JP2018185506A - Conveyance device and method for manufacturing laminate - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a conveyance device capable of easily positioning a paper sheet-shaped member.SOLUTION: A conveyance device 1 includes: a first member 21 for placing a paper sheet-shaped member 10 thereon; an alignment stage 30 for placing the paper sheet-shaped member thereon to perform position adjustment; a first belt member 41 for placing the paper sheet-shaped member thereon to convey the paper sheet-shaped member; a first transfer machine 51 for sucking the paper sheet-shaped member placed on the first member to place the paper sheet-shaped member on the alignment stage, the first transfer machine capable of making force for expanding outward in the surface of the paper sheet-shaped member act on the paper sheet-shaped member; a position confirmation device 60 for confirming position information of the paper sheet-shaped member placed on the alignment stage; a control part 70 for adjusting the position of the paper sheet-shaped member on the basis of position data of the paper sheet-shaped member; and a second transfer machine 52 for transferring the paper sheet-shaped member placed on the alignment stage to undergo position adjustment onto the first belt member and placing the paper sheet-shaped member on the first belt member.SELECTED DRAWING: Figure 1

Description

  The present invention relates to a transport apparatus for transporting a sheet-like member and a method for manufacturing a laminate.

Sheet-fed sheet-like members are used in various fields such as suction members, printed wiring boards, and optical members. For example, in a single-wafer sheet-like member used for precision equipment such as a printed wiring board and an optical member, it is necessary to perform alignment when laminating and bonding the single-wafer sheet-like members.
In recent years, thin sheet-like sheet-like members are frequently used, and the thin sheet-like sheet-like members are particularly prone to wrinkles and curls. When wrinkles, curls, etc. occur in the sheet-like member, not only is it difficult to increase the alignment accuracy, but the working efficiency is deteriorated, and the yield of the product may be adversely affected.

  For example, in Patent Document 1 (Japanese Patent Application Laid-Open No. 2012-242750), a thin sheet-like material such as an optical film is stuck on a substrate without any entrapment of bubbles and foreign matters and without causing bending and wrinkling. A film sticking device is disclosed.

JP 2012-242750 A

The film sticking device disclosed in Patent Document 1 generates tension on a film by, for example, isolating film holding members from each other. Patent Document 1 discloses that, for example, an electrostatic chuck or a vacuum attracting force is used as a holding member.
However, the electrostatic chuck may not be able to stably hold the attracted object unless the sheet-like member is flat. For example, a wrinkled or bent sheet-like member may not be stably held, and an electrostatic chuck may not be suitable for a thin sheet-like member that tends to wrinkle.
Further, when the vacuum suction force is used, the apparatus becomes complicated, such as requiring a vacuum apparatus. In addition, there may be a case where sufficient adsorption force is not obtained up to the end of the sheet-like member and bubbles are likely to be generated. Furthermore, there is a tendency that the adsorptive power with respect to the sheet-like member becomes strong, which may not be suitable for use on a thin sheet-like member.

Here, in the single-wafer sheet-like member used for precision equipment such as a printed wiring board and an optical member, as described above, it is necessary to perform alignment when laminating and laminating the single-wafer sheet-like member. There is a need to increase alignment accuracy and perform alignment more efficiently.
Further, as described above, in recent years, the thickness of the sheet-like member has been reduced. For example, in a sheet-like member used for an optical laminate, there are those having a thickness of 50 to 300 μm, and curling and wrinkling are likely to occur, and positioning of the sheet-like member cannot be easily performed. In some cases, the accuracy of the angle and alignment of the sheet-like member cannot be obtained.

  Therefore, the present invention can convey a sheet-like sheet-like member in a flat state, can suppress generation of wrinkles and curls on the sheet-like sheet-like member, can extend the sheet-like sheet-like member, Provided is a transport device that can stretch wrinkles that can exist in a sheet-like member, can easily align a sheet-like sheet-like member, and can also perform alignment with high accuracy. Furthermore, this invention provides the manufacturing method of a laminated body including conveying a sheet-like sheet-like member using such a conveying apparatus.

The present invention includes the following.
[1] A conveying device for conveying a sheet-like member,
A first member on which the sheet-like member is placed;
An alignment stage for placing and adjusting the position of the sheet-like member,
A first belt-like member for placing the single-wafer sheet-like member and conveying it in the first conveying direction;
The single-wafer sheet-like member placed on the first member is sucked from the upper surface side, and the single-wafer sheet-like member is moved onto the alignment stage while being held by the suction force, and the single-wafer is stopped. 1st transfer machine which mounts a sheet-like member on an alignment stage, Comprising: The sheet | seat-like sheet-like member is the force which expands outside in the surface, hold | maintaining a sheet-like sheet-like member with suction force A first transfer machine capable of acting on
A position confirmation device for confirming the position information of the sheet-like member placed on the alignment stage;
Based on the position data of the sheet-like member generated by the position confirmation device, the control unit controls the movement of the alignment stage on which the sheet-like member is placed, thereby adjusting the position of the sheet-like member. When,
The single-wafer sheet-like member placed on the alignment stage is sucked from its upper surface side, and the single-wafer sheet-like member is moved onto the first belt-like member while being held by the suction force. And a second transfer machine that places the single-wafer sheet-like member on the first belt-like member by stopping the suction.
[2] The first transfer machine is a plurality of suction pads capable of sucking the ambient atmosphere and having a pad portion that comes into contact with the sheet-like sheet-like member, and is mutually outwardly within a predetermined plane. The transport apparatus according to [1], including a suction pad that can be expanded.
[3] The transport apparatus according to [1] or [2], wherein the second transfer machine includes a plurality of suction pads that can suck the ambient atmosphere and have a pad portion that contacts the sheet-like sheet member. .
[4] The transfer apparatus according to any one of [1] to [3], wherein the first transfer machine and the second transfer machine are separate or common transfer machines.
[5] The recording apparatus according to any one of [1] to [4], wherein the position confirmation device captures an image of the single sheet member placed on the alignment stage and generates position data of the single sheet member. Transport device.
[6] The control unit recognizes the end portion of the sheet-like sheet-like member from the image data of the sheet-like sheet-like member generated by the imaging device, and places the sheet-like sheet-like member based on the end portion. The transfer apparatus according to any one of [1] to [5], which controls movement of the alignment stage.
[7] The transport apparatus according to any one of [1] to [6], wherein the movement of the alignment stage controlled by the control unit includes translation and / or rotation in a horizontal plane.
[8] The conveyance according to any one of [1] to [7], wherein the first member is a second belt-shaped member for placing and conveying the single-wafer sheet-shaped member in the alignment stage direction. apparatus.
[9] A method for producing a laminate having a first sheet-like member and a second sheet-like member,
[1] to [8] using the conveying device according to any one of the above, to convey the first sheet-like member, and the first sheet-like member and the second sheet-like member The manufacturing method of a laminated body including bonding a member.
[10] A method for manufacturing a laminate having a sheet-like member and a long member,
[1] to [8] including conveying a sheet-like sheet-like member using the conveying device according to any one of the above, and laminating the sheet-like sheet-like member and the elongated member, A manufacturing method of a layered product.

  The present invention can convey a sheet-like sheet-like member in a flat state, can suppress generation of wrinkles on the sheet-like sheet-like member, and can extend wrinkles that can exist in the sheet-like sheet-like member. Thus, the angle and alignment of the sheet-like member can be easily and highly accurately performed.

It is a side view which shows the outline of the conveying apparatus of this invention. It is a top view which shows the outline of the conveying apparatus of this invention. It is a top view which shows the outline of the conveying apparatus in 1 aspect of this invention. It is a schematic side view which shows the relationship between the transfer machine which concerns on this invention, and a sheet-like sheet-like member. In one mode of the present invention, it is a schematic plan view showing a relation between a suction pad and a sheet-like sheet member in a transfer machine.

According to the present invention, a conveying device for conveying a sheet-like member,
A first member on which the sheet-like member is placed;
An alignment stage for placing and adjusting the position of the sheet-like member,
A first belt-like member for placing the single-wafer sheet-like member and conveying it in the first conveying direction;
The single-wafer sheet-like member placed on the first member is sucked from the upper surface side, and the single-wafer sheet-like member is moved onto the alignment stage while being held by the suction force, and the single-wafer is stopped. 1st transfer machine which mounts a sheet-like member on an alignment stage, Comprising: The sheet | seat-like sheet-like member is the force which expands outside in the surface, hold | maintaining a sheet-like sheet-like member with suction force A first transfer machine capable of acting on
A position confirmation device for confirming the position information of the single-wafer sheet-like member placed on the alignment stage, and the single-wafer sheet-like member is placed based on the position data of the single-wafer sheet-like member generated by the position confirmation device. A control unit that controls the movement of the alignment stage, and thereby adjusts the position of the sheet-like member,
The single-wafer sheet-like member placed on the alignment stage is sucked from its upper surface side, and the single-wafer sheet-like member is moved onto the first belt-like member while being held by the suction force. A conveying device is provided that includes a second transfer machine that places the single-wafer sheet-like member on the first belt-like member by stopping the suction.

  Hereinafter, a transport device for transporting a sheet-like member according to the present invention will be described with reference to the drawings.

FIG. 1 is a side view illustrating an outline of a conveyance device according to an aspect of the present invention. FIG. 2 is a top view illustrating an outline of the transfer device according to an aspect of the present invention. FIG. 3 is a top view illustrating an outline of the conveying device according to an aspect.
1 and 2, reference numeral 1 denotes a conveying device, 10 denotes a sheet-like member, 21 denotes a first member, 30 denotes an alignment stage, 41 denotes a first belt-like member, 51 denotes a first transfer machine, 52 Is a second transfer machine, 60 is a position confirmation device, 70 is a control unit, 71 is a cross roller ring (FIG. 2), and a broken line is an example of a moving direction of a sheet-like sheet member. , And can move along the broken arrow direction and the opposite direction. A double arrow in the alignment stage 30 is an example of an operation direction of the alignment stage, and a double arrow in the transfer machines 51 and 52 is an example of an operation direction of the transfer machine.
In FIG. 3, in addition to the reference numerals described with reference to FIG. 1, reference numeral 22 denotes a second belt-like member.
The transport apparatus 1 of the present invention includes a control unit 70, and the control unit 70 may be incorporated in the alignment stage 30, for example.

(Single-wafer sheet-like member)
Examples of the sheet-like member 10 that can be transported by the transport device of the present invention include an adsorbing member, a printed wiring board, and an optical member, and can be suitably used for a thin member that is likely to be curled or wrinkled. In a certain aspect, a sheet | seat sheet-like member is an optical member, for example, is 50-500 micrometers in thickness. The dimensions of the sheet-like member are, for example, a width of 30 cm to 150 cm and a length of 30 cm to 300 cm.
The optical member can have at least one optical film selected from, for example, a retardation film, a polarizing film, an antireflection film, a viewing angle enhancement film, a brightness enhancement film, and the like. The optical member may have a single layer structure of these optical films, or may have a multilayer structure in which a plurality of films including the above optical film are laminated.
In the case of the conveying device of the present invention, a (laminate) member that is likely to cause curling, wrinkling, folding, etc., such as a sheet-like member having a thickness of 120 μm or less and a member having a multilayer structure having a thickness of 120 μm or less. On the other hand, stable conveyance is possible. For example, such a remarkable effect can be obtained even with a sheet-like member having a multilayer structure having a polarizing film.

(First member)
The first member 21 on which the sheet-like member 10 is placed may be, for example, a stocker or the like that can be placed by laminating a plurality of layers of the sheet-like member 10, such as a belt-like member. Also good.
In one embodiment, the first member 21 can be a second belt-like member 22 for placing the single-wafer sheet-like member 10 and transporting it in the direction of the alignment stage (see, for example, FIG. 3).
As described above, the first member 21, for example, the second belt-like member 22 is disposed on the upstream side of the first belt-like member 41.

When the second belt-like member 22 transports the single-wafer sheet-like member 10, the second belt-like member is parallel to the direction in which the first belt-like member 41 transports the single-wafer sheet-like member 10. May be provided.
In a certain aspect, according to the optical axis etc. of a sheet-like sheet-like member, arbitrary directions with respect to the direction which conveys the sheet-like sheet-like member 10 in the 1st belt-like member 41, for example, 1st belt shape The conveyance direction of the second belt-shaped member 22 may be provided so as to intersect with the conveyance direction of the member 41 at an angle of 15 ° to 90 °.
In one embodiment, the conveying direction of the second belt-shaped member 22 is perpendicular to the direction of conveying the sheet-like member 10 in the first belt-shaped member 41 (intersects at an angle of 90 °). May be provided).
With the transport device of the present invention, even when the transport direction of the second belt-like member 22 is provided at an arbitrary angle, the sheet-like sheet-like member 10 can be aligned with high accuracy. For example, even if it is the sheet-like sheet-like member 10 which has an optical axis, the conveyance apparatus of this invention can convey the sheet-like sheet-like member 10 continuously, sheet extension, for example, wrinkle of the sheet-like sheet-like member 10 The distortion can be removed, and the angle and position of the sheet-like member 10 can be adjusted with higher accuracy. In addition, it is possible to shorten the time from the alignment of the sheet-like member 10 to the conveyance of the sheet-like member 10 to the first belt-like member 41.

(First transfer machine)
The transport apparatus of the present invention has a first transfer machine 51. The first transfer device 51 sucks the sheet-like sheet-like member 10 placed on the first member 21 from the upper surface side, and aligns the sheet-like sheet-like member 10 with the suction force. The sheet-like member 10 is opened by being moved onto the stage 30 and stopped by suction, and placed on the alignment stage 30. The 1st transfer machine 51 can make the force which expands outside in the surface act on a sheet | seat sheet-like member, hold | maintaining a sheet | seat sheet-like member with a suction force.
The transfer machine 51 in the present invention can stretch and convey a sheet-like member with a uniform force.

In a certain aspect, the 1st transfer machine 51 attracts | sucks the sheet material 10 from the position facing the upper surface of the sheet material 10 to convey. For example, in the case of the sheet-like sheet member 10 having a thickness of about 300 μm, in order to suck the sheet-like member 10 in a flat state, the distance between the first transfer device 51 and the sheet-like sheet member 10 is set to be the same. It sets to the range of 0-5 mm, and can suck the sheet | seat-like member 10. By performing suction from such a position, the sheet-like sheet-like member can be more effectively transported in a flat state, and the generation of wrinkles can be suppressed.
Moreover, when holding the sheet-like sheet-like member 10 with suction force, when the thickness of the sheet-like sheet-like member 10 is 50 to 500 μm, the suction force is in the range of 0.1 to 50 kPa, for example, in the range of 1 to 20 kPa. Is within. By sucking the ambient atmosphere with a suction force in such a range, the sheet-like sheet-like member 10 can be sucked, damage to the sheet-like sheet-like member 10 can be suppressed, and the occurrence of wrinkles, curls, etc. can also be suppressed. Further, the thin sheet-like member 10 can be efficiently conveyed.

The 1st transfer machine 51 can make the force which expands outside in the surface act on the sheet | seat sheet-like member 10, holding the sheet-like sheet-like member 10 with a suction force.
The 1st transfer machine 51 extends the wrinkle of the sheet | seat sheet-like member 10 by making the force which expands outside in the surface act on the sheet-like sheet-like member 10, and the sheet | seat sheet-like member 10 Can be removed and planarization can be performed. Furthermore, curling of the sheet-like member 10 during conveyance, and conveyance in a state where the axial direction, for example, the optical axis is shifted, can be suppressed, so that the alignment of the sheet-like member 10 can be performed with higher accuracy. Can be done in a short time.

  In a certain aspect, the 1st transfer machine 51 has the force which expands outside in the arbitrary positions of the sheet-like sheet-like member 10, for example, the position along each side, a center part, etc. in the surface. It can be made to act on the sheet-like member 10. For example, in order to suppress the occurrence of slack in the sheet-like sheet-like member, in addition to the four corners of the sheet-like sheet-like member 10, for example, at arbitrary positions along each side, at the center of the sheet-like sheet-like member 10, etc. The force that expands outward in the plane can be applied to the sheet-like member 10.

Thus, since the force which expands outside in the surface in the arbitrary positions of the sheet-like sheet-like member 10 can be made to act on the sheet-like sheet-like member 10, the sheet-like sheet-like member 10 to convey The sheet can be effectively stretched according to the thickness of the sheet. In a certain aspect, the force which expands outside can be made to act on a sheet | seat sheet-like member at the four corners of the sheet-like member 10 and the vicinity of the center of each side. In addition, according to the sheet | seat sheet-like member 10 to convey, the position which applies the force extended to an outer side can be adjusted suitably.
For example, in addition to the four corners of the single-wafer sheet-like member 10, a force that expands outward is applied to the single-wafer sheet-like member using a plurality of suction pads according to the thickness and physical properties of the single-wafer sheet-like member. By doing so, even a very thin sheet member (for example, 120 μm or less in thickness) can prevent wrinkling, bending, and bending.
For example, in addition to the four corners of the sheet-like member 10, a plurality of suction pads are used to convey the sheet-like member 10 sucked and held with wrinkles extended, and the sheet-like member 10 is moved to the alignment stage 30. Can be placed flat in the plane.
When a sheet-like member is conveyed in such a manner, for example, even a very thin sheet-like member can not only prevent wrinkles, bends and breaks, but also convey the sheet-like member at high speed. In addition, the working efficiency can be greatly improved.

  In a certain aspect, the outward expanding force that acts on the sheet-like member 10 exhibits a size that does not twist, loosen, or wrinkle the sheet-like member 10. For example, as will be described later, when the first transfer machine 51 has a suction pad, the force to be expanded for each suction pad may be different depending on the state of the sheet-like sheet-like member 10. The suction force in the suction pad may be adjusted so that the force acts. For example, when the sheet-like member 10 having an optical axis is conveyed, the sheet-like member 10 can be conveyed so as not to warp.

  The first transfer machine 51 sucks the single-wafer sheet-like member 10 placed on the first member 21 from its upper surface side, and holds the single-wafer sheet-like member 10 by suction force in the alignment stage. Move up 30. In one embodiment, the first transfer machine 51 is a plurality of suction pads that can suck the ambient atmosphere and have a pad portion that comes into contact with the single-wafer sheet-like member 10, and is outside on a predetermined plane. Includes a suction pad that can be moved to and from each other.

For example, FIG. 4 is a schematic side view showing the relationship between the transfer machine and the sheet-like sheet-like member in one embodiment of the present invention, and FIG. 5 is observed from the transfer machine side in one embodiment of the present invention. It is a schematic plan view which shows the relationship between a suction pad and a sheet-like sheet-like member.
4 and 5, reference numeral 51 denotes a first transfer machine (52 denotes a second transfer machine), reference numeral 81 denotes a suction pad, and an arrow in FIG. 5 indicates a force that expands outward. Show.
In one embodiment, for example, as shown in FIG. 5, the force of expanding outward may be changed for each part of the suction pad. Thereby, a sheet-like sheet-like member can be extended more effectively, and a wrinkle and distortion can be removed.

  By having the suction pad 81, it is possible to cause the sheet sheet member 10 to effectively act on the sheet sheet member 10 while expanding the sheet sheet member 10 to the outside in the plane while holding the sheet member 10 with a suction force. Furthermore, for example, while the thin sheet-like member 10 is sucked and held, the sheet-like member 10 can be prevented from being damaged, curled, and twisted. In addition, by having a plurality of suction pads, the suction force can be changed for each suction pad, and for example, a force for expanding outwardly can be applied to the wrinkled site. . Moreover, the sheet-like sheet-like member 10 can be conveyed in a flatter state.

In one aspect, the first transfer machine 51 has a pad portion, for example, a suction pad 81, so that the transport device of the present invention can more effectively transport the sheet-like member 10 in a flat state, In addition, the occurrence of wrinkles and curls on the sheet-like member can be suppressed, the sheet-like member can be extended, and the wrinkles that can exist in the sheet-like member 10 can be extended. Since such an effect can be obtained when transported to the alignment stage, the alignment of the single-wafer sheet-like member can be easily performed using the alignment stage according to the present invention, and the alignment can be performed with high accuracy. be able to.
Even in such an embodiment, a suction force within the above range can be applied.

The shape of the suction pad is not particularly limited. For example, the shape of the suction portion of the suction pad includes a rectangle, an ellipse, a circle, and the like. For example, the suction pad can be evenly provided and a stable holding force can be more effectively maintained.
In such an embodiment, the dimension of the suction portion of the suction pad has a diameter of 5 to 80 mm, for example.
The material of the suction pad is, for example, a flexible material, and the flexible member can effectively stretch the wrinkles without damaging the sheet-like member. For example, a suction pad containing nitrile rubber, silicon rubber, natural rubber, fluorine rubber, or the like.

  In a certain aspect, the 1st transfer machine 51 can be translated and / or rotated in a horizontal plane, for example. For example, when the sheet-like member 10 is conveyed from the first member to the alignment stage 30, the axial direction, for example, the optical axis direction is corrected in advance so as to follow the conveying direction of the first belt-like member 41. The sheet-like member 10 may be placed on the alignment stage 30. Thereby, the position adjustment in the alignment stage can be performed more efficiently.

(Alignment stage)
The transport apparatus 1 of the present invention has an alignment stage 30 for placing and adjusting the position of the sheet-like member 10. Further, based on the position confirmation device 60 for confirming the position information of the sheet-like sheet-like member 10 placed on the alignment stage 30, and the position data of the sheet-like sheet-like member 10 generated by the position confirmation device 60, A control unit 70 that controls the movement of the alignment stage 30 on which the sheet-like member 10 is placed, and adjusts the position of the sheet-like member 10 thereby.

  In the conveying apparatus of the present invention, the alignment stage 30 can align the sheet-like sheet-like member 10 conveyed by the first transfer machine 51, for example, the sheet-like sheet-like member 10 with the sheet stretched. Since the first sheet-like sheet-like member 10 is conveyed in a state where the sheet is stretched by the first transfer device 51, for example, the angle and alignment of the thin sheet-like sheet-like member 10 can be set higher on the alignment stage 30. It can be done accurately.

  Moreover, since the sheet-like member 10 can be placed on the alignment stage 30 for alignment, even a thin sheet-like member 10 can be aligned in a stable state with high accuracy. Angle and position can be adjusted.

In one embodiment, the alignment stage 30 includes a plurality of suction holes that suck the sheet-like member 10 from its lower surface side and hold the sheet-like member on the alignment stage by suction force. By holding the single-wafer sheet-like member 10 on the alignment stage 30 with suction force using the suction holes, the single-sheet-like sheet shape is finely adjusted by the control unit 70 while the placement position of the single-wafer sheet-like member is finely corrected. The displacement of the member 10 can be suppressed, and the occurrence of wrinkles, curls, breaks, and the like can be suppressed.
The suction force may act while finely correcting the placement position of the single-wafer sheet-like member 10 after the single-wafer sheet-like member 10 is placed on the alignment stage 30 from the first transfer device 51. . Further, the suction force may act until the single-wafer sheet-like member 10 is conveyed via the second transfer machine 52.

  The suction force in the alignment stage 30 is, for example, 0.01 to 50 kPa, and in some embodiments, 0.1 to 20 kPa. By setting the suction force in such a range, the sheet-like member 10 can be efficiently moved between the transfer machine (51, 52) and the alignment stage 30, and the sheet-like member is also provided. The occurrence of ten curls, wrinkles, breaks, etc. can be more effectively suppressed.

  In addition, the alignment stage 30 removes wrinkles, curls or distortions generated on the single-wafer sheet-like member while holding the single-wafer sheet-like member 10 with a suction force, like the first transfer machine 51. A force that expands outward in the plane may be applied to the sheet-like member 10. The force that expands to the outside by the suction force changes the suction timing in a plurality of suction holes arranged on the alignment stage according to the arrangement position of the sheet-like member 10 in the horizontal plane of the alignment stage 30. Can be generated. For example, by sucking first from a suction hole located in the center of the sheet-like member 10 and sequentially applying suction from the other suction holes toward the outer periphery of the sheet-like member 10, the sheet A force can be generated to expand outwardly with respect to the member 10. Thereby, wrinkles, curls, or distortions generated in the single-wafer sheet-like member 10 can be removed better and more effectively.

  The alignment stage 30 according to the present invention can perform the angle and alignment of the sheet-like member 10 with high accuracy by the following position confirmation device 60 and the control unit 70.

(Position confirmation device)
The position confirmation device 60 is a device for confirming position information of the single-wafer sheet-like member 10 placed on the alignment stage 30.
For example, as shown in FIG. 1, the position confirmation device 60 can be arranged at any position where the position information of the single-wafer sheet-like member 10 placed on the alignment stage 30 can be confirmed, and confirms the position information. Depending on the means, it can be placed at any position.
For example, the position confirmation means of the position confirmation device 60 can be selected according to the type and structure of the sheet-like sheet member to be conveyed. Further, according to the required angle and alignment accuracy, the transport device of the present invention may include a plurality of position confirmation devices 60.

In a certain aspect, the position confirmation device 60 that confirms the position information of the single-wafer sheet-like member 10 placed on the alignment stage 30 images, for example, the single-wafer sheet-like member 10 placed on the alignment stage 30. Then, position data, for example, image data of the sheet-like sheet member 10 is generated and the position is confirmed.
The position confirmation device 60 can confirm position information of an end portion, for example, an end side of the sheet-like member 10.
In a certain aspect, the position of at least one side in the sheet-like sheet-like member 10 may be confirmed, and the position of at least one side along the axial direction may be confirmed according to the axial arrangement of the sheet-like sheet-like member. , And at least the positions of two adjacent sides may be confirmed.
Moreover, you may confirm the positional information on at least 1 of the corner part of a sheet | seat-like member. In a certain aspect, the position confirmation device 60 confirms, for example, the positions of at least two corners of the sheet-like member 10, for example, the positions of corners located on the diagonal line of the sheet-like member 10. Thus, the position information can be acquired with higher accuracy.

Thus, in the present invention, by confirming the position information of the sheet-like member 10 using the position confirmation device 60, the angle and position of the sheet-like member 10 can be adjusted with high accuracy. The axial direction can be adjusted with high accuracy.
Moreover, in the conveying apparatus of the present invention, the sheet transfer member 51 is conveyed by the first transfer machine 51, and the alignment mark 30 is provided on the sheet transfer member 10 by having the alignment stage 30 according to the present invention. Even if it is not attached, angle and positioning can be performed with high accuracy. For this reason, for example, the process required for manufacturing the laminate can be simplified, and the tact time can be reduced. Of course, if desired, an alignment mark may be attached to the sheet-like member 10.

In a certain aspect, the position confirmation device 60 images the single sheet member 10 placed on the alignment stage 30 and generates position data of the single sheet member 10. Such a position confirmation device 60 includes a semiconductor element. For example, a video camera, a digital camera, a detector, or the like that incorporates such an image sensor, such as a CCD image sensor or a CMOS image sensor.
Since such a position confirmation device 60 can confirm the position without contacting the sheet-like sheet-like member 10, the thin sheet-like sheet-like member 10 can be prevented from being damaged, curled, scratched, or the like. Moreover, since position confirmation can be performed without contacting the sheet-like sheet-like member 10, for example, when the sheet-like sheet-like member 10 has optical characteristics, the optical characteristics are not impaired during position confirmation.

  In the transport apparatus of the present invention, the sheet-like member 10 transported by the first transfer machine is transported to the alignment stage 30 in a state where the sheet is stretched. Even with the confirmation device 60, the position of the edge or the like of the sheet-like member can be accurately confirmed. Further, the angle and position of the thin sheet-like member can be adjusted with higher accuracy on the alignment stage.

  In one embodiment, the position confirmation device 60 may be a probe device that physically contacts the probe with the single-wafer sheet-like member 10. For example, the probe device can be selected according to the sheet-like member 10 to be conveyed. For example, when the object (sheet-fed sheet-like member 10) is firm, the probe contact type position confirmation device 60 may be used. Moreover, you may confirm the position of the sheet-like sheet-like member 10 using a photoelectric sensor.

(Control part)
The transport device 1 of the present invention controls the movement of the alignment stage 30 on which the single sheet member 10 is placed based on the position data of the single sheet member 10 generated by the position confirmation device 60, Thus, a control unit for adjusting the position of the sheet-like member 10 is provided.

  The controller 70 can correct the positional deviation of the sheet-like member 10 from a pre-recorded reference. The reference recorded in advance can be set as appropriate according to the purpose. For example, the reference can be set based on the position information of the end side, the position information of at least one side, and the like.

For example, the movement of the alignment stage controlled by the control unit 70 includes translation and / or rotation in a horizontal plane. For example, such a movement can be obtained by a cross roller ring or the like.
The control unit 70 controls such a movement, so that the single-wafer sheet-like member 10 placed on the alignment stage 30 according to the present invention can be aligned with higher accuracy.

In one aspect, the control unit 70 recognizes an end portion of the sheet-like sheet-like member 10 from the image data of the sheet-like sheet-like member 10 generated by the imaging apparatus, and based on the end portion, the sheet-like sheet-like member The movement of the alignment stage 30 on which 10 is placed is controlled.
By controlling the movement of the alignment stage through such a process, the sheet-like member 10 can be aligned in a shorter time and with higher accuracy. Further, since the position can be confirmed and aligned without contacting the sheet-like member 10, for example, even if the sheet-like member 10 is thin, the sheet-like member 10 is not damaged, curled, or damaged. Generation etc. can be prevented.

For example, in the control unit 70, the sheet-like member 10 can be rotated at an arbitrary angle, for example, a range of 0 to 90 °, and the horizontal movement is within a range of 0.1 to 30 mm. it can. In this way, the control unit 70 can adjust the angle and position of the sheet-like sheet-like member 10 according to the required mode.
In one embodiment, the rotational angle shift in the horizontal plane with respect to the reference position is within a range of 0.01 to 0.05 °, for example, within a range of 0.03 to 0.05 °. In addition, the displacement (XY) direction in the horizontal direction with respect to the reference position is in the range of 0.2 to 1.0 mm. Thus, the angle and position of the sheet-like member 10 can be adjusted with high accuracy.

(Second transfer machine)
The conveyance apparatus 1 of this invention may have the 2nd transfer machine 52 as FIG. 1-3 shows. The second transfer device 52 sucks from the upper surface side of the sheet-like member 10 placed on the alignment stage 30 and whose position is adjusted, and holds the sheet-like member 10 by suction force. Then, the sheet-like member 10 is placed on the first belt-like member 41 by moving it onto the first belt-like member and stopping the suction.

In a certain aspect, the 2nd transfer machine 52 attracts | sucks the sheet material 10 from the position facing the upper surface of the sheet material 10 to convey. Further, the second transfer machine 52 can suck the ambient atmosphere. The 2nd transfer machine 52 can convey the sheet-like sheet-like member 10 in a flat state, and can suppress generation | occurrence | production of a wrinkle. Moreover, when holding the sheet-like sheet-like member 10 with suction force, when the thickness of the sheet-like sheet-like member 10 is 50 to 500 μm, the suction force is in the range of 0.01 to 50 kPa, for example, 0.1 to 20 kPa. Is within the range. By suctioning with a suction force within such a range, breakage of the sheet-like sheet-like member 10 can be suppressed, and generation of wrinkles and curls can also be suppressed.
In the second transfer machine 52, it is necessary to transport the sheet-like member 10 with higher accuracy so that the axial direction adjusted in the alignment stage 30 is not shifted. Can meet such demands.
Further, by using the second transfer machine 52 in combination with the first transfer machine 51, the sheet-like sheet-like member 10 can be independently conveyed, so that the tact time can be shortened.
In one embodiment, the suction force of the first transfer machine and the suction force of the second transfer machine can be comparable.

The second transfer machine 52 may apply a force to the sheet-like member to expand outward in the plane while holding the sheet-like member 10 with a suction force. In a certain aspect, the 2nd transfer machine 52 makes the force expanded outside in the surface act on the sheet | seat-like member 10.
By applying such a force that expands outward, the sheet-like member 10 can be stretched and flattened, and curling of the sheet-like member 10 during conveyance is suppressed. Since it can do, for example, a later pasting process can be advanced efficiently. Moreover, it can convey, without shifting the angle performed in the alignment stage 30, and the axial direction of the sheet-like sheet-like member 10 aligned.

  In one aspect, the second transfer machine 52 is added to the four corners of the sheet-like member 10, and in one aspect, at any position of the sheet-like member 10, for example, the four corners of the sheet-like member 10. Even at the position along each side, the central portion, and the like, a force that expands outward in the plane can be applied to the sheet-like member 10. Thus, since the force that expands outward in the plane at any position of the sheet-like member 10 can be applied to the sheet-like member 10, depending on the state of the sheet to be conveyed, The sheet-like member 10 can be effectively stretched. In addition, according to the sheet | seat sheet-like member 10 to convey, the position which applies the force extended to an outer side can be adjusted suitably. In a certain aspect, the 2nd transfer machine 52 may be the same specification as the 1st transfer machine 51 mentioned above, and may have the same effect | action and effect.

  In a certain aspect, the force which expands outside acts on the magnitude | size which does not twist, loosen, and wrinkle by the sheet-like sheet-like member 10. For example, when the 2nd transfer machine 52 has a suction pad, according to the form etc. of the sheet-like sheet-like member 10, the force extended for every suction pad may differ, and a comparable force acts. In this way, the suction force in the suction pad may be adjusted.

  In a certain aspect, the 2nd transfer machine 52 contains the some suction pad which has a pad part which can attract | suck ambient atmosphere and contacts a sheet-like sheet-like member. For example, it includes a suction pad that can be extended and moved outward in a predetermined plane.

  By having the suction pad, the sheet sheet-like member 10 can be effectively acted on the sheet-like sheet member 10 while the sheet-like sheet member 10 is held by the suction force and expanded outwardly in the plane. Furthermore, for example, while the thin sheet-like member 10 is sucked and held, the sheet-like member 10 can be prevented from being damaged, curled, and twisted. In addition, by having a plurality of suction pads, the suction force can be changed for each suction pad, and for example, a force for expanding outwardly can be applied to the wrinkled site. . Moreover, the sheet-like sheet-like member 10 can be conveyed in a flatter state.

  In a certain aspect, the second transfer machine 52 has a pad portion, for example, a suction pad 81 as shown in FIGS. 10 can be conveyed in a flat state. Furthermore, the generation of wrinkles and curls on the sheet-like member can be suppressed, the sheet-like member can be extended, and the wrinkles that can exist in the sheet-like member 10 can be extended. For example, such an effect is obtained when the sheet-like member 10 is transported from the alignment stage 30 to the first belt-like member 41. Thus, if it is the conveying apparatus of this invention, after aligning a sheet-like sheet-like member using the alignment stage 30 which concerns on this invention, the high precision of the alignment obtained with the alignment stage 30 is obtained. The sheet-like sheet-like member 10 can be conveyed to the first belt-like member 41 in the maintained state.

The shape of the suction pad is not particularly limited. For example, the shape of the suction portion of the suction pad includes a rectangle, an ellipse, a circle, and the like. For example, the suction pad can be evenly provided and a stable holding force can be more effectively maintained.
In such an embodiment, the dimension of the suction portion of the suction pad has a diameter of 5 to 80 mm, for example.
The material of the suction pad is, for example, a flexible material. By being a flexible member, wrinkles can be effectively stretched without damaging the sheet-like sheet-like member. For example, a suction pad containing nitrile rubber, silicon rubber, natural rubber, fluorine rubber, or the like.

In one embodiment, the first transfer machine and the second transfer machine are separate or common transfer machines. In a mode in which the first transfer machine and the second transfer machine are separate, for example, as shown in FIGS. 2 and 3, the transfer apparatus of the present invention has independent first transfer machines 51. And a second transfer machine 52.
On the other hand, in the aspect in which the first transfer machine 51 and the second transfer machine 52 are a common transfer machine, for example, as shown in FIG. 1, one transfer machine is the first transfer machine. And act as a second transfer machine. In this aspect, for example, when there is a difference in conditions such as suction force and presence / absence of rotation between conveyance as the first transfer machine 51 and conveyance as the second transfer machine, in each transfer machine Various conditions can be adjusted by computer control or the like so that an appropriate suction force can be exhibited.

(First belt-like member)
As shown in FIGS. 1, 2, and 3, the transport device 1 of the present invention has a first belt-like member 41. The first belt-like member 41 places the single-wafer sheet-like member 10 conveyed from the alignment stage 30 and conveys it in the first conveying direction. In a certain aspect, the 1st conveyance direction is a direction which advances to other processes from alignment stage 30, for example, may be a pasting roll direction.

As the first belt-like member 41, a member known in the technical field may be used.
In one embodiment, the first belt-like member 41 has a plurality of holes penetrating in the thickness direction, and is opposite to the side on which the sheet-like sheet-like member is placed with respect to the first belt-like member. This is a mode in which the sheet-like sheet-like member is held against the belt-like member by the suction force through the hole of the belt-like member by sucking the ambient atmosphere through the suction part disposed in the belt-like member.
The suction force in the first belt-like member 41 may be set in a range in which the suction force is different in at least two regions of the sheet-like member. For example, the suction force may be within a range of 0.01 to 50 kPa, and the suction force may be changed within a range of 0.02 to 50 kPa from the upstream side toward the downstream side.

(Laminate manufacturing method)
According to another aspect of the present invention, there is provided a method for manufacturing a laminated body having a first sheet-like member and a second sheet-like member, wherein the transport device according to the present invention is used to The manufacturing method of a laminated body including conveying 1 sheet-fed sheet-like member and bonding this 1st sheet-fed sheet-like member and a 2nd sheet-fed sheet-like member is provided.
In another aspect, it is a manufacturing method of a layered product which has a sheet-like sheet-like member and an elongate member, and conveys a sheet-like sheet-like member using the conveyance device concerning the above-mentioned present invention, and There is provided a method for producing a laminate including bonding the sheet-like member and a long member.

By conveying the first sheet-like member using the conveying device of the present invention, the first sheet-like member can be conveyed with the first sheet-like member extended, and the wrinkles can be extended and flattened. Furthermore, the angle and the position can be adjusted without being affected by the curl of the first sheet-like member, and the first sheet-like member and the second sheet-like member are bonded together. Can be done with high accuracy.
In a certain aspect, a 2nd sheet-like sheet-like member and an elongate member are not specifically limited, For example, it can be a separate film, a protective film, and an optical member.
According to the manufacturing method of the present invention, a thin sheet-like member (for example, a thickness of 50 to 300 μm) can be angled and aligned with high accuracy and can be bonded, so that the function it has can be demonstrated and the yield is good. A laminate can be produced.

  The present invention provides a conveying apparatus that can stretch a sheet-like sheet-like member, can be conveyed in a flat state, and can easily and highly accurately position the sheet-like sheet-like member. Moreover, the conveying apparatus of this invention is a conveying apparatus which can suppress generation | occurrence | production of a wrinkle to a sheet-like sheet-like member, generation | occurrence | production of a curl, and can extend the wrinkle which exists in a sheet-like sheet-like member. Furthermore, this invention provides the manufacturing method of a laminated body including conveying a sheet-like sheet-like member using such a conveying apparatus.

DESCRIPTION OF SYMBOLS 1 Conveyance apparatus 10 Single sheet | seat sheet-like member 21 1st member 22 2nd belt-like member 30 Alignment stage 41 1st belt-like member 51 1st transfer machine 52 2nd transfer machine 60 Position confirmation apparatus 70 Control Part 71 Cross roller ring 81 Suction pad

Claims (10)

A transport device for transporting a sheet-like member,
A first member on which the sheet-like member is placed;
An alignment stage for placing and adjusting the position of the sheet-like member,
A first belt-like member for placing the single-wafer sheet-like member and conveying it in the first conveying direction;
The single-wafer sheet-like member placed on the first member is sucked from the upper surface side, and the single-wafer sheet-like member is moved onto the alignment stage while being held by the suction force, and the single-wafer is stopped. 1st transfer machine which mounts a sheet-like member on an alignment stage, Comprising: The sheet | seat-like sheet-like member is the force which expands outside in the surface, hold | maintaining a sheet-like sheet-like member with suction force A first transfer machine capable of acting on
A position confirmation device for confirming the position information of the sheet-like member placed on the alignment stage;
Based on the position data of the sheet-like member generated by the position confirmation device, the control unit controls the movement of the alignment stage on which the sheet-like member is placed, thereby adjusting the position of the sheet-like member. When,
The single-wafer sheet-like member placed on the alignment stage is sucked from its upper surface side, and the single-wafer sheet-like member is moved onto the first belt-like member while being held by the suction force. And a second transfer machine that places the single-wafer sheet-like member on the first belt-like member by stopping the suction.   The first transfer machine is a plurality of suction pads that can suck the ambient atmosphere and have a pad portion that contacts the sheet-like sheet-like member, and can be extended and moved to each other outside in a predetermined plane. The transport apparatus according to claim 1, comprising a simple suction pad.   The transport apparatus according to claim 1 or 2, wherein the second transfer device includes a plurality of suction pads that can suck the ambient atmosphere and have a pad portion that contacts the sheet-like sheet-like member.   The transport apparatus according to any one of claims 1 to 3, wherein the first transfer machine and the second transfer machine are separate or common transfer machines.   5. The transport device according to claim 1, wherein the position confirmation device captures an image of the single sheet member placed on the alignment stage and generates position data of the single sheet member.   The control unit recognizes an end portion of the sheet-like sheet-like member from the image data of the sheet-like sheet-like member generated by the imaging device, and based on the end portion, the alignment stage on which the sheet-like sheet-like member is placed. The conveyance apparatus of any one of Claim 1 to 5 which controls a movement.   The transport apparatus according to any one of claims 1 to 6, wherein the movement of the alignment stage controlled by the control unit includes translation and / or rotation in a horizontal plane.   The conveying apparatus according to any one of claims 1 to 7, wherein the first member is a second belt-shaped member for placing a single-wafer sheet-shaped member and conveying the sheet-shaped member in the alignment stage direction. A method for producing a laminate having a first sheet-like member and a second sheet-like member,
The first sheet-like sheet-like member is conveyed using the conveying device according to any one of claims 1 to 8, and the first sheet-like sheet-like member and the second sheet-like sheet-like member The manufacturing method of a laminated body including bonding. A method for producing a laminate having a sheet-like member and an elongated member,
Lamination including conveying a sheet-like member using the conveying device according to any one of claims 1 to 8, and laminating the sheet-like member and a long member. Body manufacturing method.

Images