JP2018101112A5 - - Google Patents

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Publication number
JP2018101112A5
JP2018101112A5 JP2016248395A JP2016248395A JP2018101112A5 JP 2018101112 A5 JP2018101112 A5 JP 2018101112A5 JP 2016248395 A JP2016248395 A JP 2016248395A JP 2016248395 A JP2016248395 A JP 2016248395A JP 2018101112 A5 JP2018101112 A5 JP 2018101112A5
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JP
Japan
Prior art keywords
optical device
mirror
magnet
actuators
joining surface
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JP2016248395A
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English (en)
Japanese (ja)
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JP2018101112A (ja
JP6854638B2 (ja
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Priority to JP2016248395A priority Critical patent/JP6854638B2/ja
Priority claimed from JP2016248395A external-priority patent/JP6854638B2/ja
Priority to KR1020170169969A priority patent/KR102266120B1/ko
Priority to CN201711361028.8A priority patent/CN108227401B/zh
Publication of JP2018101112A publication Critical patent/JP2018101112A/ja
Publication of JP2018101112A5 publication Critical patent/JP2018101112A5/ja
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Publication of JP6854638B2 publication Critical patent/JP6854638B2/ja
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JP2016248395A 2016-12-21 2016-12-21 光学装置、露光装置、および物品の製造方法 Active JP6854638B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2016248395A JP6854638B2 (ja) 2016-12-21 2016-12-21 光学装置、露光装置、および物品の製造方法
KR1020170169969A KR102266120B1 (ko) 2016-12-21 2017-12-12 광학 장치, 노광 장치 및 물품의 제조 방법
CN201711361028.8A CN108227401B (zh) 2016-12-21 2017-12-18 光学装置、曝光装置以及物品的制造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2016248395A JP6854638B2 (ja) 2016-12-21 2016-12-21 光学装置、露光装置、および物品の製造方法

Publications (3)

Publication Number Publication Date
JP2018101112A JP2018101112A (ja) 2018-06-28
JP2018101112A5 true JP2018101112A5 (enExample) 2019-12-19
JP6854638B2 JP6854638B2 (ja) 2021-04-07

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JP2016248395A Active JP6854638B2 (ja) 2016-12-21 2016-12-21 光学装置、露光装置、および物品の製造方法

Country Status (3)

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JP (1) JP6854638B2 (enExample)
KR (1) KR102266120B1 (enExample)
CN (1) CN108227401B (enExample)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7406338B2 (ja) * 2019-10-16 2023-12-27 キヤノン株式会社 ステージ装置、ステージ装置の調整方法、および物品製造方法
DE102020211691A1 (de) 2020-09-17 2022-03-17 Carl Zeiss Smt Gmbh Optisches system und lithographieanlage
WO2025040304A1 (en) * 2023-08-21 2025-02-27 Asml Netherlands B.V. Optical system and method

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10253872A (ja) * 1997-03-13 1998-09-25 Nikon Corp 反射光学部材の保持装置及び露光装置
FR2935054B1 (fr) * 2008-08-14 2011-01-28 Alpao Miroir deformable a actionneurs de force et raideur repartie
JP4994341B2 (ja) * 2008-10-29 2012-08-08 三菱電機株式会社 可変形ミラー装置
WO2012084675A1 (en) * 2010-12-20 2012-06-28 Carl Zeiss Smt Gmbh Arrangement for mounting an optical element
FR2985320B1 (fr) * 2011-12-29 2014-02-14 Alpao Systeme a etalonnage commun et procede correspondant
DE102012221831A1 (de) * 2012-11-29 2014-06-05 Carl Zeiss Smt Gmbh Anordnung zur Aktuierung wenigstens eines optischen Elementes in einem optischen System
DE102013211310A1 (de) * 2013-06-17 2014-12-18 Carl Zeiss Smt Gmbh EUV-Abbildungsvorrichtung
JP2015050353A (ja) * 2013-09-02 2015-03-16 キヤノン株式会社 光学装置、投影光学系、露光装置、並びに物品の製造方法
JP2015065246A (ja) * 2013-09-24 2015-04-09 キヤノン株式会社 光学装置、光学系、露光装置及び物品の製造方法
JP6336274B2 (ja) * 2013-12-25 2018-06-06 キヤノン株式会社 光学装置、投影光学系、露光装置、および物品の製造方法

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