JP2019095252A - Method for inspecting boundary of inspection object and inspection device therefor - Google Patents

Abstract

To provide an inspection method and a device therefor with which, owing to a compact device, it is possible to quickly and reliably inspect even a minute irregularity or change on a boundary between the surface and other faces of an inspection object.SOLUTION: In a method and device for inspecting a boundary between a surface 51 of an inspection object 50 and a slant face 52 inclined at a prescribed angle to the surface 51 or a curved face formed by curving from the surface, the surface 51 is irradiated with a first diffracted light 31 consisting of a light irradiated in a plurality of colors from the same irradiating device, each color radiated at a prescribed angle, and having directivity for each color, and the slant face 52 or curved face is irradiated with a second diffracted light 32. A first reflected light 41 of the first diffracted light 31 that is reflected from the surface 51 of the inspection object 50, and a second reflected light 42 of the second diffracted light 32 that is reflected from the slant face 52 or curved face are detected, and a boundary 53 of the inspection object 50 is inspected by a change of color of the first reflected light 41 and second reflected light 42 in a portion of a boundary 53 between the surface 51 of the inspection object 50 and the slant face 52 or curved face.SELECTED DRAWING: Figure 1

Description

The present invention relates to a method for inspecting the boundary of an inspection object and an inspection apparatus therefor.

  As a method of inspecting the unevenness of the surface of the inspection object, other planes and boundaries, the illumination consisting of parallel rays is applied to the surface of the inspection object, and from the reflected light, the unevenness or linearity of the boundary of the inspection object There is something to inspect. However, on a glossy surface, for example, a metal surface, the reflected light from the surface becomes strong, and in areas other than the surface, the screen becomes dark and it is difficult to determine the state of the boundary.

  Further, as shown in FIG. 15, the illumination device 130 projects the illumination light 130 of the striped pattern 121 from the irradiation device 120 onto a wide range of the surface 151 of the inspection object 150, and the reflected light 140 is photographed by the camera 160, There are some which inspect the unevenness of the surface 151 of the inspection object 150 from the disorder of the striped pattern 121 (for example, refer to patent documents 1 and 2). However, in this case, it is difficult to inspect the boundary between the surface 151 and the other plane, and to recognize from which position of the irradiation device 120 the reflected light 140 is emitted. Therefore, there are cases where advanced image processing is performed on the captured image. Therefore, image processing takes time, and the apparatus also becomes large.

  Also, as shown in FIG. 16, using the annular light source 220, the light of the red LED 221 from the inside, then the green LED 222, and the blue LED 223 on the outermost side is projected onto the inspection object placed on the inspection substrate 250. Then, there is one in which a change in hue is photographed by a camera 260 (see, for example, Patent Document 3). However, in this case, the red LED 221, the blue LED 223, and the green LED 224 are respectively required, the apparatus becomes large, and inspection of the boundary between the surface and the other plane is difficult.

JP, 2014-2041, A JP, 2016-130695, A JP, 2005-274558, A

  Therefore, the present invention is intended to provide an inspection method and an apparatus, which are compact in size and capable of quickly and reliably inspecting minute irregularities and changes in the boundary portion between the surface of an inspection object and another surface.

In order to solve the above-mentioned problems, the present invention according to claim 1 inspects the boundary between the surface of the inspection object and the inclined surface which is inclined at a predetermined angle with the surface or a curved surface formed by being curved from the surface. In the method
A plurality of colors are emitted from the same irradiation device, each color is emitted at a predetermined angle, and the first diffracted light irradiated with light having directivity for each color is irradiated on the surface, and the irradiation devices of the plurality of colors are the same. Each color is emitted at a predetermined angle, and the second diffracted light, which is irradiated with light having directivity for each color, is irradiated to the inclined surface or the curved surface,
The first reflected light in which the first diffracted light is reflected from the surface of the inspection object and the second reflected light in which the second diffracted light is reflected from the inclined surface or the curved surface are detected, and the surface and the inclined surface of the inspection object Alternatively, the boundary portion of the inspection object is inspected by changing the color of the first reflected light and the second reflected light of the portion of the boundary portion with the curved surface portion.

According to the present invention of claim 1, in the method of inspecting the boundary between the surface of the inspection object and the inclined surface which is inclined from the surface at a predetermined angle or a curved surface formed by curving from the surface, a plurality of colors Each color is emitted at a predetermined angle from the same irradiation device, and the surface is irradiated with first diffracted light which is irradiated with light having directivity for each color. The first diffracted light can be configured such that the first reflected light reflected from the surface of the inspection object has a certain same color, and can be easily distinguished from the reflected light from a portion other than the surface.

A plurality of colors are emitted from the same irradiation device, and each color is emitted at a predetermined angle, and the second diffracted light, which is irradiated with light having directivity for each color, is irradiated to the inclined surface or the curved surface. The second diffracted light can be configured so that the second reflected light reflected from the surface of the inspection object is a reflected light of a certain same color, and easily reflected light from a portion other than the inclined surface or the curved surface Can be identified.

The first reflected light in which the first diffracted light is reflected from the surface of the inspection object and the second reflected light in which the second diffracted light is reflected from the inclined surface or the curved surface are detected, and the surface and the inclined surface of the inspection object Alternatively, the boundary portion of the inspection object is inspected by the change in color of the first reflected light and the second reflected light in the portion of the boundary portion with the curved surface portion. For this reason, if there is an abnormality such as unevenness in the boundary portion, the color of the portion changes and special image processing is not required, inspection is easy, and inspection speed can be increased. If the color of the reflected light from the surface is different from the color of the reflected light from the inclined surface or the curved surface, inspection can be performed by changing the color of the reflected light. Therefore, the boundary portion between the surface and the inclined surface or a portion of the curved surface The part becomes clear.

According to the second aspect of the present invention, the first diffracted light and the second diffracted light emitted from the white light source in which a plurality of colors are emitted at predetermined angles and each light is irradiated with light having directivity. It is a method of inspecting the boundary of an inspection object using diffracted light which transmits or reflects light to a holographic diffractive optical element.

According to the second aspect of the present invention, the first diffracted light and the second diffracted light irradiated with the light having a plurality of colors emitted at a predetermined angle for each color and having directivity for each color are from the white light source. The diffracted light transmitted or reflected to the holographic diffractive optical element is used. For this reason, it is possible to easily generate diffracted light in which a plurality of colors are emitted at a predetermined angle and illuminated with light having directivity for each color in the holographic diffractive optical element. In addition, the holographic diffractive optical element is flexible and can be bent according to the inspection object, and the inspection object having the aspect can be reliably irradiated with the diffracted light.
In order to increase the intensity of diffracted light, it is preferable to use a phase modulation type volume hologram as the holographic diffraction optical element.

The invention according to claim 3 is a method of inspecting a boundary portion of an inspection object in which a plurality of diffraction regions having different diffraction angles are arranged in a holographic diffractive optical element.

In the third aspect of the present invention, since the holographic diffractive optical element has a plurality of diffractive regions with different diffraction angles arranged, the reflected light from one holographic diffractive optical element is observed as different colors depending on the reflecting surface. Thus, even a minute change of the boundary of the inspection object can be surely observed as a color change of the striped pattern, and the unevenness of the boundary can be easily found.

According to the present invention of claim 4, the second diffracted light irradiates the inclined surface or the curved surface with the first diffracted light by changing the angle with the reflecting mirror or prism, or by bending or curving the holographic diffractive optical element. (1) A method of inspecting the boundary portion of the inspection object to which the second diffracted light is irradiated from the portion other than the portion which irradiates the diffracted light.

In the present invention of claim 4, the second diffracted light is irradiated with different diffracted light from one light source when the first diffracted light is irradiated to the inclined surface or the curved surface by changing the angle with a reflecting mirror or a prism. And the apparatus can be simplified.
When the holographic diffractive optical element is bent or curved to irradiate the second diffracted light from a portion other than the portion to be irradiated with the first diffracted light, the holographic diffractive optical element having flexibility is used to be inspected Along the object, the holographic diffractive optical element can be bent or curved to irradiate the first diffracted light and the second diffracted light from one holographic diffractive optical element which is one light source.

The present invention of claim 5 is a method of inspecting a boundary portion of an inspection object in which the first diffracted light and the second diffracted light are lights emitted from another light source.

In the present invention of claim 5, since the first diffracted light and the second diffracted light are lights emitted from another light source, the first diffracted light and the second diffracted light have different surfaces from free angles. The surface of the object to be inspected and the inclined surface or curved surface can be appropriately irradiated to highlight the difference between the first reflected light and the second reflected light at the boundary, and ensure inspection. Can.

According to the present invention, the first reflected light and the second reflected light are photographed by a camera, data of the photographed reflected light is recorded, and a change in color is automatically judged based on the recorded data, and inspection is performed. A method of inspecting the boundary of an inspection object for inspecting unevenness of the boundary of the object.

In the present invention of claim 6, the first reflected light and the second reflected light are photographed by a camera, data of the photographed reflected light is recorded, and a change in color is automatically judged based on the recorded data, and inspection is performed. Inspect the unevenness of the boundary of the object. In order to judge the unevenness of the boundary part of the inspection object based on the change of color, it is possible to inspect the inspection surely and quickly without special image processing, and also to inspect away from the inspection object Based on the recorded data, it can be inspected automatically using an automatic judgment device.

The present invention according to claim 7 is a method of inspecting a boundary between a surface of an inspection object and an inclined surface which is inclined at a predetermined angle with the surface or a curved surface formed by being curved from the surface,
A light source and light emitted from the light source are emitted from a plurality of illumination devices having the same color, each color is emitted at a predetermined angle, and the surface is irradiated with first diffracted light which is irradiated with light having directivity for each color. Device, a light source, and light emitted from the light source are emitted at a predetermined angle from a plurality of illumination devices having the same color, and second diffracted light irradiated with light having directivity for each color A device for irradiating the inclined surface or the curved surface;
The first reflected light in which the first diffracted light is reflected from the surface of the inspection object and the second reflected light in which the second diffracted light is reflected from the inclined surface or the curved surface are detected, and the surface and the inclination of the inspection object It is an inspection device which inspects the border part of a test subject by change of the color of the 1st catoptric light and the 2nd catoptric light of the part of a border part with a portion of a field or a curved surface.

According to the present invention of claim 7, a light source is a method of inspecting a boundary between a surface of an inspection object and an inclined surface inclined at a predetermined angle with the surface or a curved surface formed by curving from the surface; An apparatus for irradiating the surface with a first diffracted light which is emitted from a light source and emitted from a plurality of illumination devices having the same color, each color at a predetermined angle, and illuminated with light having directivity for each color Have. For this reason, the first reflected light on the surface of the inspection object is the reflected light of a certain same color by the first diffracted light, and can be easily distinguished from the reflected light from parts other than the surface.

A light source and light irradiated from the light source are emitted from a plurality of illumination devices having the same color, each color is emitted at a predetermined angle, and the second diffracted light irradiated with light having directivity for each color is an inclined surface Or it has an apparatus which irradiates to a curved surface. For this reason, the second reflected light from the inclined surface or the curved surface may be different in color from the light reflected from the surface, so that it is easy to distinguish from the surface.

The first reflected light in which the first diffracted light is reflected from the surface of the inspection object and the second reflected light in which the second diffracted light is reflected from the inclined surface or the curved surface are detected, and the surface and the inclination of the inspection object The boundary portion of the inspection object is inspected by the change of the color of the first reflected light and the second reflected light of the portion of the boundary portion with the surface or the curved surface portion. For this reason, if there is an abnormality such as unevenness in the boundary portion, the color of the portion changes and special image processing is not required, inspection is easy, and inspection speed can be increased. If the color of the reflected light from the surface is different from the color of the reflected light from the inclined surface or the curved surface, inspection can be performed by changing the color of the reflected light. Therefore, the boundary portion between the surface and the inclined surface or a portion of the curved surface The part becomes clear.

According to the invention of claim 8, the light source is a white light source, and the illumination device is made into first diffracted light and second diffracted light which are transmitted or reflected from the white light source to the holographic diffractive optical element, the first diffracted light The light and the second diffracted light are inspection devices in which a plurality of colors are diffracted light which is emitted at a predetermined angle for each color and is irradiated with light having directivity for each color.

In the present invention of claim 8, the light source is a white light source, and the illumination device is made into first diffracted light and second diffracted light which are transmitted or reflected from the white light source to the holographic diffractive optical element, the first diffracted light The light and the second diffracted light are diffracted lights in which a plurality of colors are emitted at a predetermined angle and each direction is irradiated with light having directivity. For this reason, it is possible to easily generate diffracted light in which a plurality of colors are emitted at a predetermined angle and illuminated with light having directivity for each color in the holographic diffractive optical element. In addition, the holographic diffractive optical element is flexible and can be bent according to the inspection object, and the inspection object having the aspect can be reliably irradiated with the diffracted light.
In order to increase the intensity of diffracted light, it is preferable to use a phase modulation type volume hologram as the holographic diffraction optical element.

The invention according to claim 9 is the inspection device in which the holographic diffractive optical element is a plurality of diffraction regions arranged at different diffraction angles.

In the present invention of claim 9, the holographic diffractive optical element arranges a plurality of diffraction regions having different diffraction angles, so that the reflected light can be observed as a different color depending on the reflection surface, and the boundary of the inspection object Even a minute change of a part can be surely observed as a color change of a striped pattern, and unevenness of the boundary can be easily found.

According to the present invention of claim 10, the second diffracted light irradiates the inclined surface or the curved surface with the first diffracted light by changing the angle with a reflecting mirror or a prism, or by bending or curving the holographic diffractive optical element. (1) It is an inspection device which irradiates the second diffracted light from the part other than the part irradiated with the diffracted light.

In the present invention of claim 10, when the first diffracted light is irradiated to the inclined surface or the curved surface by changing the angle with the reflecting mirror or the prism, the second diffracted light is irradiated with the diffracted light different from one light source. And the apparatus can be simplified.
When the holographic diffractive optical element is bent or curved to irradiate the second diffracted light from a portion other than the portion to be irradiated with the first diffracted light, the holographic diffractive optical element having flexibility is used to be inspected Along the object, the holographic diffractive optical element can be bent or curved to irradiate the first diffracted light and the second diffracted light from one holographic diffractive optical element which is one light source.

The present invention of claim 11 is an inspection apparatus in which the first diffracted light and the second diffracted light are lights emitted from different light sources.

In the present invention of claim 11, the first diffracted light and the second diffracted light are lights emitted from another light source, so the first diffracted light and the second diffracted light are from different angles on different surfaces. Irradiation can be performed, and differences in the reflected light at the boundary of the inspection object can be highlighted, and inspection can be performed reliably.

The present invention according to claim 12 is a test having a camera for photographing reflected light, and a recording device for recording data of photographed reflected light, and a judgment device for automatically judging a change in color based on the recorded data. It is an apparatus.

The present invention of claim 12 has a camera for photographing reflected light, and a recording device for recording data of the photographed reflected light, and has a judgment device for automatically judging a change in color based on the recorded data. For this reason, since the unevenness of the boundary portion of the inspection object is judged based on the change in color, the inspection can be surely and quickly inspected without special image processing, and the inspection is performed apart from the inspection object It can also be inspected automatically using an automatic decision device based on the recorded data.

The first reflected light and the second reflected light are detected, and the color of the first reflected light and the second reflected light of the boundary portion between the surface of the inspection object and the inclined surface or the curved surface portion changes the inspection object The color of the first reflected light on the surface differs from the color of the second reflected light from the inclined surface or curved surface, and the inspection can be performed by the change in color of the reflected light. If there is an abnormality such as unevenness in the boundary part, the part of the boundary part with the part of becomes clear and inspection is easy without the need for special image processing.

BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 shows an embodiment of the present invention, and is a schematic view showing an entire configuration of an inspection apparatus. BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 shows an embodiment of the present invention, and is a schematic view of a photographic screen in which diffracted light is irradiated from the holographic diffractive optical element to the surface of an inspection object. This embodiment shows the embodiment of the present invention, in which diffracted light in the same direction is irradiated from the holographic diffractive optical element to the surface of the object to be inspected and on a slope, and a camera for capturing the reflected light is placed vertically above the surface of the object It is a schematic diagram of the inspection apparatus. FIG. 1 shows an embodiment of the present invention, in which diffracted light of different angles is irradiated to the surface of the object to be inspected and sloped depending on the location of the holographic diffractive optical element, and a camera capturing reflected light is oblique to the surface of the object It is a schematic diagram of the inspection apparatus put on the upper part. BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 shows an embodiment of the present invention, and is a schematic view of a photographic screen in which diffracted light from a holographic diffractive optical element is irradiated on the surface, sloped surface and boundary of an inspection object. The embodiment of the present invention is shown, in which diffracted light is irradiated from the holographic diffractive optical element to the surface of the inspection object and in the form of a slope, and the state of the reflected light when the boundary between the surface and the slope is a convex portion It is a schematic diagram shown. FIG. 1 shows an embodiment of the present invention, in which diffracted light is irradiated from the holographic diffractive optical element onto the surface of an inspection object in the form of a slope and the state of reflected light when the boundary between the surface and the slope is a recess is shown. It is a schematic diagram. It is a schematic diagram which shows embodiment of this invention, irradiates a diffracted light to the surface and slope of a test subject from a holographic diffraction optical element, and shows the state of the reflected light of a surface, a slope, and a boundary part. (A) shows that a slope is 45 degrees, (b) is a schematic diagram which shows the state of the reflected light of a surface, a slope, and a boundary part. It is a schematic diagram which shows embodiment of this invention, irradiates a diffracted light to the surface and slope of a test subject from a holographic diffraction optical element, and shows the state of the reflected light of a surface, a slope, and a boundary part. (A) shows that a slope is 30 degrees, (b) is a schematic diagram which shows the state of the reflected light of a surface, a slope, and a boundary part. The embodiment of the present invention is shown, which is a schematic view showing the state of the reflected light of the boundary portion where the surface, the vertical surface and the curved surface are curved by irradiating the diffracted light from the holographic diffractive optical element to the surface and the inclined surface of the inspection object. is there. (A) shows the thing of the boundary part which the boundary part of a surface and a perpendicular surface curved, (b) is a schematic diagram which shows the state of the reflected light of the surface and a slope and a curved boundary part. It is a photograph which irradiates a diffracted light to the surface and slope of a test subject from a holographic diffraction optical element, and shows a state of reflected light on the surface, slope and boundary. (A) is a photograph which shows the state of the reflected light of a surface, a slope, and a boundary part, (b) is the photograph to which the part of the boundary part was expanded. It is a photograph which shows embodiment of this invention, irradiates a diffracted light to the surface and slope of a test subject from a holographic diffraction optical element, and shows the state of the reflected light of the surface and a curved surface. (A) is a photograph which shows the state of the reflected light of the surface and a curved surface, (b) is the photograph to which the part of the curved surface was expanded. The embodiment of this invention is shown, The boundary part with the surface side of a test subject shows the state where it curved, and is a schematic diagram which a holographic diffraction optical element irradiates with diffracted light along a curved groove. is there. It is a schematic diagram which shows embodiment of this invention, has a funnel-shaped recessed part in the surface of a test subject, and irradiates a diffracted light along a funnel-shaped recessed part. It is a schematic diagram which shows the structure of the conventional test | inspection apparatus, projects the diffracted light of a striped pattern from an irradiation apparatus, and is a schematic diagram which shows the structure which image | photographs the reflected light. It is a schematic diagram which shows the structure of the other conventional inspection apparatus, and is a schematic diagram which shows the structure which arrange | positions and test | inspects blue LED, green LED, and red LED annularly.

An embodiment of the present invention will be described based on FIGS.
As shown in FIG. 1, the inspection apparatus of the present invention has a first diffracted light 31 which is diffracted light 30 on the surface 51 of the inspection object 50 and a second diffracted light 32 which is diffracted light 30 with respect to the inclined surface 52. Is reflected by the mirror 70 and irradiated, and the white light source 10 which is a light source for irradiating the holographic diffraction optical element 20 with light, the surface 51 of the inspection object 50, the inclined surface 52, and The reflected light 40 from the boundary 53 between the surface 51 and the inclined surface 52 is inspected. The inclined surface 52 includes a flat surface and a curved and inclined surface.

  Furthermore, a camera 60 for imaging the reflected light 40 from the surface 51, the inclined surface 52 and the boundary 53 of the inspection object 50 can be provided, and an image data recording device for recording image data from the camera 60 can be provided. FIG. 2 shows an irradiation state of each component of the first diffracted light 31 when the surface 51 of the inspection object 50 is irradiated from the holographic diffractive optical element 20.

Based on the data from the image data recording device, it is defect information of the surface 51, the inclined surface 52 and the boundary portion 53 based on the color information of the reflected light 40 from the surface 51, the inclined surface 52 and the boundary portion 53 of the inspection object 50 An inspection of unevenness can be performed automatically.
When the data of the camera 60 is not determined automatically, the reflected light 40 can be inspected visually.

An LED light source can be used as a white light source. In the case of using an LED light source, it is possible to use a blue light emitting LED in white by applying it to a yellow phosphor. In addition, LED elements that emit red, green and blue can also be used. The use of an LED light source can provide strong light at a stable wavelength.
As the white light source, xenon light, halogen light, laser light or the like can also be used.

Hereinafter, as the holographic diffractive optical element 20, a transmissive holographic diffractive optical element in which diffracted light is transmitted light will be described.
In addition, the holographic diffractive optical element 20 can be formed into a flexible sheet having a light transmitting soft plastic, and can be curved according to the shape of the inspection object 50. Furthermore, since the holographic diffractive optical element 20 is translucent, the camera 60 or the like can be placed behind the holographic diffractive optical element 20 for observation.

The diffraction angle of the holographic diffractive optical element 20 is larger than the diffraction angle of the prism, and each color can be separated sharply.
Thus, when the holographic diffractive optical element 20 is used for diffraction, it is possible to obtain light whose diffraction angles are distinctly different for each color.

  Therefore, as shown in FIG. 2, the light emitted from the holographic diffraction optical element 20 is irradiated at different angles for each of the blue component 31a, the green component 31b and the red component 31c of the first diffracted light 31, and The component 31a, the green component 31b and the red component 31c have high directivity at the same angle in the same color.

  As shown in FIG. 2, when the first diffracted light 31 emitted from the holographic diffractive optical element 20 is irradiated to the surface 51 of the inspection object 50 placed horizontally, the blue component 31 a and the green component 31 b of the first diffracted light 31 The red component 31 c has a different angle of leaving the holographic diffractive optical element 20. The blue component 31a has the largest diffraction angle, the red component 31c originally has a small diffraction angle, and the diffraction angle of the green component 31b is in the middle. The blue component 31a, the green component 31b and the red component 31c are irradiated with high directivity from the holographic diffractive optical element 20 between the blue component 31a, the green component 31b, and the red component 31c, respectively.

In the present embodiment, although the first diffracted light 31 used is one that changes in the longitudinal or lateral direction, it may be an arch-like one or a ring-like stripe pattern. Further, as described later, it is possible to make a curved stripe pattern along the shape of the inspection object.

  The first reflected light 41 reflected from the surface 51 of the inspection object 50 placed horizontally has different reflection angles for each color. Therefore, when the camera 60 is in place, only the first reflected light 41 of a specific color can be viewed among the first reflected light 41 from the flat surface 51. In FIG. 2, the first reflected light 41 can see only the green component 41 b. In addition, without using the camera 60, it can confirm visually. When placing an eye on the camera 60, the surface 51 of the inspection object 50 appears green.

Next, as shown in FIG. 3, the inspection object 50 is formed in the vertical direction from the inclined surface 52 and the surface 51 which is the upper flat surface, the inclined surface 52 formed at an angle of 45 degrees from the surface 51 The case where the camera 60 is placed on the vertical surface of the holographic diffractive optical element 20 in the case of having the side surface 54 and the boundary portion 53 formed at the boundary between the surface 51 and the inclined surface 52 will be described. The holographic diffractive optical element 20 can transmit reflected light.

The white light emitted from the white light source 10 passes through the holographic diffractive optical element 20 and becomes diffracted light 30, and the first diffracted light 31 emitted to the surface 51 is reflected by the surface 51 to be reflected to the first reflected light 41. It becomes. At that time, as described above, the green component 31 b of the first diffracted light 31 reaches the camera 60 as the green component 41 b of the first reflected light 41.

The second diffracted light 32 is reflected by the mirror 70 and irradiated onto the inclined surface 52, and is reflected from the inclined surface 52 to become the second reflected light 42. At that time, the green component 32 b of the second diffracted light 32 reaches the camera 60 as the green component 42 b of the second reflected light 42.
The second diffracted light 32 applied to the side surface 54 does not reach the camera 60 because it is reflected downward, and appears black on the camera 60 as a background.

Next, as shown in FIG. 4, when the inspection object 50 similarly has the upper surface 51, the inclined surface 52, the side surface 54, and the boundary portion 53, the camera 60 is used as the holographic diffractive optical element 20. The case where it is placed on the oblique surface of The holographic diffractive optical element 20 emits diffracted light in the center direction on the right side and the left side respectively, and the first diffracted light 31 and the second diffracted light 32 have different light sources of diffracted light.

When the first diffracted light 31 of the holographic diffractive optical element 20 is irradiated, the blue component 31a, the green component 31b and the red component 31c of the first diffracted light 31 have different angles.
In addition, when the second diffracted light 32 of the holographic diffractive optical element 20 is irradiated, the blue component 32a, the green component 32b, and the red component 32c of the second diffracted light 32 have different angles.

The white light emitted from the white light source 10 passes through the holographic diffractive optical element 20 and becomes diffracted light 30, and the first diffracted light 31 emitted to the surface 51 is reflected by the surface 51 to be reflected to the first reflected light 41. It becomes. At that time, the green component 31 b of the first diffracted light 31 reaches the camera 60 as the green component 41 b of the first reflected light 41.

The second diffracted light 32 is reflected by the mirror 70 and irradiated onto the inclined surface 52, and is reflected from the inclined surface 52 to become the second reflected light 42. At that time, unlike the first diffracted light 31, the blue component 32a of the second diffracted light 32 reaches the camera 60 as the blue component 42a of the second reflected light 42. For this reason, since the right and left of the boundary part 53 of the test object 50 are different in color, observation of the boundary part 53 is easy.
The second diffracted light 32 applied to the side surface 54 does not reach the camera 60 because it is reflected downward, and appears black on the camera 60 as a background.

FIGS. 5 to 7 show schematic diagrams of the first diffracted light 31, the first reflected light 41, the second diffracted light 32 and the second reflected light 42 at that time.
As shown in FIG. 5, the surface 51 on the upper side of the inspection object 50 is green because the green component 31 b of the first diffracted light 31 reaches the camera 60 as the green component 41 b of the first reflected light 41.
In the case of FIG. 5, the inclined surface 52 of the inspection object 50 reaches the camera 60 as the green component 42 b of the second reflected light 42 with the green component 32 b of the second diffracted light 32.
Sides 54 become black as a background.

As shown in FIG. 5, when the concave portion 55 and the convex portion 56 exist in the boundary portion 53 between the surface 51 of the inspection object 50 and the inclined surface 52, the concave portion 55 turns blue and in the case of the convex portion 56. , Turns red. For this reason, even when the difference in the reflected light from the metal surface or the like is difficult to see, if the boundary portion 53 has unevenness, it can be easily detected due to the difference in color. The same applies to the irradiation shown in FIG. 3 and the irradiation shown in FIG.

When the convex portion 56 is present at the boundary 53 of the inspection object 50, the green component 31b of the first diffracted light 31 is reflected on the surface 51 and the green component 41b of the first reflected light 41 as shown in FIG. The green component 32b of the second diffracted light 32 is reflected on the inclined surface 52, and the green component 42b of the second reflected light 42 is observed. The red component 31 c of the first diffracted light 31 is reflected by the convex portion 56 at the boundary 53, and the red component 41 c of the first reflected light 41 is observed. Therefore, the convex portion 56 can be easily detected at the boundary portion 53 of the inspection object 50.

When there is a recess 55 at the boundary 53 of the inspection object 50, as shown in FIG. 7, the green component 31b of the first diffracted light 31 is reflected on the surface 51, and the green component 41b of the first reflected light 41 is The green component 32b of the second diffracted light 32 is reflected on the inclined surface 52, and the green component 42b of the second reflected light 42 is observed. The blue component 31a of the first diffracted light 31 is reflected at the boundary portion 53 in the concave portion 55, and the blue component 41a of the first reflected light 41 and the blue component 32a of the second diffracted light 32 are reflected. The blue component 42a is observed. Therefore, the concave portion 55 can be easily detected at the boundary portion 53 of the inspection object 50.

Next, with reference to FIGS. 8 to 10, schematic views of photographed images of the surface 51, the inclined surface 52 and the boundary portion 53 of the inspection object 50 will be described.
FIG. 8 is a photographed image of the inspection object 50 in which the inclined surface 52 is inclined 45 degrees with respect to the surface 51. (A) of FIG. 8 is a cross-sectional view of the inspection object 50, and a black thick line shows the irradiation range of the diffracted light. (B) is a schematic view of a photographed image of the surface 51, the inclined surface 52 and the boundary portion 53 of the inspection object 50. As shown in (b), the boundary 53 of the inspection object 50 can be inspected clearly.

FIG. 9 is a photographed image of the inspection object 50 in which the inclined surface 52 is inclined 30 degrees with respect to the surface 51. FIG. 9A is a cross-sectional view of the inspection object 50, and a black thick line indicates the irradiation range of diffracted light. (B) is a schematic view of a photographed image of the surface 51, the inclined surface 52 and the boundary portion 53 of the inspection object 50. As shown in (b), even if the inclination of the inclined surface 52 of the inspection object 50 is small, the boundary portion 53 can be inspected clearly.

FIG. 10 is a photographed image of the inspection object 50 of the curved surface in which the inclined surface 52 is curved in a circular arc shape of the surface 51 and the side surface 54. FIG. 10A is a cross-sectional view of the inspection object 50, and a black thick line indicates the irradiation range of the diffracted light. (B) is a schematic view of a photographed image of the surface 51 of the inspection object 50, the inclined surface 52 which is a curved surface, and the boundary portion 53. As shown in (b), even if the inclined surface 52 of the inspection object 50 is curved, the boundary portion 53 can be inspected clearly.

FIG. 11 is shown for comparison with FIG. 12, and only one diffracted light from the holographic diffractive optical element 20 is irradiated to the surface 51 and the inclined surface 52 of the inspection object 50, and the surface 51 and the inclined surface 52 And a photograph showing the state of the reflected light at the boundary 52. (A) is a photograph which shows the state of the reflected light of the surface 51, the inclined surface 52, and the boundary part 52, (b) is the photograph to which the part of the boundary part 52 was expanded. In this case, since the portion of the inclined surface 52 is dark, observation of the inclined surface 52 and the boundary portion 53 is difficult.

  12, the first diffracted light 31 and the second diffracted light 32 from the holographic diffractive optical element 20 are applied to the surface 51 and the inclined surface 52 of the inspection object 50, and the reflection of the surface 51, the inclined surface 52 and the boundary portion 53 It is a photograph which shows the state of light. (A) is a photograph which shows the state of the reflected light of the surface 51, the inclined surface 52, and the boundary part 52, (b) is the photograph to which the part of the boundary part 52 was expanded. In this case, all of the surface 51, the inclined surface 52, and the boundary 52 have sufficient reflected light, and observation of the inclined surface 52 and the boundary 53 is easy.

FIG. 13 shows a case where the inclined surface 52 and the boundary portion 53 of the inspection object 50 meander. Also in this case, the holographic diffractive optical element 20 can be formed so that the first diffracted light 31 and the second diffracted light 32 of the diffracted light 30 are irradiated along the inclined surface 52 and the boundary 53. . For this reason, as in the case where the inspection object 50 is linear, the holographic diffractive optical element 20 can be used to inspect the surface 51 of the inspection object 50, the inclined surface 52, and the boundary portion 53.

FIG. 14 is for inspecting the surface 51, the inclined surface 52 of the funnel-shaped hole, and the boundary 53 between the surface 51 and the inclined surface 52 when the funnel-shaped hole is made in the inspection object 50.
An object to be inspected 50 using the holographic diffractive optical element 20 that can be formed so as to irradiate the first diffracted light 31 and the second diffracted light 32 of the diffracted light 30 of the holographic diffractive optical element 20 in an arc shape. The surface 51, the inclined surface 52 and the boundary portion 53 can be inspected.

DESCRIPTION OF SYMBOLS 10 white light source 20 holographic diffraction optical element 30 diffracted light 31 first diffracted light 32 second diffracted light 40 reflected light 41 first reflected light 42 second reflected light 50 inspection object 51 surface 52 inclined surface 53 boundary portion 55 concave portion 56 Convex part

Claims (12)

In a method of inspecting a boundary between a surface of an inspection object and an inclined surface which is inclined at a predetermined angle with the surface or a curved surface formed by being curved from the surface,
A plurality of colors are emitted from the same irradiation device, each color is emitted at a predetermined angle, and the first diffracted light irradiated with light having directivity for each color is irradiated onto the surface, and the plurality of colors are irradiated with the same color. Each of the colors is emitted from the device at a predetermined angle, and the second diffracted light, which is irradiated with light having directivity for each color, is irradiated to the inclined surface or the curved surface,
The first reflected light in which the first diffracted light is reflected from the surface of the inspection object and the second reflected light in which the second diffracted light is reflected from the inclined surface or the curved surface are detected, and the inspection is performed. A method of inspecting a boundary portion of the inspection object based on a change in color of the first reflected light and the second reflected light of a portion of the boundary portion between the surface of the object and the inclined surface or the curved surface portion. The first diffracted light and the second diffracted light, each of which emits the plurality of colors at a predetermined angle and is irradiated with light having directivity for each color, holographically diffracts the light from the white light source. The method according to claim 1, wherein diffracted light transmitted or reflected by the optical element is used. The method according to claim 2, wherein the holographic diffractive optical element has a plurality of diffraction regions having different diffraction angles arranged. The second diffracted light irradiates the inclined surface or the curved surface by changing the angle of the first diffracted light with a reflecting mirror or a prism, or bending or bending a holographic diffractive optical element to generate the first diffracted light The method according to claim 1 or 2, wherein the second diffracted light is irradiated from a portion other than the portion to be irradiated. The method according to claim 1 or 2, wherein the first diffracted light and the second diffracted light are lights emitted from different light sources. The first reflected light and the second reflected light are photographed by a camera, the data of the photographed first reflected light and the second reflected light are recorded, and a change in color is automatically determined based on the recorded data, The method of inspecting the boundary portion of the inspection object according to any one of claims 1 to 5, wherein the unevenness of the boundary portion of the inspection object is inspected. In a method of inspecting a boundary between a surface of an inspection object and an inclined surface which is inclined at a predetermined angle with the surface or a curved surface formed by being curved from the surface,
A light source and light emitted from the light source are emitted at a predetermined angle from a plurality of illumination devices having the same color, and the first diffracted light illuminated with light having directivity for each color is the above surface Each color is emitted at a predetermined angle from a plurality of illumination devices having the same color, a light source, and light emitted from the light source, and irradiated with light having directivity for each color A device for irradiating the two inclined lights onto the inclined surface or the curved surface;
The first reflected light in which the first diffracted light is reflected from the surface of the inspection object and the second reflected light in which the second diffracted light is reflected from the inclined surface or the curved surface are detected, and the inspection is performed. An inspection apparatus for inspecting the boundary portion of the inspection object by changing the color of the first reflected light and the second reflected light of a portion of the boundary portion between the surface of the object and the inclined surface or the curved surface portion . The light source is a white light source, and the irradiation device converts the light from the white light source into first diffracted light and second diffracted light transmitted or reflected to the holographic diffractive optical element, and the first diffracted light and the second diffracted light 8. The inspection apparatus according to claim 7, wherein the diffracted light is irradiation light which is emitted by a plurality of colors emitted at a predetermined angle for each color and having directivity for each color. 9. The inspection apparatus according to claim 8, wherein the holographic diffractive optical element has a plurality of diffraction regions arranged at different diffraction angles. The second diffracted light irradiates the inclined surface or the curved surface by changing the angle of the first diffracted light with a reflecting mirror or a prism, or bending or bending a holographic diffractive optical element to generate the first diffracted light The inspection apparatus according to claim 8, wherein the second diffracted light is irradiated from a portion other than the portion that irradiates the light. The inspection apparatus according to claim 8, wherein the first diffracted light and the second diffracted light are lights emitted from different light sources. The camera for photographing the first reflected light and the second reflected light, and the recording device for recording the data of the photographed first reflected light and the second reflected light, the color change is automatically based on the recorded data. The inspection apparatus according to claim 11, further comprising a judgment device for judging.