JP2018174230A - 基板処理装置 - Google Patents
基板処理装置 Download PDFInfo
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- JP2018174230A JP2018174230A JP2017071573A JP2017071573A JP2018174230A JP 2018174230 A JP2018174230 A JP 2018174230A JP 2017071573 A JP2017071573 A JP 2017071573A JP 2017071573 A JP2017071573 A JP 2017071573A JP 2018174230 A JP2018174230 A JP 2018174230A
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- substrate
- polishing
- elastic film
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/27—Work carriers
- B24B37/30—Work carriers for single side lapping of plane surfaces
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B49/00—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation
- B24B49/10—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation involving electrical means
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/304—Mechanical treatment, e.g. grinding, polishing, cutting
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/306—Chemical or electrical treatment, e.g. electrolytic etching
- H01L21/30625—With simultaneous mechanical treatment, e.g. mechanico-chemical polishing
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67092—Apparatus for mechanical treatment
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67155—Apparatus for manufacturing or treating in a plurality of work-stations
- H01L21/67207—Apparatus for manufacturing or treating in a plurality of work-stations comprising a chamber adapted to a particular process
- H01L21/67219—Apparatus for manufacturing or treating in a plurality of work-stations comprising a chamber adapted to a particular process comprising at least one polishing chamber
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
- H01L21/67259—Position monitoring, e.g. misposition detection or presence detection
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
- H01L21/67294—Apparatus for monitoring, sorting or marking using identification means, e.g. labels on substrates or labels on containers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
- H01L22/20—Sequence of activities consisting of a plurality of measurements, corrections, marking or sorting steps
- H01L22/26—Acting in response to an ongoing measurement without interruption of processing, e.g. endpoint detection, in-situ thickness measurement
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q15/00—Automatic control or regulation of feed movement, cutting velocity or position of tool or work
- B23Q15/007—Automatic control or regulation of feed movement, cutting velocity or position of tool or work while the tool acts upon the workpiece
- B23Q15/16—Compensation for wear of the tool
Abstract
Description
15 制御装置
40 研磨ユニット
41 トップリング
48 ヘッド本体
49,130 リテーナリング
80、102,110,120 弾性膜
85,86,103a〜103d、113〜117,121〜124,131〜133 センサ
90,91 検出器
W ウェハ
Claims (9)
- 基板を処理する基板処理装置であって、
前記基板処理装置において使用される消耗品と、
前記消耗品に取り付けられ、前記消耗品の物理量を測定するとともに、前記物理量を記憶する記憶部及び通信部を備える少なくとも1つのセンサと、
前記消耗品の近傍に設けられ、前記消耗品に取り付けられた前記センサとの間で情報の読み書きを行う検出器と、
前記検出器と接続され、前記センサから読み出された前記消耗品の物理量に基づき、基板処理装置における処理条件を設定する制御装置とを備えることを特徴とする基板処理装置。 - 前記記憶部には前記センサの識別情報が記憶されており、前記制御装置は、前記センサから読み出された前記識別情報に基づいて、前記消耗品が取り付けられた前記基板処理装置の駆動の可否を決定することを特徴とする、請求項1記載の基板処理装置。
- 前記制御装置は、前記基板処理装置に異常が発生したときに、前記基板の処理条件に関する情報を前記センサ内の記憶部に記録することを特徴とする、請求項1又は2記載の基板処理装置。
- 前記基板処理装置は、前記基板を研磨する研磨パッドと、前記基板を保持して前記研磨パッドに押しつけるための基板保持部とを備えた基板研磨装置であって、
前記消耗品は、前記基板保持部に取り付けられて前記基板の研磨面とは反対側の面を保持する弾性膜であり、
前記センサは前記弾性膜の歪みを計測する歪みセンサであり、
前記制御装置は、前記歪みセンサで計測された前記弾性膜の歪み情報に基づき、基板処理装置における処理条件を設定することを特徴とする、請求項1〜3のいずれか1項に記載の基板処理装置。 - 前記弾性膜と前記基板保持部との間に少なくとも一つの圧力室が形成されており、
前記制御装置は、前記歪みセンサで計測された前記弾性膜の歪み情報に基づき、前記圧力室内の圧力を調整することを特徴とする、請求項4記載の基板処理装置。 - 前記基板研磨装置は、前記基板が保持された前記弾性膜の側壁に対して気体又は液体を噴射することで、研磨済みの前記基板を前記弾性膜から剥離させるための噴射部を備えており、
前記制御装置は、前記噴射部からの気体又は液体が、前記弾性膜と前記基板との境界に噴射されるように、前記弾性膜の歪み情報に基づき前記圧力室内の圧力を調整することを特徴とする、請求項4記載の基板処理装置。 - 前記噴射部は、前記気体又は液体の噴射角度が調整可能とされており、
前記弾性膜と前記基板との境界部分を撮像する撮像部と、
前記撮像手段で得られた画像より、前記境界部分の位置を検出する画像処理部と、
前記画像処理部で検出された前記境界部分の位置に基づき、前記噴射部による噴射角度を決定して、前記噴射角度を調節する噴射角度調節部とを備えたことを特徴とする、請求項6記載の基板処理装置。 - 前記基板処理装置は、前記基板を研磨する研磨パッドと、前記基板を保持して前記研磨パッドに押しつけるための基板保持部とを備えた基板研磨装置であって、
前記消耗品は、前記基板の外周を支持するリテーナリングであり、
前記センサは前記リテーナリングの歪みを計測する複数の歪みセンサであり、
前記制御装置は、前記複数の歪みセンサで検出された歪み量のばらつきが所定値以内であるかを検出することを特徴とする、請求項1〜3のいずれか1項に記載の基板処理装置。 - 前記基板処理装置は、前記基板を研磨する研磨パッドと、前記基板を保持して前記研磨パッドに押しつけるための基板保持部とを備えた基板研磨装置であって、
前記消耗品は、前記基板の外周を支持するリテーナリングであり、
前記センサは前記リテーナリングの歪みを計測する複数の歪みセンサであり、
前記制御装置は、前記複数の歪みセンサで検出された歪み量の分布に応じて、前記基板の処理条件を変更することを特徴とする、請求項1〜3のいずれか1項に記載の基板処理装置。
Priority Applications (7)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2017071573A JP6990980B2 (ja) | 2017-03-31 | 2017-03-31 | 基板処理装置 |
PCT/JP2018/000912 WO2018179685A1 (ja) | 2017-03-31 | 2018-01-16 | 基板処理装置 |
SG11201908780R SG11201908780RA (en) | 2017-03-31 | 2018-01-16 | Substrate processing apparatus |
US16/499,576 US11969858B2 (en) | 2017-03-31 | 2018-01-16 | Substrate processing apparatus |
KR1020197030937A KR102474471B1 (ko) | 2017-03-31 | 2018-01-16 | 기판 처리 장치 |
CN201880022273.2A CN110476226B (zh) | 2017-03-31 | 2018-01-16 | 基板处理装置 |
TW107108771A TWI758436B (zh) | 2017-03-31 | 2018-03-15 | 彈性膜、扣環及基板處理裝置 |
Applications Claiming Priority (1)
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JP2017071573A JP6990980B2 (ja) | 2017-03-31 | 2017-03-31 | 基板処理装置 |
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JP2018174230A true JP2018174230A (ja) | 2018-11-08 |
JP2018174230A5 JP2018174230A5 (ja) | 2020-05-07 |
JP6990980B2 JP6990980B2 (ja) | 2022-01-12 |
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JP (1) | JP6990980B2 (ja) |
KR (1) | KR102474471B1 (ja) |
CN (1) | CN110476226B (ja) |
SG (1) | SG11201908780RA (ja) |
TW (1) | TWI758436B (ja) |
WO (1) | WO2018179685A1 (ja) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2022107553A1 (ja) * | 2020-11-18 | 2022-05-27 | 株式会社荏原製作所 | 基板保持装置 |
WO2023162714A1 (ja) * | 2022-02-25 | 2023-08-31 | 株式会社荏原製作所 | 基板研磨装置 |
WO2023189170A1 (ja) * | 2022-03-30 | 2023-10-05 | 株式会社荏原製作所 | 情報処理装置、推論装置、機械学習装置、情報処理方法、推論方法、及び、機械学習方法 |
WO2023210073A1 (ja) * | 2022-04-27 | 2023-11-02 | 株式会社荏原製作所 | 弾性膜の初期化装置、研磨装置、弾性膜の初期化方法、および弾性膜の寿命判定方法 |
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US20220281052A1 (en) * | 2021-03-05 | 2022-09-08 | Applied Materials, Inc. | Machine learning for classifying retaining rings |
TWI789926B (zh) * | 2021-09-28 | 2023-01-11 | 中國砂輪企業股份有限公司 | 研磨系統、研磨狀態感測系統及其資料庫與方法 |
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WO2023162714A1 (ja) * | 2022-02-25 | 2023-08-31 | 株式会社荏原製作所 | 基板研磨装置 |
WO2023189170A1 (ja) * | 2022-03-30 | 2023-10-05 | 株式会社荏原製作所 | 情報処理装置、推論装置、機械学習装置、情報処理方法、推論方法、及び、機械学習方法 |
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Also Published As
Publication number | Publication date |
---|---|
TW201836763A (zh) | 2018-10-16 |
CN110476226B (zh) | 2023-08-18 |
US20200023487A1 (en) | 2020-01-23 |
SG11201908780RA (en) | 2019-10-30 |
KR20190134665A (ko) | 2019-12-04 |
TWI758436B (zh) | 2022-03-21 |
JP6990980B2 (ja) | 2022-01-12 |
WO2018179685A1 (ja) | 2018-10-04 |
KR102474471B1 (ko) | 2022-12-06 |
CN110476226A (zh) | 2019-11-19 |
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