JP2018094745A - Liquid injection head and liquid injection device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To appropriately displace a film of a compliance section while suppressing excessive displacement of the compliance section.SOLUTION: A liquid injection head includes: nozzles 21 injecting ink; a plurality of pressure generating chambers 12 communicating with the nozzles 21 and being provided side-by-side in a first direction X; a manifold 100 communicating with the plurality of pressure generating chambers 12; a flexible film 46 forming a part of the manifold 100; and a frame member 47 with an opening 48 which is fixed to the film 46 and can displace the film 46 according to pressure fluctuation in the manifold 100. The frame member 47 comprises: a cantilever beam 150 protruding from an edge of the opening 48 in a second direction Y and having a leading end 151 which can be displaced; and a support section 152 being provided on the leading end 151 of the cantilever beam 150 and fixed to the film 46.SELECTED DRAWING: Figure 5

Description

  The present invention relates to a liquid ejecting head and a liquid ejecting apparatus including the liquid ejecting head.

  As a liquid ejecting head that ejects liquid as droplets, for example, a nozzle opening and a flow path such as a pressure generating chamber communicated with the nozzle opening are provided, and a pressure change is made to ink (liquid) in the pressure generating chamber by the pressure generating means. Ink jet recording heads that cause ink droplets to be ejected from nozzle openings by generating the above are known.

In such an ink jet recording head, a flexible film defines a part of a manifold that communicates with a pressure generating chamber, and a compliance section that absorbs pressure fluctuations of ink in the manifold by deforming the film is provided. It has been. In the ink jet recording head, when the film (flexible member) of the compliance portion is excessively bent in the initial stage where ink ejection is started from a standby state where ink is not ejected, the pressure in the manifold becomes a constant value from the initial stage. There is a problem that the compliance required until the steady state to be reached, that is, the proper displacement of the film of the compliance portion that absorbs the pressure fluctuation is hindered, resulting in variations in ink ejection characteristics.
For this reason, in the ink jet recording head described in Patent Document 1, the compliance part film (flexible member) is provided with a cantilever beam that functions as a spring plate, thereby suppressing excessive deflection of the compliance part film in the initial stage. Is done.

Japanese Patent Application Laid-Open No. 2006-144918

  However, in the ink jet recording head described in Patent Document 1, the compliance part film contacts the entire surface of the cantilever facing the film, and the cantilever and the compliance part film are displaced together. For example, when the rigidity of the cantilever beam is increased, there is a possibility that proper displacement of the film in the compliance portion is hindered.

  SUMMARY An advantage of some aspects of the invention is to solve at least a part of the problems described above, and the invention can be implemented as the following forms or application examples.

  Application Example 1 A liquid ejecting head according to this application example includes a nozzle opening that ejects liquid, a plurality of pressure generating chambers that are connected to the nozzle opening and arranged in parallel in a first direction, and the plurality of pressures A manifold communicating with the generation chamber, a flexible member that forms a part of the manifold and has flexibility, and is fixed to the flexible member, and the flexible member is moved in response to pressure fluctuations in the manifold. A frame member having an opening that can be displaced, the frame member protruding in a direction intersecting the first direction from an edge of the opening, and a cantilever having a displaceable tip, and the cantilever And a support portion provided at the tip of the beam and fixed to the flexible member.

In this application example, the edge of the opening of the cantilever is a fixed end fixed to the main body of the frame member, and the tip of the cantilever is a displaceable free end. The support portion is fixed to both the displaceable flexible member and the tip (free end) of the cantilever.
When a force that deforms the flexible member due to pressure fluctuation in the manifold (hereinafter referred to as a deformation force) acts on the flexible member, the deformation force is transmitted to the tip of the cantilever via the support portion. Further, since the force against the deformation force is transmitted from the cantilever to the flexible member via the support portion, the influence of the deformation force on the flexible member is weakened, and excessive displacement of the flexible member is suppressed. The

  Furthermore, when the deforming force is transmitted to the tip of the cantilever via the support portion, that is, when the deforming force is concentrated on the position away from the fixed end (tip of the cantilever), the deforming force is Compared to the case where it acts on the entire surface of the cantilever facing the flexible member, since the deformation force acts at a position away from the fixed end, the bending moment for deforming the cantilever is increased, and the cantilever is It becomes easy to deform. Since the cantilever beam is easily deformed, for example, even when the rigidity of the cantilever beam is increased, the cantilever beam is appropriately deformed, the displacement of the flexible member is not hindered, and the flexible member is also properly It will be displaced.

  Application Example 2 In the liquid ejecting head according to the application example described above, it is preferable that the support portion is fixed to at least a part of a portion where the flexible member is displaced the most.

  The portion where the flexible member is displaced the most is more deformable than the portion where the displacement of the flexible member is small. When the deformation force is increased, the cantilever is more easily deformed than when the deformation force is weak. Since the cantilever beam is easily deformed, for example, even when the rigidity of the cantilever beam is increased, the cantilever beam is appropriately deformed and the displacement of the flexible member is not easily inhibited.

  Application Example 3 In the liquid jet head according to the application example, it is preferable that the support portion extends in the first direction through the center of the opening.

  Since the force resisting the deformation force is transmitted to the wide-range flexible member via the support portion extending in the first direction, excessive displacement in the wide-range flexible member can be suppressed.

  Application Example 4 In the liquid jet head according to the application example described above, it is preferable that a plurality of the cantilever beams are arranged along the first direction.

  When a plurality of cantilevers are provided, the deformation force is dispersed and acts on each of the plurality of cantilevers. As a result, the influence of the deformation force is weakened compared to the case where the number of cantilever beams is one. Therefore, it is possible to suppress a problem that an excessive deformation force acts on the cantilever and the cantilever is plastically deformed.

  Application Example 5 In the liquid jet head according to the application example, it is preferable that the support portion is separated by each of the plurality of cantilever beams arranged.

If the support part is deformed, the direction of the deformation force acting on the cantilever from the support part or the direction of the force resisting the deformation force acting on the flexible member from the support part is displaced depending on the deformation state of the support part. However, the direction in which the cantilever or the flexible member is displaced may be uneven.
In this application example, the support portion is separated by each of the cantilever beams, and the length of the support portion is shortened. Therefore, the support portion is not easily deformed. When the support part is hard to deform, the direction of the force acting on the flexible member or cantilever from the support part becomes uniform compared to the case where the support part easily deforms, and the flexible member or cantilever is uniform. It will be displaced.

  Application Example 6 In the liquid ejecting head according to the application example described above, it is preferable that at least a part of the cantilever beam is thinner than the support portion.

  When the cantilever is at least partially thinner than the support, the cantilever is more easily deformed than when the cantilever is at least partially thicker than the support. Since the cantilever beam is easily deformed, for example, even when the rigidity of the cantilever beam is increased, the cantilever beam is appropriately deformed and the displacement of the flexible member is not easily inhibited.

  Application Example 7 In the liquid jet head according to the application example described above, it is preferable that the dimension of the cantilever in the first direction is shorter in a direction from the edge of the opening toward the tip.

  Since the dimension in the first direction of the cantilever (hereinafter referred to as the width of the cantilever) is long at the fixed end of the cantilever (on the edge of the opening), the cantilever is fixed at the fixed end of the cantilever. Compared with the case where the width of the beam is short, the influence of stress concentration at the fixed end is weakened, and the durability of the cantilever can be improved.

  Application Example 8 In the liquid jet head according to the application example described above, it is preferable that the cantilever be thinner in a direction from the edge of the opening toward the tip.

  When the cantilever is thinned in the direction from the edge (fixed end) to the tip (free end) of the opening, the cantilever is easily deformed. Since the cantilever beam is easily deformed, for example, even when the rigidity of the cantilever beam is increased, the cantilever beam is appropriately deformed, and the displacement of the flexible member is hardly inhibited.

  Application Example 9 In the liquid jet head according to the application example described above, the liquid jet head includes a lid member that is disposed so as to form a space between the flexible member, and the frame member includes the flexible member and the flexible member. It is preferable that the cantilever and the support portion are disposed between the lid member and the cantilever and the support portion are not fixed to the lid member and can be displaced with respect to the lid member.

  When the flexible member is displaced toward the lid member, the frame member disposed between the flexible member and the lid member makes it difficult for the flexible member to contact the lid member. Further, since the cantilever and the support portion can be displaced with respect to the lid member, the displacement of the cantilever beam and the support portion is not hindered by the lid member, the cantilever beam is appropriately deformed, and the flexible member Excessive displacement can be suppressed.

  Application Example 10 A liquid ejecting apparatus according to this application example includes the liquid ejecting head according to the application example.

In the liquid jet head described in the above application example, excessive displacement of the flexible member is suppressed, and the flexible member is appropriately displaced, so that the pressure fluctuation of the liquid filled in the manifold is reduced. When the pressure fluctuation of the liquid filled in the manifold is reduced, the liquid droplet amount ejected from the nozzle opening becomes uniform.
Therefore, in the liquid ejecting apparatus including the liquid ejecting head described in the above application example, the amount of liquid droplets ejected from the nozzle openings becomes uniform, so that the print quality (for example, uniformity) can be improved.

FIG. 3 is an exploded perspective view of the recording head according to the first embodiment. FIG. 3 is a schematic plan view of the recording head according to the first embodiment. The schematic plan view of the frame member which comprises a compliance board | substrate. FIG. 4 is a schematic cross-sectional view along the line AA ′ in FIG. 3. The principal part sectional drawing which expanded the principal part of FIG. FIG. 3 is a schematic diagram illustrating a displacement state of a film in a compliance region of the recording head according to the first embodiment. FIG. 3 is a schematic diagram illustrating a displacement state of a film in a compliance region of the recording head according to the first embodiment. Schematic which shows the displacement state of the film in the compliance area | region of the recording head which concerns on a comparative example. FIG. 3 is a schematic diagram illustrating a state of pressure fluctuation in the manifold when ink ejection is started from a standby state. FIG. 6 is another schematic diagram illustrating a state of displacement of the compliance area in the recording head according to the first embodiment. FIG. 10 is another schematic diagram showing a state of displacement of the compliance area in the recording head according to the comparative example. FIG. 10 is a schematic plan view of a frame member of a recording head according to another comparative example. The schematic diagram which shows the displacement state of the film of the recording head which concerns on another comparative example. FIG. 3 is a schematic diagram illustrating a film displacement state of the recording head according to the first embodiment. FIG. 4 is a schematic diagram illustrating an overview of a printer according to a second embodiment. The schematic plan view of the frame member which concerns on the modification 1. FIG. The schematic plan view of the frame member which concerns on the modification 2. FIG. FIG. 10 is a schematic plan view of a frame member according to Modification 3. The schematic plan view of the frame member which concerns on the modification 4. FIG. FIG. 10 is a schematic plan view of a frame member according to Modification 5.

  Hereinafter, the present invention will be described in detail based on embodiments with reference to the drawings. Such an embodiment shows one aspect of the present invention and does not limit the present invention, and can be arbitrarily changed within the scope of the technical idea of the present invention. In each of the following drawings, the scale of each layer or each part is made different from the actual scale so that each layer or each part can be recognized on the drawing.

(Embodiment 1)
FIG. 1 is an exploded perspective view of an ink jet recording head which is an example of a liquid jet head according to the first embodiment. FIG. 2 is a schematic plan view of the ink jet recording head according to the present embodiment. FIG. 3 is a schematic plan view of a frame member constituting the compliance substrate. 4 is a schematic cross-sectional view taken along the line AA ′ of FIG. FIG. 5 is an enlarged cross-sectional view of a main part of FIG.

As shown in the drawing, an ink jet recording head II (hereinafter referred to as recording head II) according to the present embodiment includes a head main body 11, a case member 40 fixed to one surface side of the head main body 11, and the head main body 11. A plurality of members such as a cover head 130 fixed to the direction side are provided. The head main body 11 is provided on the opposite side of the flow path forming substrate 10, the communication plate 15 provided on one side of the flow path forming substrate 10, and the flow path forming substrate 10 of the communication plate 15. The nozzle plate 20, the protective substrate 30 provided on the opposite side of the communication plate 15 of the flow path forming substrate 10, and the compliance substrate 45 provided on the surface side of the communication plate 15 on which the nozzle plate 20 is provided. (See FIG. 1).
The cover head 130 is an example of a “lid member”.

The flow path forming substrate 10 constituting the head body 11 is made of a metal such as stainless steel or Ni, a ceramic material typified by ZrO ₂ or Al ₂ O ₃ , a glass ceramic material, an oxide such as MgO or LaAlO _3. Can be used. In the present embodiment, the flow path forming substrate 10 is made of a silicon single crystal substrate. A plurality of pressure generating chambers 12 (see FIG. 4) partitioned by partition walls are ejected from the flow path forming substrate 10 by an anisotropic etching from one surface side. A plurality of nozzles 21 are juxtaposed along the direction in which the nozzles 21 are juxtaposed.
The nozzle 21 is an example of a “nozzle opening”.

Hereinafter, the direction in which the nozzles 21 are arranged in parallel, that is, the direction in which the plurality of pressure generating chambers 12 are arranged in parallel is referred to as a first direction X.
The flow path forming substrate 10 is provided with a plurality of rows (in this embodiment, two rows) of a plurality of pressure generating chambers 12 arranged in parallel in the first direction X. An arrangement direction of the rows of the pressure generating chambers 12 arranged in parallel in the first direction X is referred to as a second direction Y.
The second direction Y is an example of a “direction intersecting the first direction”. For example, the second direction Y is “the first direction on one surface of the flexible member (film 46) described later”. The direction that intersects the direction.

  The flow path forming substrate 10 has an opening area smaller than that of the pressure generation chamber 12 on one end side in the second direction Y of the pressure generation chamber 12, and the flow path resistance of the ink flowing into the pressure generation chamber 12. A supply path or the like for providing the above may be provided.

  On one surface side of the flow path forming substrate 10, a communication plate 15 and a nozzle plate 20 are sequentially stacked. That is, the communication plate 15 provided on one surface of the flow path forming substrate 10 and the nozzle plate 20 having the nozzles 21 provided on the opposite surface side of the communication plate 15 from the flow path forming substrate 10 are provided.

The communication plate 15 is provided with a nozzle communication path 16 that communicates the pressure generating chamber 12 and the nozzle 21 (see FIG. 4). The communication plate 15 has a larger area than the flow path forming substrate 10, and the nozzle plate 20 has a smaller area than the flow path forming substrate 10. By providing the communication plate 15 in this manner, the nozzle 21 of the nozzle plate 20 and the pressure generating chamber 12 can be separated from each other, so that the ink in the pressure generating chamber 12 is the amount of moisture in the ink generated by the ink near the nozzle 21 Less susceptible to thickening due to evaporation.
Furthermore, since the nozzle plate 20 only needs to cover the opening of the nozzle communication path 16 that communicates the pressure generating chamber 12 and the nozzle 21, the area of the nozzle plate 20 can be made relatively small. As a result, the flow path forming substrate 10 can be made smaller than the communication plate 15, so that the cost can be reduced.
Hereinafter, the surface of the nozzle plate 20 on which the nozzles 21 are opened and ink droplets are ejected is referred to as a liquid ejection surface 20a.

The communication plate 15 is provided with a first manifold portion 17 and a second manifold portion 18 that constitute a part of the manifold 100 (see FIG. 4).
The first manifold portion 17 is provided through the communication plate 15 in the thickness direction (the stacking direction of the communication plate 15 and the flow path forming substrate 10). The second manifold portion 18 is provided by opening the communication plate 15 toward the nozzle plate 20 without penetrating the communication plate 15 in the thickness direction. The thickness direction (stacking direction) is orthogonal to the first direction and the second direction.

The opening shape of the manifold 100 on the nozzle plate 20 side has a longitudinal direction and a lateral direction in an in-plane direction including the first direction X and the second direction Y. The manifold 100 having the longitudinal direction and the short direction means that the aspect ratio (aspect ratio) of the opening on the nozzle plate 20 side of the manifold 100 is other than 1: 1. The opening shape of the manifold 100 is not particularly limited, and may be, for example, a rectangular shape, a trapezoidal shape, a parallelogram shape, a polygonal shape, an elliptical shape, or the like.
As described above, the recording head II includes the nozzle 21 that ejects ink, the pressure generation chamber 12 that is in communication with the nozzle 21 and arranged in parallel in the first direction X, and the manifold 100 that is in communication with the pressure generation chamber 12. have.

  The plurality of pressure generation chambers 12 are arranged in parallel in the first direction X. For this reason, in the manifold 100 which is a common liquid chamber communicating with each pressure generating chamber 12, the first direction X side in which the pressure generating chambers 12 are arranged side by side is a longitudinal direction (long), and the second direction Y side is It is provided in a trapezoidal shape so as to be in the short direction (short length). Similarly, the opening shape on the nozzle plate 20 side of the manifold 100 is also provided in a trapezoidal shape so that the first direction X side is the longitudinal direction and the second direction Y side is the short direction.

  Further, the communication plate 15 is provided with a supply communication passage 19 that communicates with one end portion of the pressure generation chamber 12 in the second direction Y independently for each pressure generation chamber 12. The supply communication path 19 communicates the second manifold portion 18 and the pressure generation chamber 12. That is, in this embodiment, the supply communication path 19, the pressure generation chamber 12, and the nozzle communication path 16 are provided as individual flow paths communicating with the nozzle 21 and the second manifold portion 18 (see FIG. 4). ).

  As the communication plate 15, a metal such as stainless steel or nickel (Ni), or a ceramic such as zirconium (Zr) can be used. The communication plate 15 is preferably made of a material having the same linear expansion coefficient as the flow path forming substrate 10. That is, when a material having a linear expansion coefficient that is significantly different from that of the flow path forming substrate 10 is used as the communication plate 15, warping due to a difference in linear expansion coefficient between the flow path forming substrate 10 and the communication plate 15 due to heating or cooling. Will occur. In this embodiment, by using the same material as the flow path forming substrate 10 as the communication plate 15, that is, a silicon single crystal substrate, it is possible to suppress the occurrence of warping due to heat, cracking due to heat, peeling, and the like.

  In the nozzle plate 20, nozzles 21 communicating with the pressure generation chambers 12 through the nozzle communication passages 16 are formed. Nozzles 21 that eject the same type of liquid (ink) are arranged in parallel in the first direction X, and two rows of nozzles 21 arranged in parallel in the first direction X are arranged in two rows in the second direction Y. Is formed.

  As such a nozzle plate 20, for example, a metal such as stainless steel (SUS), an organic substance such as a polyimide resin, a silicon single crystal substrate, or the like can be used. In addition, by using a silicon single crystal substrate as the nozzle plate 20, the linear expansion coefficients of the nozzle plate 20 and the communication plate 15 are made equal, and the occurrence of warpage due to heating or cooling, cracks due to heat, peeling, and the like are suppressed. can do.

  On the other hand, a diaphragm 50 is formed on the surface of the flow path forming substrate 10 opposite to the communication plate 15 (see FIG. 5). In the present embodiment, an elastic film 51 made of silicon oxide provided on the flow path forming substrate 10 side and an insulator film 52 made of zirconium oxide provided on the elastic film 51 are provided as the diaphragm 50. I made it. The liquid flow path such as the pressure generation chamber 12 is formed by anisotropically etching the flow path forming substrate 10 from one side (the side where the nozzle plate 20 is bonded). The other surface of the liquid flow path is defined by the elastic film 51.

  In addition, the first electrode 60, the piezoelectric layer 70, and the second electrode 80 are stacked on the insulator film 52 of the vibration plate 50 to form the piezoelectric actuator 300. Here, the piezoelectric actuator 300 refers to a portion including the first electrode 60, the piezoelectric layer 70, and the second electrode 80. In general, one electrode of the piezoelectric actuator 300 is used as a common electrode, and the other electrode and the piezoelectric layer 70 are patterned for each pressure generating chamber 12. In addition, here, a portion that is configured by any one of the patterned electrodes and the piezoelectric layer 70 and in which piezoelectric distortion is generated by applying a voltage to both electrodes is referred to as a piezoelectric active portion. In the present embodiment, the first electrode 60 is used as a common electrode for the piezoelectric actuator 300 and the second electrode 80 is used as an individual electrode for the piezoelectric actuator 300. However, there is no problem even if this is reversed for the convenience of the drive circuit and wiring.

  In the present embodiment, since the first electrode 60 is continuously provided across the plurality of pressure generating chambers 12, the first electrode 60 functions as a part of the diaphragm, but of course, the present invention is not limited thereto. For example, the first electrode 60 may function as a diaphragm without providing the elastic film 51 and the insulator film 52 described above. Further, the piezoelectric actuator 300 itself may substantially serve as a diaphragm. However, when the first electrode 60 is provided directly on the flow path forming substrate 10, it is preferable to protect the first electrode 60 with an insulating protective film or the like so that the first electrode 60 and the ink are not electrically connected. That is, in the present embodiment, the configuration in which the first electrode 60 is provided on the substrate (the flow path forming substrate 10) via the vibration plate 50 is illustrated, but the present invention is not particularly limited thereto. You may make it provide the 1st electrode 60 directly on a board | substrate, without providing. That is, you may make it the 1st electrode 60 act as a diaphragm.

  Further, each second electrode 80 that is an individual electrode of such a piezoelectric actuator 300 is drawn out from the vicinity of the end portion on the opposite side to the supply communication path 19 and extended to the diaphragm 50. The second electrode 80 is connected to a lead electrode 90 made of, for example, gold (Au) or the like (see FIG. 5).

  A protective substrate 30 having substantially the same size as the flow path forming substrate 10 is bonded to the surface of the flow path forming substrate 10 on the side of the piezoelectric actuator 300 that is a pressure generating means. The protective substrate 30 has a holding portion 31 that is a space for protecting the piezoelectric actuator 300.

  In addition, a case member 40 is fixed to the head main body 11 having such a configuration. The case member 40 defines a manifold 100 communicating with the plurality of pressure generating chambers 12 together with the head main body 11. The case member 40 has substantially the same shape as the communication plate 15 described above in a plan view, and is bonded to the protective substrate 30 and is also bonded to the communication plate 15 described above. Specifically, the case member 40 has a recess 41 having a depth in which the flow path forming substrate 10 and the protective substrate 30 are accommodated on the protective substrate 30 side (see FIG. 4). The concave portion 41 has an opening area larger than the surface of the protective substrate 30 bonded to the flow path forming substrate 10. The opening surface on the nozzle plate 20 side of the recess 41 is sealed by the communication plate 15 in a state where the flow path forming substrate 10 and the like are accommodated in the recess 41. As a result, a third manifold portion 42 is defined by the case member 40 and the head body 11 on the outer peripheral portion of the flow path forming substrate 10. The manifold 100 of this embodiment is configured by the first manifold portion 17 and the second manifold portion 18 provided on the communication plate 15, and the third manifold portion 42 defined by the case member 40 and the head body 11. It is configured.

  That is, the manifold 100 includes the first manifold portion 17, the second manifold portion 18, and the third manifold portion 42. Further, the manifold 100 of the present embodiment is arranged on both outer sides of the two rows of pressure generating chambers 12 in the second direction Y, and two manifolds provided on both outer sides of the two rows of pressure generating chambers 12. 100 are provided independently so as not to communicate with each other in the recording head II. That is, one manifold 100 is provided in communication with each row of pressure generation chambers 12 of this embodiment (rows of pressure generation chambers 12 arranged in parallel in the first direction X).

  Further, the case member 40 is provided with an introduction path 44 that communicates with the manifold 100 and supplies ink to each manifold 100 (see FIG. 1). The case member 40 is provided with a connection port 43 that communicates with the through hole 32 of the protective substrate 30 and through which the wiring substrate 121 is inserted (see FIG. 1). The wiring board 121 inserted through the connection port 43 is connected to the lead electrode 90. The wiring board 121 is provided with a drive circuit 120 (see FIG. 1).

  Note that the two manifolds 100 may communicate with each other on the upstream side of the recording head II, that is, with an upstream flow path connected to an introduction path 44 that communicates with the manifold 100 described in detail later.

  As a material of the case member 40, for example, resin, metal, or the like can be used. For example, by forming the case member 40 by molding a resin material, it can be mass-produced at a low cost.

  As shown in FIGS. 4 and 5, a compliance substrate 45 is provided on the surface of the communication plate 15 where the first manifold portion 17 and the second manifold portion 18 are opened. The compliance substrate 45 has substantially the same size as the communication plate 15 described above in plan view, and is provided with a first exposure opening 45a that exposes the nozzle plate 20. The compliance substrate 45 seals the opening on the liquid ejection surface 20a side of the first manifold portion 17 and the second manifold portion 18 in a state where the nozzle plate 20 is exposed by the first exposed opening portion 45a.

As described above, the compliance substrate 45 defines a part of the manifold 100. The compliance substrate 45 includes a film 46 formed of a flexible material, and a frame member 47 fixed to the opposite side of the communication plate 15 of the film 46.
The film 46 is an example of a “flexible member”.

The film 46 is composed of a flexible film-like thin film (for example, a thin film having a thickness of 20 μm or less formed of polyphenylene sulfide (PPS), aromatic polyamide (aramid), or the like).
The frame member 47 is composed of a member that is harder and more elastic than the film 46. As a constituent material of the frame member 47, for example, a metal such as stainless steel (SUS) or Ni electroforming can be used. An area of the frame member 47 that faces the manifold 100 is an opening 48 that is completely removed in the thickness direction. Therefore, one surface of the manifold 100 is a compliance region 49 that is sealed only by the flexible film 46. That is, the film 46 forms a part of the manifold 100 and has flexibility.

That is, by providing the opening 48 in the frame member 47, a compliance space 131 for separating the film 46 and the cover head 130 as the lid member is formed. The frame member 47 is disposed between the film 46 and the cover head 130. Further, the compliance space 131 allows a part of the film 46 (the film 46 disposed inside the opening 48) to be displaced as the compliance region 49.
In other words, the opening 48 provided in the frame member 47 becomes a compliance region 49 that allows the film 46 to be displaced according to the pressure fluctuation in the manifold 100. Furthermore, by providing the compliance region 49 in the manifold 100, rapid pressure fluctuation of the ink filled in the manifold 100 is suppressed.
The compliance space 131 is an example of “a space formed between the lid member and the flexible member”. The opening 48 is an example of an “opening that allows the flexible member to be displaced”.

  In the present embodiment, one compliance region 49 is provided corresponding to one manifold 100. That is, in this embodiment, since two manifolds 100 are provided, two compliance regions 49 are provided on both sides in the second direction Y across the nozzle plate 20.

  The compliance substrate 45 is formed, for example, by applying an adhesive over the entire surface of one side of the film 46 and then bonding the frame member 47 to the one side where the adhesive of the film 46 is formed. Therefore, as shown in FIG. 5, an adhesive layer 46 a in which the adhesive is cured is also formed in the compliance region 49 exposed at the opening 48 of the frame member 47.

  Here, the compliance region 49 defined by the opening 48 has a longitudinal direction and a lateral direction in the first direction X and the second direction Y, as shown in FIG. The compliance region 49 having a longitudinal direction and a short direction means that the compliance region 49 has an aspect ratio (aspect ratio) other than 1: 1. The shape of the compliance region 49 is not particularly limited, and may be, for example, a rectangular shape, a trapezoidal shape, a parallelogram shape, a polygonal shape, an elliptical shape, or the like. In the present embodiment, as described above, the opening on the compliance substrate 45 side of the manifold 100 is provided in a trapezoidal shape having a longitudinal direction in the first direction X and a short direction in the second direction Y. Therefore, the compliance region 49 is provided in a trapezoidal shape having a longitudinal direction in the first direction X and a short direction in the second direction Y, similarly to the opening shape of the manifold 100. As a result, the compliance region 49 can be provided in the largest possible area with respect to the opening of the manifold 100, and the recording head II can be downsized. Of course, the compliance region 49 is not necessarily provided in the same shape as the opening shape of the manifold 100, and may be provided in a shape different from the opening shape of the manifold 100.

Further, as shown in FIGS. 4 and 5, a cover head 130 is provided on the liquid ejecting surface 20 a side of the head body 11.
The cover head 130 is provided with a second exposure opening 132 that exposes the nozzle 21. In the present embodiment, the second exposure opening 132 has a size that exposes the nozzle plate 20, that is, an opening that is substantially the same as the first exposure opening 45 a of the compliance substrate 45.
Further, the cover head 130 is provided with a bent end from the liquid ejection surface 20a side so as to cover the side surface of the head body 11 (a surface intersecting the liquid ejection surface 20a).

  Such a cover head 130 is joined to the surface of the compliance substrate 45 opposite to the communication plate 15 and seals the space of the compliance region 49 opposite to the flow path (manifold 100). That is, the cover head 130 which is a lid member is provided so as to cover the compliance region 49 in a state where the compliance space 131 is disposed between the cover head 130 and the compliance region 49. Thus, by covering the compliance area 49 with the cover head 130 which is a lid member, the compliance area 49 can be prevented from being destroyed even when a recording medium such as paper comes into contact. Further, it is possible to suppress the ink (liquid) from adhering to the compliance region 49 and to wipe the ink (liquid) adhering to the surface of the cover head 130 with, for example, a wiper blade, and the recording medium can be removed from the cover head 130. It is possible to suppress contamination with ink or the like adhering to the ink.

As shown in FIGS. 3 and 5, the frame member 47 includes a main body portion 47 a, a cantilever beam 150, and a support portion 152. The main body 47a, the cantilever 150, and the support 152 are integrally formed of the same material (for example, SUS). The cantilever 150 and the support 152 are disposed in a compliance space 131 formed between the film 46 in the compliance region 49 and the cover head 130, and can be displaced together with the film 46 in the compliance region 49. .
That is, the cantilever 150 and the support portion 152 are fixed to the film 46 in the compliance region 49 by the adhesive layer 46 a and can be displaced together with the film 46 in the compliance region 49.
Note that the adhesive layer 46 a may not be disposed between the cantilever 150 and the film 46, and the cantilever 150 may not be fixed to the film 46 in the compliance region 49.

One surface of the main body portion 47a is fixed to the film 46 via an adhesive layer 46a, and the other surface of the main body portion 47a is fixed to the cover head 130 via an adhesive layer 135. A first exposed opening 45a and an opening 48 are provided in the main body 47a. As described above, the main body 47 a is fixed to the film 46 and has an opening 48 that allows the film 46 to be displaced in accordance with pressure fluctuation in the manifold 100.
The cantilever 150 and the support portion 152 are disposed inside the opening 48 of the main body portion 47a. The cantilever 150 protrudes from the edge of the opening 48 in the second direction Y, and the tip 151 (see FIG. 5) can be displaced. Specifically, the cantilever 150 protrudes from the outer edge of the opening 48 in the second direction Y toward the inside where the nozzle 21 is located (the side where the pressure generating chamber 12 is disposed). That is, in the cantilever 150, the edge side of the opening 48 becomes a fixed end (support point), the tip 151 becomes a displaceable free end, and the cantilever 150 is displaced.
Further, the support portion 152 is provided at the tip 151 of the cantilever 150 and is fixed to the film 46 in the compliance region 49.

  The cantilever 150 is provided so as to protrude in the second direction Y from the edge of the opening 48 provided in the main body 47a. The cantilever 150 is fixed to the film 46 through an adhesive layer 46a. The cantilever 150 is not fixed to the cover head 130 but can be displaced with respect to the cover head 130.

The support part 152 passes through the center of the opening 48 and extends in the first direction X. The support part 152 is fixed to the film 46 through the adhesive layer 46a. The support portion 152 is not fixed to the cover head 130 and can be displaced with respect to the cover head 130.
The film 46 is most easily displaced at the center of the opening 48 and is displaced most greatly. For this reason, the center of the opening 48 corresponds to a portion where the film 46 is most easily displaced and is displaced most greatly. The support portion 152 is fixed to at least a part of a portion where the film 46 is displaced most greatly.

  As described above, the cantilever 150 and the support portion 152 provided at the tip 151 of the cantilever 150 are fixed to the film 46 and are not fixed to the cover head 130. 150 and the support 152 are displaced together with the film 46 in the compliance region 49.

A force (hereinafter referred to as a deformation force) corresponding to the pressure in the manifold 100 acts on the film 46 in the compliance region 49. The film 46 in the compliance region 49 is displaced (deformed) by the deformation force.
In the present embodiment, in a standby state where ink is not ejected from the nozzles 21, the pressure in the manifold 100 is negative (referenced to atmospheric pressure). Further, when ink is ejected from the nozzle 21 and the ink in the manifold 100 is consumed, the negative pressure in the manifold 100 is increased. Therefore, when the manifold 100 is filled with ink, the film 46 in the compliance region 49 is displaced in a direction away from the cover head 130 (hereinafter referred to as the vertical direction) due to the deformation force.

  This deformation force is transmitted to the support portion 152 via the film 46 and further transmitted to the tip 151 of the cantilever 150 via the support portion 152. That is, by providing the support portion 152 at the tip 151 of the cantilever 150, the deformation force acts on the tip 151 of the cantilever 150 in a concentrated manner. As a result, the cantilever 150 is displaced with the edge side of the opening 48 as a fixed end. Further, the support portion 152 provided at the tip 151 of the cantilever 150 is also displaced together with the cantilever 150.

  The cantilever 150 is a kind of spring plate made of an elastic member. For this reason, when a deformation force acts on the cantilever beam 150 and the cantilever beam 150 is displaced, a force (hereinafter referred to as a force against the deformation force) is applied to the cantilever beam 150 to return to the original shape. To do.

A force that resists the deformation force is transmitted from the cantilever 150 to the film 46 in the compliance region 49 via the support portion 152. Since the force resisting the deformation force acts on the film 46 in the compliance region 49 from the cantilever 150 via the support portion 152, the influence of the deformation force on the film 46 in the compliance region 49 is weakened. For example, even when a sudden pressure change in the manifold 100 occurs and the deformation force becomes excessively strong, the influence of the deformation force is weakened, so that excessive displacement (deformation) of the film 46 is suppressed.
Thus, the cantilever 150 has a role of suppressing excessive displacement (deformation) of the film 46 in the compliance region 49.

The support portion 152 has a role of transmitting a deformation force to the cantilever 150 and further transmitting a force against the deformation force to the film 46.
If the displacement of the film 46 in the compliance region 49 is non-uniform, the pressure fluctuation in the manifold 100 may not be properly adjusted by the compliance region 49. Therefore, the film 46 in the compliance region 49 is preferably displaced uniformly. .
For example, when the support portion 152 is deformed, the direction of the force acting on the cantilever 150 and the film 46 from the support portion 152 changes depending on the deformation state of the support portion 152, and the displacement of the cantilever 150 and the film 46 is not allowed. It tends to be uniform. On the other hand, if the support portion 152 is not easily deformed, the direction of the force acting on the cantilever 150 and the film 46 from the support portion 152 is difficult to change, and the cantilever 150 and the film 46 are easily displaced uniformly.
In order to uniformly displace the cantilever 150 and the film 46 and properly adjust the pressure fluctuation in the manifold 100 by the compliance region 49, the support portion 152 is thicker than the cantilever 150 and is difficult to displace. .

If the cantilever 150 has higher rigidity than the support portion 152 and is difficult to displace, excessive displacement (deformation) of the film 46 in the compliance region 49 can be suppressed. Proper displacement is hindered.
For example, in order to reduce the pressure change in the manifold 100 and stabilize the pressure in the manifold 100, the film 46 in the compliance region 49 is preferably displaced appropriately. For this reason, it is preferable that the cantilever 150 is also displaced appropriately. Therefore, the cantilever 150 is preferably easily displaced (elastically deformed) appropriately by a deformation force, and preferably has a lower rigidity than the support portion 152.
For this reason, the cantilever 150 is thinner than the support portion 152 and is easily displaced (elastically deformed).

  Since the cantilever 150 is thinner than the support portion 152, a step 153 is formed at the boundary between the cantilever 150 and the support portion 152. Further, the main body portion 47 a has the same thickness as the support portion 152 and is thicker than the cantilever 150. For this reason, the same level | step difference is formed also in the boundary of the cantilever 150 and the main-body part 47a.

  In other words, the thinned portion of the frame member 47 is the cantilever 150. A thickened portion of the frame member 47 extending in the first direction X is a support portion 152. The portion of the cantilever 150 that contacts the support portion 152 is the tip 151 of the cantilever 150. Furthermore, the thickened portion of the frame member 47 provided with the first exposed opening 45a and the opening 48 is the main body 47a.

Note that the cantilever 150 and the support portion 152 may have the same thickness. Furthermore, the cantilever 150 and the support portion 152 are not limited to being made of the same material, and may be made of different materials.
For example, when the cantilever 150 and the support portion 152 have the same thickness, the cantilever 150 is preferably made of a material that is easily deformed, and the support portion 152 is preferably made of a material that is difficult to deform.

  Note that the cantilever 150 may be configured so as to become thinner from the portion fixed to the edge of the opening 48 toward the tip 151. When the cantilever 150 is thinned from the portion fixed to the edge of the opening 48 toward the tip 151, stress concentration in the portion fixed to the edge of the opening 48 can be reduced.

6A and 6B are schematic views showing the displacement state of the film in the compliance region of the recording head according to the present embodiment. FIG. 7 is a schematic view showing a displacement state of the film in the compliance region of the recording head according to the comparative example. 6B and 7 show the same state.
The recording head according to the comparative example is different from the recording head II according to the present embodiment in that the beam member 56 is not provided with the cantilever 150 and the support portion 152.

  As shown in FIG. 6A, in the recording head II according to the present embodiment, in the standby state in which ink is not ejected from the nozzles 21, the pressure in the manifold 100 is negative (referenced to atmospheric pressure). The film 46 in the region 49 is bent and deformed inside the manifold 100 (in the vertical direction).

As shown in FIG. 6B, when the ink is ejected from the nozzle 21 and the ink in the manifold 100 is consumed, the negative pressure in the manifold 100 increases, and the film 46 in the compliance region 49 elastically deforms the cantilever 150. Then, it is further bent and deformed inside the manifold 100 (in the vertical direction).
As described above, the force that resists the deformation force (deformation force) of the film 46 acts on the film 46 from the cantilever 150 via the support portion 152, and therefore, when the cantilever 150 is not provided. As compared with the above, the bending deformation of the film 46 is suppressed. Since the cantilever 150 acts in a direction to relieve the pressure change in the manifold 100, the pressure fluctuation in the manifold 100 becomes small at the start of printing and during printing. Therefore, fluctuations in ink ejection characteristics during printing, particularly variations in ink droplet weight, are suppressed.

FIG. 7 shows the same state as FIG. 6B, in which the ink in the manifold 100 has been consumed and the negative pressure in the manifold 100 has increased.
As shown in FIG. 7, in the recording head according to the comparative example, when the ink in the manifold 100 is consumed and the negative pressure in the manifold 100 increases, the cantilever 150 and the support portion 152 are provided on the beam member 56. Therefore, the film 46 in the compliance region 49 is further bent and deformed. If the film 46 in the compliance region 49 is bent completely, the film 46 becomes more difficult to bend and deform, so that it is difficult to adjust the pressure in the manifold 100.
Therefore, the recording head according to the comparative example has a weaker pressure adjustment capability in the manifold 100 than the recording head II according to the present embodiment. On the other hand, in the recording head II according to the present embodiment, excessive deformation in which the film 46 in the compliance region 49 is bent is suppressed, so that the pressure in the manifold 100 can be adjusted appropriately.

FIG. 8 is a schematic diagram showing a state of pressure fluctuation in the manifold when ink ejection is started from the standby state.
In FIG. 8, the vertical axis represents the pressure in the manifold 100, and the horizontal axis represents the time (elapsed time) from the start of ink ejection. Further, the solid line in the figure corresponds to the recording head II according to the present embodiment, and the broken line in the figure corresponds to the recording head according to the comparative example.

  As indicated by the broken line in FIG. 8, the recording head according to the comparative example has a weak pressure adjustment capability in the manifold 100. Therefore, the compliance area 49 of the ink consumed in the manifold 100 at T1 immediately after the start of ink ejection. Since the pressure fluctuation cannot be absorbed, the manifold 100 has a large negative pressure. Thereby, at T1, the weight of the ejected ink droplet is reduced, and the printing density is reduced. At T2 thereafter, the pressure in the manifold 100 temporarily becomes positive due to the reaction that ink is supplied into the manifold 100 from the upstream side. As a result, at T2, the weight of the ink droplet increases and the print density increases. Thereafter, at T3, the compliance region 49 absorbs the pressure fluctuation in the manifold 100, the pressure in the manifold 100 is stabilized, and the ink droplet weight is intermediate, that is, the printing density is intermediate.

  As shown by the solid line in FIG. 8, in the recording head II according to this embodiment, the compliance region 49 can absorb pressure fluctuations in the manifold 100, so that the pressure difference in the manifold 100 at T1, T2, and T3. And the difference in the weight of the ink droplets can be reduced as compared with the comparative example. Therefore, by providing the cantilever 150 and the support portion 152, variation in the weight of the ejected ink droplets can be suppressed.

FIG. 9 is another schematic diagram showing the displacement state of the compliance area in the recording head according to the present embodiment. FIG. 10 is another schematic diagram illustrating a state of displacement of the compliance area in the recording head according to the comparative example.
As described above, in the recording head according to the comparative example, the cantilever 150 and the support portion 152 are not provided on the beam member 56.

  For example, when the recording head II is driven in a state where the compliance area 49 is not filled with ink, the film 46 in the compliance area 49 may be displaced toward the cover head 130.

  As shown in FIG. 9, in the recording head II according to the present embodiment, the support portion 152 and the cantilever 150 (not shown in FIG. 9) are disposed between the cover head 130 and the film 46. When the film 46 is displaced to the cover head 130 side, it becomes difficult to come into contact with the cover head 130 (it becomes difficult to stick).

  As shown in FIG. 10, in the recording head according to the comparative example, since the support portion 152 and the cantilever 150 are not provided between the cover head 130 and the film 46, the film 46 in the compliance region 49 is When displaced toward the 130 side, the cover head 130 is easily contacted. Further, when the film 46 in the compliance region 49 comes into contact with the cover head 130 in a state where moisture is adhered to the film 46 or the cover head 130 due to condensation or the like, the film 46 adheres to the cover head 130 by the moisture. There is a risk of sticking. When the film 46 is stuck and fixed to the cover head 130, the displacement of the film 46 in the compliance region 49 is hindered, so that it becomes difficult to adjust the pressure fluctuation in the manifold 100 by the compliance region 49.

  In the present embodiment, the support portion 152 and the cantilever 150 suppress the contact (sticking) of the film 46 in the compliance region 49 to the cover head 130, so that the displacement of the film 46 in the compliance region 49 is inhibited. Instead, the compliance region 49 can appropriately adjust the pressure fluctuation in the manifold 100.

  Further, when water repellent treatment is performed on at least one of the surface of the support portion 152 and the cantilever 150 facing the cover head 130 and the surface of the cover head 130 facing the support portion 152 and the cantilever 150, As compared with the case where no water is applied, the adhesion of moisture such as condensation is suppressed, so that the problem that the film 46 in the compliance region 49 sticks to the cover head 130 due to moisture (condensation) is more strongly suppressed. can do.

FIG. 11 is a diagram corresponding to FIG. 3 and a schematic plan view of a frame member of a recording head according to another comparative example. FIG. 12A is a schematic diagram in the vicinity of BB ′ shown in FIG. 11, and is a schematic diagram showing a displacement state of a film of a recording head according to another comparative example. FIG. 12B is a diagram corresponding to FIG. 12A and is a schematic diagram showing a displacement state of the film of the recording head according to the present embodiment.
In addition, in FIG. 11, FIG. 12A, and FIG. 12B, illustration of the component unnecessary for description is abbreviate | omitted.

As shown in FIG. 11, in the frame member 57 of the recording head according to another comparative example, the support portion 152 is not provided inside the opening 48, and a pair of cantilever beams 150 </ b> A protruding inside the opening 48 are provided. A plurality of elements are arranged along the first direction X. This is the difference from this embodiment.
As shown in FIG. 12A, the film 46 in the compliance region 49 is in contact with the entire surface (hereinafter referred to as a contact surface) facing the film 46 of the cantilever 150 </ b> A protruding inside the opening 48. A deformation force acts on the entire contact surface of the cantilever 150A from the film 46, and a force against the deformation force acts on the film 46 from the entire contact surface of the cantilever 150A. As a result, the bending deformation of the film 46 is suppressed around the contact surface of the cantilever 150A.

As shown in FIG. 12B, in the recording head II according to the present embodiment, the deformation force acts intensively on the tip 151 of the cantilever 150 via the support portion 152. When the deformation force acts on the tip 151 of the cantilever 150 in a concentrated manner, the deformation force acts on the fixed end (opening of the cantilever 150) as compared with the case where the deformation force acts on the entire contact surface of the cantilever 150A. 48, the bending moment for deforming the cantilever 150 is increased, and the cantilever 150 is easily deformed.
That is, the recording head II according to the present embodiment has a larger bending moment for deforming the cantilever 150 than the recording head according to another comparative example. However, the cantilever 150 is easily deformed, and the cantilever 150 is appropriately displaced. Accordingly, the film 46 in the compliance region 49 is also appropriately displaced, and the pressure fluctuation in the manifold 100 can be appropriately adjusted by the compliance region 49.
Further, in the recording head II according to the present embodiment, a force resisting the deformation force acts on the film 46 via the support portion 152, so that the bending deformation of the film 46 is suppressed around the support portion 152. On the other hand, the frame member 57 of the recording head according to another comparative example is not provided with the support portion 152 inside the opening 48, so that the bending deformation of the film 46 is suppressed as compared with the recording head II according to the present embodiment. The area of the area to be formed is reduced. Therefore, the recording head II according to the present embodiment has a large area in which the bending deformation of the film 46 is suppressed, and reliably suppresses excessive deformation of the film 46, as compared with the recording head according to another comparative example. be able to.
As described above, the recording head II according to this embodiment can obtain the effect of appropriately displacing the film 46 in the compliance region 49 in addition to the effect of reliably suppressing the excessive displacement of the film 46 in the compliance region 49. Therefore, the pressure fluctuation in the manifold 100 is appropriately adjusted by the compliance region 49, the pressure change in the manifold 100 is reduced, and the ink ejection characteristics (for example, the amount of droplets ejected from the nozzles 21) become uniform. .

(Embodiment 2)
"Liquid ejector"
FIG. 13 is a schematic diagram illustrating a configuration of a printer according to the second embodiment.
Next, an overview of a printer 1000 that is an example of a “liquid ejecting apparatus” will be described with reference to FIG. 13.
As illustrated in FIG. 13, the printer 1000 includes a transport unit 200, a carriage unit 301, and the recording head II according to the first embodiment. In the printer 1000, each unit (the conveyance unit 200 and the carriage unit 301) is controlled by the controller 600, and an image is printed on the paper S.

  The transport unit 200 has a function of moving the paper S in the transport direction H. The transport unit 200 includes a paper feed roller 210, a transport motor 220, a transport roller 230, a platen 240, a paper discharge roller 250, and the like. The paper feed roller 210 feeds the paper S inserted from the back of the printer 1000 into the printer 1000. The transport roller 230 transports the paper S fed by the paper feed roller 210 to a printable area above the platen 240. The platen 240 supports the paper S being printed. The paper discharge roller 250 discharges the paper S to the front surface (transport direction H) of the printer 1000. The paper feed roller 210, the transport roller 230, and the paper discharge roller 250 are driven by the transport motor 220.

  The carriage unit 301 has a function of reciprocating (scanning) the recording head II in a predetermined direction (scanning direction). The carriage unit 301 includes a carriage 310, a carriage motor 320, and the like. The carriage 310 can reciprocate in the scanning direction and is driven by a carriage motor 320. The carriage 310 also detachably holds the ink cartridge 6 that stores ink.

  In the printer 1000, an image composed of a plurality of dots by alternately repeating a droplet ejecting operation for ejecting ink as droplets by the recording head II and a transport operation for transporting the paper S in the transport direction H by the transport roller 230. Is printed on the paper S.

As described above, in the recording head II, the pressure fluctuation in the manifold 100 is appropriately adjusted by the compliance region 49, the pressure change in the manifold 100 is reduced, and the ink ejection characteristics (for example, the liquid ejected from the nozzle 21). Drop volume) becomes uniform.
Accordingly, even in the printer 1000 including the recording head II, the ink ejection characteristics (for example, the amount of liquid droplets ejected from the nozzles 21) become uniform, so the print quality of the image printed on the paper S (for example, uniform) Property).

  The present invention is not limited to the above-described embodiments, and can be appropriately changed without departing from the spirit or idea of the invention that can be read from the claims and the entire specification. Various modifications other than the above-described embodiments are possible. Conceivable. Hereinafter, a modification will be described.

(Modification 1)
FIG. 14 is a diagram corresponding to FIG. 3, and is a schematic plan view of a frame member according to the first modification.
As shown in FIG. 14, in the frame member 47 </ b> A according to this modification, a plurality of (three) cantilever beams 150 projecting in the second direction Y and the tip 151 of the cantilever beam 150 are disposed inside the opening 48. And a support portion 152 extending in the first direction X is disposed. That is, in the frame member 47 </ b> A according to this modified example, the three cantilever beams 150 and the one support portion 152 are arranged inside the opening 48. As described above, in the frame member 47A according to the present modification, a plurality of cantilever beams 150 are arranged along the first direction X inside the opening 48, and the plurality of cantilever beams 150 are arranged in the first direction. It is connected to a support part 152 extending to X.
On the other hand, in the frame member 47 according to the first embodiment, one cantilever 150 and one support portion 152 are arranged inside the opening 48.
This is the difference between this modification and the first embodiment.

  In the first embodiment, the support portion 152 extending in the first direction X is supported by one support point (cantilever 150). Therefore, when a force (moment) that rotates the support portion 152 is applied, the support portion 152 rotates (tilts) in a direction intersecting the first direction X, and the film 46 in the compliance region 49 may be displaced unevenly. There is.

  In the present modification, the support portion 152 extending in the first direction X is supported by a plurality of support points (cantilever beams 150), and the cantilever beams 150 are disposed at positions close to both ends of the support portion 152. . When the cantilever 150 is arranged at a position close to both ends of the support portion 152, the support portion 152 is inclined in a direction intersecting the first direction X even if a force (moment) for rotating the support portion 152 is applied. It is difficult to displace in the direction perpendicular to the first direction X and the second direction Y, and the film 46 in the compliance region 49 is easily displaced uniformly.

  Note that if the displacement of the film 46 in the compliance region 49 is not uniform, the film 46 in the compliance region 49 may not be displaced properly, and the pressure variation in the manifold 100 may not be properly adjusted by the compliance region 49. In the present modification, the film 46 in the compliance region 49 is uniformly displaced, so that proper adjustment of pressure fluctuations in the manifold 100 can be reliably performed by the compliance region 49.

(Modification 2)
FIG. 15 is a diagram corresponding to FIG. 3, and is a schematic plan view of a frame member according to Modification 2.
As shown in FIG. 15, in the frame member 47 </ b> B according to this modification, the cantilever 150 and the support portion 152 provided at the tip 151 of the cantilever 150 are arranged in the first direction X inside the opening 48. A plurality (three) are arranged along the line. On the other hand, in the frame member 47 according to the first embodiment, one cantilever 150 and one support portion 152 provided at the tip 151 of the cantilever 150 are arranged inside the opening 48.
This is the difference between this modification and the first embodiment.

In other words, in this modification, the support part 152 according to the first embodiment is divided into a plurality of parts, and the cantilever 150 is connected to each of the support parts 152 separated into a plurality. For this reason, in this modification, the length of the support portion 152 (the dimension in the first direction X) is shorter than that in the first embodiment. As described above, the length of the support portion 152 differs between this modification and the first embodiment.
Furthermore, in this modification, the angle formed by the cantilever 150 and the first direction X is a right angle, and the angle formed by the cantilever 150 and the support portion 152 is a right angle. Further, the angle formed by the cantilever 150 and the first direction X is the same between the present modification and the first embodiment.

  When the length of the support part 152 provided at the tip 151 of the cantilever 150 is shortened, the rigidity of the support part 152 is increased and the support part 152 is not easily deformed as compared with the case where the length of the support part 152 is long. . When the support part 152 is not easily deformed, the direction of the force acting on the film 46 and the cantilever 150 from the support part 152 becomes uniform as compared with the case where the support part 152 is easily deformed. Becomes uniformly displaced.

(Modification 3)
FIG. 16 is a diagram corresponding to FIG. 15 and a schematic plan view of a frame member according to Modification 3.
As shown in FIG. 16, in the frame member 47C according to this modification, the angle formed by the cantilever 150 and the first direction X is an acute angle, and the angle formed by the cantilever 150 and the support portion 152 is an acute angle. It is. On the other hand, in the beam member 47B according to the second modification, the angle formed by the cantilever 150 and the first direction X is a right angle, and the angle formed by the cantilever 150 and the support portion 152 is a right angle.
This is the difference between the present modification and the second modification.

  When the angle formed by the cantilever 150 and the support portion 152 is an acute angle, the cantilever 150 can be made longer than when the angle formed by the cantilever 150 and the support portion 152 is a right angle. When the cantilever beam 150 is lengthened, the cantilever beam 150 is easily bent (easily elastically deformed), and the function as a spring plate of the cantilever beam 150 can be enhanced.

  In the present application, “cantilever projecting in the direction intersecting the first direction from the edge of the opening and displaceable at the tip” means that the angle formed between the cantilever and the first direction is a right angle. The case where the angle formed by the cantilever and the first direction is an acute angle (or an obtuse angle) is included.

(Modification 4)
FIG. 17 is a diagram corresponding to FIG. 15 and a schematic plan view of a frame member according to Modification 4.
As shown in FIG. 17, in the frame member 47D according to the present modification, the support portion 152 is supported by a plurality (two) of support points (cantilever beams 150). That is, both ends of the support portion 152 are supported by the cantilever beam 150. In other words, in the frame member 47D according to this modification, a plurality of cantilevers 150 are arranged along the first direction X, and the cantilever 150 is provided with a plurality of support portions 152 separated from each other. .
On the other hand, in the frame member 47B according to the second modification, the support portion 152 is supported by one support point (cantilever 150).
This is the difference between this modification and Modification 2.

  When both ends of the support portion 152 are supported by the cantilever 150, even if a force (moment) for rotating the support portion 152 is applied, the support portion 152 is difficult to rotate in a direction intersecting the first direction X. The film 46 in the compliance region 49 is likely to be uniformly displaced by being displaced in a direction perpendicular to the first direction X and the second direction Y.

(Modification 5)
FIG. 18 is a diagram corresponding to FIG. 15 and a schematic plan view of a frame member according to Modification 5.
As shown in FIG. 18, in the frame member 47E according to this modification, the dimension in the first direction X of the cantilever 150 (hereinafter referred to as the width of the cantilever 150) extends from the edge of the opening 48 to the tip 151. The direction is shorter. That is, in this modification, the width of the cantilever 150 is longer on the edge side of the opening 48 and shorter on the tip 151 side. On the other hand, in the frame member 47 </ b> B according to the second modification, the width of the cantilever 150 is the same in the direction from the edge of the opening 48 toward the tip 151.
This is the difference between this modification and Modification 2.

  The tip 151 of the cantilever 150 is a free end, and is the place where the deflection is greatest. The edge side of the opening 48 of the cantilever 150 is a fixed end, and is the place where stress is most likely to concentrate. The width of the cantilever 150 is shortened toward the point where the deflection is greatest (the tip 151 of the cantilever 150), and the point where stress is most likely to concentrate (on the edge side of the opening 48 of the cantilever 150). Increasing the width of the cantilever 150 can alleviate stress concentration on the edge side of the opening 48 of the cantilever 150 without impairing the flexibility of the cantilever 150. Therefore, the durability of the cantilever 150 can be enhanced.

In this modification, the end of the cantilever 150 is a straight line in plan view, and the side surface disposed at the end of the cantilever 150 is a plane, but the present invention is not limited to this. For example, the end of the cantilever 150 may be a curved line in plan view, and the side surface disposed at the end of the cantilever 150 may be a curved surface (convex curved surface, concave curved surface).
Further, the present modification can be applied to the first embodiment, the first modification, and the fourth modification.

(Modification 6)
The printer 1000 according to the second embodiment may include a recording head to which the frame member according to the first to fifth modifications is applied in addition to the configuration including the recording head II according to the first embodiment.

  II ... Recording head, 10 ... Flow path forming substrate, 11 ... Head body, 12 ... Pressure generating chamber, 15 ... Communication plate, 16 ... Nozzle communication path, 17 ... First manifold portion, 18 ... Second manifold portion, 19 ... Common communication path, 20 ... Nozzle plate, 20a ... Liquid ejection surface, 21 ... Nozzle, 30 ... Protection substrate, 31 ... Holding part, 32 ... Through-hole, 40 ... Case member, 41 ... Recess, 42 ... Third manifold part, DESCRIPTION OF SYMBOLS 43 ... Connection port, 44 ... Introduction path, 45 ... Compliance board | substrate, 45a ... 1st exposure opening part, 46 ... Film, 46a ... Adhesive layer, 47 ... Frame member, 47a ... Main-body part, 48 ... Opening, 49 ... Compliance area | region , 50 ... diaphragm, 51 ... elastic film, 52 ... insulator film, 60 ... first electrode, 70 ... piezoelectric layer, 80 ... second electrode, 90 ... lead electrode, 100 ... manifold, 120 ... drive circuit, 21 ... wiring board, 130 ... cover head, 131 ... compliance space, 132 ... second exposure openings 135 ... adhesive layer, 150 ... cantilever, 151 ... tip, 152 ... support portion, 300 ... piezoelectric actuator.

Claims (10)

A nozzle opening for jetting liquid;
A plurality of pressure generating chambers communicated with the nozzle opening and arranged in parallel in a first direction;
A manifold communicated with the plurality of pressure generating chambers;
A flexible member that forms part of the manifold and has flexibility;
A frame member that is fixed to the flexible member and has an opening that allows the flexible member to be displaced in response to pressure fluctuations in the manifold;
Have
The frame member is
A cantilever projecting from the edge of the opening in a direction intersecting the first direction, the tip of which can be displaced;
A support portion provided at a tip of the cantilever and fixed to the flexible member;
A liquid ejecting head comprising:   The liquid ejecting head according to claim 1, wherein the support portion is fixed to at least a part of a portion where the flexible member is displaced most greatly.   The liquid ejecting head according to claim 1, wherein the support portion passes through a center of the opening and extends in the first direction.   The liquid ejecting head according to claim 1, wherein a plurality of the cantilever beams are arranged along the first direction.   The liquid ejecting head according to claim 4, wherein the support portion is separated by each of the plurality of cantilever beams arranged.   The liquid ejecting head according to claim 1, wherein the cantilever is at least partially thinner than the support portion.   The liquid ejecting head according to claim 1, wherein a dimension of the cantilever in the first direction is shorter in a direction from an edge of the opening toward the tip. .   The liquid ejecting head according to claim 1, wherein the cantilever is thinned in a direction from an edge of the opening toward the tip. A lid member arranged to form a space with the flexible member;
The frame member is disposed between the flexible member and the lid member,
The liquid ejecting head according to claim 1, wherein the cantilever beam and the support portion are not fixed to the lid member and are displaceable with respect to the lid member.   A liquid ejecting apparatus comprising the liquid ejecting head according to claim 1.

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