents

Abstract

To damp vibrations of a wide frequency band.SOLUTION: The damper gear comprises a movable body that can move in a shaft direction of a center shaft, a reciprocation control part that reciprocates the movable body, a suppressing part that suppresses the reciprocation of the movable body by contacting the movable body, and an adjusting part that contacts the movable body with the suppressing part. At least either one of the reciprocation control part and the adjusting part is controlled on the basis of a measured result of vibrations of a work-piece to be damped.SELECTED DRAWING: Figure 2

Description

  The present invention relates to a damper device and a vibration control device.

  As a configuration for actively suppressing the vibration, for example, Patent Document 1 states that “an actuator which is provided between an extendable actuator, a pump, and an actuator and a pump and which is discharged from the pump is supplied to the actuator to There is disclosed a “suspension device that includes a hydraulic circuit to be expanded and contracted, and a controller that drives and controls the pump, and determines the target rotational speed of the pump based on the expansion and contraction speed of the actuator to control the pump.

  Further, for example, in Patent Document 2, “a weight W provided to the ram 6, an actuator 21 to 24 that vibrates and displaces the weight W, a displacement meter 25 that measures relative displacement between the ram 6 and the weight W, and a control circuit unit 30X and 30Y, and drive units 34 and 35 for supplying a current based on the control signal calculated by the control circuit unit 30X (30Y) to the actuator The control circuit unit 30X corresponds to the position of the ram 6 Control constant setting unit 31 that sets control constant ω according to the natural frequency of ram 6 and a calculation unit that sets the gain and phase of the control signal based on control constant ω and relative displacement (target value setting unit 32 and A phase-shifting filter 33) is disclosed.

Unexamined-Japanese-Patent No. 2017-94808 JP, 2014-184548, A

  The suspension device described in Patent Document 1 is controlled by a pump drive using a liquid as a medium, so the response speed is low and the frequency band of vibration that can be handled is limited.

  The damping device described in Patent Document 2 exerts a damping effect on the natural frequency of the ram 6 and the forced vibration that the tool strikes the workpiece, but in actual processing, other vibration factors are As it exists, it is desirable to be able to damp the vibration corresponding to a wider frequency band.

  The present invention has been made in view of such a situation, and it is an object of the present invention to be able to suppress vibration in a wide frequency band.

  Although this application contains multiple means to solve at least one part of the said subject, if the example is given, it is as follows. In order to solve the above problems, a damper device according to an aspect of the present invention includes: a movable body movable in an axial direction of a central axis; a reciprocation control unit for reciprocating the movable body; Control unit for suppressing the reciprocation movement of the movable body, and an adjustment unit for bringing the movable body and the suppression unit into contact with each other, and at least one of the reciprocation control unit and the adjustment unit It controls based on the measurement result of the vibration of the to-be-processed object which becomes.

  According to the present invention, vibration in a wide frequency band can be suppressed. Problems, configurations, and effects other than those described above will be apparent from the description of the embodiments below.

It is a figure which shows the usage example of the damping device 10 which is one embodiment which concerns on this invention. FIG. 2 is a block diagram showing a configuration example of a vibration damping device 10. It is a figure showing the example of the relationship between a peak frequency and a gain value. It is a figure showing the example of the relation of peak frequency and a transfer function. FIG. 2 is a view showing an example of the appearance of a damper unit 20 of the vibration damping device 10; It is a figure showing an example of the section of damper part 20 in the 1st control mode. 5 is a flowchart illustrating an example of a damping process performed by the damping device 10. It is a figure showing an example of the section of damper part 20 in the 2nd control mode. It is a figure showing an example of the section of damper part 20 in the 2nd control mode. FIG. 10 is a cross-sectional view showing a first modification of damper portion 20. It is a sectional view showing the 2nd modification of damper part 20. As shown in FIG. It is an external view which shows the 3rd modification of damper part 20. As shown in FIG. FIG. 18 is a cross-sectional view showing a third modification of damper portion 20.

  Hereinafter, an embodiment according to the present invention (hereinafter, referred to as the present embodiment) will be described based on the drawings. In all the drawings for describing the present embodiment, the same reference numeral is attached to the same member in principle, and the repetitive description thereof will be omitted. Further, in the present embodiment described below, the constituent elements (including element steps and the like) are not necessarily essential except in the case where they are particularly clearly shown, and in the case where they are apparently clearly essential in principle. Needless to say. In addition, when we say “consists of A”, “consists of A”, “have A”, and “include A”, except for those cases where it is clearly stated that it is only that element, etc., the other elements are excluded. It goes without saying that it is not something to do. Similarly, in the following embodiments, when referring to the shapes, positional relationships, etc. of components etc., unless specifically stated otherwise and in principle considered to be otherwise not clear, etc. It includes those that are similar or similar to the shape etc.

<Example of use of damping device 10 according to the present embodiment>
FIG. 1 shows an application example of the vibration control device 10 according to the present embodiment.

  The damping device 10 (the damper portion 20 thereof) is used in a state of being fixed in the vertical direction of the workpiece 4 to be damped, which is processed by the processing device 1.

  The processing apparatus 1 has, for example, a cutting tool 2 and processes the workpiece 4 into a desired shape by rotationally driving the cutting tool 2. The workpiece 4 may vibrate during this processing, and may be processed out of a desired shape. In order to prevent the occurrence of such a defect, the damper unit 20 of the damping device 10 is driven to suppress the vibration generated in the workpiece 4 during processing.

  As a method of fixing the damper portion 20 to the workpiece 4, fixation by a jig or the like, fixation by a magnet, fixation by adhesion such as welding or the like is assumed. In addition, the fixing method is not limited to the example described above, as long as it can be fixed to such an extent that it does not separate by vibration during processing. In addition, the position which fixes the damper part 20 of the damping device 10 is not only the to-be-processed object 4, but if it is a position which vibrates during processing of the to-be-processed object 4, for example, the jig which fixes the to-be-processed object It may be a table (not shown) of the processing device 1 or the like.

  Next, FIG. 2 is a block diagram showing a configuration example of the vibration damping device 10. The damping device 10 includes a damper unit 20 and a control unit 30. As mentioned above, although the damper part 20 is fixed to the to-be-processed object 4, arrangement | positioning of the control part 30 is arbitrary. For example, the control unit 30 may be disposed integrally with the damper unit 20, or the control unit 30 may be separated from the damper unit 20 and disposed at a position where the vibration of the workpiece 4 is not transmitted. When the control unit 30 and the damper unit 20 are separated, communication between the control unit 30 and the damper unit 20 may be performed via a wire or may be performed using a predetermined wireless standard.

  The damper unit 20 (corresponding to the damper device of the present invention) has a sensor unit 21 and a coil unit 22. The sensor unit 21 is configured by an acceleration sensor, a velocity sensor, a displacement sensor or the like that can measure the behavior of vibration, continuously measures the vibration of the workpiece 4, and outputs the measurement result to the control unit 30. The coil unit 22 (corresponding to the reciprocation control unit of the present invention) is a mass 50 (corresponding to the moving body of the present invention) reciprocating within the damper unit 20 according to the control information from the control unit 30 (FIG. 6) Control the movement of

  The control unit 30 generates control information for controlling the drive of the damper unit 20 based on the measurement result of the vibration input from the sensor unit 21 of the damper unit 20 and outputs the control information to the damper unit 20.

  The control unit 30 includes a frequency analysis unit 31, a control mode selection unit 32, a target value setting unit 33, a control information generation unit 34, and an input / output unit 35.

  The frequency analysis unit 31 analyzes the measurement result of the vibration of the workpiece 4 input from the sensor unit 21 of the damper unit 20. Specifically, FFT (Fast Fourier Transform) is performed on the measurement result of the vibration, and the peak frequency of the vibration is detected from the frequency analysis result obtained as a result, and notified to the control mode selection unit 32.

  As the control mode, the control mode selection unit 32 follows the measurement result of the vibration to control the drive of the damper unit 20 or the drive of the damper unit 20 without following the measurement result of the vibration. Select the second control mode to control.

  As in the first control mode, in order to control the driving of the damper unit 20 following the measurement result of the vibration, a certain amount of time required for the arithmetic processing is required, and when the peak frequency of the vibration becomes high, It can not follow it. On the other hand, when the measurement result of vibration is not followed as in the second control mode, a certain amount of time required for the arithmetic processing is unnecessary. Therefore, the control mode selection unit 32 compares the peak frequency of vibration with a predetermined threshold (for example, 1000 Hz), and selects the first control mode if the peak frequency of vibration is less than the predetermined threshold, and vice versa If the peak frequency of vibration is equal to or higher than a predetermined threshold value, the second control mode is selected.

  The predetermined threshold value to be compared with the peak frequency of vibration is determined in advance, but can be changed by the user using the input / output unit 35 (details will be described later).

  As described above, in the first control mode, since the drive of the damper unit 20 is controlled following the measurement result of the vibration, the first control mode may be referred to as an active mode. On the other hand, in the second control mode, the drive of the damper unit 20 is controlled without following the measurement result of the vibration, so the second control mode may be referred to as a semi-active mode.

  When the first control mode is selected, the target value setting unit 33 sets, as a target value, the gain value of the damper unit 20 that follows the peak frequency of vibration and notifies the control information generation unit 34. The target value setting unit 33 holds a table or the like representing the relationship between the peak frequency of the vibration and the gain value, and can set the gain value of the damper unit 20 with reference to the table.

  FIG. 3 is a graph showing an example of the relationship between the peak frequency of the vibration and the gain value, which the table held by the target value setting unit 33 represents. In the graph, the horizontal axis represents the peak frequency of vibration and the vertical axis represents the gain value. For example, when the peak frequency is 100 Hz, the gain value is set to 1.0E + 02.

Return to FIG. The target value setting unit 33 notifies the second control if the mode is selected, the control information generating unit 34 sets the attenuation ratio zeta ₂ and stiffness k ₂ of the damper unit 20 as a target value.

The damping ratio ζ ₂ and the rigidity k _{2 of the} damper unit 20 can be calculated, for example, using the following equations (1) and (2).

(Mu) in Formula (1), (2) is mass ratio of the to-be-processed object 4 and the damper part 20, and mass ratio mu = m < ₂ > / m < ₁ >. Here, m ₁ is the mode mass of the workpiece 4, and m ₂ is the mode mass of the damper unit 20.

  The control information generation unit 34 (corresponding to the generation unit of the present invention) has a waveform that allows the damper unit 20 to obtain the gain value set by the target value setting unit 33 when the first control mode is selected. Are generated and output to the damper unit 20. This control signal determines the voltage value and the current value for driving the motor and the like when the coil unit 22 of the damper unit 20 is constituted by the electrically driven motor and the like.

Further, in the control information generation unit 34, when the second control mode is selected, the damper unit 20 can obtain the damping ratio ζ ₂ and the stiffness k ₂ set by the target value setting unit 33. Mass 50 And an adjustment value representing the degree of contact of the elastomer 52 (FIG. 6) with The correspondence between the damping ratio 34 ₂ and the rigidity k ₂ and the adjustment value is assumed to be held in advance by the control information generation unit 34.

The input / output unit 35 (corresponding to the setting unit of the present invention) has an input device for receiving an input from the user and a display device for displaying various information to the user. For example, the input / output unit 35 receives an operation of the user instructing the start or end of the damping process by the damping device 10. Further, for example, the input / output unit 35 displays a graph showing the relationship between the peak frequency of vibration and the transfer function of the damper unit 20 and presents it to the user, and the user's operation of changing the threshold of the frequency with reference to the graph. The input is accepted and notified to the control mode selection unit 32. Furthermore, for example, the input / output unit 35 receives an input of the damping ratio ζ ₁ and the rigidity k ₁ of the workpiece 4 to be damped from the user, and inputs the input to the target value setting unit 33. The damping ratio ζ ₁ and the rigidity k ₁ of the workpiece 4 can be obtained by frequency response analysis by FEM (finite element method) or an impulse test.

  Next, FIG. 4 is a graph showing an example of the relationship between the peak frequency of vibration and the transfer function of the damper unit 20. In the graph, the horizontal axis indicates the peak frequency of vibration, and the vertical axis indicates the output ratio (transfer function) in the first control mode (active mode) of the damper unit 20. The graph shows the peak frequency that is good at the active mode of the damper unit 20 and the peak frequency that is bad at it. For example, in the case of FIG. 4, it can be seen that when the peak frequency is 1000 Hz or more, the transfer function is lowered and a sufficient output can not be obtained. The user can adjust the driving of the damper unit 20 by changing the frequency threshold with reference to the graph.

  The control unit 30 may be configured as hardware or may be realized by software. When the control unit 30 is realized by software, a program constituting the software is installed in a computer. Here, the computer includes, for example, a general-purpose personal computer that can execute various functions by installing a computer incorporated in dedicated hardware and various programs.

  Next, details of the damper unit 20 will be described with reference to FIGS. 5 and 6.

  FIG. 5 shows an example of the appearance of the damper portion 20. As shown in FIG. FIG. 6 shows an example of the cross section of the damper portion 20. As shown in FIG. In the damper portion 20 shown in FIGS. 5 and 6, the lower side of the drawing is a surface to be fixed to the workpiece 4. Hereinafter, the surface fixed to the workpiece 4 on the lower side of the drawing of the damper unit 20 is referred to as a fixed surface, and the surface on the upper side of the drawing is referred to as a non-fixed surface.

  The damper portion 20 has a rod 65 which is a central axis of the damper portion 20. The damper unit 20 has an adjusting plate drive unit 67 and an adjusting plate 51 on the non-fixed surface side, and has a base plate 53 centered on the rod 65 on the fixed surface side. The rod 65 is fixed to the base plate 53.

  The adjustment plate drive unit 67 (corresponding to the adjustment unit of the present invention) moves the adjustment plate 51 to the fixed surface side according to the adjustment value notified as control information from the control unit 30, thereby making the mass 50 act as the elastomer 52. The pressure is adjusted to adjust the degree of contact of the elastomer 52 with the mass 50. For example, a linear actuator or a linear motor can be employed as the adjustment plate drive unit 67.

  A mass 50 made of a permanent magnet such as neodymium or ferrite is disposed between the adjusting plate 51 and the base plate 53 with the rod 65 as a center. The mass 50 is fixed to the rod 65 via the visco-elastic body 61. The visco-elastic body 61 is fixed to the mass 50 by the presser 60. Thereby, the mass 50 can reciprocate in the axial direction with the rod 65 as a guide within a limited and constant range.

  In the mass 50, a groove is formed in a cylindrical shape in the axial direction of the rod 65, and a coil jig 63 having a coil portion 22 is inserted in the groove. However, the coil jig 63 and the coil portion 22 are installed so as not to be in contact with the mass 50.

  The base plate 53 is fixed to the workpiece 4. On the base plate 53, an elastomer 52 (corresponding to the suppressing portion of the present invention) that suppresses the reciprocation of the mass 50 by being in contact with the mass 50 is fixed around the rod 65.

The elastomer 52 has a tapered cross-sectional shape, and the contact area with the mass 50 changes in accordance with the amount of movement 71 (FIG. 8) by which the adjustment plate drive unit 67 moves the adjustment plate 51. And contact area, correspondence between the damping ratio zeta ₂ and stiffness k ₂ of the damper unit 20, the control information generating unit 13 holds, for example, as a table. Generally, since the contact area and the stiffness are in proportion, increasing the amount of movement 71 can increase the contact area and increase the stiffness.

  In the first control mode, as shown in FIG. 6, the elastomer 52 is adjusted so as not to contact the mass 50 but to form a gap 70 therebetween.

  Furthermore, the sensor unit 21 is fixed to the base plate 53. However, since the sensor unit 21 only needs to measure the vibration during processing, the fixing position may be other than the base plate 53. For example, the sensor unit 21 may be directly fixed to the workpiece 4 or a jig for fixing the workpiece 4 or the like.

  Furthermore, the base plate 53 is provided with a terminal 54 (corresponding to a control information input unit of the present invention). The terminal 54 is supplied with a current for driving the mass 50 and control information from the control unit 30.

  When current is supplied from the terminal 54 to the damper unit 20 configured as described above, Lorentz force is generated by the current flowing through the coil unit 22 in the magnetic field of the mass 50 consisting of permanent magnets, and the mass 50 is in the axial direction Will move to In the first control mode, the Lorentz force is used as a thrust, and the mass 50 fixed to the rod 65 via the viscoelastic body 61 is reciprocated in the opposite phase to the vibration of the workpiece 4 to The effect of suppressing the vibration of

<About the damping processing by damping device 10>
Next, FIG. 7 is a flow chart for explaining an example of the damping process in the damping device 10.

  The damping process is started, for example, in response to a start instruction from a user (worker) who processes the workpiece 4 by the processing device 1.

  First, the sensor unit 21 starts vibration measurement, and sequentially outputs the measurement result to the control unit 30 (step S1). Next, in the control unit 30, the frequency analysis unit 31 performs frequency analysis, specifically, FFT on the measurement result input from the sensor unit 21. From the frequency analysis result obtained as a result, the peak frequency of vibration is obtained. Is detected and notified to the control mode selection unit 32 (step S2).

  Next, the control mode selection unit 32 compares the peak frequency of the vibration with a predetermined threshold, and selects a control mode according to the comparison result (step S3). Specifically, when the peak frequency of vibration is less than a predetermined threshold, the first control mode is selected and the process proceeds to step S4, and conversely, when the peak frequency of vibration is equal to or higher than a predetermined threshold The second control mode is selected and the process proceeds to step S7.

  When the first control mode is selected in step S3, the target value setting unit 33 sets the gain value of the damper unit 20 following the peak frequency of vibration as a target value and notifies the control information generation unit 34 (step S4).

  Next, the control information generation unit 34 generates a control signal having a waveform that allows the damper unit 20 to obtain the gain value set by the target value setting unit 33, and outputs the control signal to the damper unit 20 (step S5). . In the damper unit 20, the current adjusted based on the control signal is supplied to the coil unit 22 through the terminal 54. As a result, the mass 50 reciprocates in the opposite phase to the vibration of the workpiece 4 and suppresses the vibration of the workpiece 4. Thereafter, the process proceeds to step S8.

On the other hand, when the second control mode is selected in step S3, the target value setting unit 33 notifies the control information generating unit 34 sets the attenuation ratio zeta ₂ and stiffness k ₂ of the damper unit 20 as a target value ( Step S6).

Next, the control information generating unit 34, the damper unit 20, the adjustment value can be obtained target value setting unit attenuation ratio zeta ₂ is set at 33 and the rigid k ₂ for outputting to the damper unit 20 (step S7 ). In the damper unit 20, the adjusting plate drive unit 67 moves the adjusting plate 51 to the fixed surface side based on the adjustment value to adjust the degree of contact of the elastomer 52 with the mass 50. Thereby, the reciprocating motion of the mass 50 is suppressed.

  8 and 9 show an example of the cross section of the damper portion 20 when the second control mode is selected.

Comparing FIG. 8 with FIG. 9, in the case of FIG. 9, the moving amount 71 of the adjusting plate 51 by the adjusting plate drive portion 67 is larger than in the case of FIG. 8, and the pressing amount of the mass 50 against the elastomer 52 increases. The contact area between mass 50 and elastomer 52 is increased. Therefore, in the case of FIG. 9, it can be said that the damping ratio ζ ₂ and the rigidity k ₂ are increased as compared with the case of FIG.

  In the above description, when the first control mode is selected, the gap 70 is provided between the mass 50 and the elastomer 52. However, when the first control mode is selected, the gap 70 is set. The mass 50 may be pressed against the elastomer 52 without being provided. In other words, the control of the first control mode and the control of the second control mode may be used in combination.

  Return to FIG. After step S5 or step S7, the process proceeds to step S8. In step S8, the input / output unit 35 determines whether or not there is a termination instruction from the user (worker). Here, when it is determined that there is no end instruction (NO in step S8), the process is returned to step S2, and the subsequent steps are repeated. On the other hand, when it is determined that there is a termination instruction (YES in step S8), the damping process is terminated.

  According to the vibration suppression processing described above, when the peak frequency of the vibration of the workpiece 4 is less than the predetermined threshold value, the first to control the reciprocation of the mass 50 according to the vibration of the workpiece 4 Since the control mode (active mode) is selected, for example, even when the shape of the workpiece 4 changes due to processing and its natural vibration frequency changes, the vibration of the workpiece 4 is more effectively suppressed. Can.

  Further, when the peak frequency of the vibration of the workpiece 4 is equal to or higher than the predetermined threshold value, the second control mode (semi-active mode) is selected in which the degree of contact of the elastomer 52 with the reciprocating mass 50 is adjusted. Therefore, although it is inferior to the first control mode, the vibration of the workpiece 4 can be suppressed.

  Therefore, the vibration damping device 10 can suppress vibrations in a wide frequency band as well as a specific frequency band.

First Modified Example of Damper Unit 20
Next, FIG. 10 shows a cross-sectional view of a first modified example of the damper portion 20. As shown in FIG. In the first modified example, the elastomer 52 in the configuration example (FIG. 6) of the damper unit 20 is replaced with an elastomer 80, and the same reference numerals are given to the other common components, and the description thereof Omit.

  The elastomer 80 has a cross-sectional shape different from that of the elastomer 52. That is, the cross section of the elastomer 52 has a tapered shape while the cross section of the elastomer 80 has a concave arc shape.

  In the elastomer 52 having a tapered cross section, the moving amount 71 of the adjusting plate 51 by the adjusting plate driving portion 67 and the contact area between the mass 50 and the elastomer 52 are in a proportional relationship, and the adjustment is taken I could easily set the value. On the other hand, since the elastomer 80 in the first modification has a concave arc shape in cross section, the movement amount 71 is not proportional to the contact area between the mass 50 and the elastomer 80, and the contact area is increased even if the movement amount 71 is increased. Change of is small.

In the first modification having such characteristics, when it is desired to lower the sensitivity of the damping ratio 及 び₂ and the rigidity k ₂ of the damper unit 20 in the second control mode, for example, processing with a small cutting amount of the workpiece 4 It can be said that it is suitable for use in the finishing stage.

<Second Modification of Damper Unit 20>
Next, FIG. 11 shows a cross-sectional view of a second modified example of the damper portion 20. As shown in FIG. In the second modified example, the elastomer 52 in the configuration example (FIG. 6) of the damper portion 20 is replaced with an elastomer 81, and the same reference numerals are given to the other common components, and the description thereof Omit.

  The elastomer 81 is characterized in that its cross-sectional shape is different from that of the elastomer 52, and its cross-section has a convex arc shape.

  Since the elastomer 81 in the second modification has a convex arc shape in cross section, the movement amount 71 is not proportional to the contact area between the mass 50 and the elastomer 81, and the contact area increases even if the movement amount 71 increases slightly. It will be sudden.

In the second modification having such characteristics, when it is desired to increase the sensitivity of the damping ratio 及 び₂ and the rigidity k ₂ of the damper unit 20 in the second control mode, for example, rough machining with a large amount of cutting of the workpiece 4 It can be said that it is suitable for use on the floor.

<Third Modification of Damper Unit 20>
Next, FIG. 12 shows an appearance view of a third modified example of the damper portion 20, and FIG. 13 shows a cross-sectional view of the third modified example of the damper portion 20. As shown in FIG. In the third modified example, the elastomer 52 in the configuration example (FIG. 6) of the damper portion 20 is replaced with an elastomer 82, and the same reference numerals are given to the other common components, and the description thereof Omit.

  The elastomer 82 is characterized in that its cross-sectional shape is different from that of the elastomer 52, and its cross-section is stepped.

Since the elastomer 82 in the third modification has a stepped cross section, it is possible to discretely change the contact area between the mass 50 and the elastomer 82 with respect to the change of the movement amount 71. Therefore, the damping ratio ζ ₂ and the rigidity k ₂ of the damper unit 20 can be changed stepwise. For example, in the case of FIG. 13, the elastomer 82 are the five stages stepped, the damping ratio zeta ₂ and stiffness k ₂ of the damper unit 20 can be adjusted in five stages. Further, the adjustment value can be easily determined as compared with the case where the damping ratio ダ ン パ₂ and the rigidity k ₂ of the damper portion 20 are made stepless.

  The present invention is not limited to the embodiments described above, but includes various modifications. For example, the above-described embodiments are described in detail in order to explain the present invention in an easy-to-understand manner, and the present invention is not necessarily limited to those having all the described components. Also, part of the configuration of one embodiment can be replaced with the configuration of another embodiment, and the configuration of another embodiment can be added to the configuration of one embodiment. Further, with respect to a part of the configuration of each embodiment, it is possible to add, delete, and replace other configurations.

  DESCRIPTION OF SYMBOLS 1 ... Processing device, 2 ... Cutting tool, 4 ... Workpiece, 10 ... Damping device, 20 ... Damping device, 20 ... Damper part, 21 ... Sensor Unit 22 22 coil unit 30 control unit 31 frequency analysis unit 32 target value setting unit 32 control mode selection unit 33 target value setting unit , 34: control information generation unit, 35: input / output unit, 50: mass, 51: adjustment plate, 52: elastomer, 53: base plate, 54: terminal, 61 ... Viscoelastic body, 63: Coil jig, 65: Rod, 67: Adjustment plate drive part, 70: Gap, 71: Movement amount, 80: Elastomer, 81 ... Elastomer, 82 ... Elastomer

Claims (14)

A movable body movable in the axial direction of the central axis,
A reciprocating motion control unit for reciprocating the moving body;
A suppressing unit that contacts the moving body to suppress the reciprocating motion of the moving body;
An adjustment unit configured to adjust the degree of contact between the movable body and the suppression unit;
Equipped with
A damper device characterized in that at least one of the reciprocating motion control unit and the adjustment unit is controlled based on a measurement result of vibration of a workpiece to be damped. The damper device according to claim 1, wherein
A control information input unit for inputting control information generated based on the measurement result of the vibration of the workpiece, for controlling at least one of the reciprocating motion control unit and the adjustment unit;
The damper apparatus characterized by having. The damper device according to claim 1, wherein
A sensor unit for measuring the vibration of the workpiece;
The damper apparatus characterized by having. The damper device according to claim 1, wherein
The damper device according to claim 1, wherein a cross section of the suppressing portion is a tapered shape, a concave arc shape, a convex arc shape, or a step shape. The damper device according to claim 4, wherein
The damper device, wherein the suppressing portion changes a contact area with the moving body by adjusting the degree of contact with the moving body by the adjusting portion. The damper device according to claim 1, wherein
The moving body comprises a magnet,
The said reciprocating motion control part consists of coils. The damper apparatus characterized by the above-mentioned. A sensor unit that measures the vibration of a workpiece to be damped;
A damper unit attached to the workpiece to suppress vibration of the workpiece;
A control unit that controls driving of the damper unit according to the measurement result of the sensor unit;
Equipped with
The damper unit is
A movable body movable in the axial direction of the central axis,
A reciprocating motion control unit for reciprocating the moving body;
A suppressing unit that contacts the moving body to suppress the reciprocating motion of the moving body;
An adjustment unit configured to adjust the degree of contact between the movable body and the suppression unit;
Vibration control device characterized by having. The vibration control device according to claim 7, wherein
The control unit
A frequency analysis unit that analyzes the measurement result by the sensor unit;
A control mode selection unit for selecting a first control mode for controlling the reciprocating motion control unit or a second control mode for adjusting the adjustment unit as a control mode of the damper unit based on the analysis result of the frequency analysis unit; ,
A generation unit that generates control information for the damper unit according to the selected control mode;
Vibration control device characterized by having. The vibration control device according to claim 8, wherein
The control mode selection unit
If the frequency of the vibration of the workpiece obtained as the analysis result of the frequency analysis unit is less than a predetermined threshold, the first control mode is selected,
The vibration control device selects the second control mode when the frequency of the vibration of the workpiece is equal to or higher than the predetermined threshold. The vibration control device according to claim 9, wherein
The generation unit is
When the first control mode is selected, a control signal that changes in accordance with the measurement result by the sensor unit is generated as the control information for controlling the reciprocating motion control unit.
When the second control mode is selected, an adjustment value for adjusting the degree of contact between the movable body and the suppression unit for controlling the adjustment unit is generated as the control information. apparatus. The vibration control device according to claim 10, wherein
The generation unit is
When the first control mode is selected, the adjustment value is also generated as the control information. The vibration control device according to claim 7, wherein
The moving body comprises a magnet,
The said reciprocating motion control part consists of coils. The damping device characterized by the above-mentioned. The vibration control device according to claim 12, wherein
The cross section of the said suppression part is a taper shape, concave circular arc shape, convex circular arc shape, or step shape. The damping apparatus characterized by the above-mentioned. The vibration control device according to claim 13, wherein
The said suppression part is a damping device characterized by the contact area with the said moving body changing with adjustment of the contact degree with the said moving body by the said adjustment part.

Images