JP2018522281A - 特にマイクロリソグラフィ投影露光装置用のミラー - Google Patents
特にマイクロリソグラフィ投影露光装置用のミラー Download PDFInfo
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- 239000011651 chromium Substances 0.000 claims description 6
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- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 5
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- GKOZUEZYRPOHIO-UHFFFAOYSA-N iridium atom Chemical compound [Ir] GKOZUEZYRPOHIO-UHFFFAOYSA-N 0.000 claims description 2
- 229910052762 osmium Inorganic materials 0.000 claims description 2
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- GNKTZDSRQHMHLZ-UHFFFAOYSA-N [Si].[Si].[Si].[Ti].[Ti].[Ti].[Ti].[Ti] Chemical compound [Si].[Si].[Si].[Ti].[Ti].[Ti].[Ti].[Ti] GNKTZDSRQHMHLZ-UHFFFAOYSA-N 0.000 description 1
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Classifications
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
- G03F7/7095—Materials, e.g. materials for housing, stage or other support having particular properties, e.g. weight, strength, conductivity, thermal expansion coefficient
- G03F7/70958—Optical materials or coatings, e.g. with particular transmittance, reflectance or anti-reflection properties
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70058—Mask illumination systems
- G03F7/7015—Details of optical elements
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70058—Mask illumination systems
- G03F7/702—Reflective illumination, i.e. reflective optical elements other than folding mirrors, e.g. extreme ultraviolet [EUV] illumination systems
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70216—Mask projection systems
- G03F7/70316—Details of optical elements, e.g. of Bragg reflectors, extreme ultraviolet [EUV] multilayer or bilayer mirrors or diffractive optical elements
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
- G03F7/70983—Optical system protection, e.g. pellicles or removable covers for protection of mask
-
- G—PHYSICS
- G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
- G21K—TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
- G21K1/00—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating
- G21K1/06—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating using diffraction, refraction or reflection, e.g. monochromators
- G21K1/062—Devices having a multilayer structure
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- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Health & Medical Sciences (AREA)
- Environmental & Geological Engineering (AREA)
- Epidemiology (AREA)
- Public Health (AREA)
- Spectroscopy & Molecular Physics (AREA)
- General Engineering & Computer Science (AREA)
- High Energy & Nuclear Physics (AREA)
- Optical Elements Other Than Lenses (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
Abstract
【選択図】図2
Description
‐ミラー基板と、
‐ミラーが、前記光学有効面に各面法線に対して65°の入射角度で入射する所定の動作波長を有する電磁放射に対して50%以上の反射率を有するように構成した反射層と、
−ミラー基板と反射層との間に配置した基板保護層とを備え、
基板反射層のEUV放射に対する透過率が0.1%未満である。
Claims (17)
- 光学有効面を有するミラーであって、
−ミラー基板(205、305)と、
−所定の動作波長を有してそれぞれの面法線に対して少なくとも65°の入射角で前記光学有効面(200a、300a)に入射する電磁放射に対する前記ミラーの反射率が少なくとも50%となるように構成した反射層(220、320)と、
−前記ミラー基板(205、305)と前記反射層(220、320)との間に配置した基板保護層(210、310)とを備え、
前記基板保護層(210、310)のEUV放射に対する透過率が0.1%未満である、
特にマイクロリソグラフィ投影露光装置用のミラー。 - 前記基板保護層(210、310)のEUV放射に対する透過率は、0.01%未満であり、特に0.001%未満である、請求項1に記載のミラー。
- 前記基板保護層(210、310)は、第1の材料からなる吸収層を少なくとも1つ備える、請求項1又は2に記載のミラー。
- 前記第1の材料は、鉄(Fe)、ニッケル(Ni)、コバルト(Co)、銅(Cu)、銀(Ag)、金(Au)、白金(Pt)、ゲルマニウム(Ge)、タングステン(Wo)、クロム(Cr)、錫(Sn)、亜鉛(Zn)、インジウム(In)、テルル(Te)、イリジウム(Ir)、パラジウム(Pd)、オスミウム(Os)、タンタル(Ta)、及びそれらの合金を含む群から選択される、請求項3に記載のミラー。
- 前記基板保護層(210)は、さらに、第2の材料からなる応力補償層(211)を少なくとも1つ備える、請求項1〜4のいずれか一項に記載のミラー。
- 前記第2の材料は、モリブデン(Mo)、ルテニウム(Ru)、ホウ素(B)、炭化ホウ素(B4C)、炭素(C)、及びケイ素(Si)を含む群から選択される、請求項5に記載のミラー。
- 前記基板保護層(210)は、複数の個々の層からなる多層系を有する、請求項1〜6のいずれか一項に記載のミラー。
- これらの個々の層は最大厚さが100nm未満であり、特に50nm未満であり、より特には25nm未満である、請求項7に記載のミラー。
- 前記多層系は、交互に連続した第1の材料からなる第1の層と第1の材料とは異なる第2の材料からなる第2の層を有する、請求項7又は8に記載のミラー。
- 前記多層系は、周期長が6nm〜8nmの範囲内であり、特に6.5nm〜7.5nmの範囲内である、請求項9に記載のミラー。
- ミラーが、多層系により生成された定在波場の最大値を超えて有する全層厚は、±10%の最大偏差を除いて、前記多層系の周期長の整数倍に相当する、請求項9又は10に記載のミラー。
- 前記第1の層は吸収層(212)であり、前記第2の層は層応力補償層(211)である、請求項9〜11のいずれか一項に記載のミラー。
- ミラー基板(305)と反射層(320)との間に、基板保護層(310)としての吸収層を1つだけ配置した、請求項1〜4のいずれか一項に記載のミラー。
- 前記動作波長は30nm未満であり、特に10nm〜15nmの範囲内にある、請求項1〜13のいずれか一項に記載のミラー。
- マイクロリソグラフィ投影露光装置の光学系であって、前記光学系は、請求項1〜14のいずれか一項に記載のミラーを少なくとも有する、光学系。
- 前記ミラーは、電磁放射が前記ミラーで反射される際の光学系の動作中に生じる反射角が、それぞれの面法線に対して少なくとも50°となり、特に少なくとも65°となるように前記光学系に配置される、請求項15に記載の光学系。
- 照明デバイス及び投影レンズを有するマイクロリソグラフィ投影露光装置において、前記照明デバイスは、投影露光装置の動作中、投影レンズの対物面に位置するマスクを照光し、投影レンズは前記マスク上の構造を投影レンズの像面に位置する感光層上に結像し、前記投影露光装置は請求項1〜14のいずれか一項に記載のミラーを少なくとも有する、マイクロリソグラフィ投影露光装置。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
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DE102015213253.6 | 2015-07-15 | ||
DE102015213253.6A DE102015213253A1 (de) | 2015-07-15 | 2015-07-15 | Spiegel, insbesondere für eine mikrolithographische Projektionsbelichtungsanlage |
PCT/EP2016/066178 WO2017009185A1 (de) | 2015-07-15 | 2016-07-07 | Spiegel, insbesondere für eine mikrolithographische projektionsbelichtungsanlage |
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JP2018522281A true JP2018522281A (ja) | 2018-08-09 |
JP2018522281A5 JP2018522281A5 (ja) | 2019-08-15 |
JP6814195B2 JP6814195B2 (ja) | 2021-01-13 |
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US (1) | US10331048B2 (ja) |
EP (1) | EP3323022A1 (ja) |
JP (1) | JP6814195B2 (ja) |
DE (1) | DE102015213253A1 (ja) |
WO (1) | WO2017009185A1 (ja) |
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DE102017200667A1 (de) | 2017-01-17 | 2018-07-19 | Carl Zeiss Smt Gmbh | Spiegel, insbesondere für eine mikrolithographische Projektionsbelichtungsanlage oder ein Inspektionssystem |
EP3454119B1 (en) | 2017-09-09 | 2023-12-27 | IMEC vzw | Euv absorbing alloys |
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JP2007329368A (ja) * | 2006-06-09 | 2007-12-20 | Canon Inc | 多層膜ミラー、評価方法、露光装置及びデバイス製造方法 |
WO2008065821A1 (fr) * | 2006-11-27 | 2008-06-05 | Nikon Corporation | Elément optique, unité d'exposition associée et procédé de production du dispositif |
JP2013513955A (ja) * | 2009-12-15 | 2013-04-22 | カール・ツァイス・エスエムティー・ゲーエムベーハー | Euv波長域用のミラー、当該ミラー用の基板、当該ミラー又は当該基板を備えるマイクロリソグラフィ用の投影対物レンズ、及び当該投影対物レンズを備えるマイクロリソグラフィ用の投影露光装置 |
JP2014514741A (ja) * | 2011-03-22 | 2014-06-19 | カール・ツァイス・エスエムティー・ゲーエムベーハー | 偏向ミラー及び当該偏向ミラーを備えたマイクロリソグラフィ用の投影露光装置 |
WO2015018560A2 (de) * | 2013-08-07 | 2015-02-12 | Carl Zeiss Smt Gmbh | Spiegel, insbesondere für eine mikrolithographische projektionsbelichtungsanlage |
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US5086443A (en) * | 1990-08-03 | 1992-02-04 | The United States Of America As Represented By The United States Department Of Energy | Background-reducing x-ray multilayer mirror |
EP1333323A3 (en) * | 2002-02-01 | 2004-10-06 | Nikon Corporation | Self-cleaning reflective optical elements for use in x-ray optical systems, and optical systems and microlithography systems comprising same |
WO2008145364A2 (de) * | 2007-05-31 | 2008-12-04 | Carl Zeiss Smt Ag | Verfahren zur herstellung eines optischen elementes mit hilfe von abformung, optisches element hergestellt nach diesem verfahren, kollektor und beleuchtungssystem |
NL2003299A (en) * | 2008-08-28 | 2010-03-11 | Asml Netherlands Bv | Spectral purity filter and lithographic apparatus. |
DE102009032779A1 (de) | 2009-07-10 | 2011-01-13 | Carl Zeiss Smt Ag | Spiegel für den EUV-Wellenlängenbereich, Projektionsobjektiv für die Mikrolithographie mit einem solchen Spiegel und Projektionsbelichtungsanlage für die Mikrolithographie mit einem solchen Projektionsobjektiv |
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2015
- 2015-07-15 DE DE102015213253.6A patent/DE102015213253A1/de active Pending
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2016
- 2016-07-07 WO PCT/EP2016/066178 patent/WO2017009185A1/de unknown
- 2016-07-07 JP JP2018501301A patent/JP6814195B2/ja active Active
- 2016-07-07 EP EP16741264.2A patent/EP3323022A1/de active Pending
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2018
- 2018-01-15 US US15/871,926 patent/US10331048B2/en active Active
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Also Published As
Publication number | Publication date |
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EP3323022A1 (de) | 2018-05-23 |
DE102015213253A1 (de) | 2017-01-19 |
US20180217507A1 (en) | 2018-08-02 |
JP6814195B2 (ja) | 2021-01-13 |
US10331048B2 (en) | 2019-06-25 |
WO2017009185A1 (de) | 2017-01-19 |
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