JP7302197B2 - Liquid ejecting head and liquid ejecting device - Google Patents

Description

The present invention relates to technology for ejecting liquid such as ink.

2. Description of the Related Art Conventionally, a liquid ejecting head that ejects liquid such as ink from a plurality of nozzles has been proposed. For example, Patent Literature 1 discloses an inkjet head including a flow path substrate formed with individual liquid chambers that communicate with nozzles that eject ink and are separated by liquid chamber partition walls. Ink is ejected from a nozzle communicating with the individual liquid chamber by varying the pressure in the individual liquid chamber with a piezoelectric element.

Japanese Unexamined Patent Application Publication No. 2012-61750

However, in the technique of Patent Document 1, the liquid chamber partition is deformed due to fluctuations in the pressure in the individual liquid chambers, and the pressures of the adjacent individual liquid chambers with the liquid chamber partition interposed therebetween fluctuate (hereinafter referred to as "crosstalk"). ) occurs. Therefore, an error occurs in ejection characteristics such as the ejection amount or ejection speed of the ink.

In order to solve the above problems, a liquid jet head according to a preferred aspect of the present invention provides a first pressure chamber communicating with a first nozzle that ejects liquid, and a second pressure chamber that communicates with a second nozzle that ejects liquid. a pressure chamber, a first wall separating the first pressure chamber and the second pressure chamber, a first drive element for varying the pressure in the first pressure chamber, and a pressure in the second pressure chamber. a second driving element to be varied; a protective substrate disposed on a side of the jetting portion opposite to the first nozzle and the second nozzle; and a surface of the protective substrate on the side of the jetting portion. and a support portion formed from the injection portion to the injection portion, wherein the support portion overlaps the first wall portion in a plan view seen from a direction perpendicular to the protective substrate, and the surface of the injection portion of the support portion is larger than the width of the first wall.

1 is a configuration diagram of a liquid ejecting apparatus according to a first embodiment; FIG. 2 is an exploded perspective view of the liquid jet head; FIG. 2 is a cross-sectional view of a liquid jet head; FIG. FIG. 4 is a sectional view taken along line IV-IV in FIG. 3; 8 is a cross-sectional view of the liquid jet head in another aspect of the first embodiment; FIG. FIG. 5 is a cross-sectional view of a liquid jet head according to a second embodiment; FIG. 11 is a cross-sectional view of a liquid jet head according to a third embodiment; FIG. 11 is a cross-sectional view of a liquid jet head according to a fourth embodiment; FIG. 11 is a waveform diagram of reference voltages and drive waveforms according to the fifth embodiment; FIG. 11 is a plan view of a plurality of liquid jet heads according to a sixth embodiment; FIG. 14 is a plan view of a plurality of liquid jet heads according to a seventh embodiment;

<First embodiment>
FIG. 1 is a configuration diagram illustrating a liquid ejecting apparatus 100 according to a preferred embodiment of the invention. The liquid ejecting apparatus 100 of the present embodiment is an inkjet printing apparatus that ejects ink, which is an example of liquid, onto a medium (ejection target) 12 . The medium 12 is typically printing paper, but any material, such as resin film or cloth, can be used as the medium 12 to be printed. As illustrated in FIG. 1, a liquid container 14 that stores ink is installed in the liquid ejecting apparatus 100 . For example, a cartridge detachable from the liquid ejecting apparatus 100, a bag-shaped ink pack made of a flexible film, or an ink tank capable of replenishing ink is used as the liquid container 14. FIG.

As illustrated in FIG. 1, the liquid ejecting apparatus 100 includes a control unit 20, a transport mechanism 22, a moving mechanism 24, and a liquid ejecting head . The control unit 20 includes a processing circuit such as a CPU (Central Processing Unit) or FPGA (Field Programmable Gate Array) and a memory circuit such as a semiconductor memory, and controls each element of the liquid ejecting apparatus 100 in an integrated manner. The transport mechanism 22 transports the medium 12 in the Y direction under the control of the control unit 20 .

The moving mechanism 24 reciprocates the liquid jet head 26 in the X direction under the control of the control unit 20 . The X direction is the direction perpendicular to the Y direction in which the medium 12 is transported. Typically, the direction perpendicular to the Y direction is the X direction. The moving mechanism 24 of the first embodiment includes a substantially box-shaped carrier 242 that houses the liquid jet head 26, and a carrier belt 244 to which the carrier 242 is fixed. A configuration in which a plurality of liquid jet heads 26 are mounted on the carrier 242 or a configuration in which the liquid container 14 is mounted on the carrier 242 together with the liquid jet heads 26 may also be employed.

The liquid ejecting head 26 ejects ink supplied from the liquid container 14 onto the medium 12 from a plurality of nozzles under the control of the control unit 20 . A desired image is formed on the surface of the medium 12 by ejecting ink onto the medium 12 from each liquid jet head 26 in parallel with the transport of the medium 12 by the transport mechanism 22 and the repetitive reciprocation of the transport body 242 . .

2 is an exploded perspective view of the liquid jet head 26, and FIG. 3 is a cross-sectional view taken along line III-III in FIG. As illustrated in FIG. 2, the direction perpendicular to the XY plane is hereinafter referred to as the Z direction. The direction in which ink is ejected by each liquid ejecting head 26 corresponds to the Z direction. The vertical direction is typically the Z direction. The XY plane is, for example, a plane parallel to the surface of medium 12 .

As illustrated in FIGS. 2 and 3, the liquid jet head 26 includes a jet portion 40 that jets the liquid from the nozzles N. As shown in FIGS. The injection unit 40 includes a channel substrate 32 , a pressure chamber substrate 34 , a vibration plate 36 , a plurality of piezoelectric elements 38 , a nozzle plate 46 and a vibration absorber 48 . The channel substrate 32 is a substantially rectangular plate member elongated in the Y direction. A pressure chamber substrate 34 , a vibration plate 36 , a plurality of piezoelectric elements 38 , a housing portion 42 , and a protection substrate 44 are installed on the surface of the channel substrate 32 on the negative side in the Z direction. On the other hand, is installed on the positive side surface in the Z direction of the channel substrate 32 . Each element of the liquid jet head 26 is roughly a plate-shaped member elongated in the Y direction similarly to the channel substrate 32, and is joined to each other using an adhesive, for example.

As illustrated in FIG. 2, the nozzle plate 46 is a plate-like member formed with a plurality of nozzles N arranged in the Y direction. Each nozzle N is a through hole through which ink passes. The channel substrate 32, the pressure chamber substrate 34, and the nozzle plate 46 are formed by processing, for example, a silicon (Si) single crystal substrate by semiconductor manufacturing techniques such as etching. However, the material and manufacturing method of each element of the liquid jet head 26 are arbitrary. The Y direction can also be rephrased as the direction in which the plurality of nozzles N are arranged.

The channel substrate 32 is a plate-like member for forming an ink channel. As illustrated in FIGS. 2 and 3 , the channel substrate 32 is formed with an opening 322 , a supply channel 324 and a communication channel 326 . The opening 322 is a through hole that is elongated along the Y direction in a plan view from the Z direction so as to extend continuously over the plurality of nozzles N. As shown in FIG. On the other hand, the supply channel 324 and the communication channel 326 are through holes individually formed for each nozzle N, and communicate the nozzle N and the pressure chamber C with each other. Further, as illustrated in FIG. 3 , a relay channel 328 extending over a plurality of supply channels 324 is formed on the surface of the channel substrate 32 on the positive side in the Z direction. The relay channel 328 is a channel that allows the opening 322 and the plurality of supply channels 324 to communicate with each other.

The housing part 42 is a structure manufactured by, for example, injection molding of a resin material, and is fixed to the surface of the channel substrate 32 on the negative side in the Z direction. As illustrated in FIG. 3 , housing portion 422 and introduction port 424 are formed in housing portion 42 . The accommodating portion 422 is a concave portion having an outer shape corresponding to the opening portion 322 of the channel substrate 32 , and the introduction port 424 is a through hole communicating with the accommodating portion 422 . As can be understood from FIG. 3, the space in which the opening portion 322 of the flow path substrate 32 and the housing portion 422 of the housing portion 42 are communicated with each other functions as a liquid storage chamber (reservoir) R. Ink supplied from the liquid container 14 and passed through the inlet 424 is stored in the liquid storage chamber R. As shown in FIG.

The vibration absorber 48 is an element for absorbing pressure fluctuations in the liquid storage chamber R, and includes, for example, an elastically deformable flexible sheet member (compliance substrate). Specifically, the flow path substrate 32 is moved in the Z direction so that the opening 322, the relay flow path 328, and the plurality of supply flow paths 324 of the flow path substrate 32 are closed to form the bottom surface of the liquid storage chamber R. A vibration absorber 48 is installed on the positive surface of .

2 and 3, the pressure chamber substrate 34 is a plate-like member in which a plurality of pressure chambers C corresponding to different nozzles N are formed. A plurality of pressure chambers C are arranged along the Y direction. Each pressure chamber C (cavity) is an elongated opening along the X direction in plan view. The end of the pressure chamber C on the positive side in the X direction overlaps one supply channel 324 of the channel substrate 32 in plan view, and the end of the pressure chamber C on the negative side in the X direction overlaps the channel substrate in plan view. It overlaps one communicating channel 326 of 32 .

A vibration plate 36 is installed on the surface of the pressure chamber substrate 34 opposite to the flow path substrate 32 . The diaphragm 36 is an elastically deformable plate-like member. For example, the vibration plate 36 is configured by stacking a first layer made of silicon oxide (SiO ₂ ) and a second layer made of zirconium oxide (ZrO ₂ ).

As can be understood from FIG. 3, the channel substrate 32 and the vibration plate 36 are opposed to each other inside each pressure chamber C with a space therebetween. The pressure chamber C is located between the flow path substrate 32 and the vibration plate 36 and is a space for applying pressure to the ink filled in the pressure chamber C. As shown in FIG. The ink stored in the liquid storage chamber R branches from the relay flow path 328 to each supply flow path 324 and is supplied and filled in the plurality of pressure chambers C in parallel. The pressure chamber C communicates with the nozzle N through the channel substrate 32 . As understood from the above description, the diaphragm 36 constitutes a part of the wall surface of the pressure chamber C. As shown in FIG. Specifically, the diaphragm 36 constitutes the upper surface of the pressure chamber C. As shown in FIG.

As illustrated in FIGS. 2 and 3, a plurality of piezoelectric elements 38 corresponding to different nozzles N are provided on the surface of the vibration plate 36 opposite to the pressure chambers C (that is, the surface of the second vibration layer 362). is installed. Each piezoelectric element 38 is a drive element that changes the pressure in the pressure chamber C. As shown in FIG. Specifically, the piezoelectric element 38 is an actuator that deforms when a drive waveform is supplied, and is formed in a long shape along the X direction in plan view. The plurality of piezoelectric elements 38 are arranged in the Y direction so as to correspond to the plurality of pressure chambers C. As shown in FIG. When the vibration plate 36 vibrates in conjunction with the deformation of the piezoelectric element 38, the pressure in the pressure chamber C fluctuates. be done.

The protective substrate 44 in FIGS. 2 and 3 is a plate-shaped member that protects the plurality of piezoelectric elements 38 and reinforces the mechanical strength of the pressure chamber substrate 34 and diaphragm 36 . That is, the protective substrate 44 is installed on the side opposite to the plurality of nozzles N in the injection section 40 . A plurality of piezoelectric elements 38 are installed between the protective substrate 44 and the vibration plate 36 . The protective substrate 44 is made of silicon (Si), for example. In the first embodiment, the distance D between the protective substrate 44 and the diaphragm 36 is constant over the direction parallel to the diaphragm 36 (that is, the Y direction). A distance D between the protective substrate 44 and the vibration plate 36 is the distance from the surface of the protection substrate 44 on the ejection unit 40 side to the surface of the vibration plate 36 on the ejection unit 40 side.

As illustrated in FIG. 3, a wiring substrate 50 is bonded to the surface of the diaphragm 36, for example. The wiring board 50 is a mounting component formed with a plurality of wirings (not shown) for electrically connecting the control unit 20 or a power supply circuit (not shown) and the liquid jet head 26 . For example, a flexible wiring board 50 such as FPC (Flexible Printed Circuit) or FFC (Flexible Flat Cable) is preferably employed. As illustrated in FIG. 3 , the liquid jet head 26 has a drive circuit 62 mounted on the wiring board 50 . A drive circuit 62 supplies a voltage to each piezoelectric element 38 for driving the piezoelectric element 38 .

4 is a sectional view taken along line IV-IV in FIG. 3. FIG. As exemplified in FIG. 4, the piezoelectric element 38 is a thin-film type active element that is generally composed of a lamination of a first electrode 51, a piezoelectric layer 52, and a second electrode 53. As shown in FIG. In this specification, the expression "the element A and the element B are laminated" does not mean that the element A and the element B are in direct contact with each other. That is, a configuration in which another element C is interposed between the element A and the element B is also included in the concept of "the element A and the element B are laminated". Similarly, the expression "the element B is formed on the surface of the element A" is not limited to the configuration in which the element A and the element B are in direct contact with each other. That is, even in a configuration in which the element C is formed on the surface of the element A and the element B is formed on the surface of the element C, if at least a part of the element A and the element B overlap in plan view, the "element A is included in the concept that element B is formed on the face of .

A first electrode 51 is formed on the surface of the diaphragm 36 . The first electrodes 51 are individual electrodes formed separately for each piezoelectric element 38 . Specifically, a plurality of first electrodes 51 extending in the X direction are arranged in the Y direction at intervals. A drive waveform for controlling ejection of ink from the nozzle N corresponding to the piezoelectric element 38 is applied to the first electrode 51 of each piezoelectric element 38 via the wiring board 50 . The piezoelectric layer 52 is formed on the surface of the first electrode 51 using a ferroelectric piezoelectric material such as lead zirconate titanate. A second electrode 53 is formed on the surface of the piezoelectric layer 52 . Specifically, the second electrode 53 is a strip-shaped common electrode that extends in the Y direction so as to be continuous across the plurality of piezoelectric elements 38 . A predetermined reference voltage is applied to the second electrode 53 .

The piezoelectric layer 52 deforms according to the voltage difference between the drive waveform supplied to the first electrode 51 and the reference voltage applied to the second electrode 53 . That is, the portion where the first electrode 51 and the second electrode 53 face each other with the piezoelectric layer 52 interposed therebetween functions as the piezoelectric element 38 . A piezoelectric element 38 is formed for each pressure chamber C individually. Specifically, a plurality of piezoelectric elements 38 elongated in the X direction are arranged in the Y direction at intervals. The Y-direction dimension (ie width) of each piezoelectric element 38 is less than the Y-direction dimension of the pressure chamber C.

As exemplified in FIG. 4, the pressure chamber substrate 34 includes wall portions 341 separating pressure chambers C adjacent to each other. The wall 341 is an example of the first wall. In the first embodiment, the width W1 of the wall portion 341 is constant throughout the Z direction. The dimension of the wall portion 341 in the Y direction is the width W1 of the wall portion 341 .

The liquid ejecting head 26 includes a support portion 60 formed from the surface of the protective substrate 44 on the ejecting portion 40 side to the ejecting portion 40 . The surface of the support portion 60 on the side of the ejection portion 40 is bonded to the surface of the ejection portion 40 with an adhesive, for example. Specifically, the support portion 60 of the first embodiment contacts the surface of the second electrode 53 of the injection portion 40 . In the first embodiment, the support portion 60 and the protective substrate 44 are integrally formed of the same material.

The support portion 60 is formed so as to overlap the wall portion 341 in plan view as seen in the Z direction perpendicular to the protective substrate 44 . Specifically, a support portion 60 extending from the protective substrate 44 to the surface of the second electrode 53 of the piezoelectric element 38 is formed. That is, one end of the support portion 60 contacts the surface of the protective substrate 44 and the other end contacts the surface of the injection portion 40 . Specifically, the other end of the support portion 60 contacts the surface of the portion of the second electrode 53 where the piezoelectric layer 52 is not formed. As illustrated in FIG. 4 , the supporting portion 60 and the wall portion 341 face each other with the portion of the diaphragm 36 where the piezoelectric layer 52 is not formed sandwiched therebetween. A piezoelectric element 38 is installed between the support portions 60 adjacent to each other. The thermal conductivity of the support portion 60 is higher than that of the piezoelectric layer 52 . Therefore, for example, heat generated by the piezoelectric element 38 is dissipated through the support portion 60 .

In the first embodiment, the width W0 of the support portion 60 is constant throughout the Z direction. The dimension of the support portion 60 in the Y direction is the width W0 of the support portion 60 . As illustrated in FIG. 4, the width W0 of the support portion 60 is greater than the width W1 of the wall portion 341. As shown in FIG. When viewed from the Z direction, the wall portion 341 is positioned between the wall surface on one side in the Y direction and the wall surface on the other side of the support portion 60 .

The flow path substrate 32 has a wall portion 321 separating adjacent communication flow paths 326 . The wall 321 is an example of the second wall. A wall portion 321 is formed so as to overlap the wall portion 341 in a plan view as seen in the Z direction perpendicular to the protective substrate 44 . One end (negative end in the Z direction) of the wall portion 341 contacts the diaphragm 36 , and the other end (positive end in the Z direction) contacts the wall portion 321 . In the first embodiment, the width W2 of the wall portion 321 is constant throughout the Z direction. The dimension of the wall portion 321 in the Y direction is the width W2 of the wall portion 321 . As illustrated in FIG. 4, the width W2 of the wall portion 321 is greater than the width W1 of the wall portion 341. As shown in FIG. When viewed from the Z direction, the wall portion 341 is positioned between the wall surface on one side in the Y direction and the wall surface on the other side of the wall portion 321 . That is, in the first embodiment, the wall portion 341 entirely overlaps the support portion 60 and the wall portion 321 in plan view from the Z direction.

Arbitrary two pressure chambers C adjacent to each other are expressed as a first pressure chamber communicating with a first nozzle for ejecting liquid and a second pressure chamber communicating with a second nozzle for ejecting liquid. The two adjacent communication channels 326 are a first communication channel that communicates the first nozzle and the first pressure chamber, and a second communication channel that communicates the second nozzle and the second pressure chamber. is expressed as That is, the injection unit 40 of the first embodiment includes a first pressure chamber, a second pressure chamber, a first drive element that varies the pressure in the first pressure chamber, and a second drive element that varies the pressure in the second pressure chamber. a drive element, a wall portion 341 separating the first pressure chamber and the second pressure chamber, a first communication channel, a second communication channel, and between the first communication channel and the second communication channel is expressed as an element including a wall portion 321 separating the .

Here, in a configuration in which the support portion 60 is not present in the liquid jet head 26 (hereinafter referred to as “comparative example 1”), the wall portion 341 is deformed due to the pressure fluctuation in the pressure chamber C, and the wall portion 341 is adjacent to the wall portion 341 therebetween. Crosstalk occurs in the matching pressure chambers C. An error occurs in the injection characteristics due to the occurrence of crosstalk. On the other hand, in the first embodiment, the support portion 60 is formed so as to overlap the wall portion 341 in a plan view seen from the direction perpendicular to the protective substrate 44 , so that the support portion 60 can suppress the deformation of the wall portion 341 . That is, the wall portion 341 is supported by the support portion 60 . Therefore, compared with Comparative Example 1, the crosstalk generated between pressure chambers C adjacent to each other is reduced.

Especially in the first embodiment, since the width W0 of the support portion 60 is larger than the width W1 of the wall portion 341, the width W0 of the support portion 60 is smaller than the width W1 of the wall portion 341. The effect of suppressing deformation is remarkable. In addition, in the first embodiment, the wall portion 321 is formed so as to overlap the wall portion 341 in plan view when viewed in the Z direction perpendicular to the protective substrate 44 . and is suppressed by Therefore, the effect of reducing crosstalk is remarkable. Furthermore, since the width W2 of the wall portion 321 is larger than the width W1 of the wall portion 341, the effect of suppressing the deformation of the wall portion 341 is remarkable. However, the configuration in which the width W2 of the wall portion 321 is larger than the width W1 of the wall portion 341 is not essential.

Note that the support portion 60 may be formed separately from the protective substrate 44 as illustrated in FIG. For example, the support portion 60 is adhered to the injection portion 40 and the protective substrate 44 with an adhesive. The support portion 60 is made of metal, for example, and is harder than the protective substrate 44 . Specifically, the Young's modulus of the support portion 60 is greater than that of the protective substrate 44 . According to the above configuration, the effect of suppressing deformation of the wall portion 341 is remarkable. However, the support portion 60 may be softer than the protective substrate 44 . Alternatively, the support portion 60 may be formed of a photosensitive resin that is cured by being irradiated with light. According to the configuration in which the support portion 60 is formed from a photosensitive resin, the position of the support portion 60 with respect to the protective substrate 44 can be determined with high accuracy.

<Second embodiment>
A second embodiment will be described. It should be noted that, in each of the following illustrations, the reference numerals used in the description of the first embodiment are used for the elements whose functions are the same as those of the first embodiment, and detailed description of each will be omitted as appropriate.

FIG. 6 is a cross-sectional view of the liquid jet head 26 according to the second embodiment. Configurations other than the support portion 60 are the same as in the first embodiment. As illustrated in FIG. 6 , the support portion 60 of the second embodiment includes a first portion 61 and a second portion 62 . A first portion 61 is positioned on the ejection portion 40 side of the support portion 60 , and a second portion 62 is positioned on the protection substrate 44 side of the support portion 60 . The first portion 61 is a portion of the support portion 60 that contacts the surface of the injection portion 40 . The second portion 62 is a portion of the support portion 60 that contacts the surface of the protective substrate 44 . A first portion 61 is formed halfway from the surface of the injection portion 40 to the protective substrate 44 . Specifically, the ejection portion is arranged such that the height of the top surface of the first portion 61 with respect to the surface of the diaphragm 36 (that is, the position in the Z direction) is lower than the height of the top surface of the piezoelectric element 38 with respect to the surface of the diaphragm 36 . A first portion 61 is formed from the surface of 40 . On the other hand, a second portion 62 is formed from the surface of the first portion 61 to the surface of the protective substrate 44 . The width Wa of the first portion 61 is constant throughout the Z direction and is greater than the width W1 of the wall portion 341 . The width Wb of the second portion 62 is constant over the entire Z direction and is smaller than the width Wa of the first portion 61 . However, the size relationship between the width Wb of the second portion 62 and the width Wa of the wall portion 341 is arbitrary. For forming the first portion 61, a known film forming technique such as sputtering or plating is employed. The second portion 62 and the protective substrate 44 are integrally formed. Note that the second portion 62 and the protective substrate 44 may be formed separately.

The same effects as in the first embodiment are achieved in the second embodiment. For example, in a configuration in which the width Wa of the first portion 61 of the support portion 60 that contacts the surface of the injection portion 40 is smaller than the width W1 of the wall portion 341 (hereinafter referred to as “Comparative Example 2”), the wall portion 341 is sufficiently deformed. There is a problem that it is not possible to suppress In contrast, according to the configuration of the second embodiment, in which the width Wa of the first portion 61 of the support portion 60 that contacts the surface of the injection portion 40 is larger than the width W1 of the wall portion 341, compared with Comparative Example 2, Therefore, the deformation of the wall portion 341 can be sufficiently suppressed. Therefore, crosstalk can be reduced. As can be understood from the above description, from the viewpoint of reducing crosstalk, the width Wa of the first portion 61 of the support portion 60 that contacts the surface of the ejection portion 40 is larger than the width W1 of the wall portion 341. In this case, it is not essential that the width of the entire support portion 60 is larger than the width W1 of the wall portion 341. FIG.

<Third Embodiment>
FIG. 7 is a cross-sectional view of the liquid jet head 26 according to the third embodiment. As illustrated in FIG. 7, the support portion 60 of the third embodiment includes a first portion 61 and a second portion 62, like the second embodiment. However, in the third embodiment, the height of the upper surface of the first portion 61 with respect to the surface of the diaphragm 36 (that is, the position in the Z direction) is higher than the height of the upper surface of the piezoelectric element 38 with respect to the surface of the diaphragm 36. , a first portion 61 is formed from the surface of the injection portion 40 . The first portion 61 is formed separately from the second portion 62 and is joined to the surface of the injection portion 40 . The third embodiment also achieves the same effect as the second embodiment.

<Fourth Embodiment>
FIG. 8 is a cross-sectional view of the liquid jet head 26 according to the fourth embodiment. In the first embodiment, the configuration in which the distance between the protective substrate 44 and the diaphragm 36 is constant along the Y direction was exemplified, but in the second embodiment, the distance D between the protective substrate 44 and the diaphragm 36 Figure 2 illustrates a configuration that varies along a direction; The distance D increases with the distance from the support portion 60 along the Y direction. Specifically, the distance D is the smallest on the support portion 60 side and the largest at the central portion of the piezoelectric element 38 . For example, as illustrated in FIG. 8, the distance D increases along the curve from the support portion 60 side to the central portion of the piezoelectric element 38 . Therefore, between the support portions 60 adjacent to each other, the distance D is set so that the surface of the protective substrate 44 on the injection portion 40 side becomes an arc-shaped curved surface from one support portion 60 side to the other support portion 60 side. be done.

The fourth embodiment also achieves the same effect as the first embodiment. In the fourth embodiment, since the space D is larger at a position farther from the support part 60 along the Y direction, the support part 60 suppresses the deformation of the wall part 341 while ensuring a sufficient space for accommodating the piezoelectric element 38. can. If the distance D is set so as to increase with distance from the support portion 60 along the Y direction, the distance D increases stepwise from the support portion 60 side to the center portion of the piezoelectric element 38, for example. Alternatively, the distance D may be linearly increased from the support portion 60 to the central portion of the piezoelectric element 38 .

<Fifth Embodiment>
FIG. 9 is a waveform diagram of the drive waveform P supplied to the first electrode 51 of the piezoelectric element 38 and the reference voltage Va applied to the second electrode 53 of the piezoelectric element 38. As shown in FIG. As illustrated in FIG. 9, the drive waveform P is a waveform in which the voltage varies from a voltage Vb different from the reference voltage Va. Specifically, the drive waveform P includes a period during which the voltage is maintained at Vb and a period during which the voltage is maintained at Vc that varies from the voltage Vb. The reference voltage Va is an example of the first voltage, and the voltage Vb is an example of the second voltage. A drive waveform P and a reference voltage Va are supplied from a drive circuit 62 to each piezoelectric element 38 .

A voltage δV corresponding to the difference between the reference voltage Va and the voltage Vb is constantly applied between the first electrode 51 and the second electrode 53 of each piezoelectric element 38 . Due to the deformation of the piezoelectric element 38 due to the application of the voltage δV, the wall portion 341 is in a state where tensile or compressive stress is constantly applied. Therefore, compared to the configuration in which no voltage is applied to the piezoelectric elements 38 except when the driving waveform P is supplied, one of the two piezoelectric elements 38 adjacent to each other is supplied with the driving waveform P and the other is supplied with the driving waveform P. is not supplied, the wall portion 341 is likely to be deformed. That is, crosstalk is likely to occur. Therefore, the configuration in which deformation of the wall portion 341 is suppressed is particularly effective for the configuration of the fifth embodiment.

<Sixth embodiment>
A liquid ejecting apparatus 100 according to the sixth embodiment includes a plurality of liquid ejecting heads 26 . The configuration of each liquid jet head 26 is the same as that of each of the above-described embodiments. FIG. 10 is a plan view of a plurality of liquid jet heads 26 according to the sixth embodiment when viewed from the negative side in the Z direction. In the sixth embodiment, a plurality of liquid jet heads 26 are arranged along the X direction intersecting the Y direction in which the nozzles N of the liquid jet heads 26 are arranged. Each liquid ejecting head 26 has an ejecting surface S on which a plurality of nozzles N are formed. That is, the surface of the nozzle plate 46 opposite to the pressure chamber C is the ejection surface S.

As illustrated in FIG. 10, the liquid ejecting apparatus 100 of the sixth embodiment includes a wiping portion 80 that wipes off ink adhering to the ejection surface S. As shown in FIG. The wiping portion 80 is used for cleaning the liquid jet head 26 . For example, a rectangular plate-like member made of an elastic material is used as the wiping portion 80 . The wiping part 80 wipes the ink on the ejection surface S while in contact with the ejection surface S. As shown in FIG. The control unit 20 moves the wiping portion 80 in contact with the ejection surface S of the liquid ejection head 26 relative to the ejection surface S along the X direction. Therefore, the ink adhering to the entire ejection surface S is wiped off by the wiping portion 80 .

When the wiping part 80 wipes the ink on the ejection surface S, there is a possibility that the vibration plate 36 or the piezoelectric element 38 will deform due to the ejection surface S being pressed by the wiping part 80 . Since the support portion 60 is formed in the liquid jet head 26 of the sixth embodiment, deformation of the vibration plate 36 or the piezoelectric element 38 can be suppressed when the wiping portion 80 wipes ink from the ejection surface S. . Further, according to the configuration of the sixth embodiment in which the liquid ejecting apparatus 100 includes a plurality of liquid ejecting heads 26, the liquid ejecting apparatus 100 includes a single liquid ejecting head 26. As a result, there is an advantage that the strength of the liquid ejecting apparatus 100 is increased.

<Seventh Embodiment>
A liquid ejecting apparatus 100 of the seventh embodiment includes a plurality of liquid ejecting heads 26 as in the sixth embodiment. FIG. 11 is a plan view of a plurality of liquid jet heads 26 according to the seventh embodiment when viewed from the negative side in the Z direction. As illustrated in FIG. 11, the liquid ejecting apparatus 100 of the seventh embodiment includes a sealing body 91 and a pump 92. As shown in FIG. The sealing body 91 and the pump 92 are used for cleaning the liquid jet head 26 . The sealing body 91 seals the plurality of nozzles N of each liquid ejecting head 26 by coming into contact with the ejection surface S. As shown in FIG. For example, an elastic body that adheres to the ejection surface S is used as the sealing body 91 . The sealing body 91 contacts the ejection surface S so that the plurality of liquid ejection heads 26 are positioned inside the inner peripheral surface of the sealing body 91 . The pump 92 sucks the inside of the sealing body 91 . Specifically, the pump 92 sucks the ink inside the liquid ejection head 26 while the nozzles N of each liquid ejection head 26 are sealed by the sealing member 91 . Therefore, ink can be forcibly discharged from a plurality of nozzles N. FIG. In order to prevent the ink in the liquid ejecting head 26 from drying, the ejection surface S may be sealed with the sealing body 91 even in the standby state in which the liquid ejecting apparatus 100 stops printing.

In the operation of forcibly discharging the ink from the nozzles N by the sealing body 91 and the pump 92 , there is a possibility that the vibration plate 36 or the piezoelectric element 38 will be deformed due to the suction by the pump 92 . Since the support portion 60 is formed in the liquid jet head 26 of the seventh embodiment, deformation of the vibration plate 36 or the piezoelectric element 38 can be suppressed when ink is forcibly discharged.

<Modification>
Each form illustrated above can be variously modified. Specific modifications that can be applied to each of the above-described modes are exemplified below. In addition, two or more aspects arbitrarily selected from the following examples can be combined as appropriate within a mutually consistent range.

(1) In each of the embodiments described above, the configuration of the injection unit 40 is arbitrary. For example, a configuration including other elements different from the flow path substrate 32, the pressure chamber substrate 34, the vibration plate 36 and the piezoelectric element 38, or a configuration in which the flow path substrate 32 and the pressure chamber substrate 34 are integrated may be employed.

In each of the above-described embodiments, the first electrode 51 is an individual electrode and the second electrode 53 is a common electrode. The second electrode 53 may be an individual electrode for each piezoelectric element 38 . Also, both the first electrode 51 and the second electrode 53 may be individual electrodes. In a configuration in which the first electrode 51 is the common electrode and the second electrode 53 is the individual electrode, the support portion 60 contacts the surface of the first electrode 51 . Moreover, in the configuration in which both the first electrode 51 and the second electrode 53 are individual electrodes, the support portion 60 contacts the surface of the diaphragm 36 . As can be understood from the above description, the portion of the ejection portion 40 that the support portion 60 contacts can be appropriately changed according to the configuration of the ejection portion 40 .

(2) In each of the above-described embodiments, the shape of the support portion 60 is arbitrary as long as the width of the portion of the support portion 60 that contacts the injection portion 40 is greater than the width W1 of the wall portion 341 . For example, the shape may be such that the width W0 increases continuously or stepwise from the injection part 40 side to the protective substrate 44 side. A configuration is also adopted in which the width W0 of the portion of the support portion 60 other than the portion in contact with the injection portion 40 is smaller than the width W1 of the wall portion 341 .

(3) In the second and third embodiments, the support portion 60 is composed of the first portion 61 and the second portion 62. However, the support portion 60 includes elements different from the first portion 61 and the second portion 62 may contain.

(4) The drive element for ejecting the liquid (eg, ink) in the pressure chamber C from the nozzle N is not limited to the piezoelectric element 38 exemplified in each of the above embodiments. For example, it is possible to use, as the drive element, a heating element that generates bubbles in the pressure chamber C by heating to change the pressure. As understood from the above examples, the drive element is comprehensively expressed as an element that ejects the liquid in the pressure chamber C from the nozzle N (typically an element that applies pressure to the inside of the pressure chamber C), It does not matter what the operation method (piezoelectric method/thermal method) or the specific configuration is.

(5) In each of the above-described embodiments, the serial liquid ejecting apparatus 100 reciprocating the carrier 242 on which the liquid ejecting head 26 is mounted is exemplified. The present invention can also be applied to injection devices.

(6) The liquid ejecting apparatus 100 exemplified in each of the above embodiments can be employed in various types of equipment such as facsimile machines and copiers, in addition to equipment dedicated to printing. However, the application of the liquid ejecting apparatus of the present invention is not limited to printing. For example, a liquid ejecting apparatus that ejects a colorant solution is used as a manufacturing apparatus for forming a color filter of a liquid crystal display device. A liquid ejecting apparatus that ejects a solution of a conductive material is used as a manufacturing apparatus for forming wiring and electrodes of a wiring board.

DESCRIPTION OF SYMBOLS 100... Liquid ejecting apparatus 12... Medium 14... Liquid container 20... Control unit 22... Conveying mechanism 24... Moving mechanism 242... Conveying body 244... Conveying belt 26... Liquid ejecting head 32... Flow path Substrate 321 Wall 322 Opening 324 Supply channel 326 Communication channel 328 Relay channel 34 Pressure chamber substrate 341 Wall 36 Diaphragm 362 Vibration layer , 38... Piezoelectric element, 40... Ejecting part, 42... Housing part, 422... Accommodating part, 424... Introduction port, 44... Protection board, 46... Nozzle plate, 48... Vibration absorber, 50... Wiring board, 51... Third 1 electrode 52 piezoelectric layer 53 second electrode 60 support portion 80 wiping portion 91 sealing body 92 pump.

Claims (10)

a first pressure chamber communicating with a first nozzle that injects liquid;
a second pressure chamber communicating with a second nozzle that injects liquid;
a first wall separating the first pressure chamber and the second pressure chamber;
a first drive element for varying the pressure in the first pressure chamber;
an injection portion including a second drive element that varies the pressure of the second pressure chamber;
a protective substrate installed on the opposite side of the injection part to the first nozzle and the second nozzle;
a support portion formed from the surface of the protective substrate on the side of the injection portion to the injection portion;
The support portion overlaps the first wall portion in a plan view seen in a direction perpendicular to the protective substrate, and the width of a portion of the support portion that contacts the surface of the ejection portion is equal to the width of the first wall portion. larger than
The liquid ejecting head, wherein the supporting portion has a Young's modulus larger than that of the protective substrate. a first pressure chamber communicating with a first nozzle that injects liquid;
a second pressure chamber communicating with a second nozzle that injects liquid;
a first wall separating the first pressure chamber and the second pressure chamber;
a first drive element for varying the pressure in the first pressure chamber;
an injection portion including a second drive element that varies the pressure of the second pressure chamber;
a protective substrate installed on the opposite side of the injection part to the first nozzle and the second nozzle;
a support portion formed from the surface of the protective substrate on the side of the injection portion to the injection portion;
The support portion overlaps the first wall portion in a plan view seen in a direction perpendicular to the protective substrate, and the width of a portion of the support portion that contacts the surface of the ejection portion is equal to the width of the first wall portion. larger than
the injection unit includes a vibration plate forming part of the wall surfaces of the first pressure chamber and the second pressure chamber;
The distance between the protective substrate and the vibration plate is larger at a position farther from the support portion along the direction parallel to the vibration plate, the liquid jet head. a first pressure chamber communicating with a first nozzle that injects liquid;
a second pressure chamber communicating with a second nozzle that injects liquid;
a first wall separating the first pressure chamber and the second pressure chamber;
a first drive element for varying the pressure in the first pressure chamber;
an injection portion including a second drive element that varies the pressure of the second pressure chamber;
a protective substrate installed on the opposite side of the injection part to the first nozzle and the second nozzle;
a support portion formed from the surface of the protective substrate on the side of the injection portion to the injection portion;
The support portion overlaps the first wall portion in a plan view seen in a direction perpendicular to the protective substrate, and the width of a portion of the support portion that contacts the surface of the ejection portion is equal to the width of the first wall portion. larger than
The first driving element and the second driving element are thin-film piezoelectric elements in which a first electrode, a piezoelectric layer, and a second electrode are laminated,
The liquid ejecting head, wherein the supporting portion has a higher thermal conductivity than the piezoelectric layer. The injection part is
a first communication channel communicating between the first nozzle and the first pressure chamber;
a second communication channel communicating between the second nozzle and the second pressure chamber;
a second wall separating the first communication channel and the second communication channel;
The second wall portion overlaps the first wall portion in a plan view seen in a direction perpendicular to the protective substrate, and the width of a portion of the second wall portion that contacts the ejection portion is the width of the wall portion. 4. The liquid jet head according to any one of claims 1 to 3. The first driving element and the second driving element are thin-film piezoelectric elements in which a first electrode, a piezoelectric layer, and a second electrode are laminated,
A first voltage is supplied to one of the first electrode and the second electrode,
5 . The liquid jet head according to claim 1 , wherein the other of the first electrode and the second electrode is supplied with a drive waveform whose voltage varies from a second voltage different from the first voltage. The liquid jet head according to any one of claims 1 to 5, wherein the support portion is made of a photosensitive resin. one or more liquid jet heads according to any one of claims 1 to 6;
A liquid ejecting apparatus comprising: a driving circuit that drives the liquid ejecting head. the liquid ejecting head has an ejection surface on which the first nozzle and the second nozzle are formed;
8. The liquid ejecting apparatus according to claim 7, further comprising a wiping portion that wipes off the liquid adhering to the ejection surface. the liquid ejecting head has an ejection surface on which the first nozzle and the second nozzle are formed;
a sealing body that seals the first nozzle and the second nozzle by coming into contact with the ejection surface;
8. The liquid ejecting apparatus according to claim 7, further comprising a pump for sucking the inside of said sealing body. the one or more liquid jet heads are a plurality of liquid jet heads,
10. The liquid ejecting apparatus according to any one of claims 7 to 9, wherein the plurality of liquid ejecting heads are arranged side by side along a direction intersecting the direction in which the first nozzles and the second nozzles are arranged.

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