JP2018111175A - Grinding Wheel - Google Patents

Abstract

PROBLEM TO BE SOLVED: To easily detach a grinding wheel from a wheel mount.SOLUTION: A grinding wheel 16 comprises a wheel base 160 and a plurality of grindstones 163. A plurality of mounting holes 151, into which fastening bolts 17 are respectively inserted, are circumferentially spatially formed in a wheel mount 15. A plurality of internal threads 164, with which the fastening bolts 17 are engaged. are circumferentially spatially formed in an attaching part 161 of the wheel base 160 so as to correspond to the mounting holes 151. Also, a release internal thread 165, into which a release bolt is inserted for detaching the grinding wheel 16 from the mount wheel 15, is formed in a position corresponding to the position between adjacent mounting holes 151 in the wheel mount 15. Accordingly, simply by helically inserting the release bolt into the release internal thread 165 and pushing up the wheel mount 15, the grinding wheel 16 can be easily detached from the wheel mount 15.SELECTED DRAWING: Figure 2

Description

  The present invention relates to a grinding wheel that is detachably mounted on a wheel mount that is fixed to a tip of a spindle provided in a grinding apparatus.

  The grinding apparatus includes at least a chuck table for holding a workpiece such as a wafer, and a grinding wheel configured by mounting a grinding wheel for grinding the wafer on a free end of a wheel base. Can be ground to a thickness of. The grinding wheel is detachably attached to the wheel mount by fastening bolts (see, for example, Patent Document 1 below).

JP2015-178149A

  Here, there is a case where it is difficult to remove the grinding wheel from the wheel mount because the grinding waste generated during grinding adheres to the wheel mount and the grinding wheel. In this case, if the grinding wheel is forcibly removed from the wheel mount, for example, the grinding wheel may hit the chuck table, and the grinding wheel of the grinding wheel may be damaged. Further, if the grinding wheel is left attached to the wheel mount, the interface (the surface where the wheel base and the wheel mount are in contact) is corroded, and the spindle may need to be replaced.

  The present invention has been made in view of the above circumstances, and an object of the present invention is to make it possible to easily remove a grinding wheel from a wheel mount even when grinding scraps adhere to the wheel mount or the grinding wheel.

  The present invention relates to a grinding wheel that is detachably mounted on a wheel mount fixed to the tip of a spindle of a grinding apparatus, and includes a mounting portion that is mounted on the wheel mount and a free end portion on the opposite side of the mounting portion. A plurality of grinding wheels disposed at the free end of the wheel base, and a plurality of attachments into which fastening bolts for fastening the grinding wheel are inserted into the wheel mount. A plurality of holes are formed spaced apart in the circumferential direction, and a plurality of female screws to which the fastening bolts are screwed are formed in the mounting portion of the wheel base so as to be spaced apart in the circumferential direction corresponding to the mounting holes. And a release female screw into which a release bolt for removing the grinding wheel from the wheel mount is screwed into a corresponding position between the adjacent mounting holes of the wheel mount. It has been.

  It is preferable that the release female screw is formed in an even number, and is formed at a symmetrical position with respect to the rotation axis of the spindle.

  A grinding wheel according to the present invention includes a wheel base having a mounting portion mounted on a wheel mount and a free end opposite to the mounting portion, and a plurality of grinding wheels disposed on the free end of the wheel base. The wheel mount has a plurality of mounting holes into which fastening bolts for fastening the grinding wheel are inserted and are spaced apart in the circumferential direction, and the fastening bolts are screwed into the mounting portion of the wheel base A plurality of female threads are formed in a circumferentially spaced manner corresponding to the mounting holes, and a release bolt for removing the grinding wheel from the wheel mount is screwed into a position corresponding to between the mounting holes adjacent to each other in the wheel mount. Since the release female thread is formed, the release bolt can be screwed into the release female thread to push up the wheel mount. Grinding dust can be removed grinding wheel easily from wheel mounts even adhering to the grinding wheel or wheel mounts.

  Since the release female screw is formed in an even number and is formed at a symmetrical position with respect to the rotation axis of the spindle, the wheel balance of the grinding wheel is not lost.

It is a perspective view which shows the structure of an example of a grinding device. It is a disassembled perspective view which shows the structure of a wheel mount and a grinding wheel. It is sectional drawing which shows the state with which the grinding wheel was mounted | worn with the wheel mount. It is sectional drawing which shows the state which removes a grinding wheel from a wheel mount.

  A grinding apparatus 1 shown in FIG. 1 is an example of a grinding apparatus including a grinding wheel for grinding a workpiece. The grinding device 1 has a device base 2 extending in the Y-axis direction, and a column 3 erected on the rear side of the device base 2 in the Y-axis direction. On the upper surface of the apparatus base 2, a chuck table 4 capable of holding a workpiece and rotating is disposed. The upper surface of the chuck table 4 is a holding surface 5 for sucking and holding the workpiece, and is connected to a suction source (not shown). The chuck table 4 is supported from below by a moving base 6 that is movable in the Y-axis direction. The chuck table 4 can be moved in the Y-axis direction by moving the moving base 6 in the Y-axis direction with the expansion and contraction of the bellows 7.

  In front of the column 3 in the Y-axis direction, a grinding means 10 that grinds the workpiece, and a grinding feed means that moves the grinding means 10 up and down in a grinding feed direction (Z-axis direction) that approaches and separates from the chuck table 4. 20 are arranged. The grinding means 10 includes a spindle 11 having an axis in the Z-axis direction (rotating shaft 110 shown in FIG. 2), a spindle housing 12 surrounding the outer periphery of the spindle 11, a motor 13 attached to one end of the spindle 11, A holder 14 that holds the spindle housing 12 and a grinding wheel 16 that is detachably attached to a wheel mount 15 that is fixed to the tip of the spindle 11 are provided. The grinding means 10 can rotate the grinding wheel 16 at a predetermined rotational speed by being driven by the motor 13.

  The grinding feed means 20 includes a ball screw 21 extending in the Z-axis direction, a motor 22 connected to one end of the ball screw 21, a pair of guide rails 23 extending in parallel with the ball screw 21, and nuts provided therein. An elevating plate 24 is provided which is screwed into the ball screw 21 and whose side part is in sliding contact with the guide rail 23. The holder 14 is fixed to the lifting plate 24. When the motor 22 rotates the ball screw 21, the grinding means 10 can be lifted and lowered in the Z-axis direction along with the lift plate 24 along the pair of guide rails 23.

  Next, the configuration of the wheel mount 15 and the grinding wheel 16 will be described in detail. As shown in FIG. 2, the wheel mount 15 is formed in a disc shape and is fixed to the tip of the spindle 11. The lower surface of the wheel mount 15 is an attachment surface 150 to which the grinding wheel 16 is attached. The attachment surface 150 is a flat surface parallel to the horizontal direction perpendicular to the vertical direction. A plurality of attachment holes 151 into which fastening bolts 17 for fastening the grinding wheel 16 are inserted are formed in the wheel mount 15 at regular intervals in the circumferential direction. The attachment hole 151 is formed through the upper and lower surfaces of the wheel mount 15. The number of attachment holes 151 is not particularly limited, and for example, six (only four are shown in FIG. 2) are formed.

  The grinding wheel 16 is disposed on a wheel base 160 having a mounting portion 161 mounted on the wheel mount 15 and a free end portion 162 on the opposite side of the mounting portion 161, and a free end portion 162 of the wheel base 160. A plurality of grinding wheels 163 are provided. The wheel base 160 has an opening at the center and is formed in an annular shape. The outer diameter of the wheel base 160 is formed to be approximately the same as the outer diameter of the wheel mount 15. The grinding wheel 163 is, for example, a substantially rectangular segment grindstone. A plurality of grinding wheels 163 are arranged at equal intervals in the circumferential direction at the free end 162 of the wheel base 160, and are bonded and fixed by, for example, an adhesive.

  The mounting portion 161 of the wheel base 160 is formed on a flat surface parallel to the mounting surface 150. A plurality of female screws 164 to which the fastening bolts 17 are screwed are formed on the mounting portion 161. A plurality of female screws 164 are formed at equal intervals in the circumferential direction corresponding to the positions of the plurality of mounting holes 151 formed in the wheel mount 15. The number of the female screws 164 corresponds to the number of the attachment holes 151, and six, for example, are formed.

  Further, a release bolt 18 shown in FIG. 3 for removing the grinding wheel 16 from the wheel mount 15 is screwed into the mounting portion 161 of the wheel base 160 at a position corresponding to between the mounting holes 151 adjacent to each other in the wheel mount 15. A release female thread 165 is formed. The release female screw 165 is formed through the upper and lower surfaces of the wheel base 160. The number of the release female screws 165 is preferably an even number, and in this embodiment, for example, two are formed at symmetrical positions with respect to the rotation axis 110 in the vertical direction of the spindle 11.

  Next, an operation example of grinding a workpiece using the grinding wheel 16 will be described. First, the workpiece is conveyed to the chuck table 4 shown in FIG. A workpiece is sucked and held by applying a suction force of a suction source (not shown) to the holding surface 5, and the chuck table 4 holding the workpiece is moved below the grinding means 10.

  Subsequently, while rotating the chuck table 4 and rotating the grinding wheel 16 in a predetermined direction, the grinding wheel 16 is lowered in a direction approaching the holding surface 5 of the chuck table 4 by the grinding feed means 20. Grinding is performed to a desired thickness while pressing the work surface of the work piece with the grinding wheel 163 that descends while rotating. During grinding, grinding debris scatters around the rotating grinding wheel 163 and adheres to the grinding wheel 16 and the wheel mount 15. Grinding ends when the workpiece is formed to a desired thickness. Then, the workpiece after grinding is unloaded from the chuck table 4, cleaned and dried, and stored in a storage cassette (not shown).

  Next, the attaching / detaching operation of the grinding wheel 16 with respect to the wheel mount 15 will be described. When the grinding wheel 16 shown in FIG. 2 is mounted on the wheel mount 15, the six mounting holes 151 of the wheel mount 15 are fitted in a state where the mounting surface 150 of the wheel mount 15 is in close contact with the mounting portion 161 of the wheel base 160. The fastening bolts 17 are inserted, and the fastening bolts 17 are screwed together with the female screws 164 of the wheel base 160 to be fastened. As a result, the grinding wheel 16 is mounted on the wheel mount 15 as shown in FIG.

  On the other hand, when removing the grinding wheel 16 from the wheel mount 15, after removing all the fastening bolts 17 from the six mounting holes 151 of the wheel mount 15, as shown in FIG. 4, the two release female screws of the wheel base 160. While the release bolts 18 are screwed into 165, the end portions 18a of the release bolts 18 are abutted against the mounting surface 150 of the wheel mount 15 and pushed up. Here, even if grinding scraps adhere to the mounting portion 161 of the wheel base 160 and the mounting surface 150 of the wheel mount 15, an external force in a direction in which the mounting surface 150 and the mounting portion 161 are separated from each other by the release bolt 18. Since it acts on the wheel mount 15, the wheel mount 15 can be pushed up by the end portion 18 a of the release bolt 18 to separate the mounting portion 161 of the wheel base 160 from the mounting surface 150 of the wheel mount 15. When the wheel mount 15 is pushed up to a predetermined position in this way, the grinding wheel 16 is removed from the wheel mount 15.

As described above, the grinding wheel 16 according to the present invention includes the wheel base 160 having the mounting portion 161 to be mounted on the wheel mount 15 and the free end 162 on the opposite side of the mounting portion 161, and the freeness of the wheel base 160. A plurality of grinding wheels 163 disposed at the end 162, and the wheel mount 15 is formed with a plurality of mounting holes 151 into which fastening bolts 17 for fastening the grinding wheel 16 are inserted, spaced apart in the circumferential direction. The mounting portion 161 of the wheel base 160 is formed with a plurality of female screws 164 to which the fastening bolts 17 are screwed to be spaced apart from each other in the circumferential direction corresponding to the mounting holes 151, and adjacent to the wheel mount 15. A release bolt 18 for removing the grinding wheel 16 from the wheel mount 15 is screwed into a corresponding position between the mounting holes 151 to be mounted. Since the release female thread 165 is formed, the release bolt 18 can be screwed into the release female thread 165 and the wheel mount 15 can be pushed up. Therefore, even when grinding waste adheres to the grinding wheel 16 or the wheel mount 15, the wheel The grinding wheel 16 can be easily removed from the mount 15.
Further, since the release female screw 165 is formed in an even number on the wheel base 160 and is formed in a symmetrical position with respect to the rotation shaft 110 of the spindle 11, the wheel balance of the grinding wheel 16 is not lost.

  In the above embodiment, the number of the release female screws 165 has been described as an even number. However, when the grinding wheel 16 attached to the wheel mount 15 rotates, vibration is generated without breaking the wheel balance of the grinding wheel 16. If not, the number of the release female threads 165 may not necessarily be an even number. Therefore, in this case, an odd number (for example, three) of release female threads 165 may be formed on the wheel base 160.

1: Grinding device 2: Device base 3: Column 4: Chuck table 5: Holding surface 6: Moving base 7: Bellows 10: Grinding means 11: Spindle 12: Spindle housing 13: Motor 14: Holder 15: Wheel mount 150: Installation Surface 151: Mounting hole 16: Grinding wheel 160: Wheel base 161: Mounting portion 162: Free end 163: Grinding wheel 164: Female screw 165: Release female screw 17: Fastening bolt 18: Release bolt 20: Grinding feed means 21: Ball screw 22: Motor 23: Guide rail 24: Lift plate

Claims (2)

A grinding wheel detachably mounted on a wheel mount fixed to the tip of a spindle of a grinding device,
A wheel base having a mounting portion mounted on the wheel mount and a free end opposite to the mounting portion;
A plurality of grinding wheels disposed at the free end of the wheel base,
A plurality of mounting holes into which fastening bolts for fastening the grinding wheel are inserted are formed in the wheel mount so as to be spaced apart in the circumferential direction.
The mounting portion of the wheel base is formed with a plurality of female screws that are screwed with the fastening bolts in the circumferential direction so as to correspond to the mounting holes, and the wheel mounts that are adjacent to each other. A grinding wheel in which a release female screw into which a release bolt for removing the grinding wheel from the wheel mount is screwed is formed at a corresponding position between the holes.   The grinding wheel according to claim 1, wherein the release female screw is formed in an even number, and is formed at a symmetrical position with respect to a rotation axis of the spindle.

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