JP2019058902A - マイクロ流体システム又はデバイスおよびマイクロ流体システム又はデバイスを製造する方法 - Google Patents
マイクロ流体システム又はデバイスおよびマイクロ流体システム又はデバイスを製造する方法 Download PDFInfo
- Publication number
- JP2019058902A JP2019058902A JP2018165417A JP2018165417A JP2019058902A JP 2019058902 A JP2019058902 A JP 2019058902A JP 2018165417 A JP2018165417 A JP 2018165417A JP 2018165417 A JP2018165417 A JP 2018165417A JP 2019058902 A JP2019058902 A JP 2019058902A
- Authority
- JP
- Japan
- Prior art keywords
- cover film
- intermediate layer
- channel
- base sheet
- base
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 36
- 239000013039 cover film Substances 0.000 claims abstract description 171
- 238000003825 pressing Methods 0.000 claims abstract description 79
- 238000000034 method Methods 0.000 claims abstract description 56
- 238000010030 laminating Methods 0.000 claims abstract description 9
- 239000000463 material Substances 0.000 claims description 35
- 239000000853 adhesive Substances 0.000 claims description 21
- 230000001070 adhesive effect Effects 0.000 claims description 21
- 230000005855 radiation Effects 0.000 claims description 15
- 239000011521 glass Substances 0.000 claims description 11
- 229920005989 resin Polymers 0.000 claims description 10
- 239000011347 resin Substances 0.000 claims description 10
- 239000005020 polyethylene terephthalate Substances 0.000 claims description 9
- 229920000139 polyethylene terephthalate Polymers 0.000 claims description 9
- 239000013043 chemical agent Substances 0.000 claims description 8
- 230000005684 electric field Effects 0.000 claims description 8
- 229920000098 polyolefin Polymers 0.000 claims description 5
- -1 polyethylene terephthalate Polymers 0.000 claims description 4
- 239000010703 silicon Substances 0.000 claims description 4
- 229910001220 stainless steel Inorganic materials 0.000 claims description 4
- 239000010935 stainless steel Substances 0.000 claims description 4
- 239000005038 ethylene vinyl acetate Substances 0.000 claims description 3
- 239000004800 polyvinyl chloride Substances 0.000 claims description 3
- 229910052710 silicon Inorganic materials 0.000 claims description 3
- DQXBYHZEEUGOBF-UHFFFAOYSA-N but-3-enoic acid;ethene Chemical compound C=C.OC(=O)CC=C DQXBYHZEEUGOBF-UHFFFAOYSA-N 0.000 claims 1
- 229920001200 poly(ethylene-vinyl acetate) Polymers 0.000 claims 1
- 229920000915 polyvinyl chloride Polymers 0.000 claims 1
- 239000010410 layer Substances 0.000 description 103
- 239000012790 adhesive layer Substances 0.000 description 21
- 238000010438 heat treatment Methods 0.000 description 17
- 239000011229 interlayer Substances 0.000 description 13
- 238000005520 cutting process Methods 0.000 description 12
- 239000000758 substrate Substances 0.000 description 10
- 238000012360 testing method Methods 0.000 description 9
- 239000012530 fluid Substances 0.000 description 7
- 230000002093 peripheral effect Effects 0.000 description 6
- 239000010408 film Substances 0.000 description 5
- 238000012545 processing Methods 0.000 description 5
- 238000004458 analytical method Methods 0.000 description 4
- 238000002032 lab-on-a-chip Methods 0.000 description 4
- 241001050985 Disco Species 0.000 description 3
- 238000001816 cooling Methods 0.000 description 3
- 238000005553 drilling Methods 0.000 description 3
- 239000012528 membrane Substances 0.000 description 3
- 238000000206 photolithography Methods 0.000 description 3
- 229920003023 plastic Polymers 0.000 description 3
- 239000004033 plastic Substances 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 2
- 238000003889 chemical engineering Methods 0.000 description 2
- 239000004205 dimethyl polysiloxane Substances 0.000 description 2
- 238000003891 environmental analysis Methods 0.000 description 2
- 238000003698 laser cutting Methods 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 229920000435 poly(dimethylsiloxane) Polymers 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 238000012876 topography Methods 0.000 description 2
- 229910000976 Electrical steel Inorganic materials 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 239000005385 borate glass Substances 0.000 description 1
- 239000005388 borosilicate glass Substances 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000002708 enhancing effect Effects 0.000 description 1
- 230000001747 exhibiting effect Effects 0.000 description 1
- 239000000499 gel Substances 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 238000004452 microanalysis Methods 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 238000005488 sandblasting Methods 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
- 238000001039 wet etching Methods 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B27/00—Layered products comprising a layer of synthetic resin
- B32B27/30—Layered products comprising a layer of synthetic resin comprising vinyl (co)polymers; comprising acrylic (co)polymers
- B32B27/304—Layered products comprising a layer of synthetic resin comprising vinyl (co)polymers; comprising acrylic (co)polymers comprising vinyl halide (co)polymers, e.g. PVC, PVDC, PVF, PVDF
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J19/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
- B01J19/0093—Microreactors, e.g. miniaturised or microfabricated reactors
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
- B01L3/00—Containers or dishes for laboratory use, e.g. laboratory glassware; Droppers
- B01L3/50—Containers for the purpose of retaining a material to be analysed, e.g. test tubes
- B01L3/502—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures
- B01L3/5027—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip
- B01L3/502707—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip characterised by the manufacture of the container or its components
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B15/00—Layered products comprising a layer of metal
- B32B15/04—Layered products comprising a layer of metal comprising metal as the main or only constituent of a layer, which is next to another layer of the same or of a different material
- B32B15/08—Layered products comprising a layer of metal comprising metal as the main or only constituent of a layer, which is next to another layer of the same or of a different material of synthetic resin
- B32B15/082—Layered products comprising a layer of metal comprising metal as the main or only constituent of a layer, which is next to another layer of the same or of a different material of synthetic resin comprising vinyl resins; comprising acrylic resins
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B15/00—Layered products comprising a layer of metal
- B32B15/04—Layered products comprising a layer of metal comprising metal as the main or only constituent of a layer, which is next to another layer of the same or of a different material
- B32B15/08—Layered products comprising a layer of metal comprising metal as the main or only constituent of a layer, which is next to another layer of the same or of a different material of synthetic resin
- B32B15/085—Layered products comprising a layer of metal comprising metal as the main or only constituent of a layer, which is next to another layer of the same or of a different material of synthetic resin comprising polyolefins
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B15/00—Layered products comprising a layer of metal
- B32B15/18—Layered products comprising a layer of metal comprising iron or steel
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B27/00—Layered products comprising a layer of synthetic resin
- B32B27/06—Layered products comprising a layer of synthetic resin as the main or only constituent of a layer, which is next to another layer of the same or of a different material
- B32B27/08—Layered products comprising a layer of synthetic resin as the main or only constituent of a layer, which is next to another layer of the same or of a different material of synthetic resin
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B27/00—Layered products comprising a layer of synthetic resin
- B32B27/30—Layered products comprising a layer of synthetic resin comprising vinyl (co)polymers; comprising acrylic (co)polymers
- B32B27/306—Layered products comprising a layer of synthetic resin comprising vinyl (co)polymers; comprising acrylic (co)polymers comprising vinyl acetate or vinyl alcohol (co)polymers
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B27/00—Layered products comprising a layer of synthetic resin
- B32B27/32—Layered products comprising a layer of synthetic resin comprising polyolefins
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B27/00—Layered products comprising a layer of synthetic resin
- B32B27/36—Layered products comprising a layer of synthetic resin comprising polyesters
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B3/00—Layered products comprising a layer with external or internal discontinuities or unevennesses, or a layer of non-planar shape; Layered products comprising a layer having particular features of form
- B32B3/26—Layered products comprising a layer with external or internal discontinuities or unevennesses, or a layer of non-planar shape; Layered products comprising a layer having particular features of form characterised by a particular shape of the outline of the cross-section of a continuous layer; characterised by a layer with cavities or internal voids ; characterised by an apertured layer
- B32B3/28—Layered products comprising a layer with external or internal discontinuities or unevennesses, or a layer of non-planar shape; Layered products comprising a layer having particular features of form characterised by a particular shape of the outline of the cross-section of a continuous layer; characterised by a layer with cavities or internal voids ; characterised by an apertured layer characterised by a layer comprising a deformed thin sheet, i.e. the layer having its entire thickness deformed out of the plane, e.g. corrugated, crumpled
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B3/00—Layered products comprising a layer with external or internal discontinuities or unevennesses, or a layer of non-planar shape; Layered products comprising a layer having particular features of form
- B32B3/26—Layered products comprising a layer with external or internal discontinuities or unevennesses, or a layer of non-planar shape; Layered products comprising a layer having particular features of form characterised by a particular shape of the outline of the cross-section of a continuous layer; characterised by a layer with cavities or internal voids ; characterised by an apertured layer
- B32B3/30—Layered products comprising a layer with external or internal discontinuities or unevennesses, or a layer of non-planar shape; Layered products comprising a layer having particular features of form characterised by a particular shape of the outline of the cross-section of a continuous layer; characterised by a layer with cavities or internal voids ; characterised by an apertured layer characterised by a layer formed with recesses or projections, e.g. hollows, grooves, protuberances, ribs
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B7/00—Layered products characterised by the relation between layers; Layered products characterised by the relative orientation of features between layers, or by the relative values of a measurable parameter between layers, i.e. products comprising layers having different physical, chemical or physicochemical properties; Layered products characterised by the interconnection of layers
- B32B7/04—Interconnection of layers
- B32B7/12—Interconnection of layers using interposed adhesives or interposed materials with bonding properties
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B9/00—Layered products comprising a layer of a particular substance not covered by groups B32B11/00 - B32B29/00
- B32B9/04—Layered products comprising a layer of a particular substance not covered by groups B32B11/00 - B32B29/00 comprising such particular substance as the main or only constituent of a layer, which is next to another layer of the same or of a different material
- B32B9/045—Layered products comprising a layer of a particular substance not covered by groups B32B11/00 - B32B29/00 comprising such particular substance as the main or only constituent of a layer, which is next to another layer of the same or of a different material of synthetic resin
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
- B01J2219/00781—Aspects relating to microreactors
- B01J2219/00783—Laminate assemblies, i.e. the reactor comprising a stack of plates
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
- B01J2219/00781—Aspects relating to microreactors
- B01J2219/00801—Means to assemble
- B01J2219/0081—Plurality of modules
- B01J2219/00813—Fluidic connections
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
- B01J2219/00781—Aspects relating to microreactors
- B01J2219/00819—Materials of construction
- B01J2219/00822—Metal
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
- B01J2219/00781—Aspects relating to microreactors
- B01J2219/00819—Materials of construction
- B01J2219/00831—Glass
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
- B01J2219/00781—Aspects relating to microreactors
- B01J2219/00819—Materials of construction
- B01J2219/00833—Plastic
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
- B01J2219/00781—Aspects relating to microreactors
- B01J2219/00851—Additional features
- B01J2219/00858—Aspects relating to the size of the reactor
- B01J2219/0086—Dimensions of the flow channels
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
- B01J2219/00781—Aspects relating to microreactors
- B01J2219/00925—Irradiation
- B01J2219/00934—Electromagnetic waves
- B01J2219/00936—UV-radiations
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
- B01L2200/00—Solutions for specific problems relating to chemical or physical laboratory apparatus
- B01L2200/12—Specific details about manufacturing devices
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
- B01L2300/00—Additional constructional details
- B01L2300/08—Geometry, shape and general structure
- B01L2300/0803—Disc shape
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
- B01L2300/00—Additional constructional details
- B01L2300/08—Geometry, shape and general structure
- B01L2300/0809—Geometry, shape and general structure rectangular shaped
- B01L2300/0816—Cards, e.g. flat sample carriers usually with flow in two horizontal directions
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
- B01L2300/00—Additional constructional details
- B01L2300/08—Geometry, shape and general structure
- B01L2300/0861—Configuration of multiple channels and/or chambers in a single devices
- B01L2300/0883—Serpentine channels
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
- B01L2300/00—Additional constructional details
- B01L2300/08—Geometry, shape and general structure
- B01L2300/0887—Laminated structure
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B2250/00—Layers arrangement
- B32B2250/02—2 layers
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B2307/00—Properties of the layers or laminate
- B32B2307/70—Other properties
- B32B2307/732—Dimensional properties
Landscapes
- Chemical & Material Sciences (AREA)
- Health & Medical Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Clinical Laboratory Science (AREA)
- General Health & Medical Sciences (AREA)
- Hematology (AREA)
- Analytical Chemistry (AREA)
- Dispersion Chemistry (AREA)
- Organic Chemistry (AREA)
- Engineering & Computer Science (AREA)
- Ceramic Engineering (AREA)
- Micromachines (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
- Laminated Bodies (AREA)
Abstract
Description
Claims (18)
- 少なくとも一つのチャネル(20)を有するマイクロ流体システム又はマイクロ流体デバイス(30)を製造する方法であって、
ベースシート(7)を準備するステップと、
変形可能な中間層(13)を準備するステップと、
カバーフィルム(4)を準備するステップと、
前記中間層(13)の裏の面が前記ベースシート(7)の表の面に付けられ、前記カバーフィルム(4)の裏の面(4b)が、その裏の面(4b)の反対側にある前記中間層(13)の表の面(13a)に付けられるように、前記ベースシート(7)、前記中間層(13)、前記カバーフィルム(4)を積層するステップであって、前記ベースシート(7)、前記中間層(13)、前記カバーフィルム(4)を備えるラミネートを形成する、前記ステップと、
前記中間層(13)を変形するように前記カバーフィルム(4)を介して前記中間層(13)の前記表の面(13a)に圧力を加えるステップであって、少なくとも一つのチャネル(20)を形成する、前記ステップと、
を含む、方法。 - 前記カバーフィルム(4)は、拡張可能であり、当該方法は、前記カバーフィルム(4)を拡張させるステップを更に含む、請求項1に記載の方法。
- 前記カバーフィルム(4)は、前記圧力が前記カバーフィルム(4)を介して前記中間層(13)の前記表の面(13a)に加えられるとき、拡張される、請求項2に記載の方法。
- 前記中間層(13)は、UV線、熱、電界および/または化学剤のような外部刺激によって硬化可能である、請求項1〜3のいずれか一項に記載の方法。
- 前記少なくとも一つのチャネル(20)を形成するステップの後で前記中間層(13)を硬化させるように、前記中間層(13)に前記外部刺激を加えるステップを更に含む、請求項4に記載の方法。
- 前記ベースシート(7)、前記中間層(13)、前記カバーフィルム(4)は最初に積層され、前記ベースシート(7)、前記中間層(13)、前記カバーフィルム(4)を備えた前記ラミネートを形成し、その後、前記中間層(13)を変形させるように、前記カバーフィルム(4)を介して前記中間層(13)の前記表の面(13a)に圧力が加えられ、少なくとも一つのチャネル(20)を形成する、請求項1〜5のいずれか一項に記載の方法。
- 前記少なくとも一つのチャネル(20)は、5〜200μmの範囲の幅、5〜200μmの範囲の深さ、0.5〜100mmの範囲の長さを有する、請求項1〜6のいずれか一項に記載の方法。
- 前記少なくとも一つのチャネル(20)は、前記ラミネートの幅および/または長さの5%以上、好ましくは、10%以上拡張する、請求項1〜7のいずれか一項に記載の方法。
- 前記マイクロ流体システム又はマイクロ流体デバイス(30)は、複数のチャネル(20)を有し、前記圧力は、前記カバーフィルム(4)を介して前記中間層(13)の前記表の面(13a)に加えられ、前記複数のチャネル(20)を形成する、請求項1〜8のいずれか一項に記載の方法。
- 少なくとも2つの前記複数のチャネル(20)は、互いに接続される、請求項9に記載の方法。
- 前記圧力は、スタンプ、型、ダイを使用することによって、前記カバーフィルム(4)を通じて、前記中間層(13)の前記表の面(13a)に加えられる、請求項1〜10のいずれか一項に記載の方法。
- 前記ベースシート(7)は、ポリエチレンテレフタレートおよび/またはシリコンおよび/またはガラスおよび/またはステンレス鋼のような剛性材料で形成される、請求項1〜11のいずれか一項に記載の方法。
- 前記ベースシート(7)は、200〜1500μmの範囲の厚さを有する、請求項1〜12のいずれか一項に記載の方法。
- 前記中間層(13)は、樹脂、接着材、ゲルで形成される、請求項1〜13のいずれか一項に記載の方法。
- 前記中間層(13)は、20〜1000μmの範囲の厚さを有する、請求項1〜14のいずれか一項に記載の方法。
- 前記カバーフィルム(4)は、ポリ塩化ビニル、ポリオレフィン、エチレンビニルアセテートのような高分子材料で形成される、請求項1〜15のいずれか一項に記載の方法。
- 前記カバーフィルム(4)は、5〜200μmの範囲の厚さを有する、請求項1〜16のいずれか一項に記載の方法。
- 少なくとも一つのチャネル(20)を有するマイクロ流体システム又はマイクロ流体デバイス(30)において、前記マイクロ流体システム又はマイクロ流体デバイス(30)は、
ベースシート(7)、中間層(13)、カバーフィルム(4)を備えるラミネートを備え、前記中間層(13)の裏の面は前記ベースシート(7)の表の面(17)に付けられ、前記カバーフィルム(4)の裏の面(4b)は、前記中間層(13)の、その裏の面の反対側にある表の面(13a)に付けられ、
前記少なくとも一つのチャネル(20)が、前記カバーフィルム(4)の側が開くように前記ラミネートに形成される、マイクロ流体システム又はマイクロ流体デバイス。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE102017217179.0 | 2017-09-27 | ||
DE102017217179.0A DE102017217179A1 (de) | 2017-09-27 | 2017-09-27 | Mikrofluidisches System oder mikrofluidische Einrichtung und Verfahren zum Herstellen eines mikrofluidischen Systems oder einer mikrofluidischen Einrichtung |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2019058902A true JP2019058902A (ja) | 2019-04-18 |
JP6682747B2 JP6682747B2 (ja) | 2020-04-15 |
Family
ID=65638682
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2018165417A Active JP6682747B2 (ja) | 2017-09-27 | 2018-09-04 | マイクロ流体システム又はデバイスおよびマイクロ流体システム又はデバイスを製造する方法 |
Country Status (3)
Country | Link |
---|---|
US (1) | US11559974B2 (ja) |
JP (1) | JP6682747B2 (ja) |
DE (1) | DE102017217179A1 (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPWO2021100590A1 (ja) * | 2019-11-19 | 2021-05-27 |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN114433259B (zh) * | 2021-12-24 | 2023-12-26 | 广州万孚生物技术股份有限公司 | 均相测试微流控芯片及检测系统 |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2004288845A (ja) * | 2003-03-20 | 2004-10-14 | Hitachi Ltd | ナノプリント用スタンパ、及び微細構造転写方法 |
US20070110962A1 (en) * | 2003-09-23 | 2007-05-17 | Joe Tien | Three-dimensional gels that have microscale features |
JP2009523635A (ja) * | 2006-01-24 | 2009-06-25 | マイクロラボ ピーティーワイ エルティーディー | スタンピング方法及び装置 |
JP2017504183A (ja) * | 2013-12-19 | 2017-02-02 | イルミナ インコーポレイテッド | ナノパターン化表面を含む基材およびその調製方法 |
JP2017030357A (ja) * | 2015-07-31 | 2017-02-09 | 東レ株式会社 | 熱可塑性樹脂フィルムの製造方法 |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6645432B1 (en) * | 2000-05-25 | 2003-11-11 | President & Fellows Of Harvard College | Microfluidic systems including three-dimensionally arrayed channel networks |
KR100425536B1 (ko) * | 2001-07-16 | 2004-03-30 | 학교법인 포항공과대학교 | 유체 마이크로칩용 브레드보드 |
US7618510B2 (en) * | 2003-05-23 | 2009-11-17 | The Regents Of The University Of Michigan | Imprinting polymer film on patterned substrate |
US20100068489A1 (en) | 2007-02-23 | 2010-03-18 | Applied Microstructures, Inc. | Wear-resistant, carbon-doped metal oxide coatings for MEMS and nanoimprint lithography |
-
2017
- 2017-09-27 DE DE102017217179.0A patent/DE102017217179A1/de active Pending
-
2018
- 2018-09-04 JP JP2018165417A patent/JP6682747B2/ja active Active
- 2018-09-13 US US16/130,487 patent/US11559974B2/en active Active
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2004288845A (ja) * | 2003-03-20 | 2004-10-14 | Hitachi Ltd | ナノプリント用スタンパ、及び微細構造転写方法 |
US20070110962A1 (en) * | 2003-09-23 | 2007-05-17 | Joe Tien | Three-dimensional gels that have microscale features |
JP2009523635A (ja) * | 2006-01-24 | 2009-06-25 | マイクロラボ ピーティーワイ エルティーディー | スタンピング方法及び装置 |
JP2017504183A (ja) * | 2013-12-19 | 2017-02-02 | イルミナ インコーポレイテッド | ナノパターン化表面を含む基材およびその調製方法 |
JP2017030357A (ja) * | 2015-07-31 | 2017-02-09 | 東レ株式会社 | 熱可塑性樹脂フィルムの製造方法 |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPWO2021100590A1 (ja) * | 2019-11-19 | 2021-05-27 | ||
WO2021100590A1 (ja) * | 2019-11-19 | 2021-05-27 | 京セラ株式会社 | 流路デバイス、流路デバイスの製造方法、計測用流路デバイスおよび検査装置 |
Also Published As
Publication number | Publication date |
---|---|
DE102017217179A1 (de) | 2019-03-28 |
US11559974B2 (en) | 2023-01-24 |
US20190091649A1 (en) | 2019-03-28 |
JP6682747B2 (ja) | 2020-04-15 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US6182733B1 (en) | Methods of manufacturing microfabricated substrates | |
Ogilvie et al. | Reduction of surface roughness for optical quality microfluidic devices in PMMA and COC | |
Nath et al. | Rapid prototyping of robust and versatile microfluidic components using adhesive transfer tapes | |
JP2008008880A (ja) | プラスチック製マイクロチップ、及びその製造方法、並びにそれを利用したバイオチップ又はマイクロ分析チップ | |
WO2003068672A3 (en) | Fabrication of ultra-shallow channels for microfluidic devices and systems | |
US7709351B2 (en) | Method of manufacturing semiconductor device and method of manufacturing bonding sheet | |
JP2019058902A (ja) | マイクロ流体システム又はデバイスおよびマイクロ流体システム又はデバイスを製造する方法 | |
JP2016529116A (ja) | 分離可能なチップを有するマイクロ流体チップ・パッケージ又は組立体の製造 | |
WO2001026812A1 (en) | Microfluidic structures and methods of fabrication | |
CN102721820A (zh) | 一种制备具有集成化气动微阀的组装式高聚物微流控芯片的方法 | |
CN105396631A (zh) | 一种立体的微流控芯片及其制备方法 | |
US20140048201A1 (en) | Bonding of thin lamina | |
JP2009090538A (ja) | プラスチック薄膜の製造方法 | |
CN103127971B (zh) | 一种微流控管道及其制备方法 | |
US8703039B2 (en) | Microstructured composite component and method and device for producing the same | |
JP2007240461A (ja) | プラスチック製マイクロチップ、及びその接合方法、及びそれを利用したバイオチップ又はマイクロ分析チップ。 | |
TW201321214A (zh) | 印壓方法及印壓模具 | |
US20110026860A1 (en) | Method and Apparatus for Implementing Differential Heat Seal Strength in Pouch-Based Diagnostic and Medical Products | |
Lee et al. | Study on soft hot embossing process for making microstructures in a cyclo-olefin polymeric (COP) film | |
KR102369629B1 (ko) | 롤투롤을 활용한 바이오칩 제작 시스템 | |
US9498918B2 (en) | Method and device for embossing | |
EP2264466A1 (en) | Microchip and method for manufacturing microchip | |
Svedberg et al. | On the integration of flexible circuit boards with hot embossed thermoplastic structures for actuator purposes | |
JP5545255B2 (ja) | マイクロチップ及びその製造方法 | |
JP2015199340A (ja) | 樹脂製マイクロ流路デバイスの製造方法、およびマイクロ流路デバイス製造装置 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20180904 |
|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20190725 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20190730 |
|
A601 | Written request for extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A601 Effective date: 20190815 |
|
RD04 | Notification of resignation of power of attorney |
Free format text: JAPANESE INTERMEDIATE CODE: A7424 Effective date: 20190918 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20191127 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20200225 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20200304 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 6682747 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |