JP2018152232A5 - - Google Patents

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Publication number
JP2018152232A5
JP2018152232A5 JP2017047453A JP2017047453A JP2018152232A5 JP 2018152232 A5 JP2018152232 A5 JP 2018152232A5 JP 2017047453 A JP2017047453 A JP 2017047453A JP 2017047453 A JP2017047453 A JP 2017047453A JP 2018152232 A5 JP2018152232 A5 JP 2018152232A5
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JP
Japan
Prior art keywords
charged particle
light
fluorescent film
regions
scintillator
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JP2017047453A
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English (en)
Japanese (ja)
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JP6689777B2 (ja
JP2018152232A (ja
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Priority to JP2017047453A priority Critical patent/JP6689777B2/ja
Priority claimed from JP2017047453A external-priority patent/JP6689777B2/ja
Priority to US15/918,464 priority patent/US10361063B2/en
Publication of JP2018152232A publication Critical patent/JP2018152232A/ja
Publication of JP2018152232A5 publication Critical patent/JP2018152232A5/ja
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JP2017047453A 2017-03-13 2017-03-13 荷電粒子検出器およびそれを用いた荷電粒子線装置 Active JP6689777B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2017047453A JP6689777B2 (ja) 2017-03-13 2017-03-13 荷電粒子検出器およびそれを用いた荷電粒子線装置
US15/918,464 US10361063B2 (en) 2017-03-13 2018-03-12 Charged particle detector and charged particle beam device using the same

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2017047453A JP6689777B2 (ja) 2017-03-13 2017-03-13 荷電粒子検出器およびそれを用いた荷電粒子線装置

Publications (3)

Publication Number Publication Date
JP2018152232A JP2018152232A (ja) 2018-09-27
JP2018152232A5 true JP2018152232A5 (https=) 2019-05-30
JP6689777B2 JP6689777B2 (ja) 2020-04-28

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ID=63445065

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Application Number Title Priority Date Filing Date
JP2017047453A Active JP6689777B2 (ja) 2017-03-13 2017-03-13 荷電粒子検出器およびそれを用いた荷電粒子線装置

Country Status (2)

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US (1) US10361063B2 (https=)
JP (1) JP6689777B2 (https=)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10777379B1 (en) * 2019-03-19 2020-09-15 Hitachi High-Tech Corporation Holder and charged particle beam apparatus
WO2021176513A1 (ja) 2020-03-02 2021-09-10 株式会社日立ハイテク 荷電粒子検出器、荷電粒子線装置、放射線検出器および放射線検出装置
WO2025191843A1 (ja) * 2024-03-15 2025-09-18 株式会社日立ハイテク 荷電粒子線装置

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000258539A (ja) * 1999-03-10 2000-09-22 Toshiba Corp 放射線検出装置及び方法
JP2009524835A (ja) * 2006-01-30 2009-07-02 ザ ユニバーシティ オブ シドニー 光ファイバ線量計
DE102014225541A1 (de) * 2014-12-11 2016-06-16 Siemens Healthcare Gmbh Detektionsschicht umfassend Perowskitkristalle

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