JP2018105796A5 - - Google Patents
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- JP2018105796A5 JP2018105796A5 JP2016254494A JP2016254494A JP2018105796A5 JP 2018105796 A5 JP2018105796 A5 JP 2018105796A5 JP 2016254494 A JP2016254494 A JP 2016254494A JP 2016254494 A JP2016254494 A JP 2016254494A JP 2018105796 A5 JP2018105796 A5 JP 2018105796A5
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- 230000003287 optical Effects 0.000 claims 61
- 238000005259 measurement Methods 0.000 claims 22
- 238000000034 method Methods 0.000 claims 6
- 238000000691 measurement method Methods 0.000 claims 4
- 238000001514 detection method Methods 0.000 claims 2
- 230000023077 detection of light stimulus Effects 0.000 claims 2
Claims (18)
前記対象物からの光を検出するための受光部に対する、前記対象物に入射する光及び前記対象物からの光の少なくとも一方の光路を変化させる制御部と、
前記受光部が前記対象物からの光を検出した場合の前記光路に基づいて、前記対象物の形状を測定する測定部と
を備え、
前記受光部は、エリアセンサであり、
前記制御部は、
前記対象物からの光の光路を第１の光路にして、前記対象物からの光を前記エリアセンサの第１の領域に入射させ、
前記対象物からの光の光路を前記第１の光路から第２の光路に変化させて、前記対象物からの光を前記エリアセンサの第２の領域に入射させ、
前記測定部は、前記エリアセンサの前記第１の領域に設けられた複数の受光素子による前記対象物からの光の検出結果と、前記エリアセンサの前記第２の領域に設けられた複数の受光素子による前記対象物からの光の検出結果とに基づいて、前記対象物の形状を測定する測定装置。 A measuring device for measuring the shape of an object by light,
For a light receiving unit for detecting light from the object, a control unit that changes at least one optical path of light incident on the object and light from the object,
The light receiving unit, based on the optical path when detecting light from the object, based on a measuring unit that measures the shape of the object ,
The light receiving unit is an area sensor,
The control unit includes:
An optical path of light from the object is a first optical path, and light from the object is incident on a first region of the area sensor,
Changing an optical path of light from the object from the first optical path to a second optical path, and causing light from the object to enter a second area of the area sensor;
The measurement unit is configured to detect a result of detection of light from the object by a plurality of light receiving elements provided in the first area of the area sensor and a plurality of light receiving elements provided in the second area of the area sensor. A measuring device for measuring a shape of the object based on a result of detection of light from the object by an element .
前記対象物からの光を検出するための受光部に対する、前記対象物に入射する光及び前記対象物からの光の少なくとも一方の光路を変化させる制御部と、 For a light receiving unit for detecting light from the object, a control unit that changes at least one optical path of light incident on the object and light from the object,
前記受光部が前記対象物からの光を検出した場合の前記光路に基づいて、前記対象物の形状を測定する測定部と A measuring unit that measures the shape of the object based on the optical path when the light receiving unit detects light from the object.
を備え、With
前記受光部は、エリアセンサであり、 The light receiving unit is an area sensor,
前記測定装置は、 The measuring device comprises:
第１の測定モードにおいて、前記制御部は、前記エリアセンサに対して前記光路を変化させ、前記測定部は、前記エリアセンサ上の予め定められた位置で前記対象物からの光が検出された場合の前記光路に基づいて、前記対象物の形状を測定し、 In the first measurement mode, the control unit changes the optical path with respect to the area sensor, and the measurement unit detects light from the object at a predetermined position on the area sensor. Based on the optical path in the case, measure the shape of the object,
第２の測定モードにおいて、前記制御部は、前記エリアセンサに対して前記光路が固定された状態で前記エリアセンサに前記対象物からの光を受光させ、前記測定部は、前記エリアセンサ上における、前記対象物からの光が検出された位置に基づいて、前記対象物の形状を測定し、 In a second measurement mode, the control unit causes the area sensor to receive light from the object in a state where the optical path is fixed to the area sensor, and the measurement unit performs a process on the area sensor. Based on the position where light from the object is detected, measure the shape of the object,
前記測定装置は、 The measuring device comprises:
前記第１の測定モードと前記第２の測定モードとを切り換える切替部 A switching unit for switching between the first measurement mode and the second measurement mode
をさらに備える測定装置。A measurement device further comprising:
前記対象物からの光を検出するための受光部に対する、前記対象物からの光の光路を変化させる制御部と、 For a light receiving unit for detecting light from the object, a control unit that changes an optical path of light from the object,
前記受光部が前記対象物からの光を検出した場合の前記光路に基づいて、前記対象物の形状を測定する測定部と A measuring unit that measures the shape of the object based on the optical path when the light receiving unit detects light from the object.
を備える測定装置。A measuring device comprising:
をさらに備え、
前記制御部は、前記光素子の状態を変化させることにより、前記受光部に対して前記光路を変化させる
請求項１から３のいずれか一項に記載の測定装置。 Further comprising an optical element for changing the optical path,
Wherein, by changing the state of said optical device, measuring device according to any one of claims 1-3 for changing the optical path to the light receiving portion.
前記制御部は、前記光素子の向きを変化させることにより、前記受光部に対して前記光路を変化させ、
前記測定部は、前記受光部が前記対象物からの光を検出した場合の前記光素子の向きに基づいて、前記対象物の形状を測定する
請求項４に記載の測定装置。 The optical element changes the optical path by refraction or diffraction,
The control unit changes the optical path with respect to the light receiving unit by changing a direction of the optical element,
The measuring device according to claim 4 , wherein the measuring unit measures the shape of the object based on a direction of the optical element when the light receiving unit detects light from the object.
前記制御部は、前記プリズムの向きを変化させることにより、前記受光部に対して前記光路を変化させ、
前記測定部は、前記受光部が前記対象物からの光を検出した場合の前記プリズムの向きに基づいて、前記対象物の形状を測定する
請求項４又は５に記載の測定装置。 The optical element has one or more prisms;
The control unit changes the optical path with respect to the light receiving unit by changing a direction of the prism,
The measuring unit, based on the orientation of the prism in a case where the light receiving unit detects light from the object, the measuring apparatus according to claim 4 or 5 for measuring the shape of the object.
前記制御部は、前記光素子の向きを変化させることにより、前記受光部に対して前記光路を変化させ、
前記測定部は、前記受光部が前記対象物からの光を検出した場合の前記光素子の向きに基づいて、前記対象物の形状を測定する
請求項４に記載の測定装置。 The optical element changes the optical path by reflection,
The control unit changes the optical path with respect to the light receiving unit by changing a direction of the optical element,
The measuring device according to claim 4 , wherein the measuring unit measures the shape of the object based on a direction of the optical element when the light receiving unit detects light from the object.
請求項４から７のいずれか一項に記載の測定装置。 The measurement device according to any one of claims 4 to 7 , wherein the control unit changes the optical path with respect to the light receiving unit until light from the target is detected by the light receiving unit.
請求項３に記載の測定装置。 The measurement device according to claim 3 , wherein the control unit changes the position of the light receiving unit until the light from the object is detected by the light receiving unit.
請求項３に記載の測定装置。 The measuring device according to claim 3 , wherein the light receiving unit is a line sensor provided so as to be substantially orthogonal to a direction in which the optical path changes.
前記受光部と
を備える光学式センサ。 A measuring device according to any one of claims 1 to 10,
An optical sensor comprising the light receiving unit.
をさらに備える請求項１１に記載の光学式センサ。 The optical sensor according to claim 11, further comprising a light emitting unit that emits light incident on the object.
前記対象物からの光を検出するための受光部に対する、前記対象物からの光の光路を変化させる段階と、
前記受光部が前記対象物からの光を検出した場合の前記光路に基づいて、前記対象物の形状を測定する段階と
を備える測定方法。 A measurement method for measuring the shape of an object by light incident from a direction perpendicular to the surface of the object ,
For a light receiving unit for detecting light from the object, changing the optical path of light from the object,
Measuring the shape of the object based on the optical path when the light receiving unit detects light from the object.
前記対象物からの光を検出するための受光部に対する、前記対象物からの光の光路を変化させる手順と、
前記受光部が前記対象物からの光を検出した場合の前記光路に基づいて、前記対象物の形状を測定する手順と
を実行させるためのプログラム。 A program for measuring the shape of the object by light incident from a direction orthogonal to the surface of the object , the computer,
For the light receiving unit for detecting light from the object, a procedure for changing the optical path of light from the object,
Measuring the shape of the target object based on the optical path when the light receiving unit detects light from the target object.
前記対象物からの光を検出するための受光部に対する、前記対象物に入射する光及び前記対象物からの光の少なくとも一方の光路を変化させる段階と、 For a light receiving unit for detecting light from the object, changing the optical path of at least one of light incident on the object and light from the object,
前記受光部が前記対象物からの光を検出した場合の前記光路に基づいて、前記対象物の形状を測定する段階と Measuring the shape of the object based on the light path when the light receiving unit detects light from the object; and
を備え、With
前記受光部は、エリアセンサであり、 The light receiving unit is an area sensor,
前記光路を変化させる段階は、 The step of changing the optical path includes:
前記対象物からの光の光路を第１の光路にして、前記対象物からの光を前記エリアセンサの第１の領域に入射させる段階と、 Setting the optical path of light from the object to a first optical path, and causing light from the object to enter a first region of the area sensor;
前記対象物からの光の光路を前記第１の光路から第２の光路に変化させて、前記対象物からの光を前記エリアセンサの第２の領域に入射させる段階と Changing the optical path of the light from the object from the first optical path to the second optical path, and causing the light from the object to enter the second area of the area sensor;
を備え、With
前記対象物の形状を測定する段階は、前記エリアセンサの前記第１の領域に設けられた複数の受光素子による前記対象物からの光の検出結果と、前記エリアセンサの前記第２の領域に設けられた複数の受光素子による前記対象物からの光の検出結果とに基づいて、前記対象物の形状を測定する段階を備える測定方法。 The step of measuring the shape of the object includes detecting the light from the object by a plurality of light receiving elements provided in the first area of the area sensor and the second area of the area sensor. A measuring method comprising: measuring a shape of the object based on detection results of light from the object by the plurality of light receiving elements provided.
前記対象物からの光を検出するための受光部に対する、前記対象物に入射する光及び前記対象物からの光の少なくとも一方の光路を変化させる手順と、 A procedure for changing the optical path of at least one of light incident on the target and light from the target, for a light receiving unit for detecting light from the target,
前記受光部が前記対象物からの光を検出した場合の前記光路に基づいて、前記対象物の形状を測定する手順と A step of measuring the shape of the object based on the optical path when the light receiving unit detects light from the object;
を実行させ、And execute
前記受光部は、エリアセンサであり、 The light receiving unit is an area sensor,
前記光路を変化させる手順は、 The procedure for changing the optical path includes:
前記対象物からの光の光路を第１の光路にして、前記対象物からの光を前記エリアセンサの第１の領域に入射させる手順と、 Making the optical path of the light from the object a first optical path, and causing the light from the object to enter a first region of the area sensor;
前記対象物からの光の光路を前記第１の光路から第２の光路に変化させて、前記対象物からの光を前記エリアセンサの第２の領域に入射させる手順と Changing a light path of light from the object from the first light path to a second light path, and causing light from the object to be incident on a second area of the area sensor;
を備え、With
前記対象物の形状を測定する手順は、前記エリアセンサの前記第１の領域に設けられた複数の受光素子による前記対象物からの光の検出結果と、前記エリアセンサの前記第２の領域に設けられた複数の受光素子による前記対象物からの光の検出結果とに基づいて、前記対象物の形状を測定する手順を備えるプログラム。 The step of measuring the shape of the object includes detecting the light from the object by the plurality of light receiving elements provided in the first area of the area sensor and the second area of the area sensor. A program comprising a step of measuring a shape of the object based on detection results of light from the object by a plurality of provided light receiving elements.
前記対象物からの光を検出するための受光部に対する、前記対象物に入射する光及び前記対象物からの光の少なくとも一方の光路を変化させる段階と、 For a light receiving unit for detecting light from the object, changing the optical path of at least one of light incident on the object and light from the object,
前記受光部が前記対象物からの光を検出した場合の前記光路に基づいて、前記対象物の形状を測定する段階と Measuring the shape of the object based on the light path when the light receiving unit detects light from the object; and
を備え、With
前記受光部は、エリアセンサであり、 The light receiving unit is an area sensor,
前記光路を変化させる段階は、第１の測定モードにおいて、前記エリアセンサに対して前記光路を変化させる段階を備え、前記対象物の形状を測定する段階は、前記第１の測定モードにおいて、前記エリアセンサ上の予め定められた位置で前記対象物からの光が検出された場合の前記光路に基づいて、前記対象物の形状を測定する段階を備え、 The step of changing the optical path includes the step of changing the optical path with respect to the area sensor in a first measurement mode, and the step of measuring the shape of the target object is performed in the first measurement mode. Measuring the shape of the object based on the optical path when light from the object is detected at a predetermined position on an area sensor,
前記光路を変化させる段階は、第２の測定モードにおいて、前記エリアセンサに対して前記光路が固定された状態で前記エリアセンサに前記対象物からの光を受光させる段階を備え、前記対象物の形状を測定する段階は、前記第２の測定モードにおいて、前記エリアセンサ上における、前記対象物からの光が検出された位置に基づいて、前記対象物の形状を測定する段階を備え、 The step of changing the optical path includes a step of causing the area sensor to receive light from the object in a state where the optical path is fixed to the area sensor in the second measurement mode, The step of measuring the shape includes, in the second measurement mode, measuring the shape of the object based on a position on the area sensor at which light from the object is detected,
前記測定方法は、 The measuring method includes:
前記第１の測定モードと前記第２の測定モードとを切り換える段階 Switching between the first measurement mode and the second measurement mode
をさらに備える測定方法。The measurement method further comprising:
前記対象物からの光を検出するための受光部に対する、前記対象物に入射する光及び前記対象物からの光の少なくとも一方の光路を変化させる手順と、 A procedure for changing the optical path of at least one of light incident on the target and light from the target, for a light receiving unit for detecting light from the target,
前記受光部が前記対象物からの光を検出した場合の前記光路に基づいて、前記対象物の形状を測定する手順と A step of measuring the shape of the object based on the optical path when the light receiving unit detects light from the object;
を実行させ、And execute
前記受光部は、エリアセンサであり、 The light receiving unit is an area sensor,
前記光路を変化させる手順は、第１の測定モードにおいて、前記エリアセンサに対して前記光路を変化させる手順を備え、前記対象物の形状を測定する手順は、前記第１の測定モードにおいて、前記エリアセンサ上の予め定められた位置で前記対象物からの光が検出された場合の前記光路に基づいて、前記対象物の形状を測定する手順を備え、 The step of changing the light path includes a step of changing the light path with respect to the area sensor in a first measurement mode, and the step of measuring the shape of the object includes the step of measuring the shape of the object in the first measurement mode. Based on the optical path when light from the object is detected at a predetermined position on the area sensor, comprising a step of measuring the shape of the object,
前記光路を変化させる手順は、第２の測定モードにおいて、前記エリアセンサに対して前記光路が固定された状態で前記エリアセンサに前記対象物からの光を受光させる手順を備え、前記対象物の形状を測定する手順は、前記第２の測定モードにおいて、前記エリアセンサ上における、前記対象物からの光が検出された位置に基づいて、前記対象物の形状を測定する手順を備え、 The step of changing the optical path includes, in a second measurement mode, a step of causing the area sensor to receive light from the object in a state where the optical path is fixed to the area sensor, The step of measuring the shape includes, in the second measurement mode, a step of measuring the shape of the object based on a position on the area sensor at which light from the object is detected,
前記プログラムは、コンピュータに、 The program is stored in a computer,
前記第１の測定モードと前記第２の測定モードとを切り換える手順 Procedure for switching between the first measurement mode and the second measurement mode
をさらに実行させるプログラム。A program that further executes.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2016254494A JP6890797B2 (en) | 2016-12-27 | 2016-12-27 | Measuring equipment, optical sensors, measuring methods and programs |
| PCT/JP2017/046484 WO2018123992A1 (en) | 2016-12-27 | 2017-12-25 | Measuring device, optical sensor, measuring method, and program |
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|---|---|---|---|
| JP2016254494A JP6890797B2 (en) | 2016-12-27 | 2016-12-27 | Measuring equipment, optical sensors, measuring methods and programs |
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| JP2018105796A JP2018105796A (en) | 2018-07-05 |
| JP2018105796A5 true JP2018105796A5 (en) | 2020-01-23 |
| JP6890797B2 JP6890797B2 (en) | 2021-06-18 |
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| JPH0452619A (en) * | 1990-06-20 | 1992-02-20 | Fujitsu Ltd | Method and device for optical scanning |
| US5032023A (en) * | 1990-07-02 | 1991-07-16 | General Electric Company | Optical fiber based sensor for a variable depth range camera |
| JPH0566116A (en) * | 1991-09-09 | 1993-03-19 | Sumitomo Electric Ind Ltd | Three-dimensional position measuring device |
| JP3162749B2 (en) * | 1991-09-10 | 2001-05-08 | 株式会社アマダ | Welding line detector |
| US9068952B2 (en) * | 2009-09-02 | 2015-06-30 | Kla-Tencor Corporation | Method and apparatus for producing and measuring dynamically focussed, steered, and shaped oblique laser illumination for spinning wafer inspection system |
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