JP6112041B2 - Liquid ejecting head and liquid ejecting apparatus - Google Patents

Description

  The present invention relates to a liquid ejecting head and a liquid ejecting apparatus that eject liquid from nozzle openings, and more particularly to an ink jet recording head and an ink jet recording apparatus that eject ink as liquid.

  An ink jet recording head, which is a representative example of a liquid ejecting head that ejects liquid droplets, includes, for example, a nozzle opening and a flow path such as a pressure generating chamber that communicates with the nozzle opening. Some ink causes ink droplets to be ejected from nozzle openings by causing a pressure change in the ink in the chamber.

  In such an ink jet recording head, a part of a manifold in which a plurality of pressure generating chambers communicate with each other is defined by a flexible film, and the pressure variation of the liquid in the manifold is absorbed by deforming the film, so-called compliance. The thing which provided the part is proposed (for example, refer patent document 1).

JP 2006-95725 A

  However, the film is bent during manufacturing, such as the process of attaching the film that becomes the compliance part, and the bent film sticks to other members (lid members) that define a space between the compliance part and the like due to condensation. As a result, there is a problem that the compliance section does not function.

  Such a problem exists not only in the ink jet recording head but also in a liquid ejecting apparatus that ejects liquid other than ink.

  In view of such circumstances, the present invention provides a liquid ejecting head and a liquid ejecting apparatus that can suppress the adhesion of the compliance portion to the lid member and reduce malfunction due to the adherence of the compliance portion. Objective.

Examples of the application of the present invention that solves the above problems can include the following.
[Application Example 1] A manifold communicating with a plurality of nozzle openings for ejecting liquid, a fixing plate having openings, and disposed between the openings and the manifold for absorbing pressure fluctuations of the manifold A film, and the opening penetrates the fixing plate in a thickness direction of the fixing plate, and the fixing plate is further provided in the opening and is discontinuous with the opening. A liquid ejecting head having a protrusion portion.
Application Example 2 A manifold communicating with a plurality of nozzle openings for ejecting liquid;
A fixing plate having an opening; and a film disposed between the opening and the manifold for absorbing pressure fluctuations of the manifold, wherein the film in the opening is in contact with the fixing plate. A liquid ejecting head, wherein the liquid ejecting head is covered with a lid member opposite to the film, and the lid member is further provided in the opening and has an island-shaped protrusion discontinuous with the opening.
Application Example 3 A plurality of the protrusions are arranged along the direction in which the nozzle openings are arranged, and the plurality of protrusions are in a direction perpendicular to the direction in which the nozzle openings are arranged in the film in-plane direction. The liquid ejecting head according to Application Example 1 or 2, wherein the liquid ejecting head is provided at an interval equal to or larger than the width of the opening.
Application Example 4 According to any one of Application Examples 1 to 3, wherein a plurality of the manifolds are provided, and spaces in the openings corresponding to the manifolds are independently opened to the atmosphere. Liquid jet head.
Application Example 5 A plurality of the manifolds are provided, and a space in the opening corresponding to the manifold is connected to the first space that is open to the atmosphere and the first space via the first space. The liquid ejecting head according to any one of Application Examples 1 to 3, further comprising: a second space that is open to the atmosphere.
Application Example 6 In the direction in which the fixing plate and the film are laminated, the fixing plate and the nozzle plate having the nozzle opening are provided on the same side with respect to the manifold. The liquid jet head according to any one of Application Examples 1 to 5.
Application Example 7 A liquid ejecting apparatus comprising the liquid ejecting head according to any one of Application Examples 1 to 6.
Another aspect of the present invention that solves the above problems includes a manifold that communicates with a plurality of nozzle openings for ejecting liquid, and a compliance portion that is formed of a flexible film that forms part of the manifold. And a lid member that covers the compliance portion in a state where a space is provided between the compliance portion and a space between the compliance portion and the compliance portion, and the compliance portion corresponds to one of the manifolds. One protrusion is provided in the space between the compliance portion and the lid member so as to prevent the film from sticking to the lid member without partitioning the space. The liquid ejecting head is characterized by the above.
In this aspect, even if the film serving as the compliance portion bends, the compliance portion can be functioned by suppressing the compliance portion from sticking to the lid member by the protrusion.

  Here, a plurality of the protrusions are arranged along the direction in which the nozzle openings are arranged, and the plurality of protrusions are in the direction perpendicular to the direction in which the nozzle openings are arranged in the in-plane direction of the film. It is preferable that the gaps are provided at intervals equal to or greater than the width of the compliance portion. According to this, it can suppress that the whole compliance amount (ability which can absorb the pressure fluctuation of a manifold) of a compliance part falls remarkably.

  In addition, an individual flow path is provided between the manifold and the nozzle opening, and the protrusion is formed from the side opposite to the region side where the individual flow path and the manifold communicate with each other. It is preferable that the path and the manifold are provided so as to protrude into the space without reaching the side where the manifold communicates. According to this, since the protrusion is not provided on the side where the individual flow path and the manifold communicate with each other, the compliance portion in the area close to each individual flow path functions, so that the pressure fluctuation in each individual flow path is reduced. Compliance department can absorb. That is, the individual compliance amount corresponding to the individual flow path of the compliance section can be made uniform, and the droplet discharge characteristics can be made uniform.

  Moreover, it is preferable that the said protrusion part is thicker in the base end part side of protrusion than the front-end | tip part side. According to this, the strength of the protrusion can be increased.

  A fixing plate fixed to a side of the film opposite to the manifold and having an opening in a region to be the compliance portion; and the protruding portion is provided integrally with the fixing plate. preferable. According to this, since a projection part can be provided without adding another member, cost can be reduced.

  Moreover, it is preferable that the said protrusion part is integrally provided in the said cover member. According to this, since a projection part can be provided without adding another member, cost can be reduced.

  Preferably, a plurality of the manifolds are provided, and the space between the compliance portion and the lid member corresponding to each manifold is independently opened to the atmosphere. According to this, the compliance part can be bent and deformed by opening the space between each compliance part and the lid member to the atmosphere.

  A plurality of the manifolds are provided, and a space between the compliance portion corresponding to the manifold and the lid member communicates with the first space opened to the atmosphere and the first space. And a second space that is open to the atmosphere through the space. According to this, it is not necessary to individually form the atmosphere opening path, and a space for forming the atmosphere opening path is unnecessary, and the head can be reduced in size.

According to another aspect of the invention, there is provided a liquid ejecting apparatus including the liquid ejecting head according to the above aspect.
According to this aspect, it is possible to realize a liquid ejecting apparatus that suppresses the operation failure caused by the adherence of the compliance portion by suppressing the adherence of the compliance portion to the lid member.

FIG. 3 is an exploded perspective view of the recording head according to the first embodiment. FIG. 3 is a plan view of the recording head according to the first embodiment. 3 is a plan view of a compliance substrate according to Embodiment 1. FIG. FIG. 3 is a cross-sectional view of the recording head according to the first embodiment. FIG. 3 is an enlarged cross-sectional view of a main part of the recording head according to the first embodiment. FIG. 3 is an enlarged cross-sectional view of a main part of the recording head according to the first embodiment. 3 is an enlarged cross-sectional view illustrating a comparative example of a recording head according to Embodiment 1. FIG. FIG. 10 is an enlarged plan view of a main part of a compliance substrate according to a second embodiment. FIG. 10 is an enlarged plan view of a main part of a compliance substrate according to a third embodiment. FIG. 6 is an enlarged cross-sectional view of a main part of a recording head according to a third embodiment. FIG. 6 is an enlarged plan view of a main part of a compliance substrate according to a fourth embodiment. FIG. 6 is an enlarged cross-sectional view of a main part of a recording head according to a fourth embodiment. FIG. 10 is an enlarged plan view of a main part of a compliance substrate according to a fifth embodiment. FIG. 10 is an enlarged plan view of a main part of a compliance substrate according to a sixth embodiment. It is a top view of the connection board and compliance board concerning other embodiments. It is a top view of the connection board and compliance board concerning other embodiments. 1 is a schematic diagram of a recording apparatus according to an embodiment of the present invention.

  Hereinafter, the present invention will be described in detail based on embodiments.

(Embodiment 1)
FIG. 1 is an exploded perspective view of an ink jet recording head that is an example of a liquid jet head according to Embodiment 1 of the present invention, and FIG. 2 is a plan view of the ink jet recording head. 3 is a plan view of the compliance substrate, FIG. 4 is a cross-sectional view taken along the line AA ′ of FIG. 2, and FIG. 5 is an enlarged cross-sectional view of the main part of FIG.

  As shown in the drawing, an ink jet recording head II (hereinafter also simply referred to as a recording head II) of the present embodiment includes a head body 11, a case member 40 fixed to one side of the head body 11, and the head body 11. A plurality of members such as a cover head 130 fixed to the direction side are provided. Further, the head body 11 of the present embodiment includes a flow path forming substrate 10, a communication plate 15 provided on one surface side of the flow path forming substrate 10, and a surface of the communication plate 15 opposite to the flow path forming substrate 10. , A protective substrate 30 provided on the side opposite to the communication plate 15 of the flow path forming substrate 10, and a compliance substrate provided on the surface side of the communication plate 15 on which the nozzle plate 20 is provided. 45.

The flow path forming substrate 10 constituting the head body 11 is made of a metal such as stainless steel or Ni, a ceramic material typified by ZrO ₂ or Al ₂ O ₃ , a glass ceramic material, an oxide such as MgO or LaAlO _3. Can be used. In the present embodiment, the flow path forming substrate 10 is made of a silicon single crystal substrate. This flow path forming substrate 10 is anisotropically etched from one side so that the pressure generating chambers 12 partitioned by the plurality of partition walls are arranged in parallel with a plurality of nozzle openings 21 through which ink is ejected. Side by side. Hereinafter, this direction is referred to as a direction in which the pressure generating chambers 12 are arranged side by side or a first direction X. Further, the flow path forming substrate 10 is provided with a plurality of rows in which the pressure generation chambers 12 are arranged in parallel in the first direction X, and in this embodiment, two rows. An arrangement direction in which a plurality of rows of the pressure generation chambers 12 in which the pressure generation chambers 12 are formed along the first direction X is provided is hereinafter referred to as a second direction Y.

  Further, the flow path forming substrate 10 has an opening area narrower than that of the pressure generation chamber 12 on one end portion side in the second direction Y of the pressure generation chamber 12, and the flow path resistance of ink flowing into the pressure generation chamber 12. A supply path or the like for providing the above may be provided.

  Further, the communication plate 15 and the nozzle plate 20 are sequentially stacked on one surface side of the flow path forming substrate 10. That is, a communication plate 15 provided on one surface of the flow path forming substrate 10 and a nozzle plate 20 having a nozzle opening 21 provided on the opposite surface side of the communication plate 15 from the flow path forming substrate 10 are provided. .

  The communication plate 15 is provided with a nozzle communication path 16 that communicates the pressure generation chamber 12 and the nozzle opening 21. The communication plate 15 has a larger area than the flow path forming substrate 10, and the nozzle plate 20 has a smaller area than the flow path forming substrate 10. By providing the communication plate 15 in this manner, the nozzle opening 21 of the nozzle plate 20 and the pressure generating chamber 12 can be separated from each other, so that the ink in the pressure generating chamber 12 is contained in the ink generated by the ink near the nozzle opening 21. Less susceptible to thickening due to moisture evaporation. Further, since the nozzle plate 20 only needs to cover the opening of the nozzle communication path 16 that communicates the pressure generating chamber 12 and the nozzle opening 21, the area of the nozzle plate 20 can be made relatively small, and the flow path can be formed. Since the area of the board | substrate 10 can be made smaller than the communicating plate 15, cost reduction can be aimed at. In the present embodiment, a surface on which the nozzle openings 21 of the nozzle plate 20 are opened and ink droplets are ejected is referred to as a liquid ejecting surface 20a.

  The communication plate 15 is provided with a first manifold portion 17 and a second manifold portion 18 that constitute a part of the manifold 100.

  The first manifold portion 17 is provided through the communication plate 15 in the thickness direction (the stacking direction of the communication plate 15 and the flow path forming substrate 10).

  Further, the second manifold portion 18 is provided to open to the nozzle plate 20 side of the communication plate 15 without penetrating the communication plate 15 in the thickness direction.

  Further, the communication plate 15 is provided with a supply communication passage 19 that communicates with one end portion of the pressure generation chamber 12 in the second direction Y independently for each pressure generation chamber 12. The supply communication path 19 communicates the second manifold portion 18 and the pressure generation chamber 12. That is, in the present embodiment, the supply communication path 19, the pressure generation chamber 12, and the nozzle communication path 16 are provided as individual flow paths communicating with the nozzle opening 21 and the second manifold portion 18.

  As the communication plate 15, a metal such as stainless steel or nickel (Ni), or a ceramic such as zirconium (Zr) can be used. The communication plate 15 is preferably made of a material having the same linear expansion coefficient as the flow path forming substrate 10. That is, when a material having a linear expansion coefficient that is significantly different from that of the flow path forming substrate 10 is used as the communication plate 15, warping due to a difference in linear expansion coefficient between the flow path forming substrate 10 and the communication plate 15 due to heating or cooling. Will occur. In this embodiment, by using the same material as the flow path forming substrate 10 as the communication plate 15, that is, a silicon single crystal substrate, it is possible to suppress the occurrence of warping due to heat, cracking due to heat, peeling, and the like.

  In the nozzle plate 20, nozzle openings 21 communicating with the pressure generation chambers 12 through the nozzle communication passages 16 are formed. That is, nozzle openings 21 that eject the same type of liquid (ink) are juxtaposed in the first direction X, and the rows of nozzle openings 21 juxtaposed in the first direction X are in the second direction. Two rows are formed in Y.

  As such a nozzle plate 20, for example, a metal such as stainless steel (SUS), an organic substance such as a polyimide resin, a silicon single crystal substrate, or the like can be used. In addition, by using a silicon single crystal substrate as the nozzle plate 20, the linear expansion coefficients of the nozzle plate 20 and the communication plate 15 are made equal, and the occurrence of warpage due to heating or cooling, cracks due to heat, peeling, and the like are suppressed. can do.

  On the other hand, a diaphragm 50 is formed on the surface of the flow path forming substrate 10 opposite to the communication plate 15. In the present embodiment, an elastic film 51 made of silicon oxide provided on the flow path forming substrate 10 side and an insulator film 52 made of zirconium oxide provided on the elastic film 51 are provided as the diaphragm 50. I made it. The liquid flow path such as the pressure generation chamber 12 is formed by anisotropically etching the flow path forming substrate 10 from one side (the side where the nozzle plate 20 is bonded). The other surface of the liquid flow path is defined by the elastic film 51.

  In addition, the first electrode 60, the piezoelectric layer 70, and the second electrode 80 are stacked on the insulator film 52 of the vibration plate 50 to form the piezoelectric actuator 300. Here, the piezoelectric actuator 300 refers to a portion including the first electrode 60, the piezoelectric layer 70, and the second electrode 80. In general, one electrode of the piezoelectric actuator 300 is used as a common electrode, and the other electrode and the piezoelectric layer 70 are patterned for each pressure generating chamber 12. In addition, here, a portion that is configured by any one of the patterned electrodes and the piezoelectric layer 70 and in which piezoelectric distortion is generated by applying a voltage to both electrodes is referred to as a piezoelectric active portion. In this embodiment, the first electrode 60 is used as a common electrode for the piezoelectric actuator 300 and the second electrode 80 is used as an individual electrode for the piezoelectric actuator 300. However, there is no problem even if this is reversed for the convenience of the drive circuit and wiring. In the above-described example, since the first electrode 60 is continuously provided across the plurality of pressure generating chambers 12, the first electrode 60 functions as a part of the diaphragm, but of course, the present invention is not limited thereto. For example, the first electrode 60 may function as a diaphragm without providing the elastic film 51 and the insulator film 52 described above. Further, the piezoelectric actuator 300 itself may substantially serve as a diaphragm. However, when the first electrode 60 is provided directly on the flow path forming substrate 10, it is preferable to protect the first electrode 60 with an insulating protective film or the like so that the first electrode 60 and the ink are not electrically connected. That is, in the present embodiment, the configuration in which the first electrode 60 is provided on the substrate (the flow path forming substrate 10) via the vibration plate 50 is illustrated, but the present invention is not particularly limited thereto. You may make it provide the 1st electrode 60 directly on a board | substrate, without providing. That is, you may make it the 1st electrode 60 act as a diaphragm. That is, the term “on the substrate” includes both the state immediately above the substrate and a state in which another member is interposed (upward).

  Furthermore, each second electrode 80 that is an individual electrode of the piezoelectric actuator 300 is drawn from the vicinity of the end opposite to the supply communication path 19 and extends to the diaphragm 50. For example, A lead electrode 90 made of gold (Au) or the like is connected.

  A protective substrate 30 having substantially the same size as the flow path forming substrate 10 is bonded to the surface of the flow path forming substrate 10 on the side of the piezoelectric actuator 300 that is a pressure generating means. The protective substrate 30 has a holding portion 31 that is a space for protecting the piezoelectric actuator 300.

  In addition, a case member 40 is fixed to the head main body 11 having such a configuration. The case member 40 has substantially the same shape as the communication plate 15 described above in a plan view, and is bonded to the protective substrate 30 and is also bonded to the communication plate 15 described above. Specifically, the case member 40 has a recess 41 having a depth in which the flow path forming substrate 10 and the protective substrate 30 are accommodated on the protective substrate 30 side. The concave portion 41 has an opening area larger than the surface of the protective substrate 30 bonded to the flow path forming substrate 10. The opening surface on the nozzle plate 20 side of the recess 41 is sealed by the communication plate 15 in a state where the flow path forming substrate 10 and the like are accommodated in the recess 41. As a result, a third manifold portion 42 is defined by the case member 40 and the head body 11 on the outer peripheral portion of the flow path forming substrate 10. The manifold 100 of this embodiment is configured by the first manifold portion 17 and the second manifold portion 18 provided on the communication plate 15, and the third manifold portion 42 defined by the case member 40 and the head body 11. It is configured. That is, the manifold 100 includes the first manifold portion 17, the second manifold portion 18, and the third manifold portion 42. Further, the manifold 100 of the present embodiment is disposed on both outer sides of the two rows of pressure generating chambers 12 in the second direction Y, and two manifolds provided on both outer sides of the two rows of pressure generating chambers 12. 100 are provided independently so as not to communicate with each other in the recording head II. That is, one manifold 100 is provided in communication for each row of pressure generation chambers 12 (rows arranged in parallel in the first direction X) of the present embodiment.

  The case member 40 is provided with an introduction path 44 that communicates with the manifold 100 and supplies ink to each manifold 100. The case member 40 is provided with a connection port 43 that communicates with the through hole 32 of the protective substrate 30 and through which the wiring substrate 121 is inserted.

  The two manifolds 100 may communicate with each other on the upstream side of the recording head II, that is, with an upstream flow path connected to an introduction path 44 that communicates with the manifold 100, which will be described in detail later.

  As a material of the case member 40, for example, resin, metal, or the like can be used. Incidentally, the case member 40 can be mass-produced at low cost by molding a resin material.

  Moreover, as shown in FIGS. 3-5, the compliance board | substrate 45 is provided in the surface where the 1st manifold part 17 and the 2nd manifold part 18 of the communicating plate 15 open. The compliance substrate 45 has substantially the same size as the communication plate 15 described above in a plan view, and is provided with a first exposure opening 45a that exposes the nozzle plate 20. The compliance substrate 45 seals the opening on the liquid ejection surface 20a side of the first manifold portion 17 and the second manifold portion 18 in a state where the nozzle plate 20 is exposed by the first exposed opening portion 45a.

  That is, the compliance substrate 45 defines a part of the manifold 100. In this embodiment, such a compliance substrate 45 includes a sealing film 46 corresponding to a film and a fixed substrate 47 corresponding to a fixed plate. The sealing film 46 is made of a flexible film-like thin film (for example, a thin film having a thickness of 20 μm or less formed of polyphenylene sulfide (PPS), aromatic polyamide (aramid), etc.) It is made of a hard material such as a metal such as stainless steel (SUS). Since the region of the fixed substrate 47 facing the manifold 100 is an opening 48 that is completely removed in the thickness direction, one surface of the manifold 100 is sealed only with a flexible sealing film 46. The compliance portion 49 is a flexible portion. In the present embodiment, one compliance portion 49 is provided corresponding to one manifold 100. That is, in this embodiment, since the two manifolds 100 are provided, the two compliance portions 49 are provided on both sides in the second direction Y with the nozzle plate 20 interposed therebetween.

  Further, a cover head 130 which is a lid member of the present embodiment is provided on the liquid ejecting surface 20a side of the head body 11.

  The cover head 130 is provided with a second exposure opening 132 that exposes the nozzle opening 21. In the present embodiment, the second exposure opening 132 has a size that exposes the nozzle plate 20, that is, an opening that is substantially the same as the first exposure opening 45 a of the compliance substrate 45.

  Further, in this embodiment, the cover head 130 is provided with its end bent from the liquid ejecting surface 20a side so as to cover the side surface of the head body 11 (surface intersecting the liquid ejecting surface 20a).

  Such a cover head 130 is bonded to the surface of the compliance substrate 45 opposite to the communication plate 15 and seals the space of the compliance portion 49 opposite to the flow path (manifold 100). That is, the cover head 130 which is a lid member is provided so as to cover the compliance portion 49 in a state where the space 131 is disposed between the cover head 130 and the compliance portion 49. By covering the compliance portion 49 with the cover head 130 that is a lid member in this way, it is possible to prevent the compliance portion 49 from being destroyed even when a recording medium such as paper comes into contact. Further, it is possible to suppress the ink (liquid) from adhering to the compliance portion 49 and to wipe the ink (liquid) adhering to the surface of the cover head 130 with, for example, a wiper blade. It is possible to suppress contamination with ink or the like adhering to the ink.

  Thus, the space 131 defined between the compliance unit 49 and the cover head 130 is open to the atmosphere outside the recording head II. In the present embodiment, a through hole 48 a that penetrates the fixed substrate 47 in the thickness direction is provided on one side in the first direction X of each compliance portion 49, and the through hole 48 a communicates with the opening portion 48. A space 131 between the portion 49 and the cover head 130 is opened to the outside through the through hole 48a. The through hole 48a communicating with the space 131 between the compliance portion 49 and the cover head 130 is, for example, the liquid ejection surface 20a side of the recording head II, the side surface side, or the side opposite to the liquid ejection surface 20a (case member). 40 side) and the like. However, since the ink flows from the opening opened to the atmosphere, there is a possibility that problems such as blockage of the opening to the atmosphere and adhesion of the ink to the compliance portion 49 may occur. Is preferably opened to the outside by opening to the outside on the side opposite to the liquid ejection surface 20a, that is, on the case member 40 side. Incidentally, in order to open the through hole 48a to the atmosphere, members (such as the flow path forming substrate 10 and the communication plate 15) constituting the recording head II are provided with an air release path (not shown) such as a groove and a through hole. What is necessary is just to make it communicate with the exterior through an open path. In the present embodiment, a through hole 48 a is provided for each compliance portion 49, and an air release path (not shown) is provided for each through hole 48 a so that the compliance portion 49 is opened to the atmosphere independently. Of course, the opening of the space between the compliance section 49 and the cover head 130 to the atmosphere is not limited to this, and the two spaces between the compliance section 49 and the cover head 130 are connected to each other via a common opening to the atmosphere. May be opened to the atmosphere.

  As shown in FIG. 3, in the space between the compliance portion 49 and the cover head 130, the protrusion portion 140 that restricts the sealing film 46 of the compliance portion 49 from sticking to the cover head 130 forms the space 131. It is provided without partitioning.

The protruding portion 140 is provided so as to protrude in the second direction Y from the opening edge portion of the opening portion 48 provided on the fixed substrate 47 to a region facing the manifold 100. In the present embodiment, the protrusions 140 are provided so as to protrude along the second direction Y from both sides of the opening edge of the opening 48 in the second direction Y toward the center. Further, projections 140 are provided a plurality at predetermined intervals S ₁ in the first direction X. That is, the protrusion 140 of this embodiment is provided in a comb-like shape in the opening 48 of the fixed substrate 47. In addition, the protrusions 140 provided so as to protrude from both sides in the second direction Y of the opening 48 toward the central part are provided such that the end surfaces are opposed to each other, and two protrusions facing each other in the second direction Y are provided. The protrusions 140 are arranged with their tips spaced apart from each other. As a result, a communication port 141 is defined between the two projecting portions 140 facing each other in the second direction Y, and the space 131 between the compliance portion 49 and the cover head 130 is defined by the projecting portion 140 in the first direction. It is provided in communication without being partitioned in the direction X.

  By providing the protrusion 140 in this manner, as shown in FIG. 6, the compliance portion 49 is restricted from moving toward the cover head 130 due to the deflection of the compliance portion 49, and is moved to the cover head 130 of the compliance portion 49. Can be suppressed. On the other hand, as shown in FIG. 7, in the case where the protrusion 140 is not provided, if the compliance portion 49 is bent, the compliance portion 49 sticks to the cover head 130. In addition, sticking of the compliance unit 49 to the cover head 130 is caused by, for example, condensation.

Here, the protrusion 140 is provided so as to restrict the sticking of the sealing film 46 to the cover head 130 because the sealing film 46 is bent by the bending of the sealing film 46 that occurs during the manufacture of the recording head II. This means that the movement of the sealing film 46 to the cover head 130 side is restricted so that 46 does not stick to the cover head 130. That is, the protrusion 140 is formed on the compliance portion 49 in accordance with the amount of bending of the sealing film 46 when the recording head II is manufactured, the distance between the sealing film 46 and the cover head 130 (the height of the space 131), and the like. The length (projection amount) in the second direction Y and the interval S1 in the _first direction X are set as appropriate so that the sealing film 46 does not stick to the cover head 130. For example, if the length of the protrusion 140 (the amount of protrusion in the second direction Y) is too short, the amount by which the protrusion 140 restricts the movement of the sealing film 46 is reduced, and the cover head 130 of the sealing film 46 is reduced. Sticking to can not be regulated. If the length of the protrusion 140 (the amount of protrusion in the second direction Y) is too long, the protrusion 140 completely separates the space 131 between the compliance portion 49 and the cover head 130 and is separated. Since the movement of gas (pressure fluctuation) in the space 131 cannot be performed, the compliance unit 49 does not function. In the present embodiment, by providing the communication port 141 between the two projecting portions 140 facing each other in the second direction Y, the compliance portion 49 (the sealing film 46) is formed without completely separating the compliance portion 49. Sticking to the cover head 130 can be suppressed.

In addition, it is preferable to provide the interval S ₁ between the protrusions 140 adjacent to each other in the first direction X to be equal to or greater than the width W _{1 in} the second direction Y of the compliance portion 49. The width W _{1 in} the second direction Y of the compliance portion 49 is the width in the second direction Y in the region where the protrusion 140 is not provided. That is, it is preferable to satisfy the relationship of (interval S ₁ between the protrusions 140) ≧ (width W ₁ of the compliance portion 49 in the second direction Y). Incidentally, if the interval S _{1 in} the first direction X of the protrusions 140 is smaller than the width W ₁ of the compliance part 49 in the second direction Y, the protrusions 140 are in the entire compliance amount of the compliance part 49 (manifold 100). This is because the pressure fluctuation in the manifold 100 is not absorbed and the ink ejection characteristics are adversely affected.

Further, if the width W ₂ is greater in the first direction X of the protruding portion 140 itself, when projecting the protrusion 140 in the second direction Y, the compliance portion 49 corresponding to the pressure generating chamber 12 that overlaps the protrusion 140 The amount of compliance (referred to as individual compliance amount) decreases. By the way, the pressure fluctuation in each pressure generating chamber 12 is absorbed by the compliance portion 49 by deforming and absorbing the portion where the pressure generating chamber 12 is projected in the second direction Y. The individual compliance amount of the generation chamber 12 is reduced. That is, the pressure fluctuation in the pressure generation chamber 12 that overlaps the protrusion 140 in the second direction Y is absorbed by the compliance portions 49 on both sides of the protrusion 140 in the first direction X. Therefore, the width W ₂ of the first direction X protrusion 140 is large, individual compliance of the pressure generating chamber 12 that overlaps with the second direction Y is significantly reduced with the protrusion 140, can no longer absorb the pressure fluctuation As a result, the ejection characteristics of the ink droplets ejected from the plurality of nozzle openings 21 cannot be made uniform, and the ejection characteristics vary. For this reason, the width W _{2 in} the first direction X of the protrusion 140 is large enough to restrict the movement (deformation) of the compliance portion 49 toward the cover head 130, and the individual compliance amount is remarkably large. It is preferable to form it as small as possible so as not to decrease.

In addition, the protrusions 140 of the present embodiment are disposed to face each other in the second direction Y. That is, the protrusions 140 that are adjacent to each other in the second direction Y are arranged at positions that overlap each other when projected in the second direction Y. Therefore, the length (projection amount) of the protrusion 140 in the second direction Y defines the size of the width W ₃ (second direction Y) of the communication port 141. Here, the width W ₃ of the communication port 141 may be such that the gas in the space on both sides of the two protrusions 140 can pass without resistance in the second direction Y. That is, when the communication port 141 is not provided and the two protrusions 140 are continuously provided in the second direction Y, the protrusions continuous in the second direction Y pass through the space in the second direction. Completing to Y, the gas in the partitioned space is not released to the atmosphere, and the compliance unit 49 does not function. In other words, the term “projection section divides a space” means that gas cannot come and go between the two divided spaces. In the present embodiment, by providing the communication port 141, it is possible to prevent the compliance portion 49 from functioning without the protrusion 140 completely partitioning the space. Incidentally, to ensure compliance portion 49 is fully functional, preferably provided with a width W ₃ of the communication port 141 in a size that do not resistance of the gas. That is, a small width W ₃ of the communication port 141, the resistance to gas passing occurs, it is difficult to flex compliance portion 49, because it becomes impossible to absorb the pressure fluctuation of the manifold 100.

Thus, even if the compliance amount of the compliance part 49 is high, the individual compliance amount of the compliance part 49 is partly significantly reduced, and the width of the protrusion 140 (first direction X ) And length (second direction Y) particularly affect the individual compliance amount, and the number of the protrusions 140 and the width of the adjacent protrusions 140 particularly affect the overall compliance amount. . Therefore, the width W ₂ and length of the individual projections 140, the number and spacing S ₁ of the projecting portion 140 may be suitably set in consideration of the individual compliance amount and overall compliance amount.

  In the ink jet recording head II having such a configuration, when ink is ejected, the ink is taken from the ink cartridge 2 through the introduction path 44 and the inside of the flow path is filled with ink from the manifold 100 to the nozzle opening 21. Thereafter, according to a signal from the drive circuit 120, a voltage is applied to each piezoelectric actuator 300 corresponding to the pressure generating chamber 12, so that the diaphragm 50 is bent and deformed together with the piezoelectric actuator 300. As a result, the pressure in the pressure generating chamber 12 is increased and ink droplets are ejected from the predetermined nozzle openings 21.

  At this time, pressure fluctuations occur in the manifold 100 due to the supply of ink into the manifold 100, pressure fluctuations in the pressure generation chamber 12, and the like. The pressure fluctuations are absorbed by the compliance portion 49 being bent and deformed.

  In this embodiment, by providing the protruding portion 140 that protrudes in the space 131 between the compliance portion 49 and the cover head 130, the compliance amount (absorption amount of pressure fluctuation) due to the bending deformation of the compliance portion 49 is significantly reduced. In addition, the compliance portion 49 can be prevented from sticking to the cover head 130. For this reason, it can suppress that the compliance part 49 adheres to the cover head 130, and it can suppress that the pressure fluctuation in the manifold 100 is not absorbed but an ink discharge characteristic is adversely affected.

(Embodiment 2)
FIG. 8 is a plan view showing a compliance substrate according to Embodiment 2 of the present invention. In addition, the same code | symbol is attached | subjected to the member similar to embodiment mentioned above, and the overlapping description is abbreviate | omitted.

  As shown in the drawing, in a space 131 between the compliance portion 49 and the cover head 130 of the present embodiment, a protrusion 140A that restricts the compliance portion 49 from sticking to the cover head 130 is provided.

The protrusion 140 </ b> A according to the present embodiment is provided so as to protrude in the second direction Y from the opening edge of the opening 48 provided on the fixed substrate 47 to a region facing the manifold 100. In the present embodiment, the protruding portion 140A is provided so as to protrude along the second direction Y from both sides of the opening edge portion of the opening 48 in the second direction Y toward the center. Further, the protrusion 140A is provided with a plurality at predetermined intervals _{S 1} in the first direction X. That is, the protrusion 140 of this embodiment is provided in a comb-like shape in the opening 48 of the fixed substrate 47. In addition, the protrusions 140A provided so as to protrude from both sides of the opening 48 in the second direction Y toward the center are arranged so that the tip surfaces are shifted so as not to face each other. The protrusions 140A are arranged with their tips spaced apart from each other. As a result, a communication port 141 is defined between the two protrusions 140A arranged in the second direction Y, and the space 131 between the compliance portion 49 and the cover head 130 is defined by the protrusion 140A in the second direction. It is provided in communication without being partitioned in the direction Y.

That is, in this embodiment, the width W at which the communication port 141 between the tips of the two protrusions 140A is opened by shifting the two protrusions 140A arranged in the second direction Y in the first direction X. ₄ can be made wider than the width W ₃ when the front end surfaces are opposed to each other. That is, even if the protrusion 140A has the same length in the second direction Y, the two protrusions 140A are arranged at positions that do not overlap when projected in the second direction Y, that is, an interval between them, that is, the width W ₄ of the communication port 141 can be easily increased. Therefore, the width W ₄ of the communication port 141 is ensured without reducing the length (second direction Y) of the protrusion 140A and reducing the amount of restriction of the movement of the compliance portion 49 toward the cover head 130. can do.

(Embodiment 3)
FIG. 9 is a plan view of a compliance substrate according to the third embodiment of the present invention, and FIG. 10 is an enlarged cross-sectional view of a main part of an ink jet recording head which is an example of a liquid jet head according to the third embodiment of the present invention. It is. In addition, the same code | symbol is attached | subjected to the member similar to embodiment mentioned above, and the overlapping description is abbreviate | omitted.

  As shown in the drawing, in the space 131 between the compliance portion 49 and the cover head 130 of this embodiment, a protrusion 140B that restricts the compliance portion 49 from sticking to the cover head 130 is provided.

  The protrusion 140 </ b> B of the present embodiment is provided so as to protrude in the second direction Y from the opening edge of the opening 48 provided on the fixed substrate 47 to a region facing the manifold 100. In the present embodiment, the protrusion 140 is provided so as to protrude along the second direction Y from one side of the opening edge of the opening 48 in the second direction Y toward the center. In the present embodiment, the protrusion 140 </ b> B is provided so as to protrude from the opening edge on the opposite side to the supply communication path 19 that communicates the manifold 100 and the pressure generation chamber 12 toward the supply communication path 19. In other words, a communication port 141 is defined between the tip of the protrusion 140B and the opening edge, and the communication port 141 is disposed on the supply communication path 19 side.

  With such a configuration, when the compliance portion 49 of the manifold 100 is deformed by the pressure change in the pressure generation chamber 12 to absorb the pressure fluctuation, the protruding portion 140B reduces the individual compliance amount of the compliance portion 49. Can be suppressed.

That is, as described above, the pressure fluctuation in each pressure generating chamber 12 is absorbed by the compliance portion 49 by deforming and absorbing the portion where the pressure generating chamber 12 is projected in the second direction Y. Then, the individual compliance amount of the pressure generating chamber 12 is reduced. However, in the present embodiment, since the protrusion 140B is not provided in the closest portion of the supply communication passage 19 communicating with the pressure generation chamber 12, the pressure fluctuation in the pressure generation chamber 12 is caused by the protrusion 140B and the opening edge. Can be absorbed by the deformation of the compliance portion 49 between the two. Therefore, by providing the protrusion 140B on the side opposite to the supply communication path 19, the individual compliance amounts corresponding to the pressure generation chambers 12 can be made uniform, and the ink droplet ejection characteristics can be made uniform. Further, the width W ₁ (see FIG. 3) of the protrusion 140B can be increased.

Such a protrusion 140B is provided with a plurality at predetermined intervals S ₁ in the first direction X.

(Embodiment 4)
FIG. 11 is a plan view of a compliance substrate according to Embodiment 4 of the present invention, and FIG. 12 is an enlarged cross-sectional view of the main part of an ink jet recording head which is an example of a liquid jet head according to Embodiment 4 of the present invention. FIG. In addition, the same code | symbol is attached | subjected to the member similar to embodiment mentioned above, and the overlapping description is abbreviate | omitted.

  As shown in the drawing, in a space 131 between the compliance portion 49 and the cover head 130 of the present embodiment, a protrusion 140 </ b> C that restricts the compliance portion 49 from sticking to the cover head 130 is provided.

The protrusions 140 </ b> C of the present embodiment are continuously provided from the opening edge of the opening 48 provided in the fixed substrate 47 to the opening edge in the second direction Y. Further, the protruding portion 140 </ b> C is provided on the sealing film 46 side at a height that does not reach the cover head 130. As a result, a communication port 141 is defined between the protrusion 140 </ b> C and the cover head 130. Further, the protruding portion 140C is provided with a plurality at predetermined intervals _{S 1} in the first direction X.

  Even if such a protruding portion 140C is provided, the protruding portion 140C can suppress the compliance portion 49 from sticking to the cover head 130, and the protruding portion 140C can prevent the space 131 from being completely partitioned. Thus, the communication through the communication port 141 can be established, and the function of the compliance unit 49 can be prevented from being impaired.

(Embodiment 5)
FIG. 13 is a plan view of a compliance substrate according to the fifth embodiment of the present invention. In addition, the same code | symbol is attached | subjected to the member similar to embodiment mentioned above, and the overlapping description is abbreviate | omitted.

  In the first to third embodiments described above, the protrusions 140, 140A, 140B, and 140C are provided to protrude in the second direction Y with the same width, but the protrusion 140D of the present embodiment is illustrated in FIG. As described above, the width in the first direction X is gradually reduced from the base end side toward the tip end side protruding in the second direction Y. In the present embodiment, the protrusion 140D is provided such that the side surfaces (surfaces on both sides in the first direction X) are flat inclined surfaces. However, the present invention is not limited to this, and the side surfaces are curved surfaces. (Including both convex and concave curved surfaces).

Similarly to the second embodiment described above, the protrusion 140D is positioned so as not to overlap when projected in the second direction Y from both sides of the second direction Y at the opening edge of the opening 48. Is provided. Furthermore, a plurality of the protrusions 140D are arranged in parallel in the _first direction X with an interval S1.

  By providing such a protrusion 140D, the compliance part 49 can be prevented from sticking to the cover head 130. In addition, since the protrusion 140D gradually decreases in width toward the tip, it is possible to suppress a reduction in individual compliance amount. Therefore, the ink discharge characteristics can be made uniform. Further, the protrusion 140D has a width in the first direction X that gradually increases from the distal end side toward the proximal end side. In other words, the proximal end side of the protrusion is gradually larger than the distal end side. Since it is thick, the strength of the protrusion 140D can be increased. The method of increasing the width is not limited to this, and may be increased stepwise, for example.

(Embodiment 6)
FIG. 14 is a plan view of a compliance substrate according to Embodiment 6 of the present invention. In addition, the same code | symbol is attached | subjected to the member similar to embodiment mentioned above, and the overlapping description is abbreviate | omitted.

  As shown in FIG. 14, in a space 131 between the compliance portion 49 and the cover head 130 of the present embodiment, a protrusion 140 </ b> E that restricts the compliance portion 49 from sticking to the cover head 130 is provided.

  The protrusion 140E is formed in an island shape and is provided so as to be discontinuous with the opening edge of the opening 48. Thereby, the communication port 141 is provided in the both sides of the 2nd direction Y of the projection part 140E, respectively.

  By providing the protruding portion 140E having such a configuration, it is possible to regulate sticking of the compliance portion 49 to the cover head 130. Moreover, since the protrusion part 140E has the communication port 141 in the supply communication path 19 side similarly to Embodiment 3 mentioned above, it can suppress that an individual compliance amount reduces. Therefore, the ink discharge characteristics can be made uniform.

(Other embodiments)
As mentioned above, although each embodiment of this invention was described, the fundamental structure of this invention is not limited to what was mentioned above.

  For example, in the first to sixth embodiments described above, the structure in which the two manifolds 100 are provided and the compliance portion 49 is provided for each manifold 100 is illustrated, but the present invention is not particularly limited thereto. Here, another example of the manifold is shown in FIGS. 15 and 16 are a plan view of a communication plate and a plan view of a compliance substrate showing modifications of the manifold and the compliance portion.

  As shown in FIG. 15A, two rows in which the three manifolds 100 are arranged in the first direction X are provided in the second direction Y. That is, a total of six manifolds 100 are provided. Incidentally, when the manifold 100 is divided in the first direction X, different types of ink (liquid) can be supplied to each manifold 100. Therefore, for example, different inks can be ejected from the nozzle openings 21 communicating with the three manifolds 100 arranged in parallel in the first direction X.

  Further, as shown in FIG. 15B, a compliance portion 49 is provided corresponding to each manifold 100. That is, in the example shown in FIG. 15, six compliance portions 49 are provided for the six manifolds 100.

A through hole 48 a is provided in the compliance portion 49 at one end portion in the first direction X. Further, the space 131 between the compliance portion 49 and the cover head 130 adjacent to each other in the first direction X is communicated via the atmosphere release communication passage 48b. The open air communication passage 48 b is formed with an opening area in which the gas flow path resistance does not increase between the spaces 131 corresponding to the compliance portions 49. The space 131 between the three manifolds 100 arranged in parallel in the first direction X and the cover head 130 communicates with each other by the atmosphere opening communication passage 48b and is opened to the atmosphere through one through hole 48a. In the present embodiment, the width W ₂ of the first direction of the projection portion 140 itself is shorter than the length in the first direction X of the atmosphere open communication passage 48b. In the present embodiment, the space 131 that communicates with one through-hole 48a is referred to as a first space, and the space 131 that communicates with the first space via the atmosphere release communication passage 48b is referred to as a second space. . That is, in the example illustrated in FIG. 15, two second spaces are provided for one first space.

In this way, each space is provided by providing one first space that communicates with an open air path that is open to the atmosphere (not shown except for the through hole 48a) and two second spaces that communicate with the first space. Compared with the case where the atmosphere opening path is provided every time, a space for providing the atmosphere opening path is not required, and the head can be downsized. Further, the protrusion 140 width W ₂ of the first direction X itself is shorter than the length in the first direction X of the atmosphere open communication passage 48b, as compared with otherwise, protrusions 140 separate The amount of compliance can be reduced, and the bonding area between the communication plate 15 and the compliance substrate 45 can be secured between the manifolds 100 arranged in parallel in the first direction X, so that the adhesion can be improved. it can.

  In addition, as shown in FIG. 16A, two rows in which two manifolds 100 are arranged in parallel in the first direction X are provided in the second direction Y. That is, a total of four manifolds 100 are provided.

  Further, as shown in FIG. 16B, a compliance portion 49 is provided corresponding to each manifold 100. That is, in the example shown in FIG. 16, four compliance portions 49 are provided for the four manifolds 100.

  The space 131 between the compliance portion 49 and the cover head 130 is provided without being communicated.

In addition, through holes 48 a are provided on both sides of the compliance portion 49 (opening portion 48) arranged in parallel in the first direction X of the fixed substrate 47. And the space 131 between each compliance part 49 and the cover head 130 is each open | released by air | atmosphere through the through-hole 48a. That is, in the example shown in FIG. 16, each space 131 between the compliance portion 49 and the cover head 130 is open to the atmosphere without communicating. Incidentally, the protrusion 140 width W ₂ of the first direction X itself, in this embodiment, is shorter than the interval of the compliance portion 49 which is arranged in the first direction X. Thereby, it can suppress that the protrusion part 140 reduces the amount of individual compliance, and can ensure the adhesion area of the communicating plate 15 and the compliance board | substrate 45 between the manifolds 100 arranged in parallel in the 1st direction X. Therefore, adhesiveness can be improved.

  Thus, even in the configuration shown in FIGS. 15 and 16, it is possible to suppress the compliance portion 49 from sticking to the cover head 130 by providing the protrusions 140 to 140E as in the first to sixth embodiments. be able to.

  In each of the above-described embodiments, the protrusions 140 to 140E are provided on the compliance substrate 45 (fixed substrate 47). However, the present invention is not particularly limited thereto. For example, the protrusions are formed on the cover head 130 side that is a lid member. 140 to 140E may be provided. Of course, it goes without saying that the protrusions 140 to 140E may be provided by a member other than the compliance substrate 45 and the cover head 130 (lid member).

  Furthermore, in each embodiment mentioned above, although the compliance board | substrate 45 was provided in the surface side in which the nozzle plate 20 was provided, it is not limited to this in particular, For example, the compliance board | substrate 45 is the case member 40 side or a liquid ejection surface. You may be provided in the side surface etc. which cross | intersect 20a. That is, the lid member is not limited to the cover head 130 described above, and may be any other member as long as it defines the space 131 with the compliance portion 49 of the compliance substrate 45. Also good.

  Further, in each of the embodiments described above, the thin film piezoelectric actuator 300 has been described as the pressure generating means for causing a pressure change in the pressure generating chamber 12, but the present invention is not particularly limited thereto. For example, a green sheet is attached. It is possible to use a thick film type piezoelectric actuator formed by such a method, a longitudinal vibration type piezoelectric actuator in which piezoelectric materials and electrode forming materials are alternately stacked and expanded and contracted in the axial direction. Also, as a pressure generating means, a heating element is arranged in the pressure generating chamber, and droplets are discharged from the nozzle opening by bubbles generated by the heat generated by the heating element, or static electricity is generated between the diaphragm and the electrode. Thus, a so-called electrostatic actuator that discharges liquid droplets from the nozzle openings by deforming the diaphragm by electrostatic force can be used.

  In addition, the ink jet recording head II of each of the embodiments constitutes a part of an ink jet recording head unit including an ink flow path communicating with an ink cartridge or the like, and is mounted on the ink jet recording apparatus. FIG. 17 is a schematic view showing an example of the ink jet recording apparatus.

  In the ink jet recording apparatus I shown in FIG. 17, an ink jet recording head unit 1 having a plurality of ink jet recording heads II (hereinafter also referred to as head unit 1) is detachable from cartridges 2A and 2B constituting ink supply means. The carriage 3 on which the head unit 1 is mounted is provided on a carriage shaft 5 attached to the apparatus main body 4 so as to be movable in the axial direction. For example, the recording head unit 1 ejects a black ink composition and a color ink composition, respectively.

  The driving force of the driving motor 6 is transmitted to the carriage 3 via a plurality of gears and a timing belt 7 (not shown), so that the carriage 3 on which the head unit 1 is mounted is moved along the carriage shaft 5. On the other hand, the apparatus body 4 is provided with a platen 8 along the carriage shaft 5, and a recording sheet S that is a recording medium such as paper fed by a paper feed roller (not shown) is wound around the platen 8. It is designed to be transported.

  In the above-described ink jet recording apparatus I, the ink jet recording head II (head unit 1) is mounted on the carriage 3 and moves in the main scanning direction. The present invention can also be applied to a so-called line-type recording apparatus in which printing is performed simply by moving a recording sheet S such as paper in the sub-scanning direction with the recording head II fixed.

  In the above-described example, the ink jet recording apparatus I has a configuration in which the ink cartridge 2 that is a liquid storage unit is mounted on the carriage 3, but is not particularly limited thereto, for example, a liquid storage unit such as an ink tank May be fixed to the apparatus main body 4 and the storage means and the ink jet recording head II may be connected via a supply pipe such as a tube. Further, the liquid storage means may not be mounted on the ink jet recording apparatus.

  Furthermore, the present invention is intended for a wide range of liquid jet heads in general, for example, for manufacturing recording heads such as various ink jet recording heads used in image recording apparatuses such as printers, and color filters such as liquid crystal displays. The present invention can also be applied to a coloring material ejecting head, an organic EL display, an electrode material ejecting head used for forming electrodes such as an FED (field emission display), a bioorganic matter ejecting head used for biochip manufacturing, and the like.

  I ink jet recording apparatus (liquid ejecting apparatus), II ink jet recording head (liquid ejecting head), 1 ink jet recording head unit (liquid ejecting head unit), 10 flow path forming substrate, 11 head body, 15 communication plate, 20 Nozzle plate, 20a Liquid ejection surface, 21 Nozzle opening, 30 Protective substrate, 40 Case member, 45 Compliance substrate, 46 Sealing film (film), 47 Fixed substrate (fixed plate), 50 Vibration plate, 60 First electrode, 70 Piezoelectric layer, 80 second electrode, 100 manifold, 120 drive circuit, 130 cover head (lid member), 140, 140A, 140B, 140C, 140D, 140E protrusion, 141 communication port

Claims (7)

A manifold communicating with a plurality of nozzle openings for injecting liquid;
A fixed plate having an opening;
A film disposed between the opening and the manifold for absorbing pressure fluctuations of the manifold,
The opening penetrates the fixing plate in the thickness direction of the fixing plate,
The fixing plate is further provided in the opening, and has an island-shaped protrusion discontinuous with the opening. A manifold communicating with a plurality of nozzle openings for injecting liquid;
A fixed plate having an opening;
A film disposed between the opening and the manifold for absorbing pressure fluctuations of the manifold,
The film in the opening is covered with a lid member opposite to the film with respect to the fixing plate,
The liquid ejecting head according to claim 1, wherein the lid member is further provided in the opening and has an island-shaped protrusion discontinuous with the opening.   The plurality of protrusions are arranged along the direction in which the nozzle openings are arranged, and the plurality of protrusions are the widths of the openings in the direction perpendicular to the direction in which the nozzle openings are arranged in the film in-plane direction. The liquid ejecting head according to claim 1, wherein the liquid ejecting head is provided at the above intervals. The manifold is provided with a plurality of the space in the opening corresponding to each manifold, a liquid ejecting head according to any one of claim 1 to 3 independently, characterized in that open to the atmosphere. A plurality of the manifolds are provided , and a space in the opening corresponding to the manifold is opened to the atmosphere via the first space that is communicated with the first space and the first space that is opened to the atmosphere. liquid jet head according to any one of claim 1 to 3, characterized in that it has a second space, the. 2. The fixing plate and the nozzle plate having the nozzle opening are provided on the same side with respect to the manifold in a direction in which the fixing plate and the film are laminated. The liquid jet head according to any one of? A liquid ejecting apparatus comprising the liquid ejecting head according to any one of claims 1-6.

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