JP6120137B2 - Curved mirror adjustment device - Google Patents

Curved mirror adjustment device Download PDF

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JP6120137B2
JP6120137B2 JP2013005846A JP2013005846A JP6120137B2 JP 6120137 B2 JP6120137 B2 JP 6120137B2 JP 2013005846 A JP2013005846 A JP 2013005846A JP 2013005846 A JP2013005846 A JP 2013005846A JP 6120137 B2 JP6120137 B2 JP 6120137B2
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貴 山口
貴 山口
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本発明は、曲面ミラーの調整装置に関する。   The present invention relates to an apparatus for adjusting a curved mirror.

以前より、画像調整素子からの画像光を屈折光学素子から構成される結像光学系へ入射し、結像光学系から出射した光線を曲面ミラーの反射面で反射することにより被投射面へ画像光を拡大投射する投射光学系は公知であった。このような構成の広角投射光学系では曲面ミラーの反射面の位置及び角度が被投射面に投影される投影画像の品質に大きく影響する。そのため、曲面ミラーの角度及び位置の調整機構が強く要望されていた。
例えば、曲面ミラーの反射面外の外周面や背面を曲面ミラーの保持部材により調整可能に三点支持をするフローティング機構などがある(特許文献1参照)。このフローティング機構では曲面ミラーを支持する三点の各点を独立して調整することにより、反射面の傾きを微調整可能になっている。
From the past, image light from the image adjusting element is incident on the imaging optical system composed of refractive optical elements, and the light emitted from the imaging optical system is reflected by the reflecting surface of the curved mirror to form an image on the projection surface. Projection optical systems for enlarging and projecting light have been known. In the wide-angle projection optical system having such a configuration, the position and angle of the reflecting surface of the curved mirror greatly affects the quality of the projected image projected on the projection surface. Therefore, a mechanism for adjusting the angle and position of the curved mirror has been strongly demanded.
For example, there is a floating mechanism that supports a three-point support so that the outer peripheral surface and the back surface of the curved mirror outside the reflecting surface can be adjusted by a holding member of the curved mirror (see Patent Document 1). In this floating mechanism, the inclination of the reflecting surface can be finely adjusted by independently adjusting the three points that support the curved mirror.

また、別の機構として、曲面ミラーを第1保持部材で保持し、第1保持部材を第2保持部材で保持を行い、第1保持部材に対して曲面ミラーを光軸と直交する第1軸を回動軸にして回動させ、第2保持部材に対して第1保持部材を光軸及び第1軸と直交する第2軸を回動軸にして回動させることにより、曲面ミラーの角度を微調整する機構がある(特許文献2参照)。この機構の構成では、各回動軸による角度調整を独自に調整可能であり、曲面ミラーの角度調整をフローティング機構と比べて容易に行うことが可能となる。   As another mechanism, the curved mirror is held by the first holding member, the first holding member is held by the second holding member, and the curved mirror is perpendicular to the optical axis with respect to the first holding member. By rotating the first holding member with respect to the second holding member about the optical axis and the second axis orthogonal to the first axis as the rotation axis. There is a mechanism for finely adjusting (see Patent Document 2). With this configuration of the mechanism, the angle adjustment by each rotation axis can be independently adjusted, and the angle adjustment of the curved mirror can be easily performed as compared with the floating mechanism.

特開2002−228905号公報JP 2002-228905 A 特開2011−59459号公報JP 2011-59459 A

しかし、特許文献1のフローティング機構の場合、三点のうち一点を調整すると、結果的に残りの二点により調整した曲面ミラーの姿勢に影響を与えてしまうため、精密な調整を行うには各点を何度も調製し直すことが必要である。また、フローティング支持では反射面の角度の調整のみしかできず、反射面の平行移動ができないため、完全に調整し切れない場合があった。   However, in the case of the floating mechanism of Patent Document 1, adjusting one of the three points results in an influence on the posture of the curved mirror adjusted by the remaining two points. It is necessary to re-prepare the points many times. In addition, with floating support, only the angle of the reflecting surface can be adjusted, and the reflecting surface cannot be moved in parallel.

また、特許文献2の構成では、曲面ミラーの角度の調整(チルト調整)はできるが、結像光学系に対する曲面ミラーの位置(シフト調整)の調整が行えないため、角度ではなく位置のずれによる光学性能の劣化を補正することができなかった。   In the configuration of Patent Document 2, the angle of the curved mirror (tilt adjustment) can be adjusted, but the position of the curved mirror (shift adjustment) with respect to the imaging optical system cannot be adjusted. The optical performance degradation could not be corrected.

本発明の課題は、曲面ミラーの調整装置において、反射面の角度及び位置をそれぞれ独自に調整可能として、より高精度の調整を可能とすることである。   An object of the present invention is to enable adjustment with higher accuracy by making it possible to independently adjust the angle and position of a reflecting surface in a curved mirror adjustment device.

以上の課題を解決するため、請求項1に記載の発明は、
曲面ミラーを保持するミラー保持部材を備える曲面ミラーの調整装置であって、
前記ミラー保持部材に対し前記曲面ミラーを、光軸と直交する軸線もしくは光軸と直交する軸線と平行な軸線である第1軸線を回動軸として回動させることで、前記曲面ミラーの第1方向の角度調整を行う第1角度調整機構と、
前記ミラー保持部材に対し前記曲面ミラーを、前記光軸と直交して、かつ前記第1軸線と直交する軸線もしくは前記光軸と直交する軸線と平行な軸線である第2軸線を回動軸として回動させることで、前記曲面ミラーの第2方向の角度調整を行う第2角度調整機構と、
前記ミラー保持部材に対し前記曲面ミラーを、前記第1軸線と平行方向へ水平移動させることで、前記曲面ミラーの位置調整を行う第1位置調整機構と、を備え、
前記第1角度調整機構、第2角度調整機構及び第1位置調整機構は互いに独立していて、そのうち一つの調整機構を変更した際に、他の二つの調整機構の調整に対して影響を与えない構成としたことを特徴とする。
In order to solve the above problems, the invention described in claim 1
A curved mirror adjustment device comprising a mirror holding member for holding a curved mirror,
By rotating the curved mirror with respect to the mirror holding member using a first axis that is an axis that is orthogonal to the optical axis or an axis that is parallel to the axis that is orthogonal to the optical axis as a rotation axis, A first angle adjustment mechanism for adjusting the angle of the direction;
With respect to the mirror holding member, the curved mirror is used as a rotation axis with a second axis that is orthogonal to the optical axis and orthogonal to the first axis or parallel to the axis orthogonal to the optical axis. A second angle adjusting mechanism for adjusting the angle of the curved mirror in the second direction by rotating;
A first position adjustment mechanism that adjusts the position of the curved mirror by horizontally moving the curved mirror in a direction parallel to the first axis with respect to the mirror holding member;
The first angle adjustment mechanism, the second angle adjustment mechanism, and the first position adjustment mechanism are independent of each other, and when one of the adjustment mechanisms is changed, the adjustment of the other two adjustment mechanisms is affected. It is characterized by having no configuration.

さらに、請求項1に記載の発明は、
前記ミラー保持部材は、前記曲面ミラーの外周側に配置された第1保持部材と、前記第1保持部材を保持する第2保持部材とからなり、
前記曲面ミラーは、その反射面外で前記第1軸線上に第1係合部を有し、
前記第1係合部を、前記第1保持部材に取り付けられた第1被係合部材と係合し、
前記曲面ミラーは、前記第1保持部材に対して前記第1係合部及び第1被係合部材を介し前記第1軸線を回動軸として回動することで、前記第1方向の角度が調整されることを特徴とする。
Furthermore, the invention of claim 1
The mirror holding member comprises a first holding member disposed on the outer peripheral side of the curved mirror and a second holding member that holds the first holding member,
The curved mirror has a first engagement portion on the first axis outside the reflection surface;
Engaging the first engaging portion with a first engaged member attached to the first holding member;
The curved mirror rotates about the first axis with respect to the first holding member via the first engaging portion and the first engaged member, so that the angle in the first direction is increased. It is characterized by being adjusted.

そして、請求項1に記載の発明は、
前記第1保持部材は、前記第2軸線上で、かつ前記第1軸線方向に離間した位置に二つの第2係合部を有し、
前記第2係合部を、前記第2保持部材に設けられた第2被係合部と係合し、
前記第1保持部材は、前記第2保持部材に対して前記第2係合部及び第2被係合部を介し前記第2軸線または第2軸線と平行な軸を回動軸として回動することで、前記曲面ミラーの前記第2方向の角度が調整されることを特徴とする。
And invention of Claim 1 is
The first holding member has two second engagement portions on the second axis and at positions separated in the first axis direction,
Engaging the second engaging portion with a second engaged portion provided in the second holding member;
The first holding member rotates about the second axis or an axis parallel to the second axis with respect to the second holding member via the second engagement portion and the second engaged portion as a rotation axis. Thus, the angle of the curved mirror in the second direction is adjusted.

請求項に記載の発明は、
請求項に記載の曲面ミラーの調整装置であって、
前記第2保持部材を固定する固定部材を備え、
前記第2保持部材は、前記第1軸線と平行な軸線上に第3係合部を有し、
前記第3係合部を、前記固定部材に設けられた第3被係合部と位置調整部材を介して係合し、
前記第2保持部材は、前記固定部材に対して前記第3係合部及び第3被係合部を介し前記第1軸線方向へ平行移動することで、前記曲面ミラーの位置が調整されることを特徴とする。
The invention described in claim 2
An apparatus for adjusting a curved mirror according to claim 1 ,
A fixing member for fixing the second holding member;
The second holding member has a third engagement portion on an axis parallel to the first axis,
Engaging the third engaging portion with a third engaged portion provided on the fixing member via a position adjusting member;
The position of the curved mirror is adjusted by the second holding member moving in parallel with the fixed member in the first axial direction via the third engaging portion and the third engaged portion. It is characterized by.

請求項に記載の発明は、
請求項1又は2に記載の曲面ミラーの調整装置であって、
前記第1角度調整機構により前記曲面ミラーの前記第1方向の角度を調整した際に、その角度調整後の前記曲面ミラーを前記第1保持部材に対して姿勢を維持したまま固定するための第1姿勢保持機構を備えることを特徴とする。
The invention according to claim 3
An apparatus for adjusting a curved mirror according to claim 1 or 2 ,
When the angle of the curved mirror in the first direction is adjusted by the first angle adjustment mechanism, the curved mirror after the angle adjustment is fixed to the first holding member while maintaining the posture. A one-position holding mechanism is provided.

請求項に記載の発明は、
請求項1から3のいずれか一項に記載の曲面ミラーの調整装置であって、
前記第2角度調整機構により前記曲面ミラーの前記第2方向の角度を調整した際に、その角度調整後の前記第1保持部材を前記第2保持部材に対して姿勢を維持したまま固定するための第2姿勢保持機構を備えることを特徴とする。
The invention according to claim 4
An apparatus for adjusting a curved mirror according to any one of claims 1 to 3 ,
When the angle of the curved mirror in the second direction is adjusted by the second angle adjustment mechanism, the first holding member after the angle adjustment is fixed to the second holding member while maintaining the posture. The second posture holding mechanism is provided.

請求項5に記載の発明は、
請求項2に記載の曲面ミラーの調整装置であって、
前記第1位置調整機構により前記曲面ミラーの前記第1軸線と平行方向への位置を調整した際に、その位置調整後の前記第2保持部材を前記固定部材に対して姿勢を維持したまま固定するための第3姿勢保持機構を備えることを特徴とする。
The invention described in claim 5
An apparatus for adjusting a curved mirror according to claim 2 ,
When the position of the curved mirror in the direction parallel to the first axis is adjusted by the first position adjustment mechanism, the second holding member after the position adjustment is fixed while maintaining the posture with respect to the fixing member. A third posture holding mechanism is provided.

請求項に記載の発明は、
請求項1から5のいずれか一項に記載の曲面ミラーの調整装置であって、
前記第1係合部は、前記曲面ミラーの外周部で反射面を挟んだ二箇所に設けられ、
前記二箇所の第1係合部のうち一方には、前記第1保持部材と前記第1被係合部材との間に弾性部材が挿入されていることを特徴とする。
The invention described in claim 6
An apparatus for adjusting a curved mirror according to any one of claims 1 to 5 ,
The first engagement portion is provided at two locations sandwiching the reflection surface at the outer peripheral portion of the curved mirror,
One of the two first engaging portions is characterized in that an elastic member is inserted between the first holding member and the first engaged member.

請求項に記載の発明は、
請求項4又は5に記載の曲面ミラーの調整装置であって、
前記曲面ミラーの前記第2軸線と平行方向へ平行移動させることで、前記曲面ミラーの位置調整を行う第2位置調整機構を備えることを特徴とする。
The invention described in claim 7
An apparatus for adjusting a curved mirror according to claim 4 or 5 ,
A second position adjustment mechanism that adjusts the position of the curved mirror by moving the curved mirror in a direction parallel to the second axis is provided.

本発明によれば、反射面の角度及び位置をそれぞれ独自に調整可能となり、より高精度の調整が容易になる。   According to the present invention, the angle and position of the reflecting surface can be independently adjusted, and adjustment with higher accuracy is facilitated.

本発明を適用した曲面ミラーの調整装置の一実施形態の構成を示すもので、曲面ミラーと第1保持部材(ミラー保持部材)の関係を曲面ミラー側から見た分解斜視図である。BRIEF DESCRIPTION OF THE DRAWINGS The structure of one Embodiment of the curved mirror adjustment apparatus to which this invention is applied is shown, It is the disassembled perspective view which looked at the relationship between a curved mirror and a 1st holding member (mirror holding member) from the curved mirror side. 図1と逆に第1保持部材側から見た図である。It is the figure seen from the 1st holding member side contrary to FIG. 図1及び図2の曲面ミラーと第1保持部材を結合して第2保持部材(ミラー保持部材)との関係を示すもので、第1保持部材側から見た斜視図(a)と、その反対側から見た図(b)である。The curved mirror of FIG.1 and FIG.2 and a 1st holding member are couple | bonded, and the relationship with a 2nd holding member (mirror holding member) is shown, The perspective view (a) seen from the 1st holding member side, It is the figure (b) seen from the other side. 図3の曲面ミラーと第1保持部材及び第2保持部材を結合した状態を示すもので、調整用ねじ側から見た斜視図(a)と、その反対側から見た図(b)である。FIG. 4 is a perspective view (a) seen from the adjustment screw side and a view (b) seen from the opposite side, showing a state where the curved mirror of FIG. 3 and the first holding member and the second holding member are coupled. . 図4の曲面ミラーと第1保持部材及び第2保持部材と固定部材の関係を示すもので、固定部材側から見た斜視図(a)と、その反対側から見た図(b)である。FIG. 5 is a perspective view (a) seen from the fixed member side and a view (b) seen from the opposite side, showing the relationship between the curved mirror of FIG. 4 and the first holding member and the second holding member and the fixing member. . 図5の曲面ミラーと第1保持部材及び第2保持部材と固定部材と冶具部材の関係を示すもので、冶具部材側から見た斜視図(a)と、その反対側から見た図(b)である。FIG. 5 shows a relationship between the curved mirror, the first holding member, the second holding member, the fixing member, and the jig member in FIG. 5, a perspective view (a) viewed from the jig member side, and a view (b) viewed from the opposite side. ). 図6の曲面ミラーと第1保持部材及び第2保持部材と固定部材と冶具部材の結合状態を示すもので、冶具部材側から見た斜視図(a)と、その反対側から見た図(b)である。6 is a perspective view (a) seen from the jig member side, and a view seen from the opposite side (a), showing the coupled state of the curved mirror, the first holding member, the second holding member, the fixing member, and the jig member of FIG. b). 曲面ミラーと第1保持部材の関係を示すもので、背面側から見た模式図(a)と、その中央縦断面図(b)である。The relationship between a curved mirror and a 1st holding member is shown, and is the schematic diagram (a) seen from the back side, and its center longitudinal cross-sectional view (b). 曲面ミラーと第1保持部材の関係を示すもので、前面側から見た模式図(a)と、その中央縦断面図(b)である。The relationship between a curved mirror and a 1st holding member is shown, and is the schematic diagram (a) seen from the front side, and its center longitudinal cross-sectional view (b). 第2保持部材に対する第1保持部材の関係を示す要部縦断側面図である。It is a principal part vertical side view which shows the relationship of the 1st holding member with respect to a 2nd holding member. 固定部材に対する第2保持部材の関係を示す要部縦断側面図である。It is a principal part vertical side view which shows the relationship of the 2nd holding member with respect to a fixing member.

以下、図を参照して本発明を実施するための最良の形態を詳細に説明する。
(実施形態)
図1及び図2は本発明を適用した曲面ミラーの調整装置の一実施形態の構成として曲面ミラー1とミラー保持部材の第1保持部材11の関係を示すもので、図3及び図4はさらにミラー保持部材の第2保持部材12との関係を示し、図5はさらに固定部材21との関係を示し、図6及び図7はさらに冶具部材31との関係を示している。
Hereinafter, the best mode for carrying out the present invention will be described in detail with reference to the drawings.
(Embodiment)
FIG. 1 and FIG. 2 show the relationship between the curved mirror 1 and the first holding member 11 of the mirror holding member as a configuration of an embodiment of the curved mirror adjusting apparatus to which the present invention is applied. FIG. 3 and FIG. The relationship between the mirror holding member and the second holding member 12 is shown, FIG. 5 further shows the relationship with the fixing member 21, and FIGS. 6 and 7 further show the relationship with the jig member 31.

そして、図8及び図9は曲面ミラー1と第1保持部材11の関係を模式的に示すもので、図10は第2保持部材12に対する第1保持部材11の関係を示し、図11は固定部材21に対する第2保持部材12の関係を示している。   8 and 9 schematically show the relationship between the curved mirror 1 and the first holding member 11, FIG. 10 shows the relationship of the first holding member 11 with respect to the second holding member 12, and FIG. The relationship of the 2nd holding member 12 with respect to the member 21 is shown.

「前提」
始めに、画像調整素子からの画像光を屈折光学素子から構成される結像光学系へ入射し、結像光学系から出射した光線を曲面ミラー1の反射面で反射することにより被投射面へ画像光を拡大投射する投射光学系において、図1に示すように、結像光学系の光線をZ軸、画像調整素子の画像中心から出射した光線の軌跡の存在する平面内におけるZ軸と直交する軸をY軸、Z軸及びY軸とそれぞれ直交する軸をX軸と規定し、各軸と平行な方向をそれぞれZ軸方向、Y軸方向、X軸方向と規定する。
"Assumptions"
First, image light from the image adjusting element is incident on an image forming optical system composed of refractive optical elements, and a light beam emitted from the image forming optical system is reflected by the reflecting surface of the curved mirror 1 to the projection surface. In the projection optical system for enlarging and projecting image light, as shown in FIG. 1, the light beam of the imaging optical system is orthogonal to the Z axis and the Z axis in the plane where the locus of the light beam emitted from the image center of the image adjustment element exists. The axis to be defined is defined as the Y axis, the axis orthogonal to the Z axis and the Y axis is defined as the X axis, and the directions parallel to the respective axes are defined as the Z axis direction, the Y axis direction, and the X axis direction, respectively.

また、投射光学系を光軸が地面と平行となるように地面に設置した場合において、Z軸方向において、画像調整素子側を前側、被投射面側を後側と規定し、X軸方向において、前側から後側を見た場合の左右をそれぞれ左側、右側と規定して、Y軸方向において、前側から後側を見た場合の上下をそれぞれ上側、下側と規定し、左右方向はX軸方向、上下方向はY軸方向、前後方向はZ軸方向とそれぞれ対応する。   When the projection optical system is installed on the ground so that the optical axis is parallel to the ground, the image adjustment element side is defined as the front side and the projection surface side is defined as the rear side in the Z-axis direction. When the front side is viewed from the rear side, the left and right sides are defined as the left side and the right side, respectively. In the Y-axis direction, the top and bottom when the rear side is viewed from the front side are defined as the upper side and the lower side, respectively. The axial direction and the vertical direction correspond to the Y-axis direction, and the front-rear direction corresponds to the Z-axis direction.

曲面ミラー1は、非円形の曲線を回転軸にZ軸を用いて回転させた際に形成される非球面のうち、鏡軸であるZ軸上の面を含まない一部の面を用いた形状を有しており、結像光学系の光軸及び曲面ミラー1の鏡軸は共軸である。   The curved mirror 1 uses a part of an aspheric surface formed by rotating a non-circular curve with the Z axis as a rotation axis and does not include a surface on the Z axis that is a mirror axis. The optical axis of the imaging optical system and the mirror axis of the curved mirror 1 are coaxial.

「曲面ミラー」
図1及び図2に示すように、曲面ミラー1の反射面外の外周面のX軸と平行な第1軸線上に、左右一箇所ずつ溝状の第1係合部1aが形成されている。この第1係合部1aは、曲面ミラー1の前側から後側へ向かって溝が形成され、反射面側は開放されている。
"Curved mirror"
As shown in FIG. 1 and FIG. 2, groove-shaped first engaging portions 1 a are formed on the first axis parallel to the X axis on the outer peripheral surface outside the reflecting surface of the curved mirror 1, one on each side. . In the first engagement portion 1a, a groove is formed from the front side to the rear side of the curved mirror 1, and the reflection surface side is open.

曲面ミラー1の下端部側には、軸心がY軸方向に向き、かつZ軸と直交する突起部1bが形成されている。この突起部1bは、前後方向に貫通した穴部1cを有している。
また、曲面ミラー1の上端部側には、軸心がY軸方向に向い、かつZ軸と直交する突起部1dが形成されている。
On the lower end side of the curved mirror 1, a projection 1b whose axis is oriented in the Y-axis direction and orthogonal to the Z-axis is formed. The protrusion 1b has a hole 1c penetrating in the front-rear direction.
Further, on the upper end portion side of the curved mirror 1, a projection 1d whose axis is directed in the Y-axis direction and orthogonal to the Z-axis is formed.

「第1保持部材」
曲面ミラー1の外周側には、図1及び図2に示すように、第1保持部材11が配置されている。この第1保持部材11は、内周側に曲面ミラー1を保持可能に形成されている。
第1保持部材11には、曲面ミラー1の第1係合部1aに対応する位置に、左右方向に貫通した貫通孔11aが形成されている。この左右の貫通孔11aには、軸心が各々X軸と平行な第1軸線上にある軸状部材の第1被係合部材2がそれぞれ嵌め込まれている。第1係合部1aは第1被係合部材2と係合することにより、第1保持部材11に第1軸線を回動軸として回動可能に保持されている。
"First holding member"
As shown in FIGS. 1 and 2, a first holding member 11 is disposed on the outer peripheral side of the curved mirror 1. The first holding member 11 is formed to hold the curved mirror 1 on the inner peripheral side.
The first holding member 11 is formed with a through hole 11a penetrating in the left-right direction at a position corresponding to the first engaging portion 1a of the curved mirror 1. In the left and right through-holes 11a, first engaged members 2 of shaft-like members each having an axial center on a first axis parallel to the X axis are fitted. The first engaging portion 1a is held by the first holding member 11 so as to be rotatable about the first axis as a rotation axis by engaging with the first engaged member 2.

また、一方の第1被係合部材2と第1保持部材11との間にはスプリングワッシャ3が挿入されている。このスプリングワッシャ3により曲面ミラー1は一方の第1被係合部材2と共に第1保持部材11の他方に押し付けられている。
第1保持部材11には、曲面ミラー1の突起部1bに対応する位置に突起部11bが形成されている。この突起部11bには、前後方向に貫通しかつ前側の開口が狭くねじ穴状である座ぐり形状の穴部11cが形成されている。そして、曲面ミラー1の穴部1cと第1保持部材11の穴部11cには、後側から調整用ねじ4が挿入されて、穴部11cのねじ穴部と螺合している。また、穴部11cの内部には、圧縮バネ5が後側から挿入されている。
A spring washer 3 is inserted between the first engaged member 2 and the first holding member 11. The curved washer 1 is pressed against the other of the first holding members 11 together with the first engaged member 2 by the spring washer 3.
On the first holding member 11, a protrusion 11 b is formed at a position corresponding to the protrusion 1 b of the curved mirror 1. The projection 11b is formed with a counterbore-shaped hole 11c that penetrates in the front-rear direction and has a narrow opening on the front side and has a screw hole shape. An adjustment screw 4 is inserted into the hole 1c of the curved mirror 1 and the hole 11c of the first holding member 11 from the rear side, and is screwed into the screw hole of the hole 11c. A compression spring 5 is inserted into the hole 11c from the rear side.

そして、第1保持部材11には、曲面ミラー1の突起部1dに対応する位置に、位置調整用溝部11dが形成されている。この位置調整用溝部11dは、左右方向の溝幅が突起部1dの直径よりも大きく、前後方向の溝の深さが突起部1dの直径とほぼ等しくなっている。そして、第1保持部材11の後側から突起部1dを位置調整用溝部11dへ挿入した後、位置調整用溝部11dの後側からビス6で固定される板バネ7により、突起部1dを位置調整用溝部11dの底部である前側の壁面へ押し付けている。   In the first holding member 11, a position adjusting groove 11 d is formed at a position corresponding to the protrusion 1 d of the curved mirror 1. The position adjusting groove 11d has a groove width in the left-right direction larger than the diameter of the protrusion 1d, and the depth of the groove in the front-rear direction is substantially equal to the diameter of the protrusion 1d. Then, after the protrusion 1d is inserted into the position adjusting groove 11d from the rear side of the first holding member 11, the protrusion 1d is positioned by the leaf spring 7 fixed with the screw 6 from the rear side of the position adjusting groove 11d. It is pressed against the front wall surface which is the bottom of the adjusting groove 11d.

第1保持部材11の上端部には、左右方向に離間した位置に二つの板バネ8の一端がビス9でそれぞれ固定されている。この板バネ8の他端は、第1保持部材11の前側端部から前側へ突き出しており、第1保持部材11内部の曲面ミラー1の外周部の上端部を付勢している。   At the upper end of the first holding member 11, one end of two leaf springs 8 is fixed with screws 9 at positions separated in the left-right direction. The other end of the leaf spring 8 projects forward from the front end portion of the first holding member 11 and biases the upper end portion of the outer peripheral portion of the curved mirror 1 inside the first holding member 11.

よって、図8及び図9に示すように、曲面ミラー1を第1保持部材11に対して第1被係合部材2を介して保持した状態で調整ねじ4を調整することにより、曲面ミラー1を第1保持部材11に対して第1軸線(X)を回転軸として回動可能とした第1角度調整機構A1を構成している。この第1角度調整機構A1により、曲面ミラー1の反射面の角度調整及び固定が可能となっている。   Therefore, as shown in FIGS. 8 and 9, the curved mirror 1 is adjusted by adjusting the adjustment screw 4 while holding the curved mirror 1 with respect to the first holding member 11 via the first engaged member 2. The first angle adjusting mechanism A1 is configured to be rotatable with respect to the first holding member 11 about the first axis (X) as a rotation axis. By this first angle adjustment mechanism A1, the angle adjustment and fixing of the reflection surface of the curved mirror 1 are possible.

また、スプリングワッシャ3によりX軸方向のガタツキを抑制し、板バネ7により曲面ミラー1の第1被係合部材2からの脱落及びZ軸方向のガタツキを抑制し、板バネ8によりY軸方向のガタツキを抑制した第1姿勢保持機構B1を構成している。   Further, the spring washer 3 suppresses backlash in the X-axis direction, the leaf spring 7 suppresses the fall of the curved mirror 1 from the first engaged member 2 and backlash in the Z-axis direction, and the leaf spring 8 suppresses the backlash in the Y-axis direction. 1st attitude | position holding mechanism B1 which suppressed this rattling is comprised.

さらに、第1保持部材11の左右方向の外周側の両側面には、延設部11eが一つずつ形成されている。この延設部11eには、上下方向に貫通し、左右方向に比べて前後方向に口径が大きくなった長穴状の穴部11fが形成されている。
そして、2つの延設部11eの後端部には、下方向に延設された延設部11gがそれぞれ一つずつ形成されている。この延設部11gには、Z軸方向に貫通した穴部11hが形成されている。
Furthermore, one extending portion 11e is formed on each side surface of the first holding member 11 on the outer peripheral side in the left-right direction. The extended portion 11e is formed with an elongated hole portion 11f that penetrates in the vertical direction and has a larger diameter in the front-rear direction than in the left-right direction.
One extending portion 11g extending downward is formed at each rear end of the two extending portions 11e. The extending portion 11g is formed with a hole portion 11h penetrating in the Z-axis direction.

また、第1保持部材11の上端部には、調整用穴部11iが形成されている。この調整用穴部11iの中心軸は、Z軸と直交するY軸方向にあり、中心軸とZ軸の交点は曲面ミラー1の前側の表面付近で結ばれている。   An adjustment hole 11 i is formed at the upper end of the first holding member 11. The central axis of the adjustment hole portion 11i is in the Y-axis direction orthogonal to the Z-axis, and the intersection of the central axis and the Z-axis is connected near the front surface of the curved mirror 1.

「第2保持部材」
第1保持部材11の背面側には、図3に示すように、第2保持部材12が配置されている。この第2保持部材12は、内周側に曲面ミラー1を保持した第1保持部材11を保持可能に形成されている。
第2保持部材12には、第1保持部材11の穴部11fに対応する位置に、左右一つずつの固定用ねじ穴部12fが形成されている。この固定用ねじ穴部12fは、第2保持部材12の端部上に突出した突出部12eのY軸方向に向いた軸心に形成されている。
固定用ねじ13を穴部11fに挿入して固定用ねじ穴部12fに螺合することにより、第2保持部材12に対して第1保持部材11の移動を制限している。
"Second holding member"
As shown in FIG. 3, the second holding member 12 is disposed on the back side of the first holding member 11. The second holding member 12 is formed to be able to hold the first holding member 11 holding the curved mirror 1 on the inner peripheral side.
The second holding member 12 has one fixing screw hole portion 12f on each of the left and right sides at a position corresponding to the hole portion 11f of the first holding member 11. The fixing screw hole portion 12f is formed at the axial center of the protruding portion 12e protruding on the end portion of the second holding member 12 in the Y-axis direction.
The movement of the first holding member 11 is restricted with respect to the second holding member 12 by inserting the fixing screw 13 into the hole portion 11f and screwing it into the fixing screw hole portion 12f.

なお、固定用ねじ13で結合する際には、スプリングワッシャ14と平ワッシャ15を先に固定用ねじ13に嵌め込み、第1保持部材11と第2保持部材12の間に平ワッシャ16を挟んでから、固定用ねじ13を固定用ねじ穴12fに螺合する。   When connecting with the fixing screw 13, the spring washer 14 and the flat washer 15 are first fitted into the fixing screw 13, and the flat washer 16 is sandwiched between the first holding member 11 and the second holding member 12. Then, the fixing screw 13 is screwed into the fixing screw hole 12f.

そして、第2保持部材12には、第1保持部材11の穴部11hに対応する位置に、左右一つずつの穴部12hが形成されている。この穴部12hは、後側の開口の口径は広くなっているが、前側の開口の口径は小さくなり、ねじ穴状である座ぐり形状になっている。また、穴部12hには、図10に示すように、後側から圧縮バネ18が挿入されている。   The second holding member 12 is formed with one left and right hole 12 h at a position corresponding to the hole 11 h of the first holding member 11. The hole 12h has a large opening diameter on the rear side, but a small opening diameter on the front side, and has a counterbore shape that is a screw hole shape. Further, as shown in FIG. 10, a compression spring 18 is inserted into the hole 12h from the rear side.

図4に示すように、後側から調整用ねじ17を穴部11h及び圧縮バネ18、穴部12hに挿入し、穴部12hのねじ穴部に調整用ねじ17を螺合する。   As shown in FIG. 4, the adjusting screw 17 is inserted into the hole portion 11h, the compression spring 18, and the hole portion 12h from the rear side, and the adjusting screw 17 is screwed into the screw hole portion of the hole portion 12h.

また、第2保持部材12の後端部には、穴部12hと左右方向では同軸上に存在し、穴部12hよりも曲面ミラー1の光軸に近づいた位置に、二つの調整用治具固定部12jが形成されている。   In addition, two adjustment jigs are located at the rear end of the second holding member 12 coaxially with the hole 12h in the left-right direction and closer to the optical axis of the curved mirror 1 than the hole 12h. A fixed portion 12j is formed.

よって、図6及び図7に示すように、調整用治具固定部12jに背面から治具部材31を一対の冶具固定用ねじ32により固定し、治具部材31に形成された突起部31iを第1保持部材11に形成された調整用穴部11iに係合することにより、第1保持部材11は調整用穴部11iのY軸と平行な中心軸を回動軸として回動可能でかつ平行移動が規制される。   Therefore, as shown in FIGS. 6 and 7, the jig member 31 is fixed to the adjustment jig fixing portion 12j from the back by a pair of jig fixing screws 32, and the projection 31i formed on the jig member 31 is fixed. By engaging with the adjustment hole 11i formed in the first holding member 11, the first holding member 11 is rotatable about a central axis parallel to the Y axis of the adjustment hole 11i as a rotation axis, and Translation is restricted.

このため、図10に示すように、調整用ねじ17により第1保持部材11を第2保持部材12に対して第2軸線(Y)を回転中心とした角度調整を行う第2角度調整機構A2を構成している。   For this reason, as shown in FIG. 10, the second angle adjusting mechanism A <b> 2 that adjusts the angle of the first holding member 11 with respect to the second holding member 12 with the second axis (Y) as the rotation center by the adjusting screw 17. Is configured.

また、曲面ミラー1の反射面の角度を調整してから固定用ねじ13を締めることにより、調整後の姿勢を保持することが可能となる第2姿勢保持機構B2を構成している。   In addition, the second posture holding mechanism B2 that can hold the adjusted posture by adjusting the angle of the reflection surface of the curved mirror 1 and then tightening the fixing screw 13 is configured.

ここで、治具部材31は第1保持部材11を第2保持部材12に対して調整を完了した後に外しても良いし、そのまま補強部材として残しておいてもよい。   Here, the jig member 31 may be removed after the first holding member 11 has been adjusted with respect to the second holding member 12, or may be left as a reinforcing member.

さらに、第2保持部材12には、図3に示すように、前後方向において、突出部12eと同軸上にあり、かつ突出部12eよりも前側に離間した位置に、左右1つずつの穴部12kが形成されている。この穴部12kは、上下方向に貫通し、かつ前後方向に比べて左右方向の口径が大きくなった長穴状になっている。   Further, as shown in FIG. 3, the second holding member 12 has one hole on each of the left and right sides at a position that is coaxial with the projecting portion 12 e and spaced forward from the projecting portion 12 e in the front-rear direction. 12k is formed. The hole portion 12k has a long hole shape that penetrates in the vertical direction and has a larger diameter in the left-right direction than in the front-rear direction.

また、第2保持部材12の穴部12kの形成されている平面部12mは、その左右方向に光軸から離間した辺縁部に垂直で下方向に延びた平面部12nを有している。この平面部12nには、左右方向において、穴部12kと同軸上にあり、かつ左右方向に貫通した調整用ねじ穴部12pが形成されている。   Further, the flat surface portion 12m in which the hole portion 12k of the second holding member 12 is formed has a flat surface portion 12n extending in the downward direction perpendicular to the edge portion spaced from the optical axis in the left-right direction. The planar portion 12n is formed with an adjusting screw hole portion 12p that is coaxial with the hole portion 12k in the left-right direction and penetrates in the left-right direction.

こうして、反射面の角度及び位置を調整後に固定可能に保持している曲面ミラー1及び第1保持部材11、第2保持部材12を組み合わせて反射面保持機構とする。   In this way, the curved mirror 1, the first holding member 11, and the second holding member 12 that are fixedly held after adjusting the angle and position of the reflecting surface are combined to form a reflecting surface holding mechanism.

「固定部材」
以上の反射面保持機構の下面側には、図5に示すように、固定部材21が配置されている。この固定部材21は、内周側に反射面保持機構を保持可能に形成されている。反射面保持機構は、固定部材21の後側端部に配置されている。
固定部材21は、前側の左右両端部に、屈折光学素子による結像光学系を内包する図示しないレンズ鏡筒に固定するための固定用係合部21aを有している。
`` Fixing member ''
As shown in FIG. 5, a fixing member 21 is disposed on the lower surface side of the reflection surface holding mechanism. The fixing member 21 is formed on the inner peripheral side so as to be able to hold the reflecting surface holding mechanism. The reflection surface holding mechanism is disposed at the rear end portion of the fixing member 21.
The fixing member 21 has fixing engaging portions 21a for fixing to a lens barrel (not shown) that includes an imaging optical system using a refractive optical element, at both left and right ends of the front side.

固定部材21には、第2保持部材12の穴部12kに対応する位置に、左右1つずつの固定用ねじ穴部21kが形成されている。この固定用ねじ穴部21kは、固定部材21の端部上に突出した突出部21bの軸心に形成されている。
固定用ねじ22を穴部12kに挿入して固定用ねじ穴部21kと螺合することにより、固定部材21に対して第2保持部材12の移動を制限している。
The fixing member 21 is formed with one fixing screw hole portion 21k on the left and right sides at a position corresponding to the hole portion 12k of the second holding member 12. The fixing screw hole portion 21k is formed in the axial center of the protruding portion 21b protruding on the end portion of the fixing member 21.
The movement of the second holding member 12 is restricted with respect to the fixing member 21 by inserting the fixing screw 22 into the hole portion 12k and screwing it with the fixing screw hole portion 21k.

なお、固定用ねじ22で結合する際には、スプリングワッシャ23と平ワッシャ24を先に固定用ねじ22に嵌め込み、第2保持部材12と固定部材21の間に平ワッシャ25を挟んでから固定用ねじ22を固定用ねじ穴部21kと螺合する。   When connecting with the fixing screw 22, the spring washer 23 and the flat washer 24 are first fitted into the fixing screw 22, and the flat washer 25 is sandwiched between the second holding member 12 and the fixing member 21 and then fixed. The screw 22 is screwed into the fixing screw hole 21k.

そして、固定部材21には、第2保持部材12の調整用ねじ穴部12pに対応する位置に、穴部は無く壁面である壁部21pが存在している。この調整用ねじ穴部21pに調整用ねじ26が螺合されると、調整用ねじ26が調整用ねじ穴部12pを貫通して、その先端部が固定部材21の壁部21pを押す。   The fixing member 21 has a wall portion 21p that is a wall surface and does not have a hole portion at a position corresponding to the adjustment screw hole portion 12p of the second holding member 12. When the adjustment screw 26 is screwed into the adjustment screw hole portion 21p, the adjustment screw 26 penetrates the adjustment screw hole portion 12p, and the tip portion presses the wall portion 21p of the fixing member 21.

よって、図6に示すように、調整用ねじ26により第2保持部材12を固定部材21に対してX軸方向へ平行移動させることにより、反射面の位置の調整を行う第1位置調整機構C1を構成している。   Accordingly, as shown in FIG. 6, the first position adjusting mechanism C <b> 1 that adjusts the position of the reflecting surface by moving the second holding member 12 in the X-axis direction relative to the fixing member 21 with the adjusting screw 26. Is configured.

また、図11に示すように、反射面の位置が決定してから固定用ねじ22を締めることにより、調整後の姿勢を保持することが可能となる第3姿勢保持機構B3を構成している。   Further, as shown in FIG. 11, the third posture holding mechanism B3 that can hold the adjusted posture by tightening the fixing screw 22 after the position of the reflecting surface is determined is configured. .

以上のように、実施形態において、曲面ミラー1の調整装置は、第1軸線(X)を回転中心とする第1角度調整機構A1、第2軸線(Y)を回転中心とする第2角度調整機構A2、第1姿勢保持機構B1、第2姿勢保持機構B2、第3姿勢保持機構B3、第1軸線(X)方向への第1位置調整機構C1を備えている。   As described above, in the embodiment, the adjusting device for the curved mirror 1 includes the first angle adjustment mechanism A1 having the first axis (X) as the rotation center and the second angle adjustment having the second axis (Y) as the rotation center. A mechanism A2, a first posture holding mechanism B1, a second posture holding mechanism B2, a third posture holding mechanism B3, and a first position adjusting mechanism C1 in the first axis (X) direction are provided.

以上、実施形態の曲面ミラー1の調整装置によれば、第1角度調整機構A1、第2角度調整機構A2、第1姿勢保持機構B1、第2姿勢保持機構B2、第3姿勢保持機構B3、及び第1位置調整機構C1を互いに独立して備えることで、反射面の角度、姿勢及び位置をそれぞれ独自に調整でき、より高精度で容易に調整することができる。   As described above, according to the adjustment apparatus for the curved mirror 1 of the embodiment, the first angle adjustment mechanism A1, the second angle adjustment mechanism A2, the first attitude holding mechanism B1, the second attitude holding mechanism B2, the third attitude holding mechanism B3, Since the first position adjustment mechanism C1 is provided independently of each other, the angle, posture, and position of the reflecting surface can be independently adjusted, and can be easily adjusted with higher accuracy.

(変形例)
また、第1保持部材11と第2保持部材12の間にあるワッシャ16及び/または第2保持部材12と固定部材21との間にある平ワッシャ25は、そのワッシャの厚さや挟む枚数を変えることにより、反射面の上下方向の位置の調整を行うことが可能な第2位置調整機構としての機能を持たせることも可能である。
(Modification)
In addition, the washer 16 between the first holding member 11 and the second holding member 12 and / or the flat washer 25 between the second holding member 12 and the fixing member 21 changes the thickness of the washer and the number of sandwiched pieces. Thus, it is possible to provide a function as a second position adjusting mechanism capable of adjusting the position of the reflecting surface in the vertical direction.

その際に、高さ調整機構は、X軸方向において、同軸上で、かつ左右方向に離間して二箇所あるため、一方に挟むワッシャの数や厚みを他方に対して異ならせることにより、鏡軸を回転軸として反射面を回動させることも可能である。   At that time, since there are two height adjustment mechanisms on the same axis in the X-axis direction and spaced apart in the left-right direction, the number and thickness of washers sandwiched between the two can be made different from those of the other. It is also possible to rotate the reflecting surface about the axis.

(他の変形例)
以上の実施形態においては、光軸と直交する軸線を第1軸線、光軸と直交して、かつ第1軸線と直交する軸線を第2軸線としたが、これに限らず、光軸と直交する軸線と平行な軸線を第1軸線、光軸と直交して、かつ第1軸線と直交する軸線と平行な軸線を第2軸線としてもよい。
さらに、その他、具体的な細部構造等について適宜に変更可能であることは勿論である。
(Other variations)
In the above embodiment, the axis orthogonal to the optical axis is the first axis, the axis orthogonal to the optical axis, and the axis orthogonal to the first axis is the second axis. An axis parallel to the axis to be aligned may be a first axis, an axis orthogonal to the optical axis and an axis parallel to the axis orthogonal to the first axis may be the second axis.
Furthermore, it is needless to say that other specific detailed structures can be appropriately changed.

1 曲面ミラー
1a 第1係合部
1b 突起部
1c 穴部
1d 突起部
2 第1被係合部材
3 スプリングワッシャ(弾性部材)
4 調整用ねじ
5 圧縮バネ
6 ビス
7 板バネ
8 板バネ
9 ビス
11 第1保持部材
11a 貫通孔
11b 突起部
11c 穴部
11d 位置調整用溝部
11e 延設部
11f 穴部
11g 延設部
11h 穴部(第2係合部)
11i 調整用穴部
12 第2保持部材
12e 突出部
12f 固定用ねじ穴部
12h 穴部(第2被係合部)
12j 調整用治具固定部
12k 穴部
12m 平面部
12n 平面部
12p 調整用ねじ穴部(第3係合部)
13 固定用ねじ
14 スプリングワッシャ
15 平ワッシャ
16 平ワッシャ
17 調整用ねじ
18 圧縮バネ
21 固定部材
21a 固定用係合部
21k 固定用ねじ穴部
21p 壁部(第3被係合部)
22 固定用ねじ
23 スプリングワッシャ
24 平ワッシャ
25 平ワッシャ
26 調整用ねじ(位置調整部材)
31 冶具部材
31i 突起部
32 冶具固定用ねじ
A1 第1角度調整機構
A2 第2角度調整機構
B1 第1姿勢保持機構
B2 第2姿勢保持機構
B3 第3姿勢保持機構
C1 第1位置調整機構
DESCRIPTION OF SYMBOLS 1 Curved surface mirror 1a 1st engaging part 1b Projection part 1c Hole part 1d Projection part 2 1st to-be-engaged member 3 Spring washer (elastic member)
4 Adjustment screw 5 Compression spring 6 Screw 7 Leaf spring 8 Leaf spring 9 Screw 11 First holding member 11a Through hole 11b Projection portion 11c Hole portion 11d Position adjustment groove portion 11e Extension portion 11f Hole portion 11g Extension portion 11h Hole portion (Second engagement part)
11i Adjustment hole 12 Second holding member 12e Protruding portion 12f Fixing screw hole 12h Hole (second engaged portion)
12j Adjustment jig fixing part 12k Hole part 12m Plane part 12n Plane part 12p Adjustment screw hole part (third engagement part)
13 Fixing screw 14 Spring washer 15 Flat washer 16 Flat washer 17 Adjustment screw 18 Compression spring 21 Fixing member 21a Fixing engagement portion 21k Fixing screw hole 21p Wall portion (third engaged portion)
22 Fixing screw 23 Spring washer 24 Flat washer 25 Flat washer 26 Adjustment screw (position adjustment member)
31 Jig member 31i Projection part 32 Jig fixing screw A1 First angle adjusting mechanism A2 Second angle adjusting mechanism B1 First attitude holding mechanism B2 Second attitude holding mechanism B3 Third attitude holding mechanism C1 First position adjusting mechanism

Claims (7)

曲面ミラーを保持するミラー保持部材を備える曲面ミラーの調整装置であって、
前記ミラー保持部材に対し前記曲面ミラーを、光軸と直交する軸線もしくは光軸と直交する軸線と平行な軸線である第1軸線を回動軸として回動させることで、前記曲面ミラーの第1方向の角度調整を行う第1角度調整機構と、
前記ミラー保持部材に対し前記曲面ミラーを、前記光軸と直交して、かつ前記第1軸線と直交する軸線もしくは前記光軸と直交する軸線と平行な軸線である第2軸線を回動軸として回動させることで、前記曲面ミラーの前記第1方向とは異なる第2方向の角度調整を行う第2角度調整機構と、
前記ミラー保持部材に対し前記曲面ミラーを、前記第1軸線と平行方向へ水平移動させることで、前記曲面ミラーの位置調整を行う第1位置調整機構と、を備え、
前記第1角度調整機構、第2角度調整機構及び第1位置調整機構は互いに独立していて、そのうち一つの調整機構を変更した際に、他の二つの調整機構の調整に対して影響を与えない構成で、
前記ミラー保持部材は、前記曲面ミラーの外周側に配置された第1保持部材と、前記第1保持部材を保持する第2保持部材とからなり、
前記曲面ミラーは、その反射面外で前記第1軸線上に第1係合部を有し、
前記第1係合部を、前記第1保持部材に取り付けられた第1被係合部材と係合し、
前記曲面ミラーは、前記第1保持部材に対して前記第1係合部及び第1被係合部材を介し前記第1軸線を回動軸として回動することで、前記第1方向の角度が調整され、
前記第1保持部材は、前記第2軸線上で、かつ前記第1軸線方向に離間した位置に二つの第2係合部を有し、
前記第2係合部を、前記第2保持部材に設けられた第2被係合部と係合し、
前記第1保持部材は、前記第2保持部材に対して前記第2係合部及び第2被係合部を介し前記第2軸線または第2軸線と平行な軸を回動軸として回動することで、前記曲面ミラーの前記第2方向の角度が調整されることを特徴とする曲面ミラーの調整装置。
A curved mirror adjustment device comprising a mirror holding member for holding a curved mirror,
By rotating the curved mirror with respect to the mirror holding member using a first axis that is an axis that is orthogonal to the optical axis or an axis that is parallel to the axis that is orthogonal to the optical axis as a rotation axis, A first angle adjustment mechanism for adjusting the angle of the direction;
With respect to the mirror holding member, the curved mirror is used as a rotation axis with a second axis that is orthogonal to the optical axis and orthogonal to the first axis or parallel to the axis orthogonal to the optical axis. A second angle adjustment mechanism that adjusts the angle of the curved mirror in a second direction different from the first direction by rotating;
A first position adjustment mechanism that adjusts the position of the curved mirror by horizontally moving the curved mirror in a direction parallel to the first axis with respect to the mirror holding member;
The first angle adjustment mechanism, the second angle adjustment mechanism, and the first position adjustment mechanism are independent of each other, and when one of the adjustment mechanisms is changed, the adjustment of the other two adjustment mechanisms is affected. with no configuration,
The mirror holding member comprises a first holding member disposed on the outer peripheral side of the curved mirror and a second holding member that holds the first holding member,
The curved mirror has a first engagement portion on the first axis outside the reflection surface;
Engaging the first engaging portion with a first engaged member attached to the first holding member;
The curved mirror rotates about the first axis with respect to the first holding member via the first engaging portion and the first engaged member, so that the angle in the first direction is increased. Adjusted,
The first holding member has two second engagement portions on the second axis and at positions separated in the first axis direction,
Engaging the second engaging portion with a second engaged portion provided in the second holding member;
The first holding member rotates about the second axis or an axis parallel to the second axis with respect to the second holding member via the second engagement portion and the second engaged portion as a rotation axis. Thus , the curved mirror adjustment device is characterized in that the angle of the curved mirror in the second direction is adjusted .
前記第2保持部材を固定する固定部材を備え、
前記第2保持部材は、前記第1軸線と平行な軸線上に第3係合部を有し、
前記第3係合部を、前記固定部材に設けられた第3被係合部と位置調整部材を介して係合し、
前記第2保持部材は、前記固定部材に対して前記第3係合部及び第3被係合部を介し前記第1軸線方向へ平行移動することで、前記曲面ミラーの位置が調整されることを特徴とする請求項1に記載の曲面ミラーの調整装置。
A fixing member for fixing the second holding member;
The second holding member has a third engagement portion on an axis parallel to the first axis,
Engaging the third engaging portion with a third engaged portion provided on the fixing member via a position adjusting member;
The position of the curved mirror is adjusted by the second holding member moving in parallel with the fixed member in the first axial direction via the third engaging portion and the third engaged portion. The apparatus for adjusting a curved mirror according to claim 1.
前記第1角度調整機構により前記曲面ミラーの前記第1方向の角度を調整した際に、その角度調整後の前記曲面ミラーを前記第1保持部材に対して姿勢を維持したまま固定するための第1姿勢保持機構を備えることを特徴とする請求項1又は2に記載の曲面ミラーの調整装置。 When the angle of the curved mirror in the first direction is adjusted by the first angle adjustment mechanism, the curved mirror after the angle adjustment is fixed to the first holding member while maintaining the posture. The apparatus for adjusting a curved mirror according to claim 1, further comprising a one-position holding mechanism . 前記第2角度調整機構により前記曲面ミラーの前記第2方向の角度を調整した際に、その角度調整後の前記第1保持部材を前記第2保持部材に対して姿勢を維持したまま固定するための第2姿勢保持機構を備えることを特徴とする請求項1から3のいずれか一項に記載の曲面ミラーの調整装置。 When the angle of the curved mirror in the second direction is adjusted by the second angle adjustment mechanism, the first holding member after the angle adjustment is fixed to the second holding member while maintaining the posture. The apparatus for adjusting a curved mirror according to any one of claims 1 to 3, further comprising a second posture holding mechanism . 前記第1位置調整機構により前記曲面ミラーの前記第1軸線と平行方向への位置を調整した際に、その位置調整後の前記第2保持部材を前記固定部材に対して姿勢を維持したまま固定するための第3姿勢保持機構を備えることを特徴とする請求項2に記載の曲面ミラーの調整装置。 When the position of the curved mirror in the direction parallel to the first axis is adjusted by the first position adjustment mechanism, the second holding member after the position adjustment is fixed while maintaining the posture with respect to the fixing member. The apparatus for adjusting a curved mirror according to claim 2, further comprising a third posture holding mechanism. 前記第1係合部は、前記曲面ミラーの外周部で反射面を挟んだ二箇所に設けられ、
前記二箇所の第1係合部のうち一方には、前記第1保持部材と前記第1被係合部材との間に弾性部材が挿入されていることを特徴とする請求項1から5のいずれか一項に記載の曲面ミラーの調整装置。
The first engagement portion is provided at two locations sandwiching the reflection surface at the outer peripheral portion of the curved mirror,
6. The elastic member is inserted between the first holding member and the first engaged member in one of the two first engaging portions. 6. The apparatus for adjusting a curved mirror according to any one of the preceding claims.
前記曲面ミラーの前記第2軸線と平行方向へ平行移動させることで、前記曲面ミラーの位置調整を行う第2位置調整機構を備えることを特徴とする請求項4又は5に記載の曲面ミラーの調整装置。 6. The adjustment of the curved mirror according to claim 4, further comprising a second position adjustment mechanism that adjusts a position of the curved mirror by moving the curved mirror in a direction parallel to the second axis. apparatus.
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