JP2019010692A - Hand for industrial robot and industrial robot - Google Patents

Abstract

To provide a hand for an industrial robot comprising a suction mechanism for vacuum sucking a lower face of a transport object, capable of suppressing deformation of a transport object when a transport object with relatively low rigidity is sucked by the suction mechanism, and surely sucking a transport object with relatively high rigidity with the suction mechanism.SOLUTION: A hand comprises: forks 18, 19; and a suction mechanism 22 for vacuum sucking a lower face of a transport object 2 mounted on upper face sides of the forks 18, 19. The suction mechanism 22 has a suction plate 40 for sucking the transport object 2 by contacting a lower face of the transport object 2, a fixing member 41 to whose upper end side, the suction plate 40 is fixed, and on which a suction hole 41d penetrating in a vertical direction is formed; and a floating mechanism 42 for supporting the fixing member 41 so as to be tilted freely to the forks 18, 19. The suction plate 40 is formed of a porous resin.SELECTED DRAWING: Figure 6

Description

  The present invention relates to an industrial robot hand for transporting a transport object. The present invention also relates to an industrial robot provided with this hand.

  Conventionally, an industrial robot that transports a glass substrate for a liquid crystal display is known (for example, see Patent Document 1). The industrial robot hand described in Patent Literature 1 includes two forks formed in a straight line. A plurality of suction pads for vacuum-sucking a glass substrate placed on the fork are attached to the front end side of the fork.

JP 2017-19061 A

  The inventor of the present application examines the structure of a hand of an industrial robot that can be used in, for example, a manufacturing system of an organic EL display formed in a film shape. Some production systems for film-like organic EL displays include, for example, a production system in which an organic EL display formed in the form of a film is transported as a single unit. There is also a manufacturing system in which an EL display is transported in a state of being attached to a glass substrate.

  When a film-like organic EL display being manufactured is transported as a single unit by the hand of an industrial robot described in Patent Document 1, the rigidity of the organic EL display being manufactured, which is the object to be transported, is low. There is a possibility that a portion of the EL display adsorbed by the adsorption pad may be greatly deformed and damaged. Moreover, when the film-like organic EL display in the middle of manufacture is conveyed in the state which was affixed on the glass substrate with the hand of the industrial robot of patent document 1, the rigidity of the organic EL display in the middle of manufacture which is a conveyance target object For example, if the organic EL display being manufactured is bent, the suction pad does not come into contact with the organic EL display, and the organic EL display may not be sucked by the suction pad.

  Therefore, an object of the present invention is to deform a conveyance object when a relatively low-conveyance object is adsorbed by the adsorption mechanism in an industrial robot hand having an adsorption mechanism that vacuum-sucks the lower surface of the object to be conveyed. Another object of the present invention is to provide a hand for an industrial robot that can restrain a conveyance object having a relatively high rigidity with a suction mechanism. Moreover, the subject of this invention is providing the industrial robot provided with this hand.

  In order to solve the above-described problems, an industrial robot hand according to the present invention is an industrial robot hand for transporting a transport object, and includes a plurality of forks on which a transport object is placed on an upper surface side, and an upper surface of the fork. A suction mechanism that vacuum-sucks the lower surface of the object to be transported placed on the side, the suction mechanism contacting the lower surface of the object to be transported and suctioning the object to be transported, and the suction plate on the upper end side A fixing member that is fixed and formed with a suction hole penetrating in the vertical direction, and a floating mechanism that supports the fixing member so as to be tiltable with respect to the fork, and the suction plate is made of porous resin It is characterized by being.

  In the hand of the industrial robot of the present invention, the suction plate that contacts the lower surface of the transport object and sucks the transport object is formed of a porous resin. Therefore, in the present invention, the size of the hole (that is, the pore) for attracting the conveyance object is small. Therefore, in this invention, it becomes possible to suppress a deformation | transformation of a conveyance target object when the conveyance target object with comparatively low rigidity is attracted | sucked by the adsorption | suction mechanism. In the present invention, since the fixing member to which the suction plate is fixed is supported by the floating mechanism so as to be tiltable with respect to the fork, even if a relatively rigid transport object is bent, It becomes possible to incline the suction plate according to the bending of the conveyance object and to reliably bring the suction plate into contact with the conveyance object. Therefore, in the present invention, it is possible to reliably suck a conveyance object having a relatively high rigidity by the suction mechanism.

  In order to solve the above problems, an industrial robot hand according to the present invention includes a plurality of forks on which an object to be transported is placed on an upper surface side of the hand of an industrial robot that transports an object to be transported, a fork A suction mechanism that vacuum-sucks the lower surface of the object to be transported placed on the upper surface side of the substrate, the suction mechanism contacting the lower surface of the object to be transported and sucking the object to be transported, and the suction plate at the upper end And a floating mechanism that supports the fixing member so as to be tiltable with respect to the fork. The suction plate includes a shower head A plurality of second suction holes arranged like a plurality of shower holes are formed.

  In the industrial robot hand of the present invention, a plurality of second suction holes arranged like the plurality of shower holes of the shower head are provided on the suction plate that contacts the lower surface of the transport target and sucks the transport target. Is formed. Therefore, in the present invention, it is possible to reduce the size of one second suction hole that sucks the conveyance target. Therefore, in this invention, it becomes possible to suppress a deformation | transformation of a conveyance target object when the conveyance target object with comparatively low rigidity is attracted | sucked by the adsorption | suction mechanism. In the present invention, since the fixing member to which the suction plate is fixed is supported by the floating mechanism so as to be tiltable with respect to the fork, even if a relatively rigid transport object is bent, It becomes possible to incline the suction plate according to the bending of the conveyance object and to reliably bring the suction plate into contact with the conveyance object. Therefore, in the present invention, it is possible to reliably suck a conveyance object having a relatively high rigidity by the suction mechanism.

  In the present invention, the floating mechanism includes a holding member that is fixed to the fork and holds the fixing member in a tiltable manner, an urging member that urges the fixing member upward with respect to the holding member, and the holding member and the holding mechanism. An annular rubber plate connecting the members, the outer peripheral side portion of the rubber plate is fixed to the holding member over the entire circumferential direction of the rubber plate, and the inner peripheral side portion of the rubber plate is the circumferential direction of the rubber plate The part surrounded by the fixing member, the holding member and the rubber plate is a sealed space to which the suction hole is connected, and the holding member has a third space connected to the sealed space. When the suction hole is formed and air is sucked by the suction mechanism connected to the third suction hole and the object to be transported is sucked to the suction plate, the sealed space becomes negative pressure, and the biasing force of the biasing member The suction plate and the fixing member move downward Preferred. If comprised in this way, if an adsorption | suction board will adsorb | suck a conveyance target object and an adsorption | suction board and a fixing member will move below, it will become difficult for an adsorption | suction board and a fixing member to wobble with respect to a fork. Therefore, it is possible to stabilize the state of the transport object mounted on the hand when transporting the transport object.

  In the present invention, the biasing member is a compression coil spring, and the upper end side portion of the compression coil spring is preferably disposed in the suction hole. If comprised in this way, compared with the case where the urging | biasing member is arrange | positioned on the outer side of a suction hole, it will become possible to miniaturize an adsorption | suction mechanism.

  In the present invention, for example, the holding member includes a first holding member and a second holding member arranged so as to sandwich the outer peripheral side portion of the rubber plate in the vertical direction, and the first holding member is arranged on the upper surface side of the fork. The second holding member is disposed inside a fork formed in a hollow shape, and the third suction hole is formed in the second holding member.

  The hand of the present invention can be used in an industrial robot including an arm that is pivotally connected to the distal end side and a main body that is pivotally connected to the proximal end side of the arm. In this industrial robot, it is possible to suppress the deformation of the conveyance object when the conveyance object having a relatively low rigidity is adsorbed by the adsorption mechanism, and the conveyance object having a relatively high rigidity can be suppressed by the adsorption mechanism. It can be reliably adsorbed.

  As described above, according to the present invention, it is possible to suppress the deformation of the conveyance object when the conveyance object having a relatively low rigidity is adsorbed by the suction mechanism, and the conveyance object having a relatively high rigidity can be used. Adsorption can be ensured by the adsorption mechanism.

It is a top view of the industrial robot concerning an embodiment of the invention. It is a side view of the industrial robot shown in FIG. It is a top view of the hand shown in FIG. It is a top view for demonstrating the structure inside the base of the hand shown in FIG. It is a top view for demonstrating operation | movement of the fork shown in FIG. It is sectional drawing of the adsorption | suction mechanism shown in FIG. 3, and a fork. It is sectional drawing for demonstrating the structure of the adsorption | suction board concerning other embodiment of this invention. It is a top view of the suction plate shown in FIG.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings.

(Overall configuration of industrial robot)
FIG. 1 is a plan view of an industrial robot 1 according to an embodiment of the present invention. FIG. 2 is a side view of the industrial robot 1 shown in FIG.

  The industrial robot 1 of this embodiment (hereinafter referred to as “robot 1”) is a horizontal articulated robot for transporting a predetermined transport object 2. The robot 1 is used by being incorporated into an organic EL display manufacturing system, for example. The transport object 2 of this embodiment is, for example, an organic EL display in the process of being formed in the form of a film. In an organic EL display manufacturing system, the organic EL display is transported alone or attached to a glass substrate. Or transported in a Moreover, the conveyance target object 2 is formed in the rectangular flat plate shape. The robot 1 according to this embodiment can transport a plurality of types of transport objects 2 having different sizes (see FIG. 3).

  The robot 1 includes two hands 3 on which the object 2 to be transported is mounted, two arms 4 to which the two hands 3 are connected to the distal end side, and a main body unit that supports the two arms 4. 5 and a base 6 that supports the main body 5 movably in the horizontal direction. The main body 5 constitutes a base that supports the base end side of the arm 4 and can move up and down, a support frame 8 that supports the arm support 7 so as to move up and down, and a lower end portion of the main body 5. 6, a base 9 that can move horizontally with respect to 6, and a revolving frame 10 that is fixed to the lower end of the support frame 8 and that can rotate with respect to the base 9.

  The arm 4 is composed of two arm parts, a first arm part 12 and a second arm part 13. The base end side of the first arm portion 12 is rotatably connected to the arm support 7. That is, the base end side of the arm 4 is rotatably connected to the main body 5. The proximal end side of the second arm portion 13 is rotatably connected to the distal end side of the first arm portion 12. The hand 3 is rotatably connected to the distal end side of the second arm portion 13. That is, the hand 3 is rotatably connected to the distal end side of the arm 4. The robot 1 includes two arm drive mechanisms that extend and contract each of the two arms 4.

  The support frame 8 holds the hand 3 and the arm 4 through the arm support 7 so as to be movable up and down. The support frame 8 includes a columnar first support frame 14 that holds the arm support 7 so as to be movable up and down, and a columnar second support frame 15 that holds the first support frame 14 so as to be movable up and down. The robot 1 moves the arm support 7 up and down relative to the first support frame 14, the lift mechanism that raises and lowers the first support frame 14 relative to the second support frame 15, and the first support frame 14 up and down. And a guide mechanism for guiding the arm support 7 in the vertical direction.

  The lower end of the second support frame 15 is fixed to the revolving frame 10. As described above, the revolving frame 10 is rotatable with respect to the base 9. The robot 1 includes a turning mechanism for turning the turning frame 10 with respect to the base 9. The base 9 can be moved horizontally with respect to the base 6 as described above. The robot 1 includes a horizontal movement mechanism that horizontally moves the base 9 with respect to the base 6.

(Hand structure)
FIG. 3 is a plan view of the hand 3 shown in FIG. FIG. 4 is a plan view for explaining the internal structure of the base 17 of the hand 3 shown in FIG. FIG. 5 is a plan view for explaining the operation of the forks 18 and 19 shown in FIG.

  The hand 3 includes a base portion 17 that is rotatably connected to the distal end side of the second arm portion 13, and a plurality of forks 18 and 19 on which the transport object 2 is placed on the upper surface side. The hand 3 of this embodiment includes a total of four forks 18, 19 including two forks 18 and two forks 19. In addition, the hand 3 is fixed to the upper surface side of the forks 18 and 19 and a plurality of mounting members 21 on which the transport target 2 is mounted, and a transport target 2 mounted on the mounting member 21 (that is, the transport target 2). And a plurality of suction mechanisms 22 for vacuum-sucking the lower surface of the conveyance object 2) placed on the upper surface side of the forks 18 and 19.

  The base portion 17 is formed in a hollow and substantially flat rectangular parallelepiped shape with a thin vertical thickness. The forks 18 and 19 are formed in a straight line. The four forks 18 and 19 protrude from the base portion 17 in the same horizontal direction. Further, the four forks 18 and 19 are arranged in parallel to each other. When the longitudinal direction of the forks 18 and 19 (X direction in FIG. 3 etc.) is “front-rear direction” and the Y direction in FIG. 3 perpendicular to the up-down direction and the front-rear direction is “left-right direction”, the two forks 18 Are arranged on the inner side in the left-right direction, and the two forks 19 are arranged on the outer side in the left-right direction.

  The forks 18 and 19 are formed of a resin containing carbon fibers. Further, the forks 18 and 19 are formed in a hollow shape and are formed in an elongated substantially rectangular parallelepiped shape. The upper and lower surfaces of the forks 18 and 19 are flat. Further, the left and right side surfaces of the forks 18 and 19 are planes orthogonal to the left-right direction. The thicknesses of the forks 18 and 19 in the vertical direction are gradually reduced from the base ends of the forks 18 and 19 toward the tip (see FIG. 2).

  The mounting member 21 is made of resin. The mounting member 21 is formed in a substantially rectangular flat plate shape. A plurality of mounting members 21 are fixed to the upper surfaces of the two forks 18 and the upper surfaces of the two forks 19, respectively. The plurality of placement members 21 are arranged in the entire range of the forks 18 and 19 in the range in which the conveyance object 2 can be placed in the front-rear direction. That is, as shown in FIG. 3, the plurality of placement members 21 are arranged in a row in the front-rear direction so as to be continuous over the entire range of the fork 18, 19 in which the conveyance object 2 can be placed.

  In the fork 18, the suction mechanism 22 is attached at two locations on the tip side of the fork 18. In the fork 19, the suction mechanism 22 is attached to a total of three locations, two locations on the tip side of the fork 19 and one location in the middle of the fork 19 in the front-rear direction. At the place where the suction mechanism 22 is attached, the interval between the placement members 21 in the front-rear direction is wide, and the suction mechanism 22 is disposed between the placement members 21 in the front-rear direction. The detailed configuration of the suction mechanism 22 will be described later.

  The base end portions of the forks 18 and 19 are disposed inside a base portion 17 formed in a hollow shape. As shown in FIG. 4, a fork pitch changing mechanism 26 that changes the pitch of the two forks 18 in the left-right direction and a fork pitch change that changes the pitch of the two forks 19 in the left-right direction are provided inside the base portion 17. A mechanism 27 is arranged. That is, the hand 3 includes fork pitch changing mechanisms 26 and 27.

  The fork pitch changing mechanism 26 includes a motor 29 as a drive source, a screw member 30 connected to the output shaft of the motor 29, a nut member (not shown) fixed to one of the two forks 18, A nut member (not shown) fixed to the other of the two forks 18. The fork pitch changing mechanism 27 is configured in the same manner as the fork pitch changing mechanism 26. That is, the fork pitch changing mechanism 27 includes a motor 34 configured similarly to the motor 29, a screw member 35 configured similar to the screw member 30, and a nut member fixed to one of the two forks 19. (Not shown) and a nut member (not shown) fixed to the other of the two forks 19 are provided.

  The screw members 30 and 35 are formed in an elongated rod shape. The screw members 30 and 35 are disposed so that the axial direction of the screw members 30 and 35 coincides with the left-right direction, and are rotatably supported by the base portion 17. The screw members 30, 35 include forward screw portions 30 a, 35 a that constitute one end side of the screw members 30, 35 and reverse screw portions 30 b, 35 b that constitute the other end side of the screw members 30, 35. The forward screw portions 30a and 35a are formed with forward screws, and the reverse screw portions 30b and 35b are formed with reverse screws.

  The nut member fixed to one fork 18 is engaged with the forward screw portion 30a, and the nut member fixed to the other fork 18 is engaged with the reverse screw portion 30b. Similarly, the nut member fixed to one fork 19 is engaged with the forward screw portion 35a, and the nut member fixed to the other fork 19 is engaged with the reverse screw portion 35b. The two forks 18 and the two forks 19 are guided in the left-right direction by two common guide rails 36. The guide rail 36 is fixed to the base portion 17 so that the longitudinal direction of the guide rail 36 coincides with the left-right direction. Guide blocks (not shown) that engage with the guide rails 36 are attached to the forks 18 and 19.

  In the fork pitch changing mechanism 26, when the motor 29 rotates and the screw member 30 rotates, one fork 18 and the other fork 18 move by the same amount in the left and right reverse directions, and the left and right direction of the two forks 18 The pitch of is changed. Similarly, in the fork pitch changing mechanism 27, when the motor 34 rotates and the screw member 35 rotates, one fork 19 and the other fork 19 move by the same amount in the left and right opposite directions, and the two forks 19 The left and right pitch is changed.

  In this embodiment, when the size of the transfer object 2 to be transferred by the robot 1 is determined, the fork pitch changing mechanism 26 has two fork pitch change mechanisms 26 as necessary before the transfer operation of transferring the transfer object 2 by the robot 1. The fork pitch changing mechanism 27 changes the left-right pitch of the two forks 19 as necessary. That is, the fork pitch changing mechanisms 26 and 27 do not change the left and right pitches of the forks 18 and 19 during the transfer operation of the transfer object 2 by the robot 1. The fork pitch changing mechanisms 26 and 27 change the left and right pitches of the forks 18 and 19 according to the size of the transport object 2 transported by the robot 1, for example, as shown in FIG.

(Configuration of adsorption mechanism)
6 is a cross-sectional view of the suction mechanism 22 and the forks 18 and 19 shown in FIG.

  On the top surfaces of the forks 18 and 19, through holes 18a and 19a in which the suction mechanism 22 is disposed are formed. The through holes 18a and 19a penetrate the top surfaces of the forks 18 and 19 in the vertical direction. The suction mechanism 22 includes a suction plate (suction pad) 40 that contacts the lower surface of the transport target object 2 and sucks the transport target object 2, and a fixing member 41 that fixes the suction plate 40 to the upper end side. Further, the suction mechanism 22 includes a floating mechanism 42 that supports the fixing member 41 so as to be tiltable with respect to the forks 18 and 19. That is, the suction mechanism 22 includes a floating mechanism 42 that supports the fixing member 41 so that the fixing member 41 can be inclined with respect to the forks 18 and 19.

  The fixing member 41 is made of resin. The fixing member 41 includes an upper end portion 41a that forms an upper end portion of the fixing member 41, a lower end portion 41b that forms a lower end portion of the fixing member 41, and an intermediate portion 41c that forms an intermediate portion of the fixing member 41 in the vertical direction. It is configured. The upper end portion 41a is formed in a substantially disc shape. The lower end 41b is formed in a substantially cylindrical shape. The intermediate portion 41c is formed in a substantially truncated cone shape whose outer diameter gradually increases toward the upper side.

  The upper end of the lower end portion 41b is connected to the lower end of the intermediate portion 41c, and the upper end portion 41a is connected to the upper end of the intermediate portion 41c. The outer diameter of the upper end 41a is larger than the outer diameter of the upper end of the intermediate part 41c. The outer diameter of the lower end part 41b is smaller than the outer diameter of the lower end of the intermediate part 41c. When viewed from the vertical direction, the center of the upper end portion 41a, the center of the intermediate portion 41c, and the center of the lower end portion 41b coincide.

  In the center of the fixing member 41, a suction hole 41d penetrating in the vertical direction is formed. On the upper surface of the upper end portion 41a, a circular concave portion 41e that is recessed downward is formed. When viewed from above and below, the center of the recess 41e is coincident with the center of the suction hole 41d. A circular recess 41f that is further depressed downward is formed at the center of the recess 41e. When viewed from above and below, the center of the recess 41f coincides with the center of the suction hole 41d. The upper end of the suction hole 41d is connected to the center of the recess 41f.

  The adsorption plate 40 is made of a porous resin. Further, the suction plate 40 is formed in a disc shape. The suction plate 40 is disposed in the recess 41e. The upper and lower surfaces of the suction plate 40 are flat. Further, the suction plate 40 is fixed to the recess 41e. Specifically, the lower surface of the suction plate 40 is in contact with the bottom surface of the recess 41e, and the lower surface of the suction plate 40 is fixed to the bottom surface of the recess 41e with an adhesive. The outer diameter of the suction plate 40 is substantially equal to the inner diameter of the recess 41e. The conveyance object 2 is placed on the upper surface of the suction plate 40.

  As described above, the floating mechanism 42 supports the fixing member 41 so as to be tiltable with respect to the forks 18 and 19. The floating mechanism 42 supports the fixing member 41 so as to be movable up and down with respect to the forks 18 and 19. The floating mechanism 42 is fixed to the forks 18 and 19 and holds the fixing member 41 in a tiltable manner, an annular rubber plate 44 connecting the fixing member 41 and the holding member 43, and the holding member 43. And a compression coil spring 45 as an urging member for urging the fixing member 41 upward. The holding member 43 includes a first holding member 48 disposed on the upper surface side of the forks 18 and 19 and a second holding member 49 disposed inside the forks 18 and 19 formed in a hollow shape. In this embodiment, the first holding member 48 and the second holding member 49 constitute the holding member 43. The first holding member 48 and the second holding member 49 are formed separately.

  The first holding member 48 is formed in a flat and substantially rectangular parallelepiped shape with a small thickness in the vertical direction. At the center of the first holding member 48, a through hole 48a penetrating in the vertical direction is formed. The inner peripheral surface of the through hole 48a is an inclined surface whose inner diameter gradually increases toward the upper side. On the upper surface of the first holding member 48, a circular recess 48b that is recessed downward is formed. When viewed from the top-bottom direction, the center of the recess 48b coincides with the center of the through hole 48a. The upper end of the through hole 48a is connected to the center of the recess 48b.

  A step is formed on the lower surface of the first holding member 48, and the outer peripheral side portion of the lower surface of the first holding member 48 is disposed above the inner peripheral side portion of the lower surface of the first holding member 48. . The outer peripheral side portion of the lower surface of the first holding member 48 is in contact with the upper surfaces of the forks 18 and 19. The first holding member 48 is fixed to the upper surfaces of the forks 18 and 19 from above. A part of the first holding member 48 is disposed in the through holes 18a and 19a.

  The second holding member 49 is formed in a substantially rectangular parallelepiped block shape. The second holding member 49 is smaller than the first holding member 48 in the left-right direction. The second holding member 49 is fixed to the upper surfaces of the forks 18 and 19 from below. On the upper surface of the second holding member 49, a circular concave portion 49 a that is greatly depressed downward is formed. When viewed from above and below, the center of the recess 49 a coincides with the center of the second holding member 49. A suction hole 49b connected to the center of the bottom surface of the recess 49a is formed in the lower end portion of the second holding member 49. The suction hole 49b of this embodiment is a third suction hole.

  The suction hole 49b is composed of a portion that is recessed downward from the center of the bottom surface of the concave portion 49a, and a portion that extends from the lower end of this portion to one side in the front-rear direction, and suction when viewed from the left-right direction. The shape of the hole 49b is an L shape. One end of the suction hole 49b is connected to the recess 49a, and a suction mechanism (not shown) such as a vacuum pump is connected to the other end of the suction hole 49b via a predetermined pipe.

  The rubber plate 44 is made of, for example, silicon rubber. The rubber plate 44 is formed in an annular shape. The lower end portion 41 b of the fixing member 41 is inserted through the inner peripheral side of the rubber plate 44. The outer peripheral side portion of the rubber plate 44 is fixed to the holding member 43 over the entire circumferential direction of the rubber plate 44. Specifically, the outer peripheral side portion of the rubber plate 44 is fixed to the holding member 43 by the lower surface of the first holding member 48 and the upper surface of the second holding member 49. The outer peripheral portion of the rubber plate 44 is sandwiched between the inner peripheral portion of the lower surface of the first holding member 48 and the upper surface of the second holding member 49. That is, the first holding member 48 and the second holding member 49 are arranged so as to sandwich the outer peripheral side portion of the rubber plate 44 in the vertical direction.

  An inner peripheral side portion of the rubber plate 44 is fixed to the fixing member 41 over the entire circumferential direction of the rubber plate 44. Specifically, the inner peripheral side portion of the rubber plate 44 is fixed to the fixing member 41 by the step surface between the lower end portion 41 b and the intermediate portion 41 c of the fixing member 41, the washer 50, and the retaining ring 51. Yes. The washer 50 is disposed below the step surface between the lower end portion 41 b and the intermediate portion 41 c, and the inner peripheral portion of the rubber plate 44 is sandwiched between the step surface and the upper surface of the washer 50. ing. The retaining ring 51 is attached to the lower end portion 41b so as to come into contact with the lower surface of the washer 50, and functions to prevent the washer 50 from coming off from the lower end portion 41b.

  The outer diameter of the lower end 41b of the fixing member 41 is smaller than the inner diameter of the recess 49a of the second holding member 49, and the lower end 41b is disposed in the recess 49a. Further, the intermediate portion 41 c of the fixing member 41 is disposed in the through hole 48 a of the first holding member 48. A gap is formed between the outer peripheral surface of the intermediate portion 41c and the inner peripheral surface of the through hole 48a.

  In a state where no external force is applied to the suction plate 40, the center of the suction hole 41d of the fixing member 41 and the center of the suction hole 49b of the second holding member 49 (specifically, the suction hole when viewed from above and below). 49b and the center of the portion recessed downward from the bottom surface of the recess 49a. The upper end portion of the compression coil spring 45 is disposed in the suction hole 41d, and the lower end portion of the compression coil spring 45 is disposed in the suction hole 49b. The upper end of the compression coil spring 45 is in contact with the step surface formed on the upper end side of the suction hole 41d, and the lower end of the compression coil spring 45 is in contact with the bottom surface of the suction hole 49b.

  A portion surrounded by the fixing member 41, the holding member 43, and the rubber plate 44 is a sealed space S to which the suction holes 41d and 49b are connected. Specifically, a portion surrounded by the lower end portion 41 b of the fixing member 41, the second holding member 49, and the rubber plate 44 is a sealed space S. That is, the space inside the concave portion 49a and below the rubber plate 44 and outside the lower end portion 41b is a sealed space S.

  In this embodiment, when air is sucked by the suction mechanism connected to the suction hole 49b with the transport target 2 placed on the suction plate 40, the suction hole 49b, the sealed space S, the suction hole 41d, and the suction The conveyance object 2 is sucked through the plate 40 and the conveyance object 2 is adsorbed to the suction plate 40. Further, when the conveyance object 2 is adsorbed to the adsorption plate 40, the sealed space S becomes negative pressure. When the sealed space S becomes negative pressure, the suction plate 40 and the fixing member 41 move downward against the urging force of the compression coil spring 45 as shown in FIG. At this time, the rubber plate 44 is deformed.

(Main effects of this form)
As described above, in the present embodiment, the suction plate 40 that contacts the lower surface of the transport target object 2 and sucks the transport target object 2 is formed of a porous resin. Therefore, in this embodiment, the size of the hole (that is, the pore) that sucks the conveyance object 2 is small. Therefore, in this embodiment, it is possible to suppress the deformation of the transport object 2 when the transport object 2 having a low rigidity is sucked by the suction mechanism 22 like a single organic EL display formed in the form of a film. It becomes possible.

  In this embodiment, the fixing member 41 to which the suction plate 40 is fixed is supported by the floating mechanism 42 so as to be tiltable with respect to the forks 18 and 19. Therefore, in this embodiment, even if the highly rigid conveyance object 2 is bent like a film-like organic EL display that is attached to the glass substrate and is being manufactured, the suction plate is responsive to the bending of the conveyance object 2. The upper surface of the suction plate 40 can be reliably brought into contact with the lower surface of the conveyance object 2 by tilting 40. Therefore, in this embodiment, it is possible to reliably suck the transport object 2 having high rigidity by the suction mechanism 22.

  In this embodiment, when the conveyance object 2 is attracted to the suction plate 40, the sealed space S becomes negative pressure, and the suction plate 40 and the fixing member 41 move downward against the biasing force of the compression coil spring 45. . Therefore, in this embodiment, after the suction plate 40 sucks the conveyance object 2 and the suction plate 40 and the fixing member 41 move downward, the suction plate 40 and the fixing member 41 are staggered with respect to the forks 18 and 19. It becomes difficult. Therefore, in this embodiment, it is possible to stabilize the state of the conveyance object 2 mounted on the hand 3 when the conveyance object 2 is conveyed.

(Modification of suction plate)
FIG. 7 is a cross-sectional view for explaining the configuration of a suction plate 40 according to another embodiment of the present invention. FIG. 8 is a plan view of the suction plate 40 shown in FIG.

  In the embodiment described above, the suction plate 40 may be formed of a resin other than a porous resin. For example, the adsorption plate 40 may be formed of polyetheretherketone. In this case, as shown in FIGS. 7 and 8, the suction plate 40 is formed with a plurality of suction holes 40a as a plurality of second suction holes arranged like a plurality of shower holes of the shower head. Has been. The plurality of suction holes 40a penetrate the suction plate 40 in the vertical direction. On the lower surface of the suction plate 40, a suction recess 40 b connected to the lower ends of the plurality of suction holes 40 a is formed so as to be recessed upward. In FIG. 7, the same code | symbol is attached | subjected about the structure which is common in the form mentioned above.

  In the example shown in FIG. 7, the fixing member 41 includes a first fixing member 58 to which the suction plate 40 is fixed, and a second fixing member 59 that forms the central portion of the fixing member 41. The first fixing member 58 and the second fixing member 59 are formed separately. When the first fixing member 58 and the second fixing member 59 are integrated, the first fixing member 58 and the second fixing member 59 have substantially the same shape as the fixing member 41 of the above-described form. Become. A suction hole 41 d is formed at the center of the second fixing member 59. The suction plate 40 is fixed to the first fixing member 58 with screws (not shown).

  A second fixing member 59 is inserted through the inner peripheral side of the rubber plate 44. The inner peripheral side portion of the rubber plate 44 is a fixing member over the entire region in the circumferential direction of the rubber plate 44 by a flange 59 a formed at the lower end of the second fixing member 59, the first fixing member 58 and the retaining ring 51. 41 is fixed. The flange portion 59a is disposed below the lower surface of the first fixing member 58, and the inner peripheral side portion of the rubber plate 44 is sandwiched between the upper surface of the flange portion 59a and the lower surface of the first fixing member 58. ing. The retaining ring 51 is attached to the upper end portion of the second fixing member 59 and functions to prevent the second fixing member 59 from coming off from the first fixing member 58.

  Also in the modified examples shown in FIGS. 7 and 8, when the conveyance object 2 is adsorbed to the adsorption plate 40, the sealed space S becomes negative pressure, and the compression coil spring 45 is attached as shown in FIG. The suction plate 40 and the fixing member 41 move downward against the force. Also in this modification, the same effect as the above-described embodiment can be obtained. For example, since a plurality of suction holes 40 a arranged like a plurality of shower holes in the shower head are formed in the suction plate 40, the size of one suction hole 40 a that sucks the conveyance object 2 is reduced. It becomes possible. Therefore, it is possible to suppress deformation of the transport object 2 when the transport object 2 having relatively low rigidity is sucked by the suction mechanism 22.

(Other embodiments)
The above-described embodiment is an example of a preferred embodiment of the present invention, but is not limited to this, and various modifications can be made without departing from the scope of the present invention.

  In the embodiment described above, the suction plate 40 may be formed in a polygonal flat plate shape such as a quadrangle, or may be formed in an elliptical or oval flat plate shape. In the embodiment described above, the biasing member that biases the fixing member 41 upward with respect to the holding member 43 may be a spring member such as a leaf spring. However, as in the above-described embodiment, the biasing member that biases the fixing member 41 upward with respect to the holding member 43 is the compression coil spring 45, and the upper end side portion of the compression coil spring 45 is disposed in the suction hole 41d. In the case where the lower end side portion of the compression coil spring 45 is disposed in the suction hole 49b, the suction mechanism 22 is configured as compared with the case where the biasing member is disposed outside the suction holes 41d and 49b. It becomes possible to reduce the size.

  In the embodiment described above, the pitch of the two forks 18 in the left-right direction may be fixed, or the pitch of the two forks 19 in the left-right direction may be fixed. In the embodiment described above, the number of forks provided in the hand 3 may be two or three, or may be five or more. In this case, the pitches of the plurality of forks in the left-right direction may be changeable or may be fixed.

  In the embodiment described above, the robot 1 is a horizontal articulated robot, but the robot to which the present invention is applied may be an industrial robot other than the horizontal articulated robot. For example, the robot to which the present invention is applied may be an industrial robot disclosed in Patent Document 1 described above.

1 Robot (industrial robot)
2 Transport object 3 Hand 4 Arm 5 Main body 18, 19 Fork 22 Suction mechanism 40 Suction plate 40a Suction hole (second suction hole)
41 Fixing member 41d Suction hole 42 Floating mechanism 43 Holding member 44 Rubber plate 45 Compression coil spring (biasing member)
48 1st holding member 49 2nd holding member 49b Suction hole (3rd suction hole)
S sealed space

Claims (6)

In industrial robot hands that transport objects to be transported,
A plurality of forks on which the transport object is placed on the upper surface side, and a suction mechanism that vacuum-sucks the lower surface of the transport object placed on the upper surface side of the fork,
The suction mechanism includes a suction plate that contacts the lower surface of the transport object and sucks the transport object, and a fixing member that is formed with a suction hole that is fixed to the upper end side and penetrates in the vertical direction. And a floating mechanism that supports the fixing member so as to be tiltable with respect to the fork,
The suction plate is made of a porous resin. In industrial robot hands that transport objects to be transported,
A plurality of forks on which the transport object is placed on the upper surface side, and a suction mechanism that vacuum-sucks the lower surface of the transport object placed on the upper surface side of the fork,
The suction mechanism includes a suction plate that contacts the lower surface of the transport object and sucks the transport object, and a fixing member that is formed with a suction hole that is fixed to the upper end side and penetrates in the vertical direction. And a floating mechanism that supports the fixing member so as to be tiltable with respect to the fork,
The hand, wherein the suction plate is formed with a plurality of second suction holes arranged like a plurality of shower holes of a shower head. The floating mechanism includes a holding member that is fixed to the fork and holds the fixing member in a tiltable manner, an urging member that urges the fixing member upward with respect to the holding member, and the fixing member And an annular rubber plate connecting the holding member,
The outer peripheral side portion of the rubber plate is fixed to the holding member over the entire circumferential direction of the rubber plate,
The inner peripheral side portion of the rubber plate is fixed to the fixing member over the entire circumferential direction of the rubber plate,
The portion surrounded by the fixing member, the holding member, and the rubber plate is a sealed space to which the suction hole is connected,
The holding member has a third suction hole connected to the sealed space,
When air is sucked by the suction mechanism connected to the third suction hole and the object to be transported is sucked by the suction plate, the sealed space becomes negative pressure and resists the biasing force of the biasing member. The hand according to claim 1, wherein the suction plate and the fixing member move downward. The biasing member is a compression coil spring;
The hand according to claim 3, wherein an upper end side portion of the compression coil spring is disposed in the suction hole. The holding member includes a first holding member and a second holding member that are arranged so as to sandwich the outer peripheral side portion of the rubber plate in the vertical direction,
The first holding member is disposed on the upper surface side of the fork,
The second holding member is disposed inside the fork formed in a hollow shape,
The hand according to claim 3 or 4, wherein the third suction hole is formed in the second holding member.   A hand according to any one of claims 1 to 5, an arm to which the hand is rotatably connected to a distal end side, and a main body portion to which a proximal end side of the arm is rotatably connected. A featured industrial robot.

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