JP2018203827A - 可撓性樹脂形成用硬化性樹脂組成物及びこれを用いた半導体装置 - Google Patents
可撓性樹脂形成用硬化性樹脂組成物及びこれを用いた半導体装置 Download PDFInfo
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- JP2018203827A JP2018203827A JP2017108051A JP2017108051A JP2018203827A JP 2018203827 A JP2018203827 A JP 2018203827A JP 2017108051 A JP2017108051 A JP 2017108051A JP 2017108051 A JP2017108051 A JP 2017108051A JP 2018203827 A JP2018203827 A JP 2018203827A
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Abstract
Description
スチレン系エラストマとは、ハードセグメントとしてのポリスチレンと、ソフトセグメントとしてのポリエチレン、ポリブチレン、及びポリイソプレン等から選ばれる不飽和二重結合を含むジエン系エラストマとを含む共重合体であるエラストマである。
(B)成分の重合性モノマとしては、加熱又は紫外線などの照射によって重合する化合物であれば特に制限はないが、材料の選択性及び入手の容易さの観点から、例えばエチレン性不飽和基などの重合性基を有する化合物が好適である。ここで、重合性モノマとして、(メタ)アクリレート変性シリコーン化合物を用いることで、硬化性樹脂組成物を含む硬化性樹脂層が硬化して形成される可撓性樹脂層の可撓性を維持しながら、可撓性樹脂層のタックを低減できる。
(C)成分の重合開始剤としては、加熱又は紫外線などの照射によって重合を開始させるものであれば特に制限はない。例えば(B)成分の重合性化合物としてエチレン性不飽和基を有する化合物を用いる場合、重合開始剤としては熱ラジカル重合開始剤、光ラジカル重合開始剤などが挙げられる。硬化速度が速く常温硬化が可能なことから、光ラジカル重合開始剤が好ましい。
図2は、一実施形態に係る半導体装置を模式的に示す断面図である。図2に示す半導体装置100は、可撓性を有する可撓性基板1と、回路部品2と、可撓性樹脂層3とで構成される回路基板を備える。可撓性基板1は、例えば、フレキシブル基板である。回路部品2は、可撓性基板1上に実装されている。可撓性樹脂層3は、樹脂硬化物層であり、上述の硬化性樹脂組成物又はこれから形成された樹脂層を硬化させることにより形成される。可撓性樹脂層3は、可撓性基板1及び回路部品2を封止しながら、回路基板の表面を保護している。
(工程1:実装工程)
まず、図3に示すように、可撓性基板1の上に回路部品2を実装する。1種類の回路部品2が実装されていてもよく、2種類以上の回路部品2が混在して実装されていてもよい。また、回路部品2は、1個が実装されていてもよく、複数個が実装されていてもよい。
次に、可撓性基板1及び回路部品2を封止部材としての樹脂組成物又は樹脂フィルムで封止する。可撓性基板1及び回路部品2は、例えば、樹脂フィルムを可撓性基板1に積層すること、樹脂組成物を可撓性基板1に印刷すること、又は、樹脂組成物に可撓性基板1を浸漬し、乾燥することにより封止することができる。封止は、加熱プレス、ロールラミネート、真空ラミネート、印刷法又はディッピング法等によって行うことができる。この中でも、Roll to Rollのプロセスで使用できるものが製造工程を短縮できる点から好ましい。
封止工程において可撓性基板1及び回路部品2を樹脂組成物又は樹脂フィルムで封止した後、これらを硬化させることにより可撓性樹脂層3を形成し、可撓性樹脂層3を有する回路基板を得る。これにより、図1に示される半導体装置100が得られる。硬化としては、加熱による熱硬化、又は、露光による光硬化を行うことができる。回路部品2の耐熱性の観点から、熱硬化であれば低温で硬化する樹脂組成物が好ましい。また、室温で硬化できる観点から、光硬化する樹脂組成物が好ましい。
半導体装置の製造方法は、必要に応じて、例えば、図4に示すように、回路基板を切断し分離することにより、回路部品を有する複数の半導体装置を得る工程を備えることができる。これにより、複数の半導体装置を一度に大面積で製造することが可能となり、製造工程を減らすことが容易となる。
[可撓性樹脂ワニスVA1の調合]
(A)成分として、水添スチレン系ブロック共重合ポリマー(クレイトンポリマージャパン株式会社「クレイトンG1643」)90質量部、(B)成分として、トリシクロデカンジメタノールジアクリレート(新中村化学工業株式会社製「A−DCP」)5質量部、及び両末端にアクリロイルオキシ基を有するシリコーン化合物(ダイセル・オルネクス株式会社製「EBECRYL350」)5質量部、(C)成分として、ビス(2,4,6−トリメチルベンゾイル)フェニルホスフィンオキシド(BASF社製「イルガキュア819」)1.5質量部、及び溶剤としてトルエン125質量部を攪拌しながら混合し可撓性樹脂ワニスVA1を得た。
基材フィルムとして表面離型処理PETフィルム(帝人デュポンフィルム株式会社製「ピューレックスA70」、厚み50μm)を準備した。基材フィルムの離型処理面上に、ナイフコータ(株式会社康井精機製「SNC−350」を用いて樹脂ワニスVA1を塗布した。塗膜を乾燥機(株式会社二葉科学製「MSO−80TPS」)中、100℃で20分の加熱により乾燥して、樹脂層を形成した。この樹脂層に、保護フィルムとして表面離型処理PETフィルム(帝人デュポンフィルム株式会社製「ピューレックスA31」、厚み25μm)を、その離型処理面が樹脂層側になる向きで貼付け、樹脂フィルムFA1を得た。このとき樹脂層の厚みは、塗工機のギャップを調節することで任意に調整可能である。本実施例では硬化後の樹脂層の膜厚が、100μmとなるように調節した。
実施例1と同様にして、表1に示す配合比に従い、樹脂ワニスVA2〜VA7を調合し、それらを用いて樹脂フィルムFA2〜FA7を作製した。
樹脂フィルムFA1〜FA7のそれぞれに、紫外線露光機(ミカサ株式会社「ML−320FSAT」)にて紫外線(波長365nm)を2000mJ/cm2照射した。その後、長さ100mm、幅15mmの大きさの部分を切り出し、そこから保護フィルムを除去して測定用サンプルを得た。タック測定には株式会社レスカ製タッキング試験機「TAC−II」を用いた。直径5.1mmのプローブ(材質:SUS304)にて、押し込み荷重1N、押し込み速度120mm/分、押し込み時間1秒、引き上げ速度600mm/分、測定温度25℃の条件で、各測定サンプルの樹脂層(可撓性樹脂層)のタックを測定した。
樹脂フィルムFA−1〜FA−2のそれぞれに、紫外線露光機(ミカサ株式会社「ML−320FSAT」)にて紫外線(波長365nm)を2000mJ/cm2照射した。その後、長さ40mm、幅10mmの大きさの部分を切り出し、そこから基材フィルム及び保護フィルムを除去して、測定用サンプルを得た。この測定用サンプルの引張試験を、オートグラフ(株式会社島津製作所「EZ−S」)を用いて行うことで、応力−ひずみ曲線を得た。応力−ひずみ曲線から弾性率及び伸び率を求めた。引張試験時のチャック間距離は20mm、引張速度は50mm/分とした。弾性率は、荷重0.5〜1.0Nにおける応力−ひずみ曲線から求めた。伸び率は測定サンプルが破断した時点のひずみ(破断伸び率)である。
樹脂フィルムFA−1〜FA−2のそれぞれに、紫外線露光機(ミカサ株式会社「ML−320FSAT」)にて紫外線(波長365nm)を2000mJ/cm2照射した。その後、長さ70mm、幅5mmの大きさの部分を切り出し、そこから基材フィルム及び保護フィルムを除去して測定用サンプルを得た。測定用サンプルの回復率を、マイクロフォース試験機(IllinoisTool Works Inc「Instron 5948」)を用いた引張試験によって測定した。ここで回復率とは、チャックで保持された測定サンプルの1回目の引張試験で加えた変位量(又はひずみ)をX、その後、チャックを初期位置に一反戻し、再度引張試験を行ったときに荷重が掛かり始める時点の変位量とXとの差をYとしたとき、R=(Y/X)×100で示されるRを指す。本測定では初期長さ(チャック間の距離)を50mm、Xを変位量25mm(ひずみ50%)とした。
樹脂フィルムFA−1〜FA−2のそれぞれに、紫外線露光機(ミカサ株式会社「ML−320FSAT」)にて紫外線(波長365nm)を2000mJ/cm2照射した。その後、長さ40mm、幅30mmの大きさの部分を切り出し、そこから基材フィルム及び保護フィルムを除去して測定用サンプルを得た。測定用サンプルの全光線透過率、YI及びヘイズを分光ヘイズメータ(日本電色工業株式会社「SH7000」)を用いて測定した。
1)水素添加型スチレン系エラストマ、クレイトンポリマージャパン株式会社「クレイトン G1643、重量平均分子量:1.1×105
2)水素添加型スチレンブタジエンラバー、JSR株式会社「ダイナロン2324P」、重量平均分子量:1.0×105)
3)ノナンジオールジアクリレート(日立化成株式会社「ファンクリルFA−129AS」)
4)トリシクロデカンジメタノールジアクリレート(新中村化学工業株式会社「A−DCP」)
5)両末端にアクリロイルオキシ基を有するシリコーン化合物(ダイセル・オルネクス株式会社「EBECRYL350」)
6)ビス(2,4,6−トリメチルベンゾイル)フェニルホスフィンオキシド(BASFジャパン株式会社「イルガキュア819」)
Claims (8)
- (A)スチレン系エラストマ、(B)重合性モノマ及び(C)重合開始剤を含有し、
前記重合性モノマが、(メタ)アクリロイルオキシ基を有するシリコーン化合物を含む、
可撓性樹脂形成用硬化性樹脂組成物。 - 前記(メタ)アクリロイルオキシ基を有するシリコーン化合物が、シリコーン鎖と該シリコーン鎖の両末端にそれぞれ結合し(メタ)アクリロイルオキシ基を有する末端基とを有する化合物である、請求項1に記載の可撓性樹脂形成用硬化性樹脂組成物。
- 前記スチレン系エラストマが、水素添加型スチレン系エラストマである、請求項1又は2に記載の可撓性樹脂形成用硬化性樹脂組成物。
- 前記重合性モノマが、エチレン性不飽和基を有し前記(メタ)アクリロイルオキシ基を有するシリコーン化合物以外の化合物を更に含む、請求項1〜3のいずれか一項に記載の可撓性樹脂形成用硬化性樹脂組成物。
- 前記重合開始剤が、光ラジカル重合開始剤である、請求項1〜4のいずれか一項に記載の可撓性樹脂形成用硬化性樹脂組成物。
- 前記スチレン系エラストマ及び前記重合性モノマの合計量に対して、
前記スチレン系エラストマの含有量が50〜90質量%で、
前記重合性モノマの含有量が10〜50質量%で、
前記重合開始剤の含有量が0.1〜10質量%である、
請求項1〜5のいずれか一項に記載の可撓性樹脂形成用硬化性樹脂組成物。 - 請求項1〜6のいずれか一項に記載の可撓性樹脂形成用硬化性樹脂組成物を含む樹脂層又はその硬化物を備える、樹脂フィルム。
- 可撓性基板と、該可撓性基板上に実装された回路部品と、該回路部品を封止する可撓性樹脂層とを有する回路基板を備え、
前記可撓性樹脂層が、請求項1〜6のいずれか一項に記載の可撓性樹脂形成用硬化性樹脂組成物の硬化物である、
半導体装置。
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