JP6776857B2 - Liquid injection head and liquid injection device - Google Patents

Description

The present invention relates to a liquid injection head and a liquid injection device including the liquid injection head.

As a liquid injection head that injects a liquid as droplets, for example, a nozzle opening and a flow path such as a pressure generating chamber that communicates with the nozzle opening are provided, and the pressure changes to ink (liquid) in the pressure generating chamber by the pressure generating means. There is known an inkjet recording head that ejects ink droplets from a nozzle opening by causing the above.

In such an inkjet recording head, a compliance unit is provided that absorbs pressure fluctuations of ink in the manifold by defining a part of a manifold in which a flexible film communicates with a pressure generating chamber and deforming the film. Has been done. In the inkjet recording head, if the film (flexible member) of the compliance unit bends excessively in the initial stage when ink injection is started from a standby state in which ink is not injected, the pressure in the manifold becomes a constant value from the initial stage. There is a problem that the compliance required until the steady state is reached, that is, the proper displacement of the film in the compliance section that absorbs pressure fluctuations is hindered, and the ink ejection characteristics vary.
For this reason, in the inkjet recording head described in Patent Document 1, a cantilever beam that functions as a spring plate is provided on the film (flexible member) of the compliance portion, and excessive bending of the film of the compliance portion at the initial stage is suppressed. Will be done.

Japanese Unexamined Patent Publication No. 2016-144918

However, in the inkjet recording head described in Patent Document 1, the film of the compliance section comes into contact with the entire surface of the cantilever facing the film, and the cantilever and the film of the compliance section are displaced together. For example, when the rigidity of the cantilever is increased, the proper displacement of the film in the compliance section may be hindered.

The present invention has been made to solve at least a part of the above-mentioned problems, and can be realized as the following forms or application examples.

[Application Example 1] The liquid injection head according to the present application example includes a nozzle opening for injecting a liquid, a plurality of pressure generating chambers communicating with the nozzle opening and arranged side by side in the first direction, and the plurality of pressures. A manifold that communicates with the generation chamber, a flexible member that forms a part of the manifold and has flexibility, and the flexible member that is fixed to the flexible member and that responds to pressure fluctuations in the manifold. It has a frame member having a displaceable opening, and the frame member projects from the edge of the opening in a direction intersecting the first direction, and a cantilever beam whose tip is displaceable and the cantilever. It is characterized by including a support portion provided at the tip of the beam and fixed to the flexible member.

In this application example, the edge side of the opening of the cantilever is a fixed end fixed to the main body of the frame member, and the tip of the cantilever is a displaceable free end. The support is fixed to both the displaceable flexible member and the tip (free end) of the cantilever.
When a force that deforms the flexible member (hereinafter referred to as a deforming force) due to a pressure fluctuation in the manifold acts on the flexible member, the deforming force is transmitted to the tip of the cantilever via the support portion. Further, since the force resisting the deformation force is transmitted from the cantilever to the flexible member via the support portion, the influence of the deformation force on the flexible member is weakened, and excessive displacement of the flexible member is suppressed. To.

Further, when the deformation force is transmitted to the tip of the cantilever via the support portion, that is, when the deformation force acts concentrated on a position away from the fixed end (the tip of the cantilever), the deformation force is one-sided. Compared to the case where the deforming force acts on the entire surface of the cantilever facing the flexible member, the deforming force acts at a position away from the fixed end, so that the bending moment that deforms the cantilever becomes large and the cantilever becomes It becomes easy to deform. Since the cantilever is easily deformed, for example, even if the rigidity of the cantilever is increased, the cantilever is properly deformed, the displacement of the flexible member is not hindered, and the flexible member is also properly deformed. It will be displaced.

[Application Example 2] In the liquid injection head described in the above application example, it is preferable that the support portion is fixed to at least a part of the portion where the flexible member is most displaced.

The portion where the flexible member is most displaced has a stronger deforming force than the portion where the flexible member is displaced most. When the deforming force is strong, the cantilever is more easily deformed than when the deforming force is weak. Since the cantilever is easily deformed, for example, even when the rigidity of the cantilever is increased, the cantilever is properly deformed and the displacement of the flexible member is less likely to be hindered.

[Application Example 3] In the liquid injection head described in the above application example, it is preferable that the support portion passes through the center of the opening and extends in the first direction.

Since the force resisting the deforming force is transmitted to a wide range of flexible members via the support portion extending in the first direction, excessive displacement in the wide range of flexible members can be suppressed.

[Application Example 4] In the liquid injection head described in the above application example, it is preferable that a plurality of the cantilever beams are arranged along the first direction.

When a plurality of cantilever beams are provided, the deforming force is dispersed and acts on each of the plurality of cantilever beams. As a result, the influence of the deforming force is weakened as compared with the case where the cantilever is singular. Therefore, it is possible to suppress a problem that an excessive deforming force acts on the cantilever and the cantilever is plastically deformed.

[Application Example 5] In the liquid injection head described in the above application example, it is preferable that the support portion is separated by each of the plurality of arranged cantilever beams.

If the support portion is deformed, the direction of the deformation force acting on the cantilever from the support portion and the direction of the force resisting the deformation force acting on the flexible member from the support portion are displaced depending on the deformation state of the support portion. However, the direction in which the cantilever and the flexible member are displaced may be non-uniform.
In this application example, the support portion is separated by each of the cantilever beams, and the length of the support portion is shortened, so that the support portion is not easily deformed. When the support part is hard to be deformed, the direction of the force acting from the support part to the flexible member or the cantilever is uniform, and the flexible member or the cantilever is uniform, as compared with the case where the support part is easily deformed. It will be displaced.

[Application Example 6] In the liquid injection head described in the above application example, it is preferable that the cantilever beam is at least partially thinner than the support portion.

When the cantilever is at least partially thinner than the support portion, the cantilever is more likely to be deformed than when the cantilever is at least partially thicker than the support portion. Since the cantilever is easily deformed, for example, even when the rigidity of the cantilever is increased, the cantilever is properly deformed and the displacement of the flexible member is less likely to be hindered.

[Application Example 7] In the liquid injection head described in the above application example, it is preferable that the dimension of the cantilever in the first direction is shortened in the direction from the edge of the opening toward the tip.

Since the dimension of the cantilever in the first direction (hereinafter referred to as the width of the cantilever) is long at the fixed end of the cantilever (on the edge side of the opening), the cantilever is at the fixed end of the cantilever. Compared with the case where the width of the cantilever is short, the influence of stress concentration at the fixed end is weakened, and the durability of the cantilever can be improved.

[Application Example 8] In the liquid injection head described in the above application example, it is preferable that the cantilever is thinned in the direction from the edge of the opening toward the tip.

When the cantilever becomes thinner in the direction from the edge (fixed end) of the opening to the tip (free end), the cantilever is easily deformed. Since the cantilever is easily deformed, for example, even when the rigidity of the cantilever is increased, the cantilever is properly deformed and the displacement of the flexible member is less likely to be hindered.

[Application Example 9] The liquid injection head according to the above application example has a lid member arranged so as to form a space between the flexible member and the flexible member, and the frame member is the flexible member and the flexible member. It is preferable that the cantilever beam and the support portion are arranged between the lid member and are not fixed to the lid member and can be displaced with respect to the lid member.

When the flexible member is displaced toward the lid member, the frame member arranged between the flexible member and the lid member makes it difficult for the flexible member to come into contact with the lid member. Further, since the cantilever and the support portion can be displaced with respect to the lid member, the displacement of the cantilever beam and the support portion is not hindered by the lid member, the cantilever beam is properly deformed, and the flexible member Excessive displacement can be suppressed.

[Application Example 10] The liquid injection device according to the present application example is characterized by including the liquid injection head described in the above application example.

In the liquid injection head described in the above application example, excessive displacement of the flexible member is suppressed and the flexible member is properly displaced, so that the pressure fluctuation of the liquid filled in the manifold is reduced. When the pressure fluctuation of the liquid filled in the manifold becomes small, the amount of liquid droplets ejected from the nozzle opening becomes uniform.
Therefore, in the liquid injection device provided with the liquid injection head described in the above application example, the amount of liquid droplets ejected from the nozzle opening becomes uniform, so that the print quality (for example, uniformity) can be improved.

An exploded perspective view of the recording head according to the first embodiment. The schematic plan view of the recording head which concerns on Embodiment 1. The schematic plan view of the frame member constituting a compliance board. FIG. 3 is a schematic cross-sectional view taken along the line AA'of FIG. FIG. 6 is an enlarged cross-sectional view of a main part of FIG. The schematic diagram which shows the displacement state of the film in the compliance area of the recording head which concerns on Embodiment 1. FIG. The schematic diagram which shows the displacement state of the film in the compliance area of the recording head which concerns on Embodiment 1. FIG. The schematic diagram which shows the displacement state of the film in the compliance area of the recording head which concerns on a comparative example. The schematic diagram which shows the state of the pressure fluctuation in the manifold when the ink injection is started from the standby state. Another schematic diagram showing the state of displacement of the compliance region in the recording head according to the first embodiment. Another schematic diagram showing the state of displacement of the compliance area in the recording head according to the comparative example. The schematic plan view of the frame member of the recording head which concerns on other comparative examples. The schematic diagram which shows the displacement state of the film of the recording head which concerns on other comparative examples. The schematic diagram which shows the displacement state of the film of the recording head which concerns on Embodiment 1. FIG. The schematic diagram which shows the outline of the printer which concerns on Embodiment 2. The schematic plan view of the frame member which concerns on modification 1. FIG. The schematic plan view of the frame member which concerns on modification 2. The schematic plan view of the frame member which concerns on modification 3. The schematic plan view of the frame member which concerns on modification 4. The schematic plan view of the frame member which concerns on modification 5.

Hereinafter, the present invention will be described in detail with reference to the drawings. Such an embodiment shows one aspect of the present invention, does not limit the present invention, and can be arbitrarily changed within the scope of the technical idea of the present invention. Further, in each of the following drawings, the scale of each layer and each part is different from the actual scale in order to make each layer and each part recognizable in the drawing.

(Embodiment 1)
FIG. 1 is an exploded perspective view of an inkjet recording head which is an example of the liquid injection head according to the first embodiment. FIG. 2 is a schematic plan view of the inkjet recording head according to the present embodiment. FIG. 3 is a schematic plan view of the frame members constituting the compliance board. FIG. 4 is a schematic cross-sectional view taken along the line AA'of FIG. FIG. 5 is an enlarged cross-sectional view of a main part of FIG. 4.

As shown in the figure, the inkjet recording head II (hereinafter referred to as the recording head II) according to the present embodiment includes the head body 11, the case member 40 fixed to one side of the head body 11, and the head body 11. A plurality of members such as a cover head 130 fixed to the direction side are provided. Further, the head main body 11 is provided on the flow path forming substrate 10, the communication plate 15 provided on one side of the flow path forming substrate 10, and the communication plate 15 on the side opposite to the flow path forming substrate 10. The nozzle plate 20, the protective substrate 30 provided on the side opposite to the communication plate 15 of the flow path forming substrate 10, and the compliance substrate 45 provided on the surface side of the communication plate 15 on which the nozzle plate 20 is provided. Provided (see FIG. 1).
The cover head 130 is an example of a “lid member”.

The flow path forming substrate 10 constituting the head body 11 is made of a metal such as stainless steel or Ni, a ceramic material typified by ZrO ₂ or Al ₂ O ₃ , a glass ceramic material, an oxide such as MgO or LaAlO _3. Can be used. In the present embodiment, the flow path forming substrate 10 is made of a silicon single crystal substrate. A plurality of pressure generating chambers 12 (see FIG. 4) partitioned by partition walls discharge ink, which is an example of “liquid”, on the flow path forming substrate 10 by anisotropic etching from one side. A plurality of nozzles 21 are arranged side by side along the direction in which they are arranged side by side.
The nozzle 21 is an example of a “nozzle opening”.

Hereinafter, the direction in which the nozzles 21 are arranged side by side, that is, the direction in which the plurality of pressure generating chambers 12 are arranged side by side is referred to as the first direction X.
The flow path forming substrate 10 is provided with a plurality of rows (two rows in this embodiment) of a plurality of pressure generating chambers 12 arranged side by side in the first direction X. The row arrangement direction of the rows of the pressure generating chambers 12 arranged side by side in the first direction X is referred to as a second direction Y.
The second direction Y is an example of the "direction intersecting the first direction". For example, the second direction Y is the "first direction" on one surface of the flexible member (film 46) described later. The direction that intersects with the direction of.

The flow path forming substrate 10 has an opening area smaller than that of the pressure generating chamber 12 on one end side in the second direction Y of the pressure generating chamber 12, and the flow path resistance of the ink flowing into the pressure generating chamber 12. A supply channel or the like may be provided.

A communication plate 15 and a nozzle plate 20 are sequentially laminated on one surface side of the flow path forming substrate 10. That is, it includes a communication plate 15 provided on one surface of the flow path forming substrate 10 and a nozzle plate 20 having a nozzle 21 provided on the side opposite to the flow path forming substrate 10 of the communication plate 15.

The communication plate 15 is provided with a nozzle communication passage 16 that communicates the pressure generating chamber 12 and the nozzle 21 (see FIG. 4). The communication plate 15 has a larger area than the flow path forming substrate 10, and the nozzle plate 20 has a smaller area than the flow path forming substrate 10. By providing the communication plate 15 in this way, the nozzle 21 of the nozzle plate 20 and the pressure generating chamber 12 can be separated from each other. Therefore, the ink in the pressure generating chamber 12 is the moisture in the ink generated by the ink near the nozzle 21. It is less susceptible to thickening due to evaporation.
Further, since the nozzle plate 20 only needs to cover the opening of the nozzle communication passage 16 that communicates the pressure generating chamber 12 and the nozzle 21, the area of the nozzle plate 20 can be made relatively small. As a result, the flow path forming substrate 10 can be made smaller than the communication plate 15, so that the cost can be reduced.
Hereinafter, in the nozzle plate 20, the surface on which the nozzle 21 is opened and ink droplets are discharged is referred to as a liquid injection surface 20a.

The communication plate 15 is provided with a first manifold portion 17 and a second manifold portion 18 that form a part of the manifold 100 (see FIG. 4).
The first manifold portion 17 is provided so as to penetrate the communication plate 15 in the thickness direction (the direction in which the communication plate 15 and the flow path forming substrate 10 are laminated). The second manifold portion 18 is provided by opening the communication plate 15 toward the nozzle plate 20 without penetrating the communication plate 15 in the thickness direction. The thickness direction (stacking direction) is orthogonal to the first direction and the second direction.

The opening shape of the manifold 100 on the nozzle plate 20 side has a longitudinal direction and a lateral direction in the in-plane direction including the first direction X and the second direction Y. The term "manifold 100 having a longitudinal direction and a lateral direction" means that the aspect ratio of the opening of the manifold 100 on the nozzle plate 20 side is other than 1: 1. The opening shape of the manifold 100 is not particularly limited, and may be, for example, a rectangular shape, a trapezoidal shape, a parallel quadrilateral shape, a polygonal shape, an elliptical shape, or the like.
As described above, the recording head II includes the nozzle 21 for injecting ink, the pressure generating chamber 12 communicating with the nozzle 21 and juxtaposed in the first direction X, and the manifold 100 communicating with the pressure generating chamber 12. have.

The plurality of pressure generating chambers 12 are arranged side by side in the first direction X. Therefore, in the manifold 100 which is a common liquid chamber communicating with each pressure generating chamber 12, the first direction X side in which the pressure generating chambers 12 are arranged side by side is the longitudinal direction (long), and the second direction Y side is. It is provided in a trapezoidal shape so as to be in the lateral direction (short). Similarly, the opening shape of the manifold 100 on the nozzle plate 20 side is provided in a trapezoidal shape so that the first direction X side is the longitudinal direction and the second direction Y side is the lateral direction.

Further, the communication plate 15 is provided with a supply communication passage 19 that communicates with one end of the pressure generation chamber 12 in the second direction Y independently for each pressure generation chamber 12. The supply communication passage 19 communicates the second manifold portion 18 with the pressure generating chamber 12. That is, in the present embodiment, the supply communication passage 19, the pressure generating chamber 12, and the nozzle communication passage 16 are provided as individual passages communicating with the nozzle 21 and the second manifold portion 18 (see FIG. 4). ).

As such a communication plate 15, a metal such as stainless steel or nickel (Ni), ceramics such as zirconium (Zr), or the like can be used. The communication plate 15 is preferably made of a material having the same coefficient of linear expansion as that of the flow path forming substrate 10. That is, when a material having a linear expansion coefficient significantly different from that of the flow path forming substrate 10 is used as the communication plate 15, the flow path forming substrate 10 and the communication plate 15 are warped due to the difference in the linear expansion coefficient due to heating or cooling. Will occur. In the present embodiment, by using the same material as the flow path forming substrate 10, that is, a silicon single crystal substrate as the communication plate 15, it is possible to suppress the occurrence of warpage due to heat, cracks due to heat, peeling, and the like.

The nozzle plate 20 is formed with nozzles 21 that communicate with each pressure generating chamber 12 via the nozzle communication passage 16. Nozzles 21 that inject the same type of liquid (ink) are arranged side by side in the first direction X, and two rows of nozzles 21 arranged side by side in the first direction X are arranged in the second direction Y. It is formed.

As such a nozzle plate 20, for example, a metal such as stainless steel (SUS), an organic substance such as a polyimide resin, a silicon single crystal substrate, or the like can be used. By using a silicon single crystal substrate as the nozzle plate 20, the linear expansion coefficients of the nozzle plate 20 and the communicating plate 15 are made equal, and the occurrence of warpage due to heating and cooling, cracks due to heat, peeling, etc. is suppressed. can do.

On the other hand, a diaphragm 50 is formed on the side of the flow path forming substrate 10 opposite to the communication plate 15 (see FIG. 5). In the present embodiment, as the diaphragm 50, an elastic film 51 made of silicon oxide provided on the flow path forming substrate 10 side and an insulator film 52 made of zirconium oxide provided on the elastic film 51 are provided. I made it. The liquid flow path of the pressure generating chamber 12 or the like is formed by anisotropic etching of the flow path forming substrate 10 from one surface side (the surface side to which the nozzle plate 20 is joined), and the pressure generating chamber 12 or the like is formed. The other surface of the liquid flow path is defined by the elastic film 51.

Further, the first electrode 60, the piezoelectric layer 70, and the second electrode 80 are laminated and formed on the insulator film 52 of the diaphragm 50 to form the piezoelectric actuator 300. Here, the piezoelectric actuator 300 refers to a portion including a first electrode 60, a piezoelectric layer 70, and a second electrode 80. Generally, one electrode of the piezoelectric actuator 300 is used as a common electrode, and the other electrode and the piezoelectric layer 70 are patterned for each pressure generating chamber 12. Here, a portion composed of one of the patterned electrodes and the piezoelectric layer 70 and in which piezoelectric strain is generated by applying a voltage to both electrodes is referred to as a piezoelectric active portion. In the present embodiment, the first electrode 60 is a common electrode of the piezoelectric actuator 300, and the second electrode 80 is an individual electrode of the piezoelectric actuator 300, but there is no problem even if this is reversed due to the convenience of the drive circuit and wiring.

In the present embodiment, since the first electrode 60 is continuously provided over the plurality of pressure generating chambers 12, the first electrode 60 functions as a part of the diaphragm, but of course, it is limited to this. For example, only the first electrode 60 may act as a diaphragm without providing the elastic film 51 and the insulator film 52 described above. Further, the piezoelectric actuator 300 itself may substantially also serve as a diaphragm. However, when the first electrode 60 is provided directly on the flow path forming substrate 10, it is preferable to protect the first electrode 60 with an insulating protective film or the like so that the first electrode 60 and the ink do not conduct with each other. That is, in the present embodiment, the configuration in which the first electrode 60 is provided on the substrate (flow path forming substrate 10) via the diaphragm 50 is illustrated, but the configuration is not particularly limited to this, and the diaphragm 50 is used. The first electrode 60 may be provided directly on the substrate without being provided. That is, the first electrode 60 may act as a diaphragm.

Further, each second electrode 80, which is an individual electrode of the piezoelectric actuator 300, is pulled out from the vicinity of the end opposite to the supply passage 19 and extends onto the diaphragm 50. A lead electrode 90 made of, for example, gold (Au) or the like is connected to the second electrode 80 (see FIG. 5).

Further, a protective substrate 30 having substantially the same size as the flow path forming substrate 10 is bonded to the surface of the flow path forming substrate 10 on the side of the piezoelectric actuator 300 which is a pressure generating means. The protective substrate 30 has a holding portion 31 which is a space for protecting the piezoelectric actuator 300.

Further, a case member 40 for defining a manifold 100 communicating with a plurality of pressure generating chambers 12 together with the head main body 11 is fixed to the head main body 11 having such a configuration. The case member 40 has substantially the same shape as the communication plate 15 described above in a plan view, and is joined to the protective substrate 30 and also to the communication plate 15 described above. Specifically, the case member 40 has a recess 41 having a depth for accommodating the flow path forming substrate 10 and the protective substrate 30 on the protective substrate 30 side (see FIG. 4). The recess 41 has an opening area wider than the surface of the protective substrate 30 joined to the flow path forming substrate 10. Then, the opening surface of the recess 41 on the nozzle plate 20 side is sealed by the communication plate 15 in a state where the flow path forming substrate 10 and the like are housed in the recess 41. As a result, the third manifold portion 42 is defined by the case member 40 and the head main body 11 on the outer peripheral portion of the flow path forming substrate 10. Then, the manifold 100 of the present embodiment is formed by the first manifold portion 17 and the second manifold portion 18 provided on the communication plate 15, and the third manifold portion 42 defined by the case member 40 and the head main body 11. It is configured.

That is, the manifold 100 includes a first manifold portion 17, a second manifold portion 18, and a third manifold portion 42. Further, the manifold 100 of the present embodiment is arranged on both outer sides of the two rows of pressure generating chambers 12 in the second direction Y, and two manifolds provided on both outer sides of the two rows of pressure generating chambers 12. The 100s are independently provided in the recording head II so as not to communicate with each other. That is, one manifold 100 is provided in communication with each row of the pressure generating chambers 12 of the present embodiment (rows of the pressure generating chambers 12 arranged side by side in the first direction X).

Further, the case member 40 is provided with an introduction path 44 for communicating with the manifold 100 and supplying ink to each manifold 100 (see FIG. 1). Further, the case member 40 is provided with a connection port 43 through which the wiring board 121 is inserted so as to communicate with the through hole 32 of the protective board 30 (see FIG. 1). The wiring board 121 through which the connection port 43 is inserted is connected to the lead electrode 90. Further, the wiring board 121 is provided with a drive circuit 120 (see FIG. 1).

The two manifolds 100 may communicate with each other on the upstream side of the recording head II, that is, an upstream flow path connected to an introduction path 44 communicating with the manifold 100, which will be described in detail later.

As the material of such a case member 40, for example, resin, metal, or the like can be used. For example, by molding a resin material to form a case member 40, mass production can be performed at low cost.

Further, as shown in FIGS. 4 and 5, a compliance substrate 45 is provided on the surface of the communication plate 15 where the first manifold portion 17 and the second manifold portion 18 open. The compliance board 45 has substantially the same size as the communication plate 15 described above in a plan view, and is provided with a first exposed opening 45a that exposes the nozzle plate 20. Then, the compliance substrate 45 seals the openings of the first manifold portion 17 and the second manifold portion 18 on the liquid injection surface 20a side in a state where the nozzle plate 20 is exposed by the first exposed opening 45a.

In this way, the compliance board 45 defines a part of the manifold 100. The compliance substrate 45 includes a film 46 made of a flexible material and a frame member 47 fixed to the side opposite to the communication plate 15 of the film 46.
The film 46 is an example of a "flexible member".

The film 46 is composed of a flexible film-like thin film (for example, a thin film having a thickness of 20 μm or less formed of polyphenylene sulfide (PPS), aromatic polyamide (aramid), or the like).
The frame member 47 is made of a member that is harder and more elastic than the film 46. As a constituent material of the frame member 47, for example, a metal such as stainless steel (SUS) or Ni electroformed can be used. The region of the frame member 47 facing the manifold 100 is an opening 48 completely removed in the thickness direction. Therefore, one surface of the manifold 100 is a compliance region 49 sealed only with the flexible film 46. That is, the film 46 forms a part of the manifold 100 and has flexibility.

That is, by providing the opening 48 in the frame member 47, a compliance space 131 for separating the film 46 and the cover head 130 which is a lid member is formed. Then, the frame member 47 is arranged between the film 46 and the cover head 130. Further, the compliance space 131 makes it possible to displace a part of the film 46 (the film 46 arranged inside the opening 48) as the compliance region 49.
In other words, the opening 48 provided in the frame member 47 becomes the compliance region 49 that allows the film 46 to be displaced according to the pressure fluctuation in the manifold 100. Further, by providing the compliance region 49 in the manifold 100, a sudden pressure fluctuation of the ink filled in the manifold 100 is suppressed.
The compliance space 131 is an example of "a space formed between the lid member and the flexible member". The opening 48 is an example of an “opening that allows the flexible member to be displaced”.

Further, in the present embodiment, one compliance area 49 is provided corresponding to one manifold 100. That is, in the present embodiment, since the two manifolds 100 are provided, two compliance regions 49 are provided on both sides of the second direction Y with the nozzle plate 20 interposed therebetween.

The compliance substrate 45 is formed, for example, by applying an adhesive over the entire surface of one surface of the film 46 and then adhering the frame member 47 to the one surface on which the adhesive of the film 46 is formed. Therefore, as shown in FIG. 5, an adhesive layer 46a in which the adhesive is cured is also formed in the compliance region 49 exposed by the opening 48 of the frame member 47.

Here, the compliance region 49 defined by the opening 48 has a longitudinal direction and a lateral direction in the first direction X and the second direction Y, as shown in FIG. The phrase that the compliance region 49 has a longitudinal direction and a lateral direction means that the aspect ratio of the compliance region 49 is other than 1: 1. The shape of the compliance region 49 is not particularly limited, and may be, for example, a rectangular shape, a trapezoidal shape, a parallel quadrilateral shape, a polygonal shape, an elliptical shape, or the like. In the present embodiment, as described above, the opening on the compliance substrate 45 side of the manifold 100 is provided in a trapezoidal shape having a longitudinal direction in the first direction X and a lateral direction in the second direction Y. Therefore, the compliance region 49 is provided in a trapezoidal shape having a longitudinal direction in the first direction X and a lateral direction in the second direction Y, similar to the opening shape of the manifold 100. As a result, the compliance area 49 can be provided in an area as large as possible with respect to the opening of the manifold 100, and the recording head II can be miniaturized. Of course, the compliance region 49 does not necessarily have to be provided in the same shape as the opening shape of the manifold 100, and may be provided in a shape different from the opening shape of the manifold 100.

Further, as shown in FIGS. 4 and 5, a cover head 130 is provided on the liquid injection surface 20a side of the head main body 11.
The cover head 130 is provided with a second exposed opening 132 that exposes the nozzle 21. In the present embodiment, the second exposed opening 132 has a size that exposes the nozzle plate 20, that is, has substantially the same opening as the first exposed opening 45a of the compliance substrate 45.
Further, the cover head 130 is provided with its end bent from the liquid injection surface 20a side so as to cover the side surface of the head main body 11 (the surface intersecting the liquid injection surface 20a).

Such a cover head 130 is joined to the side of the compliance substrate 45 opposite to the communication plate 15, and seals a space on the side opposite to the flow path (manifold 100) of the compliance region 49. That is, the cover head 130, which is a lid member, is provided so as to cover the compliance area 49 with the compliance space 131 arranged between the cover head 130 and the compliance area 49. By covering the compliance area 49 with the cover head 130 which is a lid member in this way, it is possible to prevent the compliance area 49 from being destroyed even if it comes into contact with a recording medium such as paper. Further, it is possible to suppress the ink (liquid) from adhering to the compliance region 49, wipe off the ink (liquid) adhering to the surface of the cover head 130 with, for example, a wiper blade, and cover the recording medium with the cover head 130. It is possible to prevent stains with ink or the like adhering to the surface.

As shown in FIGS. 3 and 5, the frame member 47 has a main body portion 47a, a cantilever beam 150, and a support portion 152. The main body portion 47a, the cantilever beam 150, and the support portion 152 are integrally molded with the same material (for example, SUS). The cantilever beam 150 and the support portion 152 are arranged in the compliance space 131 formed between the film 46 in the compliance region 49 and the cover head 130, and can be displaced together with the film 46 in the compliance region 49. ..
That is, the cantilever beam 150 and the support portion 152 are fixed to the film 46 in the compliance region 49 by the adhesive layer 46a, and can be displaced together with the film 46 in the compliance region 49.
The adhesive layer 46a may not be arranged between the cantilever beam 150 and the film 46, and the cantilever beam 150 may not be fixed to the film 46 in the compliance region 49.

One surface of the main body 47a is fixed to the film 46 via the adhesive layer 46a, and the other surface of the main body 47a is fixed to the cover head 130 via the adhesive layer 135. The main body 47a is provided with a first exposed opening 45a and an opening 48. As described above, the main body 47a has an opening 48 which is fixed to the film 46 and allows the film 46 to be displaced according to the pressure fluctuation in the manifold 100.
The cantilever beam 150 and the support portion 152 are arranged inside the opening 48 of the main body portion 47a. The cantilever beam 150 projects from the edge of the opening 48 in the second direction Y, and the tip 151 (see FIG. 5) can be displaced. Specifically, the cantilever beam 150 projects from the outer edge of the opening 48 in the second direction Y toward the inside where the nozzle 21 is located (the side where the pressure generating chamber 12 is arranged). That is, in the cantilever beam 150, the edge side of the opening 48 becomes a fixed end (support point), the tip 151 becomes a displaceable free end, and the cantilever beam 150 is displaced.
Further, the support portion 152 is provided at the tip 151 of the cantilever beam 150 and is fixed to the film 46 in the compliance region 49.

The cantilever beam 150 is provided so as to project in the second direction Y from the edge of the opening 48 provided in the main body portion 47a. The cantilever beam 150 is fixed to the film 46 via an adhesive layer 46a. The cantilever beam 150 is not fixed to the cover head 130 and can be displaced with respect to the cover head 130.

The support portion 152 passes through the center of the opening 48 and extends in the first direction X. The support portion 152 is fixed to the film 46 via the adhesive layer 46a. The support portion 152 is not fixed to the cover head 130 and can be displaced with respect to the cover head 130.
The film 46 is most easily displaced and most displaced at the center of the opening 48. Therefore, the center of the opening 48 corresponds to the portion where the film 46 is most easily displaced and is most displaced. The support portion 152 is fixed to at least a part of the portion where the film 46 is most displaced.

As described above, since the cantilever beam 150 and the support portion 152 provided at the tip 151 of the cantilever beam 150 are fixed to the film 46 and not to the cover head 130, the cantilever beam is fixed in the compliance space 131. The 150 and the support 152 are displaced together with the film 46 in the compliance region 49.

A force (hereinafter referred to as a deforming force) corresponding to the pressure in the manifold 100 acts on the film 46 in the compliance region 49. The film 46 in the compliance region 49 is displaced (deformed) by the deforming force.
In the present embodiment, the pressure in the manifold 100 is negative pressure (based on atmospheric pressure) in the standby state in which ink is not ejected from the nozzle 21. Further, when the ink is ejected from the nozzle 21 and the ink in the manifold 100 is consumed, the negative pressure in the manifold 100 is increased. Therefore, when the manifold 100 is filled with ink, the film 46 in the compliance region 49 is displaced in the direction away from the cover head 130 (hereinafter referred to as the vertical direction) due to the deforming force.

This deforming force is transmitted to the support portion 152 via the film 46, and further transmitted to the tip 151 of the cantilever beam 150 via the support portion 152. That is, by providing the support portion 152 at the tip 151 of the cantilever beam 150, the deforming force acts intensively on the tip 151 of the cantilever 150. As a result, the cantilever 150 is displaced with the edge side of the opening 48 as the fixed end. Further, the support portion 152 provided at the tip 151 of the cantilever beam 150 is also displaced together with the cantilever beam 150.

The cantilever beam 150 is a kind of spring plate made of an elastic member. Therefore, a deformation force acts on the cantilever beam 150, and when the cantilever beam 150 is displaced, a force that tries to return to the original shape (hereinafter referred to as a force that opposes the deformation force) acts on the cantilever beam 150. To do.

The force against the deforming force is transmitted from the cantilever 150 to the film 46 in the compliance region 49 via the support portion 152. Since a force resisting the deformation force acts on the film 46 in the compliance region 49 from the cantilever 150 via the support portion 152, the influence of the deformation force on the film 46 in the compliance region 49 is weakened. For example, even when a sudden pressure change in the manifold 100 occurs and the deforming force becomes excessively strong, the influence of the deforming force is weakened, so that excessive displacement (deformation) of the film 46 is suppressed.
As described above, the cantilever beam 150 has a role of suppressing excessive displacement (deformation) of the film 46 in the compliance region 49.

The support portion 152 has a role of transmitting a deforming force to the cantilever beam 150 and further transmitting a force resisting the deforming force to the film 46.
If the displacement of the film 46 in the compliance region 49 is non-uniform, the pressure fluctuation in the manifold 100 may not be properly adjusted by the compliance region 49. Therefore, it is preferable that the film 46 in the compliance region 49 is uniformly displaced. ..
For example, when the support portion 152 is deformed, the direction of the force acting on the cantilever beam 150 and the film 46 from the support portion 152 changes depending on the deformed state of the support portion 152, and the displacement of the cantilever beam 150 and the film 46 is not correct. It tends to be uniform. On the other hand, if the support portion 152 is not easily deformed, the direction of the force acting on the cantilever beam 150 and the film 46 from the support portion 152 is unlikely to change, and the cantilever beam 150 and the film 46 are likely to be uniformly displaced.
The support portion 152 is thicker than the cantilever beam 150 and is less likely to be displaced in order to uniformly displace the cantilever beam 150 and the film 46 and appropriately adjust the pressure fluctuation in the manifold 100 by the compliance region 49. ..

If the cantilever beam 150 has a higher rigidity than the support portion 152 and is difficult to be displaced, excessive displacement (deformation) of the film 46 in the compliance region 49 can be suppressed, but the film 46 in the compliance region 49 can be suppressed. Proper displacement is hindered.
For example, in order to reduce the pressure change in the manifold 100 and stabilize the pressure in the manifold 100, it is preferable that the film 46 in the compliance region 49 is properly displaced. Therefore, it is preferable that the cantilever beam 150 is also displaced appropriately. Therefore, the cantilever beam 150 is preferably easily displaced (elastically deformed) by a deforming force, and is preferably less rigid than the support portion 152.
Therefore, the cantilever beam 150 is thinner than the support portion 152 and is easily displaced (elastically deformed).

Since the cantilever beam 150 is thinner than the support portion 152, a step 153 is formed at the boundary between the cantilever beam 150 and the support portion 152. Further, the main body portion 47a has the same thickness as the support portion 152, and is thicker than the cantilever beam 150. Therefore, a similar step is formed at the boundary between the cantilever beam 150 and the main body portion 47a.

In other words, the thinned portion of the frame member 47 is the cantilever 150. The thickened portion of the frame member 47 extending in the first direction X is the support portion 152. The portion of the cantilever beam 150 in contact with the support portion 152 is the tip 151 of the cantilever beam 150. Further, the thickened portion of the frame member 47 provided with the first exposed opening 45a and the opening 48 is the main body 47a.

The cantilever beam 150 and the support portion 152 may have the same thickness. Further, the cantilever beam 150 and the support portion 152 are not limited to being made of the same material, and may be made of different materials.
For example, when the cantilever beam 150 and the support portion 152 have the same thickness, it is preferable that the cantilever beam 150 is made of a material that is easily deformed and the support portion 152 is made of a material that is not easily deformed.

The cantilever beam 150 may be configured to be thinner toward the tip 151 from a portion fixed to the edge of the opening 48. When the cantilever beam 150 is thinned from the portion fixed to the edge of the opening 48 toward the tip 151, the stress concentration in the portion fixed to the edge of the opening 48 can be relaxed.

6A and 6B are schematic views showing the displacement state of the film in the compliance region of the recording head according to the present embodiment. FIG. 7 is a schematic view showing a displacement state of the film in the compliance region of the recording head according to the comparative example. Further, FIGS. 6B and 7 show the same state.
The recording head according to the comparative example is different from the recording head II according to the present embodiment in that the beam member 56 is not provided with the cantilever beam 150 and the support portion 152.

As shown in FIG. 6A, in the recording head II according to the present embodiment, in the standby state in which ink is not ejected from the nozzle 21, the pressure in the manifold 100 is negative pressure (based on atmospheric pressure), so that compliance is achieved. The film 46 in the region 49 bends and deforms inward (vertically) inside the manifold 100.

As shown in FIG. 6B, when ink is ejected from the nozzle 21 and the ink in the manifold 100 is consumed, the negative pressure in the manifold 100 increases, and the film 46 in the compliance region 49 elastically deforms the cantilever beam 150. While doing so, it further bends and deforms inward (in the vertical direction) inside the manifold 100.
As described above, since the force resisting the force (deformation force) that bends and deforms the film 46 acts on the film 46 from the cantilever beam 150 via the support portion 152, the case where the cantilever beam 150 is not provided. The bending deformation of the film 46 is suppressed as compared with the above. Since the cantilever beam 150 acts in the direction of alleviating the pressure change in the manifold 100, the pressure fluctuation in the manifold 100 becomes small at the start of printing and during printing. Therefore, fluctuations in the ejection characteristics of the ink during printing, particularly variations in the weight of the ink droplets, are suppressed.

FIG. 7 shows the same state as in FIG. 6B, in which the ink in the manifold 100 is consumed and the negative pressure in the manifold 100 is increased.
As shown in FIG. 7, in the recording head according to the comparative example, when the ink in the manifold 100 is consumed and the negative pressure in the manifold 100 increases, the beam member 56 is provided with the cantilever beam 150 and the support portion 152. Therefore, the film 46 in the compliance region 49 is further bent and deformed. If the film 46 in the compliance region 49 is completely bent, the film 46 is less likely to bend and deform, which makes it difficult to adjust the pressure in the manifold 100.
Therefore, the recording head according to the comparative example has a weaker pressure adjusting ability in the manifold 100 than the recording head II according to the present embodiment. On the other hand, in the recording head II according to the present embodiment, excessive deformation that the film 46 in the compliance region 49 is completely bent is suppressed, so that the pressure in the manifold 100 can be adjusted appropriately.

FIG. 8 is a schematic view showing a state of pressure fluctuation in the manifold when ink injection is started from the standby state.
In FIG. 8, the vertical axis represents the pressure in the manifold 100, and the horizontal axis represents the time (elapsed time) from the start of ink injection. The solid line in the figure corresponds to the recording head II according to the present embodiment, and the broken line in the figure corresponds to the recording head according to the comparative example.

As shown by the broken line in FIG. 8, since the recording head according to the comparative example has a weak pressure adjusting ability in the manifold 100, the compliance region 49 although the ink in the manifold 100 is consumed in T1 immediately after the start of ink injection. However, since the pressure fluctuation cannot be absorbed, the inside of the manifold 100 becomes a large negative pressure. As a result, in T1, the weight of the ejected ink droplets is reduced and the print density is reduced. In T2 after that, the pressure in the manifold 100 temporarily becomes a positive pressure due to the reaction of ink being supplied into the manifold 100 from the upstream side. As a result, in T2, the weight of the ink droplets becomes large and the print density becomes high. After that, in T3, the compliance region 49 absorbs the pressure fluctuation in the manifold 100, the pressure in the manifold 100 becomes stable, the weight of the ink droplets is intermediate, that is, the print density is intermediate.

As shown by the solid line in FIG. 8, in the recording head II according to the present embodiment, the compliance region 49 can absorb the pressure fluctuation in the manifold 100, so that the pressure difference in the manifold 100 in T1, T2, and T3. Can be reduced to make the difference in weight of ink droplets smaller than in the comparative example. Therefore, by providing the cantilever beam 150 and the support portion 152, it is possible to suppress variations in the weight of the ejected ink droplets.

FIG. 9 is another schematic view showing the state of displacement of the compliance region in the recording head according to the present embodiment. FIG. 10 is another schematic view showing the state of displacement of the compliance region in the recording head according to the comparative example.
As described above, in the recording head according to the comparative example, the cantilever beam 150 and the support portion 152 are not provided on the beam member 56.

For example, if the recording head II is driven while the compliance region 49 is not filled with ink, the film 46 in the compliance region 49 may be displaced toward the cover head 130.

As shown in FIG. 9, in the recording head II according to the present embodiment, the support portion 152 and the cantilever beam 150 (not shown in FIG. 9) are arranged between the cover head 130 and the film 46, so that the compliance area When the film 46 of 49 is displaced toward the cover head 130, it becomes difficult to come into contact with the cover head 130 (it becomes difficult to stick).

As shown in FIG. 10, in the recording head according to the comparative example, since the support portion 152 and the cantilever beam 150 are not provided between the cover head 130 and the film 46, the film 46 in the compliance region 49 is the cover head. When displaced to the 130 side, it easily comes into contact with the cover head 130. Further, when the film 46 in the compliance region 49 comes into contact with the cover head 130 in a state where moisture is attached to the film 46 and the cover head 130 due to dew condensation or the like, the film 46 sticks to the cover head 130 due to the moisture. , May be stuck. When the film 46 is attached to and fixed to the cover head 130, the displacement of the film 46 in the compliance region 49 is hindered, so that it becomes difficult to adjust the pressure fluctuation in the manifold 100 by the compliance region 49.

In the present embodiment, the support portion 152 and the cantilever beam 150 suppress the contact (sticking) of the film 46 in the compliance region 49 with the cover head 130, so that the displacement of the film 46 in the compliance region 49 is hindered. Instead, the compliance region 49 allows the pressure fluctuation in the manifold 100 to be adjusted appropriately.

Further, when at least one of the surface of the support portion 152 and the cantilever beam 150 facing the cover head 130 and the surface of the cover head 130 facing the support portion 152 and the cantilever beam 150 is water-repellent, the water-repellent treatment is applied. Since the adhesion of moisture such as dew condensation is suppressed as compared with the case where the above is not applied, the problem that the film 46 of the compliance region 49 sticks to the cover head 130 due to the moisture (condensation) is more strongly suppressed. can do.

FIG. 11 is a diagram corresponding to FIG. 3, and is a schematic plan view of a frame member of a recording head according to another comparative example. FIG. 12A is a schematic view of the vicinity of BB'shown in FIG. 11, and is a schematic view showing a displacement state of the film of the recording head according to another comparative example. FIG. 12B is a diagram corresponding to FIG. 12A, and is a schematic diagram showing a displacement state of the film of the recording head according to the present embodiment.
In addition, in FIG. 11, FIG. 12A, and FIG. 12B, illustration of components unnecessary for explanation is omitted.

As shown in FIG. 11, in the frame member 57 of the recording head according to another comparative example, the support portion 152 is not provided inside the opening 48, and the pair of cantilever beams 150A protruding inside the opening 48 are formed. A plurality of them are arranged along the first direction X. This point is a difference from the present embodiment.
As shown in FIG. 12A, the film 46 of the compliance region 49 is in contact with the entire surface (hereinafter referred to as a contact surface) of the cantilever beam 150A protruding inward of the opening 48 and facing the film 46. Then, the deforming force acts on the entire contact surface of the cantilever beam 150A from the film 46, and the force resisting the deforming force acts on the film 46 from the entire contact surface of the cantilever beam 150A. As a result, the bending deformation of the film 46 is suppressed around the contact surface of the cantilever beam 150A.

As shown in FIG. 12B, in the recording head II according to the present embodiment, the deforming force acts intensively on the tip 151 of the cantilever beam 150 via the support portion 152. When the deformation force acts intensively on the tip 151 of the cantilever beam 150, the deformation force acts on the entire contact surface of the cantilever beam 150A, as compared with the case where the deformation force acts on the fixed end (opening of the cantilever beam 150). Since it acts at a position away from the edge side of the 48), the bending moment that deforms the cantilever beam 150 becomes large, and the cantilever beam 150 is easily deformed.
That is, the recording head II according to the present embodiment has a larger bending moment for deforming the cantilever beam 150 than the recording head according to another comparative example, so that the rigidity of the cantilever beam 150 is assumed to be high. However, the cantilever beam 150 is easily deformed, and the cantilever beam 150 is properly displaced. Therefore, the film 46 in the compliance region 49 is also displaced appropriately, and the pressure fluctuation in the manifold 100 can be appropriately adjusted by the compliance region 49.
Further, in the recording head II according to the present embodiment, since a force resisting the deformation force acts on the film 46 via the support portion 152, the bending deformation of the film 46 is suppressed around the support portion 152. On the other hand, since the frame member 57 of the recording head according to the other comparative example is not provided with the support portion 152 inside the opening 48, the bending deformation of the film 46 is suppressed as compared with the recording head II according to the present embodiment. The area of the area to be covered becomes smaller. Therefore, the recording head II according to the present embodiment has a large area in which the bending deformation of the film 46 is suppressed as compared with the recording head according to the other comparative examples, and the excessive deformation of the film 46 is surely suppressed. be able to.
As described above, the recording head II according to the present embodiment can obtain the effect of appropriately displacementing the film 46 of the compliance region 49 in addition to the effect of surely suppressing the excessive displacement of the film 46 of the compliance region 49. Therefore, the pressure fluctuation in the manifold 100 is properly adjusted by the compliance region 49, the pressure change in the manifold 100 becomes small, and the ink ejection characteristics (for example, the amount of droplets ejected from the nozzle 21) become uniform. ..

(Embodiment 2)
"Liquid injection device"
FIG. 13 is a schematic view showing the configuration of the printer according to the second embodiment.
Next, with reference to FIG. 13, an outline of the printer 1000, which is an example of the “liquid injection device”, will be described.
As shown in FIG. 13, the printer 1000 includes a transport unit 200, a carriage unit 301, a recording head II according to the first embodiment, and the like. In the printer 1000, each unit (conveying unit 200, carriage unit 301) is controlled by the controller 600, and an image is printed on the paper S.

The transport unit 200 has a function of moving the paper S in the transport direction H. The transfer unit 200 includes a paper feed roller 210, a transfer motor 220, a transfer roller 230, a platen 240, a paper discharge roller 250, and the like. The paper feed roller 210 feeds the paper S inserted from the back surface of the printer 1000 into the printer 1000. The transport roller 230 transports the paper S fed by the paper feed roller 210 to the printable area on the platen 240. The platen 240 supports the paper S being printed. The paper ejection roller 250 ejects the paper S to the front surface (conveying direction H) of the printer 1000. The paper feed roller 210, the paper feed roller 230, and the paper discharge roller 250 are driven by the paper feed motor 220.

The carriage unit 301 has a function of reciprocating (scanning) the recording head II in a predetermined direction (scanning direction). The carriage unit 301 includes a carriage 310, a carriage motor 320, and the like. The carriage 310 can reciprocate in the scanning direction and is driven by the carriage motor 320. In addition, the carriage 310 detachably holds the ink cartridge 6 that houses the ink.

In the printer 1000, the droplet ejection operation of ejecting ink as droplets by the recording head II and the conveying operation of conveying the paper S in the conveying direction H by the conveying roller 230 are alternately repeated, and an image composed of a plurality of dots is repeated. Is printed on paper S.

As described above, in the recording head II, the pressure fluctuation in the manifold 100 is appropriately adjusted by the compliance region 49, the pressure change in the manifold 100 becomes small, and the ink ejection characteristics (for example, the liquid ejected from the nozzle 21) are reduced. The amount of drops) becomes uniform.
Therefore, even in the printer 1000 provided with the recording head II, the ink ejection characteristics (for example, the amount of droplets ejected from the nozzle 21) are uniform, so that the print quality (for example, uniform) of the image printed on the paper S is uniform. Gender) can be enhanced.

The present invention is not limited to the above-described embodiment, and can be appropriately modified within the scope of the claims and within a range not contrary to the gist or idea of the invention that can be read from the entire specification. Conceivable. Hereinafter, a modified example will be described.

(Modification example 1)
FIG. 14 is a view corresponding to FIG. 3, and is a schematic plan view of the frame member according to the first modification.
As shown in FIG. 14, in the frame member 47A according to the present modification, a plurality of (three) cantilever beams 150 projecting in the second direction Y and the tip 151 of the cantilever beam 150 inside the opening 48. A support portion 152 provided in the above and extending in the first direction X is arranged. That is, in the frame member 47A according to the present modification, three cantilever beams 150 and one support portion 152 are arranged inside the opening 48. As described above, in the frame member 47A according to the present modification, a plurality of cantilever beams 150 are arranged inside the opening 48 along the first direction X, and the plurality of arranged cantilever beams 150 are arranged in the first direction. It is connected to a support portion 152 extending to X.
On the other hand, in the frame member 47 according to the first embodiment, one cantilever beam 150 and one support portion 152 are arranged inside the opening 48.
This is the difference between this modification and the first embodiment.

In the first embodiment, the support portion 152 extending in the first direction X is supported by one support point (cantilever beam 150). Therefore, when a force (moment) that rotates the support portion 152 acts, the support portion 152 rotates (tilts) in a direction intersecting the first direction X, and the film 46 in the compliance region 49 may be displaced unevenly. There is.

In this modification, the support portion 152 extending in the first direction X is supported by a plurality of support points (cantilever beams 150), and the cantilever beams 150 are arranged at positions close to both ends of the support portions 152. .. When the cantilever beam 150 is arranged near both ends of the support portion 152, the support portion 152 is tilted in a direction intersecting the first direction X even if a force (moment) for rotating the support portion 152 is applied. It is difficult to displace in the direction orthogonal to the first direction X and the second direction Y, and the film 46 in the compliance region 49 tends to be uniformly displaced.

If the displacement of the film 46 in the compliance region 49 is not uniform, the film 46 in the compliance region 49 may not be properly displaced, and the pressure fluctuation in the manifold 100 may not be properly adjusted by the compliance region 49. In this modification, since the film 46 in the compliance region 49 is uniformly displaced, the compliance region 49 can reliably adjust the pressure fluctuation in the manifold 100.

(Modification 2)
FIG. 15 is a diagram corresponding to FIG. 3, and is a schematic plan view of the frame member according to the second modification.
As shown in FIG. 15, in the frame member 47B according to the present modification, the cantilever beam 150 and the support portion 152 provided at the tip 151 of the cantilever beam 150 are located inside the opening 48 in the first direction X. Multiple (three) are arranged along. On the other hand, in the frame member 47 according to the first embodiment, one cantilever beam 150 and one support portion 152 provided at the tip 151 of the cantilever beam 150 are arranged inside the opening 48.
This is the difference between this modification and the first embodiment.

In other words, in this modification, the support portion 152 according to the first embodiment is separated into a plurality of parts, and the cantilever beam 150 is connected to each of the plurality of separated support parts 152. Therefore, in this modification, the length of the support portion 152 (the dimension of the first direction X) is shorter than that of the first embodiment. As described above, the length of the support portion 152 differs between the present modification and the first embodiment.
Further, in this modification, the angle formed by the cantilever beam 150 and the first direction X is a right angle, and the angle formed by the cantilever beam 150 and the support portion 152 is a right angle. Further, the angle formed by the cantilever beam 150 and the first direction X is the same in the present modification and the first embodiment.

When the length of the support portion 152 provided at the tip 151 of the cantilever beam 150 is shortened, the rigidity of the support portion 152 is increased and the support portion 152 is less likely to be deformed as compared with the case where the length of the support portion 152 is long. .. When the support portion 152 is not easily deformed, the direction of the force acting from the support portion 152 on the film 46 and the cantilever beam 150 becomes uniform as compared with the case where the support portion 152 is easily deformed, and the film 46 and the cantilever beam 150 Will be displaced uniformly.

(Modification 3)
FIG. 16 is a diagram corresponding to FIG. 15, and is a schematic plan view of the frame member according to the third modification.
As shown in FIG. 16, in the frame member 47C according to the present modification, the angle formed by the cantilever beam 150 and the first direction X is an acute angle, and the angle formed by the cantilever beam 150 and the support portion 152 is an acute angle. Is. On the other hand, in the beam member 47B according to the second modification, the angle formed by the cantilever beam 150 and the first direction X is a right angle, and the angle formed by the cantilever beam 150 and the support portion 152 is a right angle.
This point is the difference between the present modification and the modification 2.

When the angle formed by the cantilever beam 150 and the support portion 152 is made an acute angle, the cantilever beam 150 can be made longer than in the case where the angle formed by the cantilever beam 150 and the support portion 152 is a right angle. When the cantilever beam 150 is lengthened, the cantilever beam 150 is easily bent (elastically deformed), and the function as a spring plate of the cantilever beam 150 can be enhanced.

In addition, in the present application, "a cantilever beam that protrudes from the edge of the opening in a direction intersecting the first direction and whose tip can be displaced" is added when the angle formed by the cantilever beam and the first direction is a right angle. This includes the case where the angle formed by the cantilever and the first direction is an acute angle (or an obtuse angle).

(Modification example 4)
FIG. 17 is a diagram corresponding to FIG. 15, and is a schematic plan view of the frame member according to the modified example 4.
As shown in FIG. 17, in the frame member 47D according to the present deformation, the support portion 152 is supported by a plurality of (two) support points (cantilever beams 150). That is, both ends of the support portion 152 are supported by the cantilever beam 150. In other words, in the frame member 47D according to the present modification, a plurality of cantilever beams 150 are arranged along the first direction X, and the support portions 152 are separated from each other by the arranged cantilever beams 150. ..
On the other hand, in the frame member 47B according to the second modification, the support portion 152 is supported by one support point (cantilever beam 150).
This point is the difference between the present modification and the modification 2.

When both ends of the support portion 152 are supported by the cantilever beam 150, the support portion 152 is difficult to rotate in the direction intersecting the first direction X even if a force (moment) for rotating the support portion 152 acts. (Difficult to tilt), the film 46 is displaced in a direction orthogonal to the first direction X and the second direction Y, and the film 46 in the compliance region 49 is likely to be uniformly displaced.

(Modification 5)
FIG. 18 is a diagram corresponding to FIG. 15, and is a schematic plan view of the frame member according to the modified example 5.
As shown in FIG. 18, in the frame member 47E according to the present modification, the dimension of the cantilever 150 in the first direction X (hereinafter referred to as the width of the cantilever 150) is from the edge of the opening 48 to the tip 151. It is getting shorter in the direction of going. That is, in this modified example, the width of the cantilever beam 150 is long on the edge side of the opening 48 and short on the tip 151 side. On the other hand, in the frame member 47B according to the second modification, the width of the cantilever beam 150 is the same in the direction from the edge of the opening 48 toward the tip 151.
This point is the difference between the present modification and the modification 2.

The tip 151 of the cantilever beam 150 is a free end and has the largest deflection. The edge side of the opening 48 of the cantilever 150 is a fixed end, which is the place where stress is most likely to be concentrated. The width of the cantilever 150 is shortened toward the portion where the deflection is the largest (the tip 151 of the cantilever 150), and toward the portion where the stress is most concentrated (the edge side of the opening 48 of the cantilever 150). Increasing the width of the cantilever 150 can alleviate stress concentration on the edge side of the opening 48 of the cantilever 150 without compromising the flexibility of the cantilever 150. Therefore, the durability of the cantilever beam 150 can be increased.

In this modification, the end of the cantilever beam 150 is a straight line in a plan view, and the side surface arranged at the end of the cantilever beam 150 is a flat surface, but the present invention is not limited to this. For example, the end of the cantilever beam 150 may be curved in a plan view, and the side surface arranged at the end of the cantilever beam 150 may be a curved surface (convex curved surface, concave curved surface).
Further, this modification is applicable to the first embodiment, the first modification, and the fourth modification.

(Modification 6)
The printer 1000 of the second embodiment may have a configuration including a recording head to which the frame member according to the modified examples 1 to 5 is applied, in addition to the configuration including the recording head II according to the first embodiment.

II ... Recording head, 10 ... Flow path forming substrate, 11 ... Head body, 12 ... Pressure generating chamber, 15 ... Communication plate, 16 ... Nozzle communication path, 17 ... First manifold part, 18 ... Second manifold part, 19 ... Common passage, 20 ... nozzle plate, 20a ... liquid injection surface, 21 ... nozzle, 30 ... protective substrate, 31 ... holding part, 32 ... through hole, 40 ... case member, 41 ... recess, 42 ... third manifold part, 43 ... Connection port, 44 ... Introduction path, 45 ... Compliance board, 45a ... First exposed opening, 46 ... Film, 46a ... Adhesive layer, 47 ... Frame member, 47a ... Main body, 48 ... Opening, 49 ... Compliance area , 50 ... Vibrating plate, 51 ... Elastic film, 52 ... Insulator film, 60 ... First electrode, 70 ... Piezoelectric layer, 80 ... Second electrode, 90 ... Lead electrode, 100 ... Manifold, 120 ... Drive circuit, 121 ... Wiring board, 130 ... Cover head, 131 ... Compliance space, 132 ... Second exposed opening, 135 ... Adhesive layer, 150 ... Cantilever, 151 ... Tip, 152 ... Support, 300 ... Piezoelectric actuator.

Claims (10)

Nozzle opening to inject liquid and
A plurality of pressure generating chambers communicating with the nozzle opening and arranged side by side in the first direction,
A manifold that communicates with the plurality of pressure generating chambers
A flexible member that forms a part of the manifold and has flexibility.
A frame member fixed to the flexible member and having an opening that allows the flexible member to be displaced according to pressure fluctuations in the manifold.
Have,
The frame member
A cantilever beam protruding from the edge of the opening in a direction intersecting the first direction and having a displaceable tip.
A support portion provided at the tip of the cantilever and fixed to the flexible member,
A liquid injection head characterized by being equipped with. The liquid injection head according to claim 1, wherein the support portion is fixed to at least a part of a portion where the flexible member is most displaced. The liquid injection head according to claim 1 or 2, wherein the support portion passes through the center of the opening and extends in the first direction. The liquid injection head according to any one of claims 1 to 3, wherein a plurality of the cantilever beams are arranged along the first direction. The liquid injection head according to claim 4, wherein the support portion is separated by each of the plurality of cantilever beams arranged. The liquid injection head according to any one of claims 1 to 5, wherein the cantilever is at least partially thinner than the support portion. The liquid injection head according to any one of claims 1 to 6, wherein the dimension of the cantilever beam in the first direction is shortened in a direction from the edge of the opening toward the tip end. .. The liquid injection head according to any one of claims 1 to 7, wherein the cantilever is thinned in a direction from the edge of the opening toward the tip. It has a lid member arranged so as to form a space with the flexible member, and has a lid member.
The frame member is arranged between the flexible member and the lid member, and is arranged.
The liquid injection head according to any one of claims 1 to 8, wherein the cantilever beam and the support portion are not fixed to the lid member and can be displaced with respect to the lid member. A liquid injection device comprising the liquid injection head according to any one of claims 1 to 9.

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