JP2019029399A5 - - Google Patents

Claims (13)

A pixel region including a plurality of pixels, each of which has a photoelectric conversion unit and a charge storage region for accumulating charges generated by the photoelectric conversion unit.
Peripheral circuit area located outside the pixel area and
A first conductive type first impurity region located between the pixel region and the peripheral circuit region, a plurality of first contact plugs connected to the first impurity region, the peripheral circuit region and the first. A peripheral region having a second conductive type second impurity region located between the impurity region and a plurality of second contact plugs connected to the second impurity region.
An imaging device comprising. The first impurity region surrounds the pixel region in a plan view.
The imaging device according to claim 1. The second impurity region surrounds the pixel region in a plan view.
The imaging device according to claim 1. The peripheral area
A first conductive type third impurity region located between the peripheral circuit region and the second impurity region,
Includes a plurality of third contact plugs connected to the third impurity region.
The imaging device according to any one of claims 1 to 3. The third impurity region surrounds the pixel region in a plan view.
The imaging device according to claim 4. It is located deeper than the first impurity region, and further has a second conductive type fourth impurity region that straddles the pixel region and the peripheral region.
The second impurity region is electrically connected to the fourth impurity region.
The imaging device according to any one of claims 1 to 5. It is located deeper than the fourth impurity region, and further has a first conductive type fifth impurity region that straddles the pixel region and the peripheral region.
The third impurity region is electrically connected to the fifth impurity region.
The imaging apparatus according to claim 6, which cites claim 4 or 5. It further has a plurality of first conductive type sixth impurity regions that penetrate the fourth impurity region and electrically connect the fifth impurity region and the pixel region.
The imaging device according to claim 7. The peripheral region includes an element separation located between the pixel region and the plurality of first contact plugs in a plan view.
The imaging device according to any one of claims 1 to 8. The first conductive type is a P type.
The imaging device according to any one of claims 1 to 9. Further provided with metal wiring for supplying voltage to the peripheral region,
The metal wiring is located in the wiring layer above the peripheral circuit region.
The imaging device according to any one of claims 1 to 10. The metal wiring is located in the uppermost layer in the wiring layer.
The imaging device according to claim 11. The third impurity region contains a seventh impurity region having a higher impurity concentration than the surroundings.
The imaging device according to claim 4.