JP2018105796A5 - - Google Patents

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Publication number
JP2018105796A5
JP2018105796A5 JP2016254494A JP2016254494A JP2018105796A5 JP 2018105796 A5 JP2018105796 A5 JP 2018105796A5 JP 2016254494 A JP2016254494 A JP 2016254494A JP 2016254494 A JP2016254494 A JP 2016254494A JP 2018105796 A5 JP2018105796 A5 JP 2018105796A5
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JP
Japan
Prior art keywords
light
optical path
measuring
shape
receiving unit
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JP2016254494A
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English (en)
Japanese (ja)
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JP6890797B2 (ja
JP2018105796A (ja
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Priority to JP2016254494A priority Critical patent/JP6890797B2/ja
Priority claimed from JP2016254494A external-priority patent/JP6890797B2/ja
Priority to PCT/JP2017/046484 priority patent/WO2018123992A1/ja
Publication of JP2018105796A publication Critical patent/JP2018105796A/ja
Publication of JP2018105796A5 publication Critical patent/JP2018105796A5/ja
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JP2016254494A 2016-12-27 2016-12-27 測定装置、光学式センサ、測定方法及びプログラム Active JP6890797B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2016254494A JP6890797B2 (ja) 2016-12-27 2016-12-27 測定装置、光学式センサ、測定方法及びプログラム
PCT/JP2017/046484 WO2018123992A1 (ja) 2016-12-27 2017-12-25 測定装置、光学式センサ、測定方法及びプログラム

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2016254494A JP6890797B2 (ja) 2016-12-27 2016-12-27 測定装置、光学式センサ、測定方法及びプログラム

Publications (3)

Publication Number Publication Date
JP2018105796A JP2018105796A (ja) 2018-07-05
JP2018105796A5 true JP2018105796A5 (cg-RX-API-DMAC7.html) 2020-01-23
JP6890797B2 JP6890797B2 (ja) 2021-06-18

Family

ID=62710416

Family Applications (1)

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JP2016254494A Active JP6890797B2 (ja) 2016-12-27 2016-12-27 測定装置、光学式センサ、測定方法及びプログラム

Country Status (2)

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JP (1) JP6890797B2 (cg-RX-API-DMAC7.html)
WO (1) WO2018123992A1 (cg-RX-API-DMAC7.html)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2021234812A1 (ja) 2020-05-19 2021-11-25 日本電信電話株式会社 角度計測装置および方法
EP4517255B1 (de) * 2023-08-30 2025-06-04 Sick Ag Aufnahme von 3d-bilddaten mit einem lichtschnittverfahren

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0452619A (ja) * 1990-06-20 1992-02-20 Fujitsu Ltd 光学走査方法およびその装置
US5032023A (en) * 1990-07-02 1991-07-16 General Electric Company Optical fiber based sensor for a variable depth range camera
JPH0566116A (ja) * 1991-09-09 1993-03-19 Sumitomo Electric Ind Ltd 三次元位置測定装置
JP3162749B2 (ja) * 1991-09-10 2001-05-08 株式会社アマダ 溶接線検出装置
US9068952B2 (en) * 2009-09-02 2015-06-30 Kla-Tencor Corporation Method and apparatus for producing and measuring dynamically focussed, steered, and shaped oblique laser illumination for spinning wafer inspection system

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