JP2018201016A - ヘテロ接合型太陽電池の製造方法及びヘテロ接合型太陽電池 - Google Patents
ヘテロ接合型太陽電池の製造方法及びヘテロ接合型太陽電池 Download PDFInfo
- Publication number
- JP2018201016A JP2018201016A JP2018098511A JP2018098511A JP2018201016A JP 2018201016 A JP2018201016 A JP 2018201016A JP 2018098511 A JP2018098511 A JP 2018098511A JP 2018098511 A JP2018098511 A JP 2018098511A JP 2018201016 A JP2018201016 A JP 2018201016A
- Authority
- JP
- Japan
- Prior art keywords
- type doped
- doped layer
- layer
- substrate
- solar cell
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000000034 method Methods 0.000 title claims abstract description 37
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 24
- 239000000758 substrate Substances 0.000 claims abstract description 76
- 238000000151 deposition Methods 0.000 claims abstract description 66
- 230000008021 deposition Effects 0.000 claims description 45
- 238000004140 cleaning Methods 0.000 claims description 30
- 238000005229 chemical vapour deposition Methods 0.000 claims description 4
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 claims description 3
- 238000002360 preparation method Methods 0.000 claims description 2
- 238000006243 chemical reaction Methods 0.000 abstract description 21
- 230000001965 increasing effect Effects 0.000 abstract description 11
- 239000007789 gas Substances 0.000 description 27
- 239000012535 impurity Substances 0.000 description 10
- 230000005684 electric field Effects 0.000 description 9
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 6
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 6
- 230000000694 effects Effects 0.000 description 6
- 239000007788 liquid Substances 0.000 description 6
- 229910000077 silane Inorganic materials 0.000 description 6
- 239000000126 substance Substances 0.000 description 6
- XYFCBTPGUUZFHI-UHFFFAOYSA-N Phosphine Chemical compound P XYFCBTPGUUZFHI-UHFFFAOYSA-N 0.000 description 4
- 229910021417 amorphous silicon Inorganic materials 0.000 description 4
- 230000000873 masking effect Effects 0.000 description 4
- 238000002161 passivation Methods 0.000 description 4
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 3
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 3
- 239000002253 acid Substances 0.000 description 3
- 230000007423 decrease Effects 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 150000002500 ions Chemical class 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 3
- 239000003921 oil Substances 0.000 description 3
- 239000002245 particle Substances 0.000 description 3
- 238000005240 physical vapour deposition Methods 0.000 description 3
- 239000000243 solution Substances 0.000 description 3
- 238000004544 sputter deposition Methods 0.000 description 3
- 238000005406 washing Methods 0.000 description 3
- KFZMGEQAYNKOFK-UHFFFAOYSA-N Isopropanol Chemical compound CC(C)O KFZMGEQAYNKOFK-UHFFFAOYSA-N 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 2
- 230000002378 acidificating effect Effects 0.000 description 2
- 230000000536 complexating effect Effects 0.000 description 2
- 238000005137 deposition process Methods 0.000 description 2
- 239000003599 detergent Substances 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000009792 diffusion process Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 229910021645 metal ion Inorganic materials 0.000 description 2
- 150000002739 metals Chemical class 0.000 description 2
- 239000011259 mixed solution Substances 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000005215 recombination Methods 0.000 description 2
- 230000006798 recombination Effects 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 229910021642 ultra pure water Inorganic materials 0.000 description 2
- 239000012498 ultrapure water Substances 0.000 description 2
- 238000001771 vacuum deposition Methods 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- RSWGJHLUYNHPMX-UHFFFAOYSA-N Abietic-Saeure Natural products C12CCC(C(C)C)=CC2=CCC2C1(C)CCCC2(C)C(O)=O RSWGJHLUYNHPMX-UHFFFAOYSA-N 0.000 description 1
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 1
- GRYLNZFGIOXLOG-UHFFFAOYSA-N Nitric acid Chemical compound O[N+]([O-])=O GRYLNZFGIOXLOG-UHFFFAOYSA-N 0.000 description 1
- 239000002202 Polyethylene glycol Substances 0.000 description 1
- KHPCPRHQVVSZAH-HUOMCSJISA-N Rosin Natural products O(C/C=C/c1ccccc1)[C@H]1[C@H](O)[C@@H](O)[C@@H](O)[C@@H](CO)O1 KHPCPRHQVVSZAH-HUOMCSJISA-N 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 150000007513 acids Chemical class 0.000 description 1
- 239000003513 alkali Substances 0.000 description 1
- 239000012670 alkaline solution Substances 0.000 description 1
- 239000002216 antistatic agent Substances 0.000 description 1
- QZPSXPBJTPJTSZ-UHFFFAOYSA-N aqua regia Chemical compound Cl.O[N+]([O-])=O QZPSXPBJTPJTSZ-UHFFFAOYSA-N 0.000 description 1
- 239000000969 carrier Substances 0.000 description 1
- 239000012459 cleaning agent Substances 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 229910021419 crystalline silicon Inorganic materials 0.000 description 1
- 229910001873 dinitrogen Inorganic materials 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000005265 energy consumption Methods 0.000 description 1
- 230000002708 enhancing effect Effects 0.000 description 1
- 238000003912 environmental pollution Methods 0.000 description 1
- 239000003822 epoxy resin Substances 0.000 description 1
- 230000003628 erosive effect Effects 0.000 description 1
- QOSATHPSBFQAML-UHFFFAOYSA-N hydrogen peroxide;hydrate Chemical compound O.OO QOSATHPSBFQAML-UHFFFAOYSA-N 0.000 description 1
- 150000002484 inorganic compounds Chemical class 0.000 description 1
- 229910010272 inorganic material Inorganic materials 0.000 description 1
- 238000007733 ion plating Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 230000007935 neutral effect Effects 0.000 description 1
- 229910017604 nitric acid Inorganic materials 0.000 description 1
- 239000003960 organic solvent Substances 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 230000001590 oxidative effect Effects 0.000 description 1
- 229920000647 polyepoxide Polymers 0.000 description 1
- 229920001223 polyethylene glycol Polymers 0.000 description 1
- 238000010248 power generation Methods 0.000 description 1
- 239000012495 reaction gas Substances 0.000 description 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 1
- 229910010271 silicon carbide Inorganic materials 0.000 description 1
- 238000000638 solvent extraction Methods 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
- 238000005728 strengthening Methods 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- KHPCPRHQVVSZAH-UHFFFAOYSA-N trans-cinnamyl beta-D-glucopyranoside Natural products OC1C(O)C(O)C(CO)OC1OCC=CC1=CC=CC=C1 KHPCPRHQVVSZAH-UHFFFAOYSA-N 0.000 description 1
- 238000004506 ultrasonic cleaning Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/04—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices
- H01L31/06—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by potential barriers
- H01L31/075—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by potential barriers the potential barriers being only of the PIN type, e.g. amorphous silicon PIN solar cells
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/04—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices
- H01L31/06—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by potential barriers
- H01L31/072—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by potential barriers the potential barriers being only of the PN heterojunction type
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/04—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices
- H01L31/06—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by potential barriers
- H01L31/072—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by potential barriers the potential barriers being only of the PN heterojunction type
- H01L31/0745—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by potential barriers the potential barriers being only of the PN heterojunction type comprising a AIVBIV heterojunction, e.g. Si/Ge, SiGe/Si or Si/SiC solar cells
- H01L31/0747—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by potential barriers the potential barriers being only of the PN heterojunction type comprising a AIVBIV heterojunction, e.g. Si/Ge, SiGe/Si or Si/SiC solar cells comprising a heterojunction of crystalline and amorphous materials, e.g. heterojunction with intrinsic thin layer
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/02—Details
- H01L31/0224—Electrodes
- H01L31/022408—Electrodes for devices characterised by at least one potential jump barrier or surface barrier
- H01L31/022425—Electrodes for devices characterised by at least one potential jump barrier or surface barrier for solar cells
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/02—Details
- H01L31/0236—Special surface textures
- H01L31/02366—Special surface textures of the substrate or of a layer on the substrate, e.g. textured ITO/glass substrate or superstrate, textured polymer layer on glass substrate
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/0248—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies
- H01L31/0256—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by the material
- H01L31/0264—Inorganic materials
- H01L31/0312—Inorganic materials including, apart from doping materials or other impurities, only AIVBIV compounds, e.g. SiC
- H01L31/03125—Inorganic materials including, apart from doping materials or other impurities, only AIVBIV compounds, e.g. SiC characterised by the doping material
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/0248—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies
- H01L31/0352—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by their shape or by the shapes, relative sizes or disposition of the semiconductor regions
- H01L31/035272—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by their shape or by the shapes, relative sizes or disposition of the semiconductor regions characterised by at least one potential jump barrier or surface barrier
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/0248—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies
- H01L31/036—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by their crystalline structure or particular orientation of the crystalline planes
- H01L31/0392—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by their crystalline structure or particular orientation of the crystalline planes including thin films deposited on metallic or insulating substrates ; characterised by specific substrate materials or substrate features or by the presence of intermediate layers, e.g. barrier layers, on the substrate
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
- H01L31/1804—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof comprising only elements of Group IV of the Periodic Table
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
- H01L31/1804—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof comprising only elements of Group IV of the Periodic Table
- H01L31/1812—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof comprising only elements of Group IV of the Periodic Table including only AIVBIV alloys, e.g. SiGe
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
- Y02E10/547—Monocrystalline silicon PV cells
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
- Y02E10/548—Amorphous silicon PV cells
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Electromagnetism (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Physics & Mathematics (AREA)
- Life Sciences & Earth Sciences (AREA)
- Sustainable Energy (AREA)
- Manufacturing & Machinery (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Sustainable Development (AREA)
- Inorganic Chemistry (AREA)
- Photovoltaic Devices (AREA)
Abstract
Description
気体体積流量比の範囲がH2/SiH4/PH3=4〜10/2/1〜2で、気圧の範囲が0.3mbar以上2.0mbar以下で、高周波出力の範囲が500W以上2000W以下で、堆積厚さの範囲が5nmより大きく10nm以下であるという条件で、前記真性層に第1のn型ドープ層を堆積することと、
気体体積流量比の範囲がH2/SiH4/PH3=4〜10/2/2〜3で、気圧の範囲が0.3mbar以上2.0mbar以下で、高周波出力の範囲が500W以上2000W以下で、堆積厚さの範囲が3nmより大きく5nm以下であるという条件で、前記第1のn型ドープ層に第2のn型ドープ層を堆積することと、
気体体積流量比の範囲がH2/SiH4/PH3=4〜10/2/3〜4で、気圧の範囲が0.3mbar以上2.0mbar以下で、高周波出力の範囲が500W以上2000W以下で、堆積厚さの範囲が1nm以上3nm以下であるという条件で、前記第2のn型ドープ層に第3のn型ドープ層を堆積することとを含む。
前記n型ドープ層及び/又はp型ドープ層は少なくとも2層設けられ、且つ前記基板から離間する縦方向において、前記n型ドープ層及び/又はp型ドープ層における各層のドープ濃度は漸次増加する。
本発明によるヘテロ接合型太陽電池の製造方法は、前記基板の両側の真性層にそれぞれn型ドープ層及びp型ドープ層を堆積し、前記n型ドープ層及び/又はp型ドープ層を少なくとも2層とし、且つ前記n型ドープ層及び/又は前記p型ドープ層の各層の前記基板から離間する縦方向におけるドープ濃度を漸次増加させることにより、ヘテロ接合型太陽電池における高濃度のドープを実現しつつ、前記第1の真性層が不純物の浸入からの影響を受けないよう確保し、電界方向がpn接合と一致するn/n+/n++電界を形成し、pn接合のビルトイン電界を強めることで、電池の変換効率向上という目的を達成するとともに、界面準位密度が高すぎるために電池セルの効率が低下し、p型ドープ層とn型ドープ層が互いに接触できないことを回避するために、本発明は、前記基板の縦方向において堆積によってドープを行い、マスキング工程やドープが完了した後にさらにドープ層を一部除去する工程を必要とせず、すなわち前記基板の片側に堆積によってドープを行うとき、前記基板の他側に対してマスキングや遮蔽を行うことや、ドープが完了した後にドープ層を一部除去するなどの工程を行う必要がなく、片側への堆積が完了してからまた他側に堆積するだけでよいため、生産性を高めることができる。
n型ドープ層203及び/又はp型ドープ層204は少なくとも2層設けられ、且つ基板201から離間する縦方向において、n型ドープ層203及び/又はp型ドープ層204の各層におけるドープ濃度は漸次増加する。
Claims (14)
- ヘテロ接合型太陽電池の製造方法であって、
基板を用意し、
前記基板の両側にそれぞれ真性層を堆積し、
前記基板の両側の前記真性層にそれぞれn型ドープ層及びp型ドープ層を堆積し、ただし、前記n型ドープ層及び/又はp型ドープ層は少なくとも2層であり、且つ前記n型ドープ層及び/又は前記p型ドープ層の各層の前記基板から離間する縦方向におけるドープ濃度は漸次増加し、
前記n型ドープ層及び前記p型ドープ層にそれぞれ透明導電層及び電極層を順次形成することを特徴とするヘテロ接合型太陽電池の製造方法。 - 前記n型ドープ層及び/又はp型ドープ層の各層の前記基板から離間する縦方向における厚さは漸次低減することを特徴とする請求項1に記載のヘテロ接合型太陽電池の製造方法。
- 前記基板上の前記真性層におけるn型ドープ層の堆積は、
気体体積流量比の範囲がH2/SiH4/PH3=4〜10/2/1〜2で、気圧の範囲が0.3mbar以上2.0mbar以下で、高周波出力の範囲が500W以上2000W以下で、堆積厚さの範囲が5nmより大きく10nm以下であるという条件で、前記真性層に第1のn型ドープ層を堆積することと、
気体体積流量比の範囲がH2/SiH4/PH3=4〜10/2/2〜3で、気圧の範囲が0.3mbar以上2.0mbar以下で、高周波出力の範囲が500W以上2000W以下で、堆積厚さの範囲が3nmより大きく5nm以下であるという条件で、前記第1のn型ドープ層に第2のn型ドープ層を堆積することと、
気体体積流量比の範囲がH2/SiH4/PH3=4〜10/2/3〜4で、気圧の範囲が0.3mbar以上2.0mbar以下で、高周波出力の範囲が500W以上2000W以下で、堆積厚さの範囲が1nm以上3nm以下であるという条件で、前記第2のn型ドープ層に第3のn型ドープ層を堆積することとを含むことを特徴とする請求項2に記載のヘテロ接合型太陽電池の製造方法。 - 各前記n型ドープ層を堆積する前に真空引きを行うことを特徴とする請求項3に記載のヘテロ接合型太陽電池の製造方法。
- 前記基板上の前記真性層におけるp型ドープ層の堆積の条件は、気体体積流量比がH2/SiH4/B2H6=4〜10/2/1〜4で、気圧の範囲が0.3mbar以上2.0mbar以下で、高周波出力の範囲が500W以上2000W以下で、堆積厚さの範囲が4nm以上10nm以下であることを特徴とする請求項2に記載のヘテロ接合型太陽電池の製造方法。
- 前記真性層の堆積はVHF−PECVD法(超短波を用いたプラズマ化学気相成長法)で行われることを特徴とする請求項1に記載のヘテロ接合型太陽電池の製造方法。
- 前記真性層の堆積の条件は、気体体積流量比がH2/SiH4=0〜10/1で、気圧の範囲が0.3mbar以上2.0mbar以下で、高周波出力の範囲が200W以上2000W以下で、堆積厚さの範囲が5nm以上15nm以下であることを特徴とする請求項6に記載のヘテロ接合型太陽電池の製造方法。
- 前記基板の用意は、前記基板の表面に対するテクスチャリング及び/又は洗浄の前処理を含むことを特徴とする請求項1に記載のヘテロ接合型太陽電池の製造方法。
- ヘテロ接合型太陽電池であって、
基板と、真性層と、n型ドープ層と、p型ドープ層と、電極層とを含み、前記真性層が前記基板の両側に設けられ、前記n型ドープ層及びp型ドープ層が前記基板の両側の前記真性層にそれぞれ設けられ、前記電極層が前記基板の両側の前記n型ドープ層及びp型ドープ層にそれぞれ設けられ、
前記n型ドープ層及び/又はp型ドープ層は少なくとも2層設けられ、且つ前記基板から離間する縦方向において、前記n型ドープ層及び/又はp型ドープ層における各層のドープ濃度は漸次増加することを特徴とするヘテロ接合型太陽電池。 - 前記n型ドープ層及び/又はp型ドープ層の各層の前記基板から離間する縦方向における厚さは漸次低減することを特徴とする請求項9に記載のヘテロ接合型太陽電池。
- 前記基板の前記真性層に設けられる前記n型ドープ層は、前記真性層に近い側に設けられる第1のn型ドープ層と、前記第1のn型ドープ層に設けられる第2のn型ドープ層と、前記第2のn型ドープ層に設けられる第3のn型ドープ層とを含むことを特徴とする請求項10に記載のヘテロ接合型太陽電池。
- 前記第1のn型ドープ層の厚さの範囲は5nmより大きく10nm以下で、前記第2のn型ドープ層の厚さの範囲は3nmより大きく5nm以下で、前記第3のn型ドープ層の厚さの範囲は1nm以上3nm以下であることを特徴とする請求項11に記載のヘテロ接合型太陽電池。
- 前記基板の前記真性層に設けられる前記p型ドープ層の厚さの範囲は4nm以上10nm以下であることを特徴とする請求項11に記載のヘテロ接合型太陽電池。
- 前記真性層の厚さの範囲は5nm以上15nm以下であることを特徴とする請求項9に記載のヘテロ接合型太陽電池。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201710379489.1 | 2017-05-25 | ||
CN201710379489.1A CN107170850A (zh) | 2017-05-25 | 2017-05-25 | 一种异质结太阳能电池的制备方法及异质结太阳能电池 |
Publications (1)
Publication Number | Publication Date |
---|---|
JP2018201016A true JP2018201016A (ja) | 2018-12-20 |
Family
ID=59820868
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2018098511A Pending JP2018201016A (ja) | 2017-05-25 | 2018-05-23 | ヘテロ接合型太陽電池の製造方法及びヘテロ接合型太陽電池 |
Country Status (6)
Country | Link |
---|---|
US (1) | US20180342641A1 (ja) |
EP (1) | EP3407391A1 (ja) |
JP (1) | JP2018201016A (ja) |
KR (1) | KR20180129668A (ja) |
CN (2) | CN107170850A (ja) |
WO (1) | WO2018214870A1 (ja) |
Families Citing this family (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN107170850A (zh) * | 2017-05-25 | 2017-09-15 | 君泰创新(北京)科技有限公司 | 一种异质结太阳能电池的制备方法及异质结太阳能电池 |
CN107819052A (zh) * | 2017-12-11 | 2018-03-20 | 晋能光伏技术有限责任公司 | 一种高效晶硅非晶硅异质结电池结构及其制备方法 |
CN109509807B (zh) * | 2018-12-04 | 2020-06-16 | 江苏爱康能源研究院有限公司 | 晶硅异质结太阳能电池的发射极结构及其制备方法 |
CN109950132A (zh) * | 2019-03-01 | 2019-06-28 | 晋能光伏技术有限责任公司 | 一种管式pecvd设备双面沉积太阳能电池非晶硅层的方法 |
CN112289685A (zh) * | 2019-07-22 | 2021-01-29 | 长鑫存储技术有限公司 | Pin二极管及其形成方法、静电保护结构 |
CN114203849A (zh) * | 2020-09-01 | 2022-03-18 | 嘉兴阿特斯技术研究院有限公司 | 异质结太阳能电池和制备异质结太阳能电池的方法 |
CN114203850A (zh) * | 2020-09-01 | 2022-03-18 | 嘉兴阿特斯技术研究院有限公司 | 异质结太阳能电池及制备其的方法 |
CN114203851A (zh) * | 2020-09-01 | 2022-03-18 | 嘉兴阿特斯技术研究院有限公司 | 异质结太阳能电池和制备异质结太阳能电池的方法 |
CN114628543A (zh) * | 2020-11-27 | 2022-06-14 | 嘉兴阿特斯技术研究院有限公司 | 异质结太阳能电池及其制作方法 |
GB202119060D0 (en) * | 2021-12-29 | 2022-02-09 | Rec Solar Pte Ltd | Solar cell and method for forming the same |
CN114497260B (zh) * | 2022-02-08 | 2024-01-09 | 理想万里晖半导体设备(上海)股份有限公司 | 用于制造异质结太阳能电池的方法及异质结太阳能电池 |
CN115117184B (zh) * | 2022-06-28 | 2024-04-30 | 河海大学 | 一种待回收异质结太阳电池结构的确定方法 |
CN117012861B (zh) * | 2023-10-07 | 2024-01-23 | 深圳市华创汇能技术有限公司 | 基于光伏太阳能电池片制绒工艺的电流矢量变频方法 |
Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2003282458A (ja) * | 2002-03-26 | 2003-10-03 | Sanyo Electric Co Ltd | 半導体素子及びその製造方法 |
JP2005101239A (ja) * | 2003-09-24 | 2005-04-14 | Sanyo Electric Co Ltd | 光起電力素子およびその製造方法 |
JP2011061197A (ja) * | 2009-09-04 | 2011-03-24 | Lg Electronics Inc | 太陽電池およびその製造方法 |
CN102280502A (zh) * | 2011-08-26 | 2011-12-14 | 上海师范大学 | 一种梯度掺杂硅基异质结太阳能电池及其制备方法 |
DE102010044348A1 (de) * | 2010-09-03 | 2012-03-08 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Photovoltaische Solarzelle und Verfahren zu deren Herstellung |
CN102446991A (zh) * | 2011-12-14 | 2012-05-09 | 杭州赛昂电力有限公司 | 基于晶硅的薄膜太阳能电池及其制造方法 |
CN102683468A (zh) * | 2012-06-06 | 2012-09-19 | 南昌大学 | 一种晶硅异质结太阳电池的发射极结构 |
US20130102133A1 (en) * | 2011-10-21 | 2013-04-25 | Applied Materials, Inc. | Method and apparatus for fabricating silicon heterojunction solar cells |
Family Cites Families (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3902534B2 (ja) * | 2001-11-29 | 2007-04-11 | 三洋電機株式会社 | 光起電力装置及びその製造方法 |
US20070023082A1 (en) * | 2005-07-28 | 2007-02-01 | Venkatesan Manivannan | Compositionally-graded back contact photovoltaic devices and methods of fabricating such devices |
CN201708164U (zh) * | 2010-03-12 | 2011-01-12 | 河南阿格斯新能源有限公司 | 一种薄膜太阳电池的膜系和薄膜太阳电池 |
US20120318340A1 (en) * | 2010-05-04 | 2012-12-20 | Silevo, Inc. | Back junction solar cell with tunnel oxide |
CN102110734B (zh) * | 2011-01-18 | 2012-07-18 | 西安交通大学 | 一种纳米硅/晶体硅异质结光伏电池 |
CN102446990B (zh) * | 2011-12-14 | 2014-08-13 | 杭州赛昂电力有限公司 | 基于晶硅的薄膜太阳能电池及其形成方法 |
CN103915523B (zh) * | 2014-04-21 | 2016-02-10 | 南开大学 | 一种含复合发射层硅异质结太阳电池的制备方法 |
CN104600157A (zh) * | 2015-01-13 | 2015-05-06 | 福建铂阳精工设备有限公司 | 一种异质结太阳能电池的制造方法及异质结太阳能电池 |
CN105304746A (zh) * | 2015-09-24 | 2016-02-03 | 新奥光伏能源有限公司 | 一种异质结太阳能电池及其制备方法 |
CN205920977U (zh) * | 2016-06-29 | 2017-02-01 | 新奥光伏能源有限公司 | 一种具有新型发射极的硅异质结太阳能电池及光伏组件 |
CN106206781B (zh) * | 2016-08-30 | 2018-10-26 | 陕西师范大学 | 一种单晶硅基异质结太阳能电池及其制备方法 |
CN107170850A (zh) * | 2017-05-25 | 2017-09-15 | 君泰创新(北京)科技有限公司 | 一种异质结太阳能电池的制备方法及异质结太阳能电池 |
-
2017
- 2017-05-25 CN CN201710379489.1A patent/CN107170850A/zh active Pending
-
2018
- 2018-05-22 CN CN201880001497.5A patent/CN109463010A/zh active Pending
- 2018-05-22 WO PCT/CN2018/087814 patent/WO2018214870A1/zh active Application Filing
- 2018-05-23 JP JP2018098511A patent/JP2018201016A/ja active Pending
- 2018-05-23 EP EP18173762.8A patent/EP3407391A1/en not_active Withdrawn
- 2018-05-24 KR KR1020180058891A patent/KR20180129668A/ko not_active Application Discontinuation
- 2018-05-25 US US15/990,536 patent/US20180342641A1/en not_active Abandoned
Patent Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2003282458A (ja) * | 2002-03-26 | 2003-10-03 | Sanyo Electric Co Ltd | 半導体素子及びその製造方法 |
JP2005101239A (ja) * | 2003-09-24 | 2005-04-14 | Sanyo Electric Co Ltd | 光起電力素子およびその製造方法 |
JP2011061197A (ja) * | 2009-09-04 | 2011-03-24 | Lg Electronics Inc | 太陽電池およびその製造方法 |
DE102010044348A1 (de) * | 2010-09-03 | 2012-03-08 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Photovoltaische Solarzelle und Verfahren zu deren Herstellung |
CN102280502A (zh) * | 2011-08-26 | 2011-12-14 | 上海师范大学 | 一种梯度掺杂硅基异质结太阳能电池及其制备方法 |
US20130102133A1 (en) * | 2011-10-21 | 2013-04-25 | Applied Materials, Inc. | Method and apparatus for fabricating silicon heterojunction solar cells |
CN102446991A (zh) * | 2011-12-14 | 2012-05-09 | 杭州赛昂电力有限公司 | 基于晶硅的薄膜太阳能电池及其制造方法 |
CN102683468A (zh) * | 2012-06-06 | 2012-09-19 | 南昌大学 | 一种晶硅异质结太阳电池的发射极结构 |
Also Published As
Publication number | Publication date |
---|---|
US20180342641A1 (en) | 2018-11-29 |
CN109463010A (zh) | 2019-03-12 |
EP3407391A1 (en) | 2018-11-28 |
WO2018214870A1 (zh) | 2018-11-29 |
KR20180129668A (ko) | 2018-12-05 |
CN107170850A (zh) | 2017-09-15 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP2018201016A (ja) | ヘテロ接合型太陽電池の製造方法及びヘテロ接合型太陽電池 | |
CN101916787B (zh) | 一种黑硅太阳能电池及其制备方法 | |
CN108666393B (zh) | 太阳能电池的制备方法及太阳能电池 | |
CN102157624B (zh) | 一种硅太阳能电池及其制备方法 | |
CN103456804A (zh) | 在多晶硅上形成倒金字塔型多孔表面纳米织构的方法及制备短波增强型太阳电池的方法 | |
JP5584845B1 (ja) | 太陽電池およびその製造方法、ならびに太陽電池モジュール | |
CN102931287A (zh) | 一种n型电池片及其制备方法 | |
CN103647000A (zh) | 一种晶体硅太阳电池表面织构化工艺 | |
WO2012162905A1 (zh) | 背接触晶体硅太阳能电池片制造方法 | |
CN114447142B (zh) | 一种N型TOPCon太阳能电池及其制作方法 | |
CN116741877A (zh) | 一种tbc电池制备方法及tbc电池 | |
JP6426486B2 (ja) | 太陽電池素子の製造方法 | |
CN106449850A (zh) | 一种高效硅基异质结双面电池及其制备方法 | |
Chen et al. | Improvement of conversion efficiency of multi-crystalline silicon solar cells using reactive ion etching with surface pre-etching | |
CN103746006A (zh) | 一种晶体硅太阳能电池的钝化层及其钝化工艺 | |
WO2012162901A1 (zh) | 背接触晶体硅太阳能电池片制造方法 | |
CN110476256B (zh) | 太阳能电池、太阳能电池模块和太阳能电池的制造方法 | |
CN103247720A (zh) | 一种晶体硅异质结太阳能电池的制备方法 | |
JP2006344883A (ja) | 太陽電池の製造方法 | |
US20150187979A1 (en) | Heterojunction solar cell with epitaxial silicon thin film and method for preparing the same | |
CN113471304A (zh) | 一种局域钝化接触结构电池及其制备方法 | |
CN110785856B (zh) | 高效太阳能电池的制造方法 | |
CN102709378A (zh) | 一种选择性发射极晶体硅太阳能电池的制备方法 | |
CN112599618A (zh) | 一种太阳能电池及其制作方法 | |
KR101134131B1 (ko) | 실리콘 태양전지용 실리콘 기판 표면의 처리 방법 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20180523 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20180606 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20180712 |
|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20190418 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20190508 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20190808 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20191224 |
|
A02 | Decision of refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A02 Effective date: 20200804 |