JP2018519425A - バッチ処理用注入器及びその使用方法 - Google Patents
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- 229910052710 silicon Inorganic materials 0.000 description 4
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Abstract
【選択図】図6
Description
Claims (15)
- 注入器ユニットであって、
前記注入器ユニットの長さに沿って延在する前端の反応性ガスポート、
前記注入器ユニットの前記長さに沿って延在する後端の反応性ガスポート、及び、
前記前端の反応性ガスポートと前記後端の反応性ガスポートの周りに境界を形成し、且つ、前記前端の反応性ガスポートと前記後端の反応性ガスポートを包囲する、混合真空ポートを備える、注入器ユニット。 - 前記混合真空ポートは、前記前端の反応性ガスポートと前記後端の反応性ガスポートからのガスが、前記境界から外に出て拡散することを妨げると同時に、前記境界の範囲内で混合することを可能にする、請求項1に記載の注入器ユニット。
- 前記注入器ユニットが、前記注入器ユニットの幅を画定する前縁と後縁、及び、前記前縁と前記後縁を連結し且つ前記注入器ユニットの長さを画定する、内側周縁端部と外側周縁端部を有する、請求項1に記載の注入器ユニット。
- 前記前縁と前記後縁が約60度から約120度までの範囲内の角度を形成するように、前記注入器ユニットが円の一部分を形成する、請求項3に記載の注入器ユニット。
- 前記混合真空ポートが、形状において前記注入器ユニットと共形である、請求項1に記載の注入器ユニット。
- 前記前端の反応性ガスポート又は前記後端の反応性ガスポートのうちの1以上に連結された、少なくとも1つの遠隔プラズマ源を更に備える、請求項1に記載の注入器ユニット。
- 前記前端の反応性ガスポートに連結された前端の遠隔プラズマ源と、前記後端の反応性ガスポートに連結された後端の遠隔プラズマ源と、を更に備える、請求項1に記載の注入器ユニット。
- 前記混合真空ポートの一側部に隣接するパージガスポートを更に備える、請求項1に記載の注入器ユニット。
- 前記混合真空ポートの前記境界の範囲内で、前記前端の反応性ガスポートと前記後端の反応性ガスポートとの間に、少なくとも1つの中間ガスポートを更に備える、請求項1に記載の注入器ユニット。
- ガス分配アセンブリであって、
少なくとも1つの第1の注入器であって、その長さを画定する内側周縁端部と外側周縁端部を有し、各第1の注入器ユニットが、
前記注入器ユニットの前記長さに沿って延在する第1の反応性ガスポート、
前記第1の反応性ガスポートを取り囲む第1の真空ポート、
前記注入器ユニットの前記長さに沿って延在する、前記第1の真空ポートの一側部に隣接する第1のパージガスポート、
前記注入器ユニットの前記長さに沿って延在する第2の反応性ガスポート、及び
前記第2の反応性ガスポートを取り囲む第2の真空ポートを備えた、少なくとも1つの第1の注入器と、
請求項1から9のいずれか一項に記載の少なくとも1つの第2の注入器ユニットを備える、ガス分配アセンブリ。 - 前記第1の注入器ユニットと前記第2の注入器ユニットの各々の間に、パージガスポートを更に備える、請求項10に記載のガス分配アセンブリ。
- 前記ガス分配アセンブリの面に隣接して回転する基板が、順番に、真空流れ、前記第1の反応性ガスポートからの第1の反応性ガス、真空流れ、パージガス、真空流れ、前記第2の反応性ガスポートからの第2の反応性ガス、真空流れ、パージガス、真空流れ、前記前端の反応性ガスポートからの前端の反応性ガス、前記後端の反応性ガスポートからの後端の反応性ガス、及び真空流れに晒されるように、交互の構成で配置された、2つの第1の注入器ユニットと2つの第2の注入器ユニットが存在する、請求項11に記載のガス分配アセンブリ。
- 処理チャンバであって、
内側周縁端部と外側周縁端部を有する円形のガス分配アセンブリを備え、前記ガス分配アセンブリが、請求項10に記載の第1の注入器ユニットと第2の注入器ユニットが交互になるように配置された、2つの前記第1の注入器ユニットと2つの前記第2の注入器ユニットを備え、各第1の注入器ユニットが、
前記第1の注入器ユニットの長さに沿って延在する第1の反応性ガスポート、
前記第1の反応性ガスポートを取り囲む第1の真空ポート、
前記第1の真空ポートの一側部に隣接する第1のパージガスポート、
前記第1の注入器ユニットの長さに沿って延在する第2の反応性ガスポート、及び
前記第2の反応性ガスポートを取り囲む第2の真空ポートを備え、
前記処理チャンバが、更に、
前記円形のガス分配アセンブリに面する頂面を有するサセプタアセンブリであって、前記頂面が内部に複数の凹部を有し、各凹部が処理中に基板を支持するようにサイズ決定された、サセプタアセンブリを備える、処理チャンバ。 - 前記前端の反応性ガスポートに連通する前端の遠隔プラズマ源と、前記後端の反応性ガスポートに連通する後端の遠隔プラズマ源と、を更に備える、請求項13に記載の処理チャンバ。
- 基板表面を有する基板を、複数の注入器ユニットを含むガス分配アセンブリを備えた処理チャンバの中へ配置すること、
前記基板表面の少なくとも一部分を、第1の真空ポートによって取り囲まれた第1の反応性ガスポートからの第1の反応性ガスに晒すこと、
ガスカーテンを通して前記基板表面を横方向に移動させること、
前記基板表面の少なくとも一部分を、第2の真空ポートによって取り囲まれた第2の反応性ガスポートからの第2の反応性ガスに晒すこと、
ガスカーテンを通して前記基板表面を横方向に移動させること、
前記基板表面の少なくとも一部分を、混合真空ポート内に包囲された混合処理領域であって、前端の反応性ガスポートからの前端の反応性ガスと後端の反応性ガスポートからの後端の反応性ガスを含む、混合処理領域に晒すこと、及び
ガスカーテンを通して前記基板表面を横方向に移動させることを含む、処理方法。
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US20030192645A1 (en) * | 2002-04-16 | 2003-10-16 | Applied Materials, Inc. | Method and apparatus for creating circumferential process gas flow in a semiconductor wafer plasma reactor chamber |
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WO2015080900A1 (en) * | 2013-11-26 | 2015-06-04 | Applied Materials, Inc. | Tilted plate for batch processing and methods of use |
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US20160369398A1 (en) | 2016-12-22 |
US11530480B2 (en) | 2022-12-20 |
CN107743529B (zh) | 2020-08-21 |
US11261525B2 (en) | 2022-03-01 |
TWI723997B (zh) | 2021-04-11 |
WO2016205510A1 (en) | 2016-12-22 |
CN107743529A (zh) | 2018-02-27 |
KR102462467B1 (ko) | 2022-11-01 |
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US20220162748A1 (en) | 2022-05-26 |
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