JP2019036706A - 二次元電子デバイスおよび関連する製造方法 - Google Patents
二次元電子デバイスおよび関連する製造方法 Download PDFInfo
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- 238000004519 manufacturing process Methods 0.000 title description 7
- 239000004065 semiconductor Substances 0.000 claims abstract description 112
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- 238000000034 method Methods 0.000 claims abstract description 45
- 230000003287 optical effect Effects 0.000 claims abstract description 21
- 239000000463 material Substances 0.000 claims description 92
- 229910052710 silicon Inorganic materials 0.000 claims description 44
- 239000010703 silicon Substances 0.000 claims description 44
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 40
- 229910052725 zinc Inorganic materials 0.000 claims description 24
- 239000011701 zinc Substances 0.000 claims description 24
- 229910052782 aluminium Inorganic materials 0.000 claims description 20
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 claims description 12
- 229910052802 copper Inorganic materials 0.000 claims description 12
- 229910052737 gold Inorganic materials 0.000 claims description 12
- 229910052738 indium Inorganic materials 0.000 claims description 12
- 229910052742 iron Inorganic materials 0.000 claims description 12
- 229910052748 manganese Inorganic materials 0.000 claims description 12
- 229910052759 nickel Inorganic materials 0.000 claims description 12
- 229910052697 platinum Inorganic materials 0.000 claims description 12
- 229910052709 silver Inorganic materials 0.000 claims description 12
- 229910052719 titanium Inorganic materials 0.000 claims description 12
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 8
- 238000002834 transmittance Methods 0.000 claims description 7
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 claims description 6
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 claims description 6
- 229910052796 boron Inorganic materials 0.000 claims description 6
- 229910052698 phosphorus Inorganic materials 0.000 claims description 6
- 239000011574 phosphorus Substances 0.000 claims description 6
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- 238000010586 diagram Methods 0.000 description 9
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- 230000001965 increasing effect Effects 0.000 description 9
- 230000007547 defect Effects 0.000 description 7
- 230000008021 deposition Effects 0.000 description 7
- 230000005693 optoelectronics Effects 0.000 description 7
- 230000000694 effects Effects 0.000 description 5
- 238000005516 engineering process Methods 0.000 description 5
- 229910052751 metal Inorganic materials 0.000 description 5
- 239000002184 metal Substances 0.000 description 5
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- 229910000577 Silicon-germanium Inorganic materials 0.000 description 3
- LEVVHYCKPQWKOP-UHFFFAOYSA-N [Si].[Ge] Chemical compound [Si].[Ge] LEVVHYCKPQWKOP-UHFFFAOYSA-N 0.000 description 3
- 238000013459 approach Methods 0.000 description 3
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- 238000000634 powder X-ray diffraction Methods 0.000 description 2
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- 230000001052 transient effect Effects 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
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- 238000005229 chemical vapour deposition Methods 0.000 description 1
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- 150000001875 compounds Chemical class 0.000 description 1
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- 229910052732 germanium Inorganic materials 0.000 description 1
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 description 1
- 229910021389 graphene Inorganic materials 0.000 description 1
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- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/12—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed
- H01L29/22—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed including, apart from doping materials or other impurities, only AIIBVI compounds
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- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02518—Deposited layers
- H01L21/02521—Materials
- H01L21/02551—Group 12/16 materials
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- H01L31/0256—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by the material
- H01L31/0264—Inorganic materials
- H01L31/0296—Inorganic materials including, apart from doping material or other impurities, only AIIBVI compounds, e.g. CdS, ZnS, HgCdTe
- H01L31/02963—Inorganic materials including, apart from doping material or other impurities, only AIIBVI compounds, e.g. CdS, ZnS, HgCdTe characterised by the doping material
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- H01L31/04—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices
- H01L31/06—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by potential barriers
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Abstract
Description
E(t)=EZnO,bulk+F/t2
によって与えられ、ここで、F=6eV−nm2は量子閉じ込め定数であり、EZnO,bulkはZnOバルクのバンドギャップエネルギー(〜3.37eV)である。バースタイン−モス(Burstein−Moss)効果によれば、バンドギャップエネルギーは、nをキャリア密度とすると、n2/3の割合でキャリア密度と共に増加するはずである。
Claims (22)
- 基板と、
前記基板上の複数の二次元膜と、
を含む半導体デバイスであって、
前記二次元膜の光ゲインは、室温で測定した場合、約103を超える、半導体デバイス。 - 前記二次元膜は、II族またはVI族材料を含む、請求項1に記載の半導体デバイス。
- 前記二次元膜は、亜鉛および酸化物を含む、請求項2に記載の半導体デバイス。
- 前記二次元膜がZnO膜であり、前記ZnO膜の厚さが約100nm未満である、請求項3に記載の半導体デバイス。
- 前記ZnO膜の厚さが約5nm未満である、請求項4に記載の半導体デバイス
- さらに電極を含み、当該電極が、Fe、Co、Ni、Cu、Zn、Ag、Pt、Au、Al、In、Ti、Mn、Ge、Pb、またはCであり、前記二次元膜上に配置されている、請求項1に記載の半導体デバイス。
- 前記電極がAuであり、電極の厚さが約50nm〜2000nmである、請求項6に記載の半導体デバイス。
- さらに電極を含み、当該電極が、Fe、Co、Ni、Cu、Zn、Ag、Pt、Au、Al、In、Ti、Mn、Ge、Pb、またはCであり、前記基板上に配置されている、請求項1に記載の半導体デバイス。
- 前記電極の厚さは、約50nm〜2000nmである、請求項8に記載の半導体デバイス。
- 前記基板が、II族、III族、V族、またはVI族材料を含む、請求項8に記載の半導体デバイス。
- 前記基板は、シリコン、ホウ素、またはリンを含む、請求項10に記載の半導体デバイス。
- 基板と、
複数のドープされた二次元膜と、
を含む半導体デバイスであって
前記ドープされた二次元膜は、95%を超える可視波長域における透過率、約102cm2V-1s-1を超える移動度、および約10-5Ω−cm未満の抵抗率を有する、半導体デバイス。 - 前記ドープされた二次元膜は、III族またはV族材料によってドープされている、請求項12に記載の半導体デバイス。
- 前記ドープされた二次元膜は、ZnO膜を含む、請求項13に記載の半導体デバイス。
- 前記ドープされた二次元膜は、アルミニウムを含む、請求項12に記載の半導体デバイス。
- 半導体デバイス上に二次元膜を成長させる方法であって、
基板を用意することと、
温度を約50℃以上に制御することと、
IV族材料を供給すること、
前記IV族材料の供給を停止することと、
II族材料を供給することと、
前記II族材料の供給を停止することと、及び
前記基板上にII−VI族二次元膜を形成することと、
を含む方法。 - 前記II族材料の供給を停止した後に、圧力を約10-1〜10-4torrの範囲に設定することをさらに含む、請求項16に記載の方法。
- 前記II−VI族二次元膜を形成することは、前記基板上に約100nm未満の厚さを有する前記II−VI族二次元膜を形成することを含む、請求項16に記載の方法。
- 前記II−VI族二次元膜がZnO膜を含む、請求項16に記載の方法。
- 半導体デバイス上にドープされた二次元膜を成長させる方法であって、
基板を用意することと、
温度を約50℃以上に制御することと、
IV族材料を供給することと、
前記IV族材料の供給を停止することと、
II族材料を供給することと、
前記II族材料の供給を停止することと、
III族又はV族材料を供給することと、
前記III族又はV族材料の供給を停止することと、及び
前記III族またはV族ドープ材料を含むII−VI族二次元膜を前記基板上に形成することと、
を含む方法。 - 前記II族材料の供給を停止した後に、圧力を約10-1〜10-4torrの範囲に設定することをさらに含む、請求項20に記載の方法。
- 前記II−VI族二次元膜を形成することは、前記基板上に約100nm未満の厚さを有する前記II−VI族二次元膜を形成することを含む、請求項20に記載の方法。
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WO2021070594A1 (ja) * | 2019-10-10 | 2021-04-15 | ソニーセミコンダクタソリューションズ株式会社 | 電磁波検出装置、電磁波検出システム、及び電磁波検出方法 |
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US10475948B1 (en) | 2018-05-31 | 2019-11-12 | International Business Machines Corporation | Transparent ultraviolet photodetector |
CN111900091B (zh) * | 2019-05-05 | 2024-01-23 | 天津大学 | 一种二维纳米半导体材料掺杂方法 |
CN112310239B (zh) * | 2019-07-31 | 2022-03-11 | 哈尔滨工业大学 | 一种ALD结合银纳米线增强法制备高性能ZnO薄膜紫外探测器的方法 |
CN114512569B (zh) * | 2021-11-25 | 2023-06-02 | 北京师范大学 | 一种梯度掺杂的宽光谱自供能光电探测器 |
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US20180308941A1 (en) | 2018-10-25 |
TWI705577B (zh) | 2020-09-21 |
TW201907574A (zh) | 2019-02-16 |
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