JP2018512769A - 音響窓層を備えるｃｍｕｔアレイ - Google Patents

音響窓層を備えるｃｍｕｔアレイ Download PDF

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Publication number
JP2018512769A
JP2018512769A JP2017545716A JP2017545716A JP2018512769A JP 2018512769 A JP2018512769 A JP 2018512769A JP 2017545716 A JP2017545716 A JP 2017545716A JP 2017545716 A JP2017545716 A JP 2017545716A JP 2018512769 A JP2018512769 A JP 2018512769A
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JP
Japan
Prior art keywords
layer
cmut
cell
acoustic
ultrasonic array
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Pending
Application number
JP2017545716A
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English (en)
Japanese (ja)
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JP2018512769A5 (enExample
Inventor
ルカス ヨハネス アンナ マリア ベッカース
ルカス ヨハネス アンナ マリア ベッカース
フランシスカス ヨハネス ゲラルドゥス ハッケンス
フランシスカス ヨハネス ゲラルドゥス ハッケンス
ペーター ダークセン
ペーター ダークセン
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Koninklijke Philips NV
Original Assignee
Koninklijke Philips NV
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Filing date
Publication date
Application filed by Koninklijke Philips NV filed Critical Koninklijke Philips NV
Publication of JP2018512769A publication Critical patent/JP2018512769A/ja
Publication of JP2018512769A5 publication Critical patent/JP2018512769A5/ja
Pending legal-status Critical Current

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/06—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/0292—Electrostatic transducers, e.g. electret-type
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/06—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
    • B06B1/0644—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using a single piezoelectric element
    • B06B1/0662—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using a single piezoelectric element with an electrode on the sensitive surface
    • B06B1/067—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using a single piezoelectric element with an electrode on the sensitive surface which is used as, or combined with, an impedance matching layer
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B7/00—Layered products characterised by the relation between layers; Layered products characterised by the relative orientation of features between layers, or by the relative values of a measurable parameter between layers, i.e. products comprising layers having different physical, chemical or physicochemical properties; Layered products characterised by the interconnection of layers
    • B32B7/04—Interconnection of layers
    • B32B7/12—Interconnection of layers using interposed adhesives or interposed materials with bonding properties
    • G—PHYSICS
    • G10—MUSICAL INSTRUMENTS; ACOUSTICS
    • G10K—SOUND-PRODUCING DEVICES; METHODS OR DEVICES FOR PROTECTING AGAINST, OR FOR DAMPING, NOISE OR OTHER ACOUSTIC WAVES IN GENERAL; ACOUSTICS NOT OTHERWISE PROVIDED FOR
    • G10K11/00—Methods or devices for transmitting, conducting or directing sound in general; Methods or devices for protecting against, or for damping, noise or other acoustic waves in general
    • G10K11/02—Mechanical acoustic impedances; Impedance matching, e.g. by horns; Acoustic resonators
    • G—PHYSICS
    • G10—MUSICAL INSTRUMENTS; ACOUSTICS
    • G10K—SOUND-PRODUCING DEVICES; METHODS OR DEVICES FOR PROTECTING AGAINST, OR FOR DAMPING, NOISE OR OTHER ACOUSTIC WAVES IN GENERAL; ACOUSTICS NOT OTHERWISE PROVIDED FOR
    • G10K11/00—Methods or devices for transmitting, conducting or directing sound in general; Methods or devices for protecting against, or for damping, noise or other acoustic waves in general
    • G10K11/18—Methods or devices for transmitting, conducting or directing sound
    • G10K11/26—Sound-focusing or directing, e.g. scanning
    • G10K11/30—Sound-focusing or directing, e.g. scanning using refraction, e.g. acoustic lenses
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B8/00—Diagnosis using ultrasonic, sonic or infrasonic waves
    • A61B8/42—Details of probe positioning or probe attachment to the patient
    • A61B8/4209—Details of probe positioning or probe attachment to the patient by using holders, e.g. positioning frames
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/50—Piezoelectric or electrostrictive devices having a stacked or multilayer structure

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Multimedia (AREA)
  • Transducers For Ultrasonic Waves (AREA)
  • Ultra Sonic Daignosis Equipment (AREA)
JP2017545716A 2015-03-03 2016-02-25 音響窓層を備えるｃｍｕｔアレイ Pending JP2018512769A (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
EP15157280.7 2015-03-03
EP15157280 2015-03-03
PCT/EP2016/053899 WO2016139103A1 (en) 2015-03-03 2016-02-25 A cmut array comprising an acoustic window layer

Publications (2)

Publication Number Publication Date
JP2018512769A true JP2018512769A (ja) 2018-05-17
JP2018512769A5 JP2018512769A5 (enExample) 2019-04-04

Family

ID=52595205

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2017545716A Pending JP2018512769A (ja) 2015-03-03 2016-02-25 音響窓層を備えるｃｍｕｔアレイ

Country Status (5)

Country Link
US (1) US20180021813A1 (enExample)
EP (1) EP3265243B1 (enExample)
JP (1) JP2018512769A (enExample)
CN (1) CN107405649B (enExample)
WO (1) WO2016139103A1 (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2023527436A (ja) * 2020-05-28 2023-06-28 モジューレウス 行及び列のアドレス指定の超音波画像化デバイス
KR102630328B1 (ko) * 2022-10-19 2024-01-31 한국과학기술원 습도센서 모듈과 이를 구비하는 습도 측정장치 및 이를 이용하는 습도측정 방법

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2018041658A2 (en) * 2016-08-30 2018-03-08 Koninklijke Philips N.V. Imaging device with ultrasound transducer array
IT201800002952A1 (it) 2018-02-22 2019-08-22 St Microelectronics Srl Trasduttore ultrasonico microlavorato (mut) perfezionato, metodo di fabbricazione del mut, e metodo di progettazione del mut
EP3590437A1 (en) 2018-07-02 2020-01-08 Koninklijke Philips N.V. Acoustically transparent window for intraluminal ultrasound imaging device
DE102018122557A1 (de) * 2018-09-14 2020-03-19 Echovista Gmbh Vorrichtung zur Beseitigung von Ablagerungen und/oder Niederschlag auf einem Substrat
US10645497B1 (en) * 2019-05-28 2020-05-05 Bose Corporation Surface treatments for silicone acoustic diaphragms
CN114157966B (zh) * 2021-11-23 2023-09-26 苏州清听声学科技有限公司 一种基于压电薄膜的声音发射、接收及收发装置

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62233149A (ja) * 1986-04-02 1987-10-13 松下電器産業株式会社 超音波探触子
JPH05316595A (ja) * 1992-05-13 1993-11-26 Hitachi Medical Corp 超音波探触子
JPH08205290A (ja) * 1995-01-24 1996-08-09 Olympus Optical Co Ltd 超音波探触子
JP2007189342A (ja) * 2006-01-11 2007-07-26 Toshiba Corp アレイ式超音波プローブおよび超音波診断装置
JP2009153675A (ja) * 2007-12-26 2009-07-16 Ge Medical Systems Global Technology Co Llc 超音波探触子および超音波撮像装置
JP2012519406A (ja) * 2009-02-27 2012-08-23 コーニンクレッカ フィリップス エレクトロニクス エヌ ヴィ 機械的な圧壊保持機能を備える事前圧壊ｃｍｕｔ
JP2014183589A (ja) * 2013-03-15 2014-09-29 Sonosite Inc 微細加工超音波トランスデューサのための音響レンズ

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0239999B1 (en) * 1986-04-02 1993-10-13 Matsushita Electric Industrial Co., Ltd. Ultrasonic probe having an ultrasonic propagation medium
US7303530B2 (en) * 2003-05-22 2007-12-04 Siemens Medical Solutions Usa, Inc. Transducer arrays with an integrated sensor and methods of use
CN1297399C (zh) * 2003-07-24 2007-01-31 上海交通大学 无机陶瓷分级结构/有机复合材料的制备方法
US7750536B2 (en) * 2006-03-02 2010-07-06 Visualsonics Inc. High frequency ultrasonic transducer and matching layer comprising cyanoacrylate
US8203912B2 (en) * 2007-07-31 2012-06-19 Koninklijke Philips Electronics N.V. CMUTs with a high-k dielectric
JP5075665B2 (ja) * 2008-02-18 2012-11-21 株式会社東芝 二次元アレイ超音波プローブ

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62233149A (ja) * 1986-04-02 1987-10-13 松下電器産業株式会社 超音波探触子
JPH05316595A (ja) * 1992-05-13 1993-11-26 Hitachi Medical Corp 超音波探触子
JPH08205290A (ja) * 1995-01-24 1996-08-09 Olympus Optical Co Ltd 超音波探触子
JP2007189342A (ja) * 2006-01-11 2007-07-26 Toshiba Corp アレイ式超音波プローブおよび超音波診断装置
JP2009153675A (ja) * 2007-12-26 2009-07-16 Ge Medical Systems Global Technology Co Llc 超音波探触子および超音波撮像装置
JP2012519406A (ja) * 2009-02-27 2012-08-23 コーニンクレッカ フィリップス エレクトロニクス エヌ ヴィ 機械的な圧壊保持機能を備える事前圧壊ｃｍｕｔ
JP2014183589A (ja) * 2013-03-15 2014-09-29 Sonosite Inc 微細加工超音波トランスデューサのための音響レンズ

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2023527436A (ja) * 2020-05-28 2023-06-28 モジューレウス 行及び列のアドレス指定の超音波画像化デバイス
KR102630328B1 (ko) * 2022-10-19 2024-01-31 한국과학기술원 습도센서 모듈과 이를 구비하는 습도 측정장치 및 이를 이용하는 습도측정 방법

Also Published As

Publication number Publication date
US20180021813A1 (en) 2018-01-25
WO2016139103A1 (en) 2016-09-09
CN107405649B (zh) 2021-06-01
EP3265243A1 (en) 2018-01-10
EP3265243B1 (en) 2022-04-06
CN107405649A (zh) 2017-11-28

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