JP2019091073A - Curved surface mirror adjustment device, and projection optical system - Google Patents

Abstract

To make it possible to individually adjust an angle and position of a reflection surface even if glass small in thermal and linear expansion coefficients and the like are used for a base board of a curved mirror in a curved surface mirror adjustment device, and to enable a more precise adjustment.SOLUTION: An optical element, which is arranged at a last position with respect to an advancing direction of image light in a projection optical system enlargedly projecting the image light from an image adjustment element in which an image is formed on one side of an optical axis toward a projection surface, comprises: a curved mirror α that is formed of glass, metal or ceramics, has a curved-shape reflection surface α2 enlargedly projecting the image light, and makes an optical axis coaxial with the optical axis of the projection optical system; a mirror fixing frame 1 that holds the curved mirror α; and a posture adjustment mechanism that, in a state where fixation of the curved mirror α to the mirror fixing frame 1 is complete, adjusts a position and angle of the mirror fixing frame 1 with respect to the optical axis of the projection optical system in a state where fixation of the curved mirror α to the mirror fixing frame 1 is completed, and thereby adjusts a position and angle of the reflection surface α2 of the curved surface mirror α with respect to the optical axis.SELECTED DRAWING: Figure 1

Description

  The present invention relates to a curved mirror adjustment apparatus and a projection optical system having the curved mirror adjustment apparatus.

As before, the image light from the image adjustment element is incident on the imaging optical system composed of the dioptric optical element, and the light beam emitted from the imaging optical system is reflected by the reflection surface of the curved mirror to form an image on the projection surface Projection optical systems for magnifying and projecting light have been known. In the wide-angle projection optical system having such a configuration, the position and the angle of the reflection surface of the curved mirror greatly affect the quality of the projection image projected on the projection surface. Therefore, a mechanism for adjusting the angle and position of the curved mirror has been strongly demanded.
For example, there is a floating mechanism in which the outer peripheral surface and the back surface outside the reflection surface of the curved mirror can be adjusted to be adjustable at three points by the holding member of the curved mirror (see Patent Document 1). In this floating mechanism, the inclination of the reflecting surface can be finely adjusted by independently adjusting the three points supporting the curved mirror.

  As another mechanism, the curved mirror is held by the first holding member, the first holding member is held by the second holding member, and the curved mirror is perpendicular to the optical axis with respect to the first holding member. Angle of the curved mirror by rotating the first holding member relative to the second holding member about the optical axis and the second axis orthogonal to the first axis. There is a mechanism for fine-tuning (see Patent Document 2). In the configuration of this mechanism, it is possible to independently adjust the angle adjustment by each rotation axis, and the angle adjustment of the curved mirror can be easily performed as compared with the floating mechanism.

Unexamined-Japanese-Patent No. 2002-228905 JP, 2011-59459, A

  However, in the case of the floating mechanism of Patent Document 1, adjusting one of the three points affects the posture of the curved mirror which is adjusted by the remaining two points as a result. It is necessary to recalibrate the points many times. In addition, in the floating support, only adjustment of the angle of the reflecting surface can be performed, and parallel movement of the reflecting surface can not be performed.

  Further, in the configuration of Patent Document 2, although the adjustment (tilt adjustment) of the angle of the curved mirror can be performed, the adjustment (shift adjustment) of the position of the curved mirror with respect to the imaging optical system can not be performed. It was not possible to correct the deterioration of the optical performance.

Furthermore, in recent years, the projection onto a larger projection surface is required, and in order to project a clear image, it is required to use a light source (high-intensity light source) having a higher number of lumens.
However, in high-intensity light sources, heat generation due to absorption of light, etc., and fluctuations in the shape and performance of the optical element due to the heat of the light source itself can not be ignored. It tends to be remarkable.

In order to solve such a problem, a material having a small coefficient of linear thermal expansion may be used as the material of the curved mirror, but processing is not easy as compared with plastic, and It is difficult to form the joint portion and attach to the projection optical system, etc., and also in Patent Document 1 and Patent Document 2, plastic is used as the glass material.
In addition, when a glass substrate is used for a curved mirror incorporated in a projection optical system, there is no disclosure in the past of an adjustment mechanism or adjustment method that enables adjustment of a position or angle that is delicate enough to withstand actual use.

  It is an object of the present invention to provide a curved mirror adjustment device, in which the angle and position of the reflecting surface can be independently adjusted even when glass or the like having a small coefficient of thermal expansion is used for the base of the curved mirror. To make it possible.

In order to solve the above problems, the invention according to claim 1 is:
In a projection optical system for enlarging and projecting image light from an image adjustment element on which an image is formed on one side of an optical axis toward a projection surface, an optical element disposed at the last position in the traveling direction of the image light A curved mirror formed of glass, metal, or ceramic and having a curved reflecting surface for enlarging and projecting the image light, the optical axis being coaxial with the optical axis of the projection optical system;
A mirror fixing frame for holding the curved mirror;
The reflection surface of the curved mirror with respect to the optical axis is adjusted by adjusting the position and the angle of the mirror fixed frame with respect to the optical axis of the projection optical system in a state where the fixing of the curved mirror to the mirror fixing frame is completed. Attitude adjustment mechanism that adjusts the position and angle of the
An adjusting device of a curved mirror comprising:

The invention according to claim 2 is
In the curved mirror adjustment device according to claim 1,
The attitude adjustment mechanism includes a position adjustment mechanism that adjusts the position of the mirror fixing frame, and an angle adjustment mechanism that adjusts an angle of the curved mirror.
The posture adjustment mechanism and the angle adjustment mechanism are independent structures that do not affect each other's adjustment.
It is characterized by
The invention according to claim 3 is
In the curved mirror adjustment device according to claim 2,
The posture adjustment mechanism includes a first holding member, a second holding member, and a fixing member.
The first holding member holds the mirror fixing frame,
The second holding member holds the first holding member,
The fixing member holds the second holding member,
The holding of the mirror fixing frame of the first holding member is a holding capable of performing a first angle adjustment,
Holding of the first holding member of the second holding member is holding capable of second angle adjustment,
The holding of the second holding member of the fixing member is a position adjustable holding,
It is characterized by

The invention according to claim 4 is
A projection optical system comprising the curved mirror adjustment device according to any one of claims 1 to 3,
A refractive optical system having a refractive element is provided between the image adjustment element and the curved mirror,
The dioptric system forms an intermediate image in its own optical path and between the dioptric system and the curved mirror.
It is characterized by

Another first invention is
A curved mirror having a curved reflecting surface as at least one of optical elements constituting the projection optical system;
A mirror holding member for holding the curved mirror;
An adjusting device for a curved mirror, comprising: an attitude adjusting mechanism which enables the position and angle of the curved reflecting surface to be finely adjusted with respect to the mirror holding member;
The curved mirror is formed of any material of glass, metal, or ceramic.
Another second invention is
Another embodiment of the curved mirror adjustment device of the first invention,
It has a mirror fixing portion for inserting and rotatably holding the curved mirror,
Rotating the curved mirror to adjust the position and angle with the mirror fixing portion;
An elastic member is fitted in the mirror fixing portion,
The curved mirror may be fixed to the mirror fixing portion in a state in which the curved mirror is biased by the elastic member.
Another third invention is
Another embodiment of the curved mirror adjustment device of the second invention,
The mirror fixing portion is incorporated so as to allow fine adjustment of the angle and position with respect to the mirror holding member,
Rotating the mirror fixing portion with respect to the mirror holding member to adjust an angle of the curved reflecting surface of the curved mirror;
The rotational axis of the mirror fixing portion at the time of the angle adjustment is made to intersect the optical axis of the projection optical system on the surface of the curved reflecting surface.
Another fourth invention is
Another aspect of the present invention is a curved mirror adjustment apparatus according to the second or third invention, wherein
The adjustment of the position and the angle of the curved reflecting surface of the curved mirror is performed with the first axis and the second axis, which are mutually independent in two orthogonal directions, as rotation axes, respectively.
The first axis and the second axis are also orthogonal to the optical axis of the projection optical system,
An intersection of the first axis and the second axis may be located on the surface of the curved reflecting surface.

  According to the present invention, even when using a curved mirror made of glass, metal, or ceramic with a small coefficient of thermal expansion for the substrate forming the reflection surface, the angle and position can be adjusted independently, and more accurate adjustment Becomes easier.

It is the disassembled perspective view which looked at the structure of one Embodiment of the adjustment apparatus of the curved surface mirror which applied this invention from the curved surface mirror side. It is the figure seen from the 1st holding member side contrary to FIG. It is the perspective view (a) seen from the curved mirror side, and the figure (b) seen from the other side, combining the adjustment apparatus of the curved surface mirror of FIG.1 and FIG.2. The curved mirror holding portion and the first holding member, the second holding member, the fixing member, and the jig member are shown in a connected state, and a perspective view (a) seen from the jig member side and a view seen from the diagonal upper side (b) ). They are the front view (a) and side view (b) which connected the curved mirror holding part, the 1st holding member, and the 2nd holding member, and were seen from the curved mirror side. It is sectional drawing (a) along the arrow AA of FIG. 5, and the enlarged view (b) of the arrow B part. It is sectional drawing (a) along the arrow CC line | wire of FIG. 5, and the enlarged view (b) of the arrow B part. It is a principal part longitudinal side view which shows the relationship between a mirror fixed frame and a 1st holding member. It is a principal part longitudinal side view which shows the relationship between a 2nd holding member and a fixing member.

  Hereinafter, the best mode for carrying out the present invention will be described in detail with reference to the drawings.

(Overview)
An image adjustment element for giving image information to light source light, a projection optical system on which the image light from the image adjustment element is incident, and a projection surface on which the enlarged image light emitted from the projection optical system is projected And a projection device having the
The projection optical system has at least a first optical system formed of a coaxial refracting element whose optical axes of all the elements coincide with each other from the image adjustment element side, and a second optical system formed of a reflecting element. Between the first optical system and the second optical system, there is disposed a prism which receives the light emitted from the first optical system and which deflects the optical path by internal total reflection at least once inside, Emitted light is incident on the second optical system.
Inside the first optical system, there is a first intermediate image formed by the refracting action of at least one optical element on the image adjustment element side of the first optical system. Between the first optical system and the second optical system, there is a second intermediate image formed by the refracting action of at least one or more optical elements on the projection surface side of the first optical system. ing.
The second optical system is composed of a concave reflecting surface formed on a single concave mirror, and deflects incident light to the projection surface side to reflect it.

(solution)
The curved mirror to be used is formed of glass, metal, or ceramic having a small coefficient of thermal expansion.
The outer peripheral side of the curved mirror is held by a mirror fixing frame.
Then, after performing angle adjustment with the optical axis of the curved mirror and the mirror fixing frame as the rotation axis, fixing is performed, and the mirror fixing frame is incorporated into the mirror holding member to adjust the position and angle of the mirror fixing frame. The position and angle of the reflecting surface to be fixed are fixed after adjustment.

(Embodiment)
1 and 2 show the configuration of an embodiment of a curved mirror adjustment apparatus to which the present invention is applied, curved mirror α, mirror fixing portion 1, first holding member 11 of mirror holding member, second holding member 12 and fixing member 3 and 4 are joint diagrams showing the connection state of FIGS. 1 and 2, and FIG. 5 further shows a relation with the jig member 31. FIG.

  And FIG. 5 is a front view and a side view of the adjusting device of a curved mirror, FIG. 6 and FIG. 7 are a sectional view and an enlarged view, FIG. 8 schematically shows the relationship between the mirror fixing portion 1 and the first holding member 11 FIG. 9 shows the relationship of the second holding member 12 to the fixing member 21. As shown in FIG.

"Assumption"
First, the image light from the image adjustment element is incident on the imaging optical system composed of dioptric optical elements, and the light beam emitted from the imaging optical system is reflected by the reflection surface of the curved mirror α to the projection surface In a projection optical system that magnifies and projects image light, as shown in FIG. 1, the light beam of the imaging optical system is orthogonal to the Z axis within the plane where the Z axis represents the light beam emitted from the image center of the image adjustment element. An axis perpendicular to the Y axis and the Z axis and the Y axis is defined as an X axis, and a direction parallel to each axis is defined as a Z axis direction, a Y axis direction, and an X axis direction.

  When the projection optical system is installed on the ground so that the optical axis is parallel to the ground, the image adjustment element side is the front side, the projection surface side in the Z-axis direction along the optical axis of the first optical system. Is defined as the rear side, and the left and right sides when looking at the rear side from the front side are respectively defined as the left side and the right side in the X axis direction, and the upper and lower sides when the rear side is seen from the front side in the Y axis direction The lower side is defined as the X-axis direction, the up-down direction as the Y-axis direction, and the front-rear direction as the Z-axis direction.

  Hereinafter, the holding mechanism of the second optical system will be described.

"Curved mirror"
As shown in FIGS. 1 and 2, the curved mirror α is a surface on the Z axis which is a mirror axis among the aspheric surfaces formed when the non-circular curve is rotated about the rotation axis using the Z axis. The light axis of the imaging optical system and the mirror axis of the curved mirror α are coaxial.

The curved mirror α includes a base α1 made of glass having a small thermal expansion coefficient and a curved reflecting surface α2 formed on the front surface of the base α1.
A plane portion α3 orthogonal to the vertical direction is formed on the upper surface of the base α1 of the curved mirror α.
In the side surfaces other than the upper side (lower side, left side, right side), there is formed a cylindrical side surface shape α4 of a single connection that is circular when viewed from the front.
At the outer peripheral edge of the rear surface, a flat portion α5 whose side surface is released is formed.
Further, a flat surface portion α6 orthogonal to the optical axis is formed at the center upper end portion.

"Mirror fixed part"
As shown in FIGS. 1 and 2, the mirror fixing frame 1 has a substantially semicircular shape along the outer shape of the curved mirror α, and the inside of the frame is hollow.
On the first axis parallel to the X axis of the outer peripheral surface of the mirror fixing frame 1 and substantially coinciding with the X axis, hole-shaped engaging portions 1a are formed at the left and right positions respectively.

On the lower end portion side of the mirror fixing frame 1, a protrusion 1b whose axis is oriented in the Y axis direction and orthogonal to the Z axis is formed. The protrusion 1 b has a hole 1 c penetrating in the front-rear direction.
Further, a screw hole 1d whose axis is directed in the Y-axis direction is formed at the upper end portion side of the mirror fixing frame 1 and at a position biased to one end in the X direction.

At each of the positions on the inner peripheral surface side on the upper end side of the mirror fixing frame 1 that are biased to one end and the other end in the X direction, adjustment projections 1e whose axis centers in the Y axis direction are formed.
Further, the inner peripheral surface of the mirror fixing frame 1 is shaped along the outer peripheral surface of the curved mirror α, and the inner diameter of the opening by the rib 1 f formed on the inner peripheral side at the rear end of the inner peripheral surface The back surface of the curved mirror α is formed to be larger than the diameter inside the flat portion α5 and smaller than the outer diameter of the curved mirror α.
Further, at the front end portion of the inner peripheral surface, a groove portion 1g having a substantially triangular cross-sectional shape formed from the inner peripheral side toward the outer peripheral side is formed.

Therefore, the rear side of the curved mirror α is inserted into the inner peripheral portion of the mirror fixing frame 1 from the front side, and the flat portion α5 on the rear side of the curved mirror α is engaged with the rib 1 f on the inner peripheral side of the mirror fixing frame 1.
Further, a curved mirror adjustment screw (not shown) is inserted into the screw hole portion 1d, and the flat surface portion α3 of the upper portion of the curved surface mirror is biased by the tip portion of the curved surface mirror adjustment screw. The curved mirror adjustment screw is turned until it comes in contact with the adjustment projection 1 e to adjust the positional relationship between the curved mirror α and the mirror fixing frame 1.
Then, when the adjustment is completed, a metal C ring β having elasticity is inserted into the groove 1g formed on the front side on the inner peripheral side of the mirror fixing frame 1, and the C ring β makes a curved mirror α from the front to the back The curved mirror α is fixed to the mirror fixing frame 1 by being biased.

"Mirror holding member"
The mirror holding member consists of three members of the first holding member 11, the second holding member 12 and the fixing member 21. The first holding member 11 performs the first angle adjustment with the mirror fixing frame 1 and the first holding member 11 The second angle adjustment and the first position adjustment are performed between the second holding member 12 and the second holding member 12, and the second position adjustment is performed between the second holding member 12 and the fixing member 21.

"First holding member"
As shown in FIGS. 1 and 2, the first holding member 11 is disposed on the outer peripheral side of the curved mirror α. The first holding member 11 is formed on the inner peripheral side so as to be able to hold the mirror fixing frame 1.

  As shown in FIGS. 5 and 6, the first holding member 11 is formed with a through hole 11a at a position corresponding to the engaging portion 1a of the mirror fixing frame 1 in the left-right direction. In the left and right through holes 11a, the engaged members 2 of shaft-shaped members whose axial centers are respectively on the first axis parallel to the X-axis are respectively fitted, and the engaged members 2 are It is fixed to the first holding member 11. The engaging portion 1 a is rotatably held by the first holding member 11 with the first axis as a rotational axis by engaging with the engaged member 2.

  Further, a spring washer 3 is inserted between one of the mounting screws γ and the first holding member 11. The mirror fixing frame 1 is pressed to the other of the first holding member 11 together with the one engaged member 2 by the spring washer 3.

  As shown in FIG. 7, the first holding member 11 is formed with a counterbore shaped hole portion 11 c having a narrow opening on the front side at a position corresponding to the protrusion 1 b of the mirror fixing frame 1. . The adjustment screw 4 is inserted from the rear side into the hole portion 1c of the mirror fixing frame 1 and the hole portion 11c of the first holding member 11, and is screwed with the screw hole portion of the hole portion 11c. In addition, a compression spring 5 is inserted from the rear side into the inside of the hole 11c.

  Therefore, by adjusting the adjustment screw 4 in a state in which the mirror fixing frame 1 is held with respect to the first holding member 11 via the engaged member 2, the mirror fixing frame 1 can be moved to the first holding member 11. The first angle adjustment mechanism A1 is configured to be rotatable about the one axis (X) as a rotation axis. The first angle adjustment mechanism A1 enables angle adjustment and fixing of the reflection surface of the curved mirror α through the mirror fixing frame 1.

  Further, a first attitude holding mechanism B1 is configured in which the spring washer 3 suppresses rattling in the X-axis direction.

Furthermore, one extending portion 11 e is formed on each of both side surfaces on the outer peripheral side in the left-right direction of the first holding member 11. The elongated portion 11 e is formed with an elongated hole portion 11 f penetrating in the vertical direction and having a larger diameter in the front-rear direction than in the horizontal direction.
Then, at the rear end of the two extending portions 11e, one extending portion 11g extending downward is formed. The extended portion 11g is formed with a hole 11h penetrating in the Z-axis direction.

  Further, at the upper end portion of the first holding member 11, an adjustment hole 11i is formed. The central axis of the adjustment hole 11i is in the Y-axis direction orthogonal to the Z-axis, and the intersection point of the central axis and the Z-axis is connected near the front surface of the curved mirror α.

"Second holding member"
As shown in FIGS. 1 and 2, the second holding member 12 is disposed on the back side of the first holding member 11.
The second holding member 12 is formed so as to be able to hold the first holding member 11 holding the curved mirror α on the inner peripheral side via the mirror fixing portion 1.

The second holding member 12 is provided with left and right fixing screw holes 12 f at positions corresponding to the holes 11 f of the first holding member 11. The fixing screw hole portion 12 f is formed at an axial center of the protruding portion 12 e protruding on the end portion of the second holding member 12 in the Y-axis direction.
The movement of the first holding member 11 with respect to the second holding member 12 is restricted by inserting the fixing screw 13 into the hole 11 f and screwing it into the fixing screw hole 12 f.

  When connecting with the fixing screw 13, the spring washer 14 and the flat washer 15 are first inserted into the fixing screw 13, and the flat washer 16 is held between the first holding member 11 and the second holding member 12. Then, the fixing screw 13 is screwed into the fixing screw hole 12f.

  Then, in the second holding member 12, right and left flat portions 12 h are formed at positions corresponding to the hole portions 11 h of the first holding member 11.

  As shown in FIG. 4, the adjustment screw 17 is inserted into the hole 11 h from the rear side, and the flat portion 12 h is biased by the tip of the adjustment screw 17.

  Further, at the rear end portion of the second holding member 12, two adjustment jig fixing portions 12j are formed at positions closer to the optical axis of the curved mirror α than the plane portion 12h.

  Therefore, as shown in FIG. 4, the jig member 31 is fixed to the adjustment jig fixing portion 12j from the rear surface by the pair of jig fixing screws 32, and the protrusion 31i formed on the jig member 31 is held in the first position. By engaging the adjustment hole 11i formed in the member 11, the first holding member 11 can be rotated with a central axis parallel to the Y axis of the adjustment hole 11i as a rotation axis, and a parallel movement is possible. It is regulated.

  Therefore, a second angle adjusting mechanism A2 is configured to adjust the angle of the first holding member 11 with respect to the second holding member 12 about the second axis (Y) with the adjustment screw 17.

  In addition, by adjusting the angle of the reflection surface of the curved mirror α and then tightening the fixing screw 13, a second attitude holding mechanism B2 that can hold the attitude after adjustment is configured.

  Here, the jig member 31 and the adjustment screw 17 may be removed after completing the adjustment of the first holding member 11 with respect to the second holding member 12, or may be left as a reinforcing member as it is.

  Further, as shown in FIGS. 1 and 2, the second holding member 12 is coaxial with the projecting portion 12e in the front-rear direction, and one by one at each position separated from the projecting portion 12e on the front side. The hole 12k is formed. The hole 12k penetrates in the vertical direction, and has an elongated hole shape whose diameter in the left-right direction is larger than that in the front-rear direction.

  Further, the plane portion 12m in which the hole portion 12k of the second holding member 12 is formed has a plane portion 12n extending downward and perpendicular to the side edge portion separated from the optical axis in the left-right direction. An adjustment screw hole 12p coaxial with the hole 12k in the left-right direction and penetrating in the left-right direction is formed in the flat portion 12n.

  Thus, the curved mirror α, the mirror fixing frame 1, the first holding member 11, and the second holding member 12 that hold the angle and position of the reflecting surface in a fixed manner after adjustment are combined to form a reflecting surface holding mechanism.

"Fixing member"
As shown in FIGS. 1 and 2, a fixing member 21 is disposed on the lower surface side of the above-described reflection surface holding mechanism.
The fixing member 21 is formed on the inner peripheral side so as to be capable of holding the reflecting surface holding mechanism. The reflective surface holding mechanism is disposed at the rear end of the fixing member 21.

The fixing member 21 has a fixing engaging portion 21a at the front end portion for fixing to a lens barrel (not shown) containing an imaging optical system with a dioptric optical element.
The fixing member 21 has a prism disposed inside and has a first opening through which light emitted from the lens barrel disposed on the front end is incident, and the prism disposed on the rear end And a second opening for passing the light emitted from the light source.

The fixing member 21 is formed with left and right fixing screw holes 21 k at positions corresponding to the holes 12 k of the second holding member 12. The fixing screw hole portion 21 k is formed at the axial center of the projecting portion 21 b protruding on the end of the fixing member 21.
The movement of the second holding member 12 with respect to the fixing member 21 is restricted by inserting the fixing screw 22 into the hole 12 k and screwing with the fixing screw hole 21 k.

  When connecting with the fixing screw 22, the spring washer 23 and the flat washer 24 are first inserted into the fixing screw 22, and the flat washer 25 is sandwiched between the second holding member 12 and the fixing member 21 before fixing. The screw 22 is screwed into the fixing screw hole 21k.

  In the fixing member 21, a wall 21 p which is a wall surface without a hole exists at a position corresponding to the adjustment screw hole 12 p of the second holding member 12. When the adjustment screw 26 is screwed into the adjustment screw hole 21p, the adjustment screw 26 passes through the adjustment screw hole 12p, and the tip thereof pushes the wall 21p of the fixing member 21.

Therefore, as shown in FIG. 4, the first position adjustment mechanism C1 adjusts the position of the reflection surface by moving the second holding member 12 in parallel in the X axis direction with respect to the fixing member 21 by the adjustment screw 26. Are configured.
Here, the adjustment screw 26 may be removed after the adjustment of the second holding member 12 with respect to the fixing member 21 is completed, or may be left as a reinforcing member as it is.

  Further, as shown in FIG. 9, a third attitude holding mechanism B3 capable of holding the attitude after adjustment is configured by tightening the fixing screw 22 after the position of the reflection surface is determined. .

  As described above, in the embodiment, the adjustment device of the curved mirror α is the first angle adjustment mechanism A1 whose rotation center is the first axis (X), and the second angle adjustment whose rotation center is the second axis (Y) A mechanism A2, a first attitude holding mechanism B1, a second attitude holding mechanism B2, a third attitude holding mechanism B3, and a first position adjusting mechanism C1 in the first axis (X) direction are provided.

  As described above, according to the adjusting device of the curved mirror α of the embodiment, the first angle adjusting mechanism A1, the second angle adjusting mechanism A2, the first attitude holding mechanism B1, the second attitude holding mechanism B2, the third attitude holding mechanism B3, By providing the first position adjusting mechanism C1 independently of each other, the angle, attitude, and position of the reflecting surface can be adjusted independently, and can be easily adjusted with higher accuracy.

  In addition, even if the curved mirror α made of glass with a small coefficient of thermal expansion is used for the substrate α1 forming the reflection surface, the angle and position can be adjusted independently, and adjustment with higher accuracy is facilitated.

(Method of manufacturing curved mirror)
Forming a glass molded product having a rotationally symmetric aspheric surface by molding;
Cutting the glass molding in a plane parallel to the axis of symmetry of the rotationally symmetric aspheric surface and passing on the axis of symmetry;
A region of a rotationally symmetric aspheric surface on the peripheral side of the cutting surface is cut out of each of two hemispherical glass moldings to form a concave reflecting surface α 2 by a curved surface,
A portion of the glass molded product having a concave reflecting surface α2 formed by the curved surface is referred to as a curved mirror α.
From the above, it is possible to create two curved mirrors α from one molded article.

(Modification)
In the embodiment, the material of the substrate α1 of the curved mirror α is glass, but the material is not limited thereto, and may be metal or ceramic having a small coefficient of linear thermal expansion.

  Further, the washer 16 between the first holding member 11 and the second holding member 12 and / or the flat washer 25 between the second holding member 12 and the fixing member 21 change the thickness and the number of the washers. Thus, it is also possible to provide a function as a second position adjusting mechanism capable of adjusting the position of the reflecting surface in the vertical direction.

  At that time, the height adjustment mechanism is provided coaxially in the X-axis direction and at two places separated in the left-right direction, so that the number and thickness of the washers sandwiched in one is different from the other It is also possible to turn the reflective surface about the axis of rotation.

  Further, a washer is inserted between the second holding member 12 and the jig member 31 via the jig fixing screw 32, and the projection 31 i formed on the jig member 31 is formed in the first holding member 11 in that state. When engaging the adjustment hole 11i, the first holding member 11 is moved to the back side with respect to the second holding member 12 by the thickness of the washer to adjust the position of the reflecting surface in the front-rear direction It is also possible to have a function as a third position adjustment mechanism capable of performing

(Other modifications)
In the above embodiment, an axis orthogonal to the optical axis is taken as a first axis, an axis orthogonal to the optical axis, and an axis orthogonal to the first axis is taken as a second axis. An axis parallel to the first axis may be a first axis, an axis perpendicular to the optical axis, and an axis parallel to an axis orthogonal to the first axis may be a second axis.
Furthermore, it is needless to say that other specific details can be appropriately changed.

α curved mirror α 1 base α 2 curved reflecting surface α 3 flat surface portion α 4 flat surface portion α 5 flat surface portion α 6 flat surface portion β elastic member γ mounting screw 1 mirror fixing portion 1 a engaging portion 1 b protrusion 1 c hole 1 d screw hole 1 e adjustment Part 1 f Rib 1 g Groove 2 Engaged member (first shaft)
Reference Signs List 3 spring washer 4 adjustment screw 5 compression spring 11 first holding member 11a through hole 11c hole 11e extension 11f hole 11g extension 11h hole 11i adjustment hole 12 second holding member 12e protrusion 12f fixed Screw hole 12h Flat part 12j Jig fixing part 12k Adjustment part 12k Hole 12m Flat part 12n Flat part 12p Adjustment screw hole 13 Fixing screw 14 Spring washer 15 Flat washer 16 Flat washer 17 Adjustment screw 21 Fixing member 21a Fixing engaging portion 21b Protrusion 21k Fixing screw hole 21p Wall 22 Fixing screw 23 Spring washer 24 Flat washer 25 Flat washer 26 Adjustment screw 31 Jig member 31i Protruding part (second shaft)
32 Screw for fixing jig A1 First angle adjustment mechanism A2 Second angle adjustment mechanism B1 First attitude holding mechanism B2 Second attitude holding mechanism B3 Third attitude holding mechanism C1 First position adjustment mechanism

Claims (4)

In a projection optical system for enlarging and projecting image light from an image adjustment element on which an image is formed on one side of an optical axis toward a projection surface, an optical element disposed at the last position in the traveling direction of the image light A curved mirror formed of glass, metal, or ceramic and having a curved reflecting surface for enlarging and projecting the image light, the optical axis being coaxial with the optical axis of the projection optical system;
A mirror fixing frame for holding the curved mirror;
The reflection surface of the curved mirror with respect to the optical axis is adjusted by adjusting the position and the angle of the mirror fixed frame with respect to the optical axis of the projection optical system in a state where the fixing of the curved mirror to the mirror fixing frame is completed. Attitude adjustment mechanism that adjusts the position and angle of the
An adjusting device for a curved mirror, comprising: In the curved mirror adjustment device according to claim 1,
The attitude adjustment mechanism includes a position adjustment mechanism that adjusts the position of the mirror fixing frame, and an angle adjustment mechanism that adjusts an angle of the curved mirror.
The posture adjustment mechanism and the angle adjustment mechanism are independent structures that do not affect each other's adjustment.
An adjusting device of a curved mirror characterized in that. In the curved mirror adjustment device according to claim 2,
The posture adjustment mechanism includes a first holding member, a second holding member, and a fixing member.
The first holding member holds the mirror fixing frame,
The second holding member holds the first holding member,
The fixing member holds the second holding member,
The holding of the mirror fixing frame of the first holding member is a holding capable of performing a first angle adjustment,
Holding of the first holding member of the second holding member is holding capable of second angle adjustment,
The holding of the second holding member of the fixing member is a position adjustable holding,
An adjusting device of a curved mirror characterized in that. A projection optical system comprising the curved mirror adjustment device according to any one of claims 1 to 3,
A refractive optical system having a refractive element is provided between the image adjustment element and the curved mirror,
The dioptric system forms an intermediate image in its own optical path and between the dioptric system and the curved mirror.
Projection optical system characterized by

Images