JP2019098250A - Non-contact type substrate cleaner - Google Patents

Abstract

To provide a technique for removing dusts on a substrate surface in a non-contact manner.SOLUTION: A substrate is transported in a direction of an arrow A by a belt conveyor 13. A hood 100 is fitted to an upper part of a transport part. The interior of the hood 100 is divided into an inlet side suction chamber 102, and an outlet side blow-out chamber 103 by an inner wall 101. A pipe 15 for suction is fitted to the suction chamber 102, and a pipe 16 for blowing-out is fitted to the blow-out chamber 103. A suction port 102a of an inclined shape is provided on an inlet side of the suction chamber 102, and obliquely sucks dusts on the substrate. An underside of the blow-out chamber 103 is opened over a substantially whole area thereof, and blows out air toward a surface of the substrate. Thus, dusts on the surface of the substrate can be sucked and removed through the suction port 102a in a non-contact manner while suppressing leakage of the flown-up dusts to the exterior of the hood 100.SELECTED DRAWING: Figure 2

Description

  The present invention relates to a noncontact substrate cleaner that removes dust on the surface of a substrate in a noncontact manner.

Conventionally, dust on the surface of a substrate has been removed by a cleaning device using a brush. In such a method, since the brush comes in contact with the substrate, there are problems such as the possibility of damaging the substrate and the necessity of regular replacement of the brush. As a method of solving such a problem, a non-contact cleaner which blows air on the substrate surface to blow off dust can be considered.
For example, Patent Document 1 discloses a non-contact cleaning device which is not a device for a substrate. According to the document, there is disclosed a hand-held type cleaning machine which sucks and collects dust while discharging air from the air blow nozzle pipe by providing a nozzle pipe for air blow in a tip suction pipe.

JP, 2004-243209, A

However, when air is blown to the substrate surface, it is relatively easy for dust to fly, and there is a problem that dust that should have been blown off falls again on the substrate being cleaned or falls off to the cleaned substrate. . Further, as in Patent Document 1, in the apparatus in which the air blowing nozzle is provided in the tip end suction pipe, the substrate is cleaned for each part while moving the nozzle, which may cause uneven cleaning. As the interval between the two changes, problems such as the cleaning situation becoming unstable may occur. Furthermore, in the structure of Patent Document 1, if there is a recovery leakage of dust that has risen while cleaning a certain portion of the substrate, there is also a possibility that dust may fall again on the cleaned portion around it.
An object of the present invention is to provide a technique for removing dust on the surface of a substrate in a non-contact manner, in view of these problems.

The present invention
A non-contact substrate cleaner for removing dust on the surface of a substrate,
A hood, the inside of which is separated into at least one suction chamber and blowing chamber respectively;
A transport unit configured to transport the substrate from the inlet side to the outlet side in a state in which the substrate faces the hood;
An air suction device connected to the suction chamber for suctioning air from the suction chamber;
An air blowout device connected to the blowout chamber for feeding air into the blowout chamber;
The suction chamber has a slit-shaped suction port elongated in a direction intersecting the transport direction at a position facing the surface of the substrate on the inlet side.
The blowout chamber can be configured like a non-contact type substrate cleaner having a blowout port at a position facing the surface of the substrate on the outlet side with respect to the suction port.

According to the non-contact type substrate cleaner of the present invention, air can be blown to the substrate from the blowout port while transporting the substrate, and dust can be sucked from the suction port. In the cleaning process, since the distance between the hood and the transport unit is constant, the substrate can be cleaned uniformly.
In addition, since the suction port is provided on the inlet side of the hood, the cleaning effect can be enhanced by the following operation. First, when the substrate is transported, dust in the vicinity of the surface can be sucked by the suction port on the inlet side as the primary cleaning before the air is wiped from the blowout port. It is possible to suppress the amount of dust rising to the substrate input side (inlet side).
Second, dust that soars by blowing air is distributed relatively more to the inlet side than to the outlet side just before the cleaned portion of the substrate is discharged. Therefore, by providing the suction port on the inlet side, these dusts can be efficiently sucked.
Thirdly, if the suction port is provided on the outlet side, it will result in attracting the dust that has risen to the outlet side, and there is a possibility that dust that was not separated by suction may fall again on the cleaned part of the substrate. Such an adverse effect can be avoided by providing the suction port on the side.
Based on the above operation, according to the present invention, dust on the surface of the substrate can be effectively removed without contact. In the present invention, the air taken in through the suction port may be sprayed from the blowout port after the dust is filtered and cleaned with a HEPA filter (High Efficiency Particulate Air Filter).

In the present invention, the method of forming the suction chamber and the blowout chamber in the hood can take various methods. For example, both may be formed by dividing the inside of one hood by a wall or the like. In addition, after the suction chamber and the blowout chamber are separately formed, they may be combined to form a single hood. The suction chamber and the blowout chamber may have two or more.
The air suction device and the air blowing device may be separate devices, or one device may share the functions of both. As such an apparatus, for example, a roots-type blower can be used.
The suction port preferably has dimensions over the entire width of the substrate to be cleaned, in order to enable the substrate surface to be cleaned uniformly. In addition, it can be said that the dimension across the entire width of the transport unit is more preferable in that the transport function of the substrate by the transport unit can be most effectively used.
The suction port is preferably elongated in a direction orthogonal to the transport direction, but may be elongated in a direction obliquely crossing the transport direction.
Moreover, the suction port does not necessarily have to be a slit shape in one row, and two or more rows may be arranged in the transport direction.
The positional relationship between the transport unit and the hood can take various forms. For example, in the case of a transport unit in which the substrate is placed horizontally and transported in the horizontal direction, the hood may be disposed above or below the transport unit. In addition, in the case of a transport unit that transports the substrate in a horizontal or vertical direction by standing the substrate, the hood may be disposed on the side of the transport unit so as to face the substrate surface.

In the non-contact type substrate cleaner of the present invention,
The suction port may protrude from the suction chamber toward the transport unit, and a tip of the suction port may be inclined more toward the inside of the hood than the inlet side.
By doing this, it is possible to more effectively suck in the dust that has risen into the hood.
The angle of inclination may be arbitrarily set, but may be 45 degrees inclined to the vertical with respect to the substrate being transported. In addition, the cross-sectional area of the suction port may be smaller as it goes to the tip. By doing this, the suction force near the substrate surface can be improved.

In the non-contact type substrate cleaner of the present invention,
The suction chamber may also have an outlet-side suction port at a position facing the surface of the substrate also on the outlet side of the hood.
By doing this, there is an advantage that dust can be prevented from leaking out from the outlet side of the hood.
The shape etc. of the outlet side suction port can be set arbitrarily, but it may be a slit shape as well as the suction port provided on the inlet side, and it protrudes toward the transport part and its tip end is said It is good also as a shape which inclines in the inside direction of the said hood rather than the entrance side.
The size of the outlet side suction port does not have to be the same as the suction port provided on the inlet side.
Further, the suction chamber may be divided into an outlet side suction port and a suction port provided on the inlet side.

In the present invention, the outlet can have various shapes and the like.
For example,
The area of the outlet may be larger than the area of the inlet.
The present invention is intended to clean dust on the surface of a substrate, but these dusts are not so firmly attached to the surface of the substrate and can be blown off relatively easily. Therefore, it is not necessary to apply a very strong air for cleaning dust, and if too strong air is applied, there is a possibility that the dust may soak up so much that it can not be inhaled at the suction port. In the above aspect, in order to increase the area of the blowout port, the air blown to the substrate surface from the blowout port can be made relatively gentle, these problems can be suppressed, and the cleaning efficiency can be improved.

In another aspect,
The outlet may be formed by arranging a plurality of holes or nozzles.
This has an advantage that it is easy to obtain the effect of blowing off the dust on the substrate surface even if the delivery pressure by the air blowing device is relatively low.
The holes or the nozzles can be in various positions and arrangements, but it is effective to arrange the holes or nozzles closer to the inlet side than the center of the transport method hole of the hood and to arrange them parallel to the suction port.

In the latter case,
The hole or the nozzle may be shaped to blow out an air flow obliquely to the substrate.
By blowing air from the oblique direction in this manner, dust can be effectively blown away.
The blowing direction can be arbitrarily set, but can be, for example, 45 degrees with respect to the substrate surface. Further, in order to cause the dust to be efficiently sucked from the suction port, it is preferable to face the inlet direction in parallel with the transport direction, but it may blow out in a direction orthogonal to the transport direction or a direction intersecting obliquely.

In the non-contact type substrate cleaner of the present invention,
The transfer unit may have a control mechanism that restricts the movement of the substrate being transferred in the direction of the suction port.
By doing this, the substrate can be prevented from being adsorbed to the suction port. The restriction mechanism may be, for example, a mechanism that holds both ends of the substrate so as to be sandwiched between the conveyance unit. In addition, a suction cup or a pressure-sensitive adhesive mechanism that causes the transfer unit to adsorb the substrate may be used.

Further, in the noncontact substrate cleaner of the present invention,
An adjustment mechanism may be provided which adjusts the distance between the substrate to be conveyed and the suction port by relatively moving the conveyance unit and the hood.
By doing this, the suction force of the suction port can be adjusted according to the thickness of the substrate. As the adjusting mechanism, various known mechanisms capable of moving at least one of the transport unit and the hood can be applied.

The various features described above do not necessarily have to be all, and some of them may be omitted or combined as appropriate. Further, the present invention can be configured not only as the above-described configuration as the noncontact substrate cleaner but also as a noncontact substrate cleaning method as described below. That is,
A noncontact substrate cleaning method for removing dust on the surface of a substrate, comprising:
Transporting the substrate from the inlet side to the outlet side with the hood facing the hood separated into at least one suction chamber and at least one blowout chamber;
Sucking air from the suction chamber by an air suction device connected to the suction chamber;
Feeding air into the blowout chamber by means of an air blowout device connected to the blowout chamber;
In the blowout chamber, a step of blowing air to the substrate from a blowout port formed at a position facing the surface of the substrate on the outlet side with respect to the suction port;
Suctioning dust on the surface of the substrate from a slit-shaped suction port formed in a direction intersecting the transport direction at a position facing the surface of the substrate on the inlet side in the suction chamber; It is a noncontact type substrate cleaning method which it has.
Also in the above method, various features described above can be applied.
The present invention is applicable not only to cleaning of a substrate, but also to cleaning of various transportable articles, particularly articles having a thin plate shape.

It is a perspective view which shows the whole outline of the non-contact type | formula substrate cleaner in 1st Example. It is a side view of the non-contact type substrate cleaner in a 1st example. It is explanatory drawing which shows the structure of the food | hood in 1st Example. It is explanatory drawing which shows the structure of the food | hood in 2nd Example.

FIG. 1 is a perspective view showing the general outline of a non-contact type substrate cleaner (hereinafter sometimes referred to simply as "substrate cleaner") in the first embodiment.
The substrate cleaner of the embodiment removes dust on the surface of the substrate by air blowing and suction while conveying the substrate horizontally from the left to the right in the figure (arrow A in the figure) along the guide rails 11. Device. Although not shown in FIG. 1, the mechanism for transporting the substrate utilized a belt conveyor attached between the guide rails 11 provided on the left and right. A restricting plate 12 is attached to the guide rail 11 so as to hold both ends of the substrate so as to sandwich the guide rail. The substrate moves in a gap between the guide rail 11 and the regulation plate 12 with its both ends sandwiched, and therefore, the substrate is transported without being attracted to the cleaning suction port during cleaning.

The lower surface of the hood 100, that is, the portion facing the substrate to be transported, is provided with an outlet for blowing out cleaning air and an inlet for sucking in dust. The shape, site, etc. will be described later. The hood 100 is connected with a pipe 15 for suction and a pipe 16 for blowing air.
The hood 100 and the guide rail 11 are attached to the support 10 respectively. Although both may be fixed to the support 10, in the present embodiment, an adjustment mechanism is provided to move the position of the hood 100 up and down along the support 10 as shown by the arrow B. Thus, various well-known techniques exist for the mechanism for moving the attachment position of components along the support column 10, and the adjustment mechanism can appropriately use these and thus the detailed description will be omitted. By adjusting the height of the hood 100 by the adjustment mechanism, it is possible to adjust the suction input so that dust can be properly cleaned according to the type of substrate and the like. The adjustment mechanism may be a mechanism capable of adjusting the height of the guide rail 11 in place of the hood 100, or may be a mechanism capable of adjusting both the hood 100 and the guide rail 11.

FIG. 2 is a side view of the noncontacting substrate cleaner in the first embodiment. The overall structure is shown schematically.
The entire substrate cleaner is supported by posts 10.
The transport unit for transporting the substrate is a belt conveyor 13 assembled to a guide rail 11 attached to the support 10. The belt conveyor 13 is driven in the direction of arrow A by the drive motor 14. A restricting plate 12 is attached to the upper surface of the guide rail 11.

A hood 100 is attached to the top of the transport unit. Since the substrate is transported as shown by arrow A in the figure, the right side of the hood 100 in the figure is called the inlet side, and the left side is called the outlet side.
Inside the hood 100, a substantially L-shaped inner wall 101 is attached, and the inner wall 101 separates the right side (inlet side) into the suction chamber 102 and the left side (outlet side) into the blowout chamber 103. A suction pipe 15 is attached to the suction chamber 102, and a blowout pipe 16 is attached to the blowout chamber 103. A suction port 102 a is provided on the inlet side of the suction chamber 102. The suction port 102 a protrudes from the suction chamber 102 toward the belt conveyor 13, and its tip end is inclined in the outlet direction. By sucking air from the suction pipe 15, dust on the substrate is sucked obliquely from the suction port. On the other hand, the lower surface of the blowout chamber 103 is almost entirely open, and when air is fed from the blowout pipe 16, the air is blown out toward the surface of the substrate as shown.

  In the substrate cleaner of the example, a hood 120 for cleaning was also installed under the belt conveyor 13. The inside of the hood 120 is also partitioned by the inner wall 121, and the right side (inlet side) is the suction chamber 122, and the left side (outlet side) is the blowout chamber 123. A suction pipe 15A is connected to the suction chamber 122, and a blowout pipe 16A is connected to the blowout chamber 123. Although the hood 120 has a shape different from the hood 100 for the convenience of the installation location, it may be the same shape as the hood 100. As described above, by providing the hood 120 also on the lower side of the belt conveyor 13, there is an advantage that the upper and lower surfaces of the substrate can be cleaned at one time. However, the hoods 100 and 120 need not necessarily be provided on both the upper and lower sides, and either one may be omitted.

  In the present embodiment, the blower 30 is installed at the lower part of the apparatus, and the pipes 15, 15A, 16, 16A are connected thereto. Various types of blowers can be used, but in this embodiment, a roots-type blower is used. The roots type is a blower that sucks in and discharges air by rotation of a plurality of rotors provided inside. The suction pipes 15, 15A are connected to the suction side of the Roots-type blower, and the blow pipes 16, 16A are connected to the discharge side. By doing this, both suction and blowing can be performed by one unit. However, separate blowers may be prepared for suction and blowout.

FIG. 3 is an explanatory view showing the structure of the hood 100 in the first embodiment. FIG. 3A shows a plan view. As illustrated, the hood 100 has a rectangular planar shape, and the pipes 15 and 16 are connected.
FIG. 3 (b) is a side view. The hood 100 has a side shape similar to a trapezoidal shape with the upper right and the upper left in the figure on the oblique side. The left and right tops are inclined to allow air to flow without stagnation. The side surface shape does not necessarily have to be a shape similar to a trapezoid, and may be a rectangular shape, or may be a circular arc shape on the left and right.

  As described above, the substantially L-shaped inner wall 101 is attached to the inside of the hood 100, and the right side (inlet side) in FIG. 3 is the suction chamber 102, and the left side (outlet side). Is a blowout chamber 103. The position of the suction pipe 15 connected to the suction chamber 102 and the position of the blowout pipe 16 connected to the blowout chamber 103 are different in height in the present embodiment, but the heights of both may be the same. The pipe 16 may be higher than the pipe 15. Since the suction action of dust is more important than the blowout of air in the action of the substrate cleaner in this embodiment, the position of the pipe 15 is first determined so that a smooth air flow is realized in the suction chamber 102, Thereafter, the mounting position of the pipe 16 may be determined in consideration of the interference of the pipes 15 and 16, the strength of the hood 100, the ease of mounting, the air flow in the blowout chamber 103, and the like. In the present embodiment, the pipes 15 and 16 have substantially the same thickness, but the two may have different thicknesses.

The lower surface 100 a of the hood 100 is open, and a suction port 102 a is provided on the inlet side of the suction chamber 102. The suction port 102 a protrudes from the suction chamber 102 toward the belt conveyor 13, and its tip end is inclined in the outlet direction. The inclination angle α can be set arbitrarily, but in the present embodiment it is 45 degrees. When the inclination angle α becomes close to 0 degree (vertical direction), it becomes difficult to inhale dust that has soared inside the hood 100 without protruding from the inlet side. On the other hand, when the inclination angle α becomes close to 90 degrees (horizontal direction), the dust suction effect is reduced. The inclination angle α of the suction port 102a can be set analytically or experimentally based on these effects.
The shape of the suction port 102a can also be set arbitrarily. In order to clean the whole board | substrate conveyed uniformly, it is preferable to make the suction opening 102a into the slit-like shape over the full width of the board | substrate which becomes cleaning object. In particular, if the width is greater than the width of the belt conveyor 13, there is an advantage that the entire belt conveyor 13 can be used for transporting the substrate without waste. Further, in the present embodiment, as shown in FIG. 3B, the suction port 102a has a tapered shape so that the cross-sectional area becomes narrower toward the tip so as to obtain a stronger suction force. It does not matter as an area.

  The lower surface of the blowout chamber 103 is almost entirely open, and serves as a blowout port for blowing air. That is, the area of the air outlet is larger than that of the inlet 102a. By doing this, air that hits the dust on the substrate surface can be made relatively loose. In general, dust on the surface of the substrate is not so firmly attached to the surface of the substrate, so if it is exposed to excessively strong air, there is also a possibility that dust may fly so much that it can not be inhaled at the suction port 102a. In the present embodiment, these problems can be suppressed by widening the area of the air outlet. In addition, since the opening is used as the outlet as it is, there is an advantage that the structure of the hood 100 can be simplified. However, the blowout port does not necessarily have to use the entire opening, and a slit-shaped nozzle, a hole, a circular nozzle, or the like similar to the suction port 102a may be used. As an example, by extending the end of the pipe 16 to the lower end of the blowout chamber 103, it can also be used as the blowout port as it is.

  According to the non-contact type substrate cleaner of the embodiment described above, while transporting the substrate, air can be blown to the substrate from the blowout port, dust can be sucked by the suction port 102a, and the substrate can be cleaned evenly. be able to. Further, since the suction port 102a is provided on the inlet side of the hood, dust can be efficiently sucked.

Next, a non-contact type substrate cleaner as a second embodiment will be described. The configuration of the entire apparatus is the same as that of the first embodiment (FIG. 1). In the second embodiment, the structure of the hood is different.
FIG. 4 is an explanatory view showing the structure of the hood 110 in the second embodiment. FIG. 4 (a) shows the lower surface, that is, the side facing the belt conveyor. As shown, the hood 110 has a rectangular planar shape. And the pipe 15B for suction and the pipe 16B for blow-out are connected respectively. The tips of the pipes 15B and 16B are connected to the blowers as in the first embodiment.
The substrate will be transported from the right side to the left side of FIG. 4 (a). Therefore, the right side in FIG. 4A is the inlet side of the hood 110, and the left side is the outlet side.
In the hood 110 of the second embodiment, suction ports 112a and 112b are formed on both the inlet side and the outlet side. The suction ports 112 a and 112 b are formed in a slit shape over the entire width of the hood 110. In the present embodiment, the opening areas of the suction ports 112a and 112b are the same, but may be different areas.

In the hood 110, the suction ports 112a and 112b are not entirely open but closed by a flat plate. Then, a large number of nozzles 114 for blowing out air are arrayed on the inlet side of the hood 110 at the left and right centers (centers on the inlet side and the outlet side). In order to avoid the complication of the drawing, only a part of the drawing is given the code as the nozzle 114. The air blown from the blowout pipe 16B passes through the pipe 16B and the flow path 113B as shown by arrows a1 and a2 in the figure, flows into the manifold 113C, and blows out from the respective nozzles 114.
A flow path connecting the suction ports 112a and 112b and the pipe 15B is formed avoiding the pipe 16B, the pipe 16B, and the flow path 113B. Air is drawn into the pipe 15B from the suction port 112a through the upper side of the manifold 113C. A flow passage 112C is formed from the suction port 112b to the pipe 15B, passing through the lower side of the pipe 16B, and air is sucked through the flow passage 112C as shown by arrows b1 and b2.
The positional relationship of each flow path is demonstrated below using an AA cross section and a BB cross section. In the present embodiment, both of the suction ports 112a and 112b are connected to the pipe 15B, but separate suction pipes may be provided on the respective suction ports.

FIG.4 (b) is a BB sectional drawing. The hood 110 has an overall shape in which short rectangles are stacked on long rectangles in the transport direction of the substrate as illustrated.
Inside the hood 110, L-shaped inner walls 111a and 111b are attached, whereby the hood 110 is divided into a blowout chamber 113A and a suction chamber 112. However, in the present embodiment, the pipe 16B penetrates the inside of the blowout chamber 113A, and the air does not blow out into the blowout chamber 113A.
Also, a plate-like inner wall 111 c is attached horizontally below the hood 110 to form the lower surface of the suction chamber 112. The manifold 113C in which the nozzle 114 is formed is attached to the lower surface of the inner wall 111c. The inner wall 111c is bent downward on the inlet side and the outlet side, and also serves to form the inside of the suction ports 112a and 112b.
The suction chamber 112 thus formed also forms a flow passage 112C passing through the lower side of the blowout chamber 113A at the cross section B-B and also functions to connect the suction port 112b on the outlet side and the pipe 15B. .

FIG.4 (c) is AA sectional drawing. In the same cross section, a vertical cylindrical pipe 16C connected to the blowout pipe 16B is provided, and the pipe 16C is connected to a flow path 113B formed by attaching the inner wall 111d to the lower surface of the inner wall 111c. ing. In the inner wall 111c, an opening is formed in a portion corresponding to the pipe 16C, and air flows from the pipe 16C through the opening into the flow path 113B. The tip of the flow path 113B is connected to a manifold 113C attached to the lower surface of the inner wall 111c. A nozzle 114 is formed in the manifold 113C.
The nozzle 114 may be formed to blow air vertically downward, but in the present embodiment, the nozzle 114 is shaped so as to blow air obliquely in the inlet side direction of the hood 110 as illustrated. By doing this, dust on the surface of the substrate can be blown off to the inlet side, and there is an advantage that the suction port 112a can be easily sucked. The direction in which the air is blown out from the nozzle 114 can be set arbitrarily. If it approaches vertically downward, the effect of blowing off the dust in the inlet direction becomes weak, and if it becomes close to the horizontal direction, the action itself of blowing off the dust becomes weak. The shape of the nozzle 114 may be determined in consideration of both. The blowing direction of the nozzle 114 may be adjustable.
In the present embodiment, the nozzles 114 are all configured to blow out air in parallel to the transport direction of the substrate, but may be configured to blow out in the direction intersecting the transport direction.
According to the non-contact type substrate cleaner using the hood 110 of the second embodiment described above, in addition to the same effect as the first embodiment, since the suction port 112 b is provided on the outlet side, the outlet side of the hood 110 There is an advantage that dust can be prevented from leaking out. In particular, when dust is blown to the outlet side of the substrate, dust may fall on the substrate after cleaning, which is more useful when there is a concern that the next step may be affected.

The various features described in the first embodiment and the second embodiment do not necessarily have to be all, and some of them may be omitted or combined as appropriate. Furthermore, the present invention is not limited to these embodiments, and various modifications can be made.
For example, in the first embodiment and the second embodiment, the air outlet can be omitted.
Although the first and second embodiments show an example in which the substrate is transported in the horizontal direction, the substrate may be erected and transported in the vertical direction. In this case, the hoods 100 and 110 described in the first embodiment and the second embodiment may be arranged upright so as to face the transport surface of the substrate.

  The present invention can be used to remove dust on a substrate surface without contact.

10: Support 11: Guide rail 12: Restriction plate 13: Belt conveyor 14: Drive motor 15: Pipe 15A: Pipe 15B: Pipe 16B: Pipe 16A: Pipe 16A: Pipe 16B: Pipe 16C: Pipe 30: Blower 100: Hood 100a: Lower surface 101: inner wall 102: suction chamber 102a: suction port 103: blowout chamber 110: hood 111a, 111b, 111c, 111d: inner wall 112: suction chamber 112C: flow passage 112a: suction port 112b: suction port 113A: blowout chamber 113B: flow Path 113C: Manifold 114: Nozzle 120: Hood 121: Inner wall 122: Suction chamber 123: Blow-out chamber

Claims (8)

A non-contact substrate cleaner for removing dust on the surface of a substrate,
A hood, the inside of which is separated into at least one suction chamber and blowing chamber respectively;
A transport unit configured to transport the substrate from the inlet side to the outlet side in a state in which the substrate faces the hood;
An air suction device connected to the suction chamber for suctioning air from the suction chamber;
An air blowout device connected to the blowout chamber for feeding air into the blowout chamber;
The suction chamber has a slit-shaped suction port elongated in a direction intersecting the transport direction at a position facing the surface of the substrate on the inlet side.
The non-contact type substrate cleaner, wherein the blowout chamber has a blowout port at a position facing the surface of the substrate on the outlet side with respect to the suction port. The non-contact type substrate cleaner according to claim 1, wherein
The non-contact type substrate cleaner, wherein the suction port protrudes from the suction chamber toward the transport section, and the tip of the suction port is inclined more inward of the hood than the inlet side. A noncontact substrate cleaner according to claim 1 or 2, wherein
The non-contact type substrate cleaner, wherein the suction chamber has an outlet-side suction port at a position facing the surface of the substrate also on the outlet side of the hood. The noncontact substrate cleaner according to any one of claims 1 to 3, wherein
The non-contact type | formula substrate cleaner whose area of the said blower outlet is wider than the area of the said suction inlet. The noncontact substrate cleaner according to any one of claims 1 to 3, wherein
The non-contact type substrate cleaner, wherein the outlet is formed by arranging a plurality of holes or nozzles. The noncontact substrate cleaner according to claim 5, wherein
The non-contact type substrate cleaner, wherein the hole or the nozzle is shaped to blow out an air flow that obliquely strikes the substrate. The noncontact substrate cleaner according to any one of claims 1 to 6, wherein
The non-contact type substrate cleaner, wherein the transport unit has a regulating mechanism that regulates movement of the substrate being transported in the direction of the suction port. The noncontact substrate cleaner according to any one of claims 1 to 6, further comprising:
A non-contact type substrate cleaner provided with an adjustment mechanism which adjusts a space between the substrate to be conveyed and the suction port by relatively moving the conveyance portion and the hood.

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