JP2018503484A - プラズマ処理装置および物品を処理する方法 - Google Patents
プラズマ処理装置および物品を処理する方法 Download PDFInfo
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Abstract
Description
本出願は、2014年12月22日出願の米国仮出願第62/095,629号および2015年3月6日出願の米国仮出願第 62/129,533号の優先権を主張するものであり、図面や表を含む全内容を参照することにより組み込まれる。
Claims (24)
- 被処理物品を受ける処理チャンバであって、前記物品を受ける容積を形成する少なくとも1つのコンフォーマブルウォールを含む処理チャンバと、
前記処理チャンバに操作可能に接続されたポンプであって、前記処理チャンバの容積を減じるために、前記処理チャンバ内の周囲空気を前記ポンプにより除去可能であり、これによって前記コンフォーマブルウォールが潰れ、少なくとも部分的に前記物品に適合し、前記処理チャンバ外の空気を前記ポンプにより前記処理チャンバへ移動可能である、ポンプと、
前記処理チャンバ外の空気が、前記処理チャンバへと移動する際、前記プラズマ発生器を通過して、前記処理チャンバに移動する前記空気の少なくとも一部が、前記処理チャンバに入る前にプラズマに変換されるように、配置されたプラズマ発生器と
を含む、
消毒装置。 - 請求項1に記載の装置であって、
前記ポンプに操作可能に接続された排出チャンバをさらに含み、前記ポンプにより前記周囲空気の一部が前記排出チャンバに移動する、
装置。 - 請求項2に記載の装置であって、
前記ポンプの操作を制御するセンサをさらに含む、
装置。 - 請求項3に記載の装置であって、
前記センサは、前記周囲空気のどの部分が前記ポンプにより前記排出チャンバと周囲環境の少なくとも1つに移動するかを制御する、
装置。 - 請求項4に記載の装置であって、
前記ポンプに操作可能に接続された他の排出チャンバをさらに含み、前記ポンプにより前記周囲空気が前記他の排出チャンバに移動可能である、
装置。 - 請求項5に記載の装置であって、
前記センサは、前記ポンプが前記周囲空気を移動するのを制御する、
装置。 - 請求項1に記載の装置であって、
芳香注入装置をさらに含み、前記処理チャンバに移動した前記空気が、前記芳香注入装置を通過する、
装置。 - 請求項1に記載の装置であって、
フィルタをさらに含み、前記処理チャンバから除去された前記周囲空気が、前記フィルタを通過する、
装置。 - 請求項8に記載の装置であって、
前記フィルタは、前記ポンプにより前記周囲空気が除去されるときに、前記周囲空気中の前記プラズマを除去または不活性化する、
装置。 - 請求項3に記載の装置であって、
殺菌UV光を前記処理チャンバに指向するUV光源をさらに含む、
装置。 - 請求項1に記載の装置であって、
真空リザーバシステムをさらに含み、前記真空リザーバシステムが、
負圧レベルを維持することのできる真空リザーバと、
前記負圧レベルを生成するポンプと、
前記真空リザーバと前記処理チャンバとの間のバルブであって、前記バルブを開くと、前記負圧レベルのために、前記周囲空気が、前記真空リザーバと前記処理チャンバとの間で平衡に達するまで、前記処理チャンバ内の前記周囲空気が、前記真空チャンバへ移動する、バルブと
を含む、
装置。 - 請求項1に記載の装置であって、
前記ポンプと前記処理チャンバとの間にエアロゾル化機構をさらに含み、前記エアロゾル機構が、
殺菌リザーバと、
前記殺菌リザーバと前記処理チャンバとの間にあるノズルであって、前記ポンプが空気を前記処理チャンバに移動するとき、前記ノズルは、前記殺菌剤をエアロゾル化して、前記エアロゾル化された殺菌剤は、前記空気により前記処理チャンバへ運ばれる、ノズルと、
を含む
装置。 - 請求項1に記載の装置であって、
前記処理チャンバに移動する前記空気が通過可能な1つ以上のポートを前記チャンバにさらに含む、
装置。 - 請求項13に記載の装置であって、
前記1つ以上のポートに操作可能に取り付けられ、前記処理チャンバにつながるガス指向部品をさらに含む、
装置。 - 物品を消毒する方法であって、
前記物品を、請求項1に記載の前記消毒装置の前記処理チャンバに配置し、
中和プロセスの第1段階を開始して、前記ポンプが、前記処理チャンバから周囲空気を除去して、前記コンフォーマブルウォールを潰して、前記処理チャンバの容積を減じ、
前記中和プロセスの第2段階を開始して、前記ポンプが、前記処理チャンバ外の空気を前記処理チャンバに移動し、移動した空気が前記プラズマ発生器を通過し、それによって形成されたプラズマを前記処理チャンバに移動して、所定時間にわたって、前記物品と接触させ、
前記中和プロセスの最終段階を開始して、前記ポンプが、前記処理チャンバ内の周囲空気とプラズマを除去し、前記処理チャンバ外の空気を前記処理チャンバに移動して、前記処理チャンバの容積を元に戻す、
方法。 - 請求項15に記載の方法であって、
前記第1段階で除去された前記周囲空気を、周囲環境と第1の排出チャンバの少なくとも1つに放出する、
方法。 - 請求項16に記載の方法であって、
前記第1段階がさらに、前記処理チャンバ内の前記周囲空気の一部を、第2の排出チャンバへ除去する、
方法。 - 請求項17に記載の方法であって、
前記プラズマ生成器を通過し、前記ポンプにより除去された前記周囲空気を、前記第2の排出チャンバから取り出す、
方法。 - 請求項18に記載の方法であって、
前記ポンプが、前記第2の排出チャンバ内の前記周囲空気を前記処理チャンバへ移動するプロセスを繰り返して、前記周囲空気が前記処理チャンバに移動する度にプラズマの濃度を増大する、
方法。 - 請求項19に記載の方法であって、
プラズマが前記処理チャンバに移動した後、前記第2段階は、少なくとも1つの休止期間を含む、
方法。 - 請求項20に記載の方法であって、
前記消毒装置は、フィルタをさらに含み、前記方法は、前記フィルタを通して前記周囲空気とプラズマを移動する前記ポンプをさらに含む、
方法。 - 請求項21に記載の方法であって、
前記消毒装置は、芳香注入装置をさらに含み、前記処理チャンバ外の空気を前記処理チャンバに移動して、前記空気を前記芳香注入装置に通過させる、前記ポンプをさらに含む、
方法。 - 被処理物品を受け取る処理チャンバであって、前記物品を受け取る容積を形成する少なくとも1つのコンフォーマブルウォールを含む処理チャンバと、
前記処理チャンバに操作可能に接続されたポンプであって、前記処理チャンバの容積を減じるために、前記処理チャンバ内の周囲空気を前記ポンプにより除去可能であり、これによって前記コンフォーマブルウォールが前記物品に対して潰れ、少なくとも部分的に前記物品に適合し、前記処理チャンバ外の空気を前記ポンプにより前記処理チャンバへ移動可能である、ポンプと、
前記処理チャンバ外の空気が、前記ポンプにより、前記処理チャンバへと移動する際、エアロゾル化機構が、前記空気に材料を取り込むように、配置された前記エアロゾル化機構と、
を含む
消毒装置。 - 請求項23に記載の消毒装置であって、
前記エアロゾル化機構により前記空気に取り込まれた材料が殺菌剤である、
消毒装置。
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