JP2018104804A - 製造装置 - Google Patents

製造装置 Download PDF

Info

Publication number
JP2018104804A
JP2018104804A JP2016255719A JP2016255719A JP2018104804A JP 2018104804 A JP2018104804 A JP 2018104804A JP 2016255719 A JP2016255719 A JP 2016255719A JP 2016255719 A JP2016255719 A JP 2016255719A JP 2018104804 A JP2018104804 A JP 2018104804A
Authority
JP
Japan
Prior art keywords
abbreviation
vapor deposition
crucible
light
phenyl
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP2016255719A
Other languages
English (en)
Japanese (ja)
Other versions
JP2018104804A5 (enExample
Inventor
山崎 舜平
Shunpei Yamazaki
舜平 山崎
江口 晋吾
Shingo Eguchi
晋吾 江口
智哉 青山
Tomoya Aoyama
智哉 青山
由衣 末松
Yui Suematsu
由衣 末松
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Semiconductor Energy Laboratory Co Ltd
Original Assignee
Semiconductor Energy Laboratory Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Semiconductor Energy Laboratory Co Ltd filed Critical Semiconductor Energy Laboratory Co Ltd
Priority to JP2016255719A priority Critical patent/JP2018104804A/ja
Publication of JP2018104804A publication Critical patent/JP2018104804A/ja
Publication of JP2018104804A5 publication Critical patent/JP2018104804A5/ja
Withdrawn legal-status Critical Current

Links

Images

Landscapes

  • Electroluminescent Light Sources (AREA)
  • Physical Vapour Deposition (AREA)
JP2016255719A 2016-12-28 2016-12-28 製造装置 Withdrawn JP2018104804A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2016255719A JP2018104804A (ja) 2016-12-28 2016-12-28 製造装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2016255719A JP2018104804A (ja) 2016-12-28 2016-12-28 製造装置

Publications (2)

Publication Number Publication Date
JP2018104804A true JP2018104804A (ja) 2018-07-05
JP2018104804A5 JP2018104804A5 (enExample) 2020-02-06

Family

ID=62786765

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2016255719A Withdrawn JP2018104804A (ja) 2016-12-28 2016-12-28 製造装置

Country Status (1)

Country Link
JP (1) JP2018104804A (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN116219368A (zh) * 2021-12-02 2023-06-06 佳能特机株式会社 蒸镀用坩埚及蒸镀装置
WO2024201548A1 (ja) * 2023-03-24 2024-10-03 シャープディスプレイテクノロジー株式会社 蒸着装置、表示装置の製造方法

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02247374A (ja) * 1989-03-20 1990-10-03 Hitachi Ltd 蒸発源用るつぼ及びそれを用いた薄膜成膜方法
JPH11222667A (ja) * 1998-02-06 1999-08-17 Ulvac Corp 蒸着源用るつぼ、及び蒸着装置
JP2004263299A (ja) * 2003-02-14 2004-09-24 Semiconductor Energy Lab Co Ltd 製造装置
JP2012172185A (ja) * 2011-02-21 2012-09-10 Mitsubishi Heavy Ind Ltd 蒸着用容器、及びこれを備えた蒸着装置
JP2014031547A (ja) * 2012-08-03 2014-02-20 Canon Tokki Corp 蒸着装置及び蒸着方法

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02247374A (ja) * 1989-03-20 1990-10-03 Hitachi Ltd 蒸発源用るつぼ及びそれを用いた薄膜成膜方法
JPH11222667A (ja) * 1998-02-06 1999-08-17 Ulvac Corp 蒸着源用るつぼ、及び蒸着装置
JP2004263299A (ja) * 2003-02-14 2004-09-24 Semiconductor Energy Lab Co Ltd 製造装置
JP2012172185A (ja) * 2011-02-21 2012-09-10 Mitsubishi Heavy Ind Ltd 蒸着用容器、及びこれを備えた蒸着装置
JP2014031547A (ja) * 2012-08-03 2014-02-20 Canon Tokki Corp 蒸着装置及び蒸着方法

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN116219368A (zh) * 2021-12-02 2023-06-06 佳能特机株式会社 蒸镀用坩埚及蒸镀装置
KR20230083234A (ko) 2021-12-02 2023-06-09 캐논 톡키 가부시키가이샤 증착용 도가니 및 증착 장치
JP2023082513A (ja) * 2021-12-02 2023-06-14 キヤノントッキ株式会社 蒸着用坩堝及び蒸着装置
JP7444843B2 (ja) 2021-12-02 2024-03-06 キヤノントッキ株式会社 蒸着用坩堝及び蒸着装置
WO2024201548A1 (ja) * 2023-03-24 2024-10-03 シャープディスプレイテクノロジー株式会社 蒸着装置、表示装置の製造方法

Similar Documents

Publication Publication Date Title
JP7143310B2 (ja) 有機化合物、発光素子、発光装置、電子機器、および照明装置
US20250031573A1 (en) Light-Emitting Element, Organic Compound, Light-Emitting Device, Electronic Device, and Lighting Device
US12232420B2 (en) Organic compound, light-emitting element, light-emitting device, electronic device, and lighting device
JP2016157692A (ja) 発光素子、表示装置、電子機器、及び照明装置
JP2017208334A (ja) 発光素子、発光装置、電子機器、および照明装置
JP7067916B2 (ja) 発光素子、発光装置、電子機器、および照明装置
WO2019229584A1 (ja) 有機化合物、発光素子、発光装置、電子機器、および照明装置
JP2022173506A (ja) 発光素子
JP2022166086A (ja) 化合物
WO2020121097A1 (ja) 発光デバイス、発光装置、電子機器、および照明装置
JP2019189540A (ja) 有機化合物、発光素子、発光装置、電子機器、および照明装置
JP2018104804A (ja) 製造装置
JPWO2018158659A1 (ja) 有機化合物、発光素子、発光装置、電子機器、および照明装置
JP2018193597A (ja) 成膜装置
WO2020109922A1 (ja) 発光デバイス用組成物
US20240373748A1 (en) Organic Compound, Light-Emitting Device, Light-Emitting Apparatus, Electronic Device, and Lighting Device
JP7225097B2 (ja) 有機化合物、発光素子、発光装置、電子機器、および照明装置
WO2018178818A1 (ja) 有機化合物、発光素子、発光装置、電子機器、および照明装置
US20230143281A1 (en) Composition for light-emitting device, light-emitting device, light-emitting apparatus, electronic device, and lighting device
JPWO2018189623A1 (ja) 有機金属錯体、発光素子、発光装置、電子機器、および照明装置
JP2019142821A (ja) 縮合カルバゾール骨格を有する有機化合物の合成方法

Legal Events

Date Code Title Description
A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20191218

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20191218

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20200821

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20200901

A761 Written withdrawal of application

Free format text: JAPANESE INTERMEDIATE CODE: A761

Effective date: 20200910