JP2019060639A5 - - Google Patents
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- Publication number
- JP2019060639A5 JP2019060639A5 JP2017183501A JP2017183501A JP2019060639A5 JP 2019060639 A5 JP2019060639 A5 JP 2019060639A5 JP 2017183501 A JP2017183501 A JP 2017183501A JP 2017183501 A JP2017183501 A JP 2017183501A JP 2019060639 A5 JP2019060639 A5 JP 2019060639A5
- Authority
- JP
- Japan
- Prior art keywords
- softening temperature
- bonding layer
- glass
- parts
- glass beads
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000011521 glass Substances 0.000 claims description 24
- 239000011324 bead Substances 0.000 claims description 13
- 238000002844 melting Methods 0.000 claims description 11
- 238000004519 manufacturing process Methods 0.000 claims description 5
- 239000000956 alloy Substances 0.000 claims description 3
- 229910045601 alloy Inorganic materials 0.000 claims description 3
- REDXJYDRNCIFBQ-UHFFFAOYSA-N aluminium(3+) Chemical class [Al+3] REDXJYDRNCIFBQ-UHFFFAOYSA-N 0.000 claims description 3
- 239000002184 metal Substances 0.000 claims description 3
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2017183501A JP6941278B2 (ja) | 2017-09-25 | 2017-09-25 | 圧力センサ、圧力センサの製造方法及び質量流量制御装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2017183501A JP6941278B2 (ja) | 2017-09-25 | 2017-09-25 | 圧力センサ、圧力センサの製造方法及び質量流量制御装置 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2019060639A JP2019060639A (ja) | 2019-04-18 |
| JP2019060639A5 true JP2019060639A5 (de) | 2020-10-01 |
| JP6941278B2 JP6941278B2 (ja) | 2021-09-29 |
Family
ID=66177240
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2017183501A Active JP6941278B2 (ja) | 2017-09-25 | 2017-09-25 | 圧力センサ、圧力センサの製造方法及び質量流量制御装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP6941278B2 (de) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2024053270A1 (ja) * | 2022-09-07 | 2024-03-14 | 株式会社プロテリアル | 半導体チップをガラス接合する方法、圧力センサの製造方法及び接合装置 |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4939497A (en) * | 1989-04-18 | 1990-07-03 | Nippon Soken, Inc. | Pressure sensor |
| JPH0894471A (ja) * | 1994-09-27 | 1996-04-12 | Matsushita Electric Ind Co Ltd | 静電容量式圧力センサ及びその製造方法 |
| JP4692918B2 (ja) * | 2004-12-01 | 2011-06-01 | 日本電気硝子株式会社 | 封着材料 |
| JP2009061650A (ja) * | 2007-09-06 | 2009-03-26 | Tokyo Institute Of Technology | 無機・高分子構造体、微小および超微小電気機械システム、製造方法、および製造装置 |
| JP5919910B2 (ja) * | 2012-03-14 | 2016-05-18 | 株式会社日本自動車部品総合研究所 | 接合部材及びその製造方法 |
| JP6237923B2 (ja) * | 2014-10-07 | 2017-11-29 | 日立金属株式会社 | 圧力センサ及び差圧センサ並びにそれらを用いた質量流量制御装置 |
| CN107683406B (zh) * | 2015-07-07 | 2020-08-07 | 日立汽车系统株式会社 | 半导体器件、力学量测量装置和半导体器件的制造方法 |
-
2017
- 2017-09-25 JP JP2017183501A patent/JP6941278B2/ja active Active
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