JP2018087822A5 - - Google Patents

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Publication number
JP2018087822A5
JP2018087822A5 JP2018018410A JP2018018410A JP2018087822A5 JP 2018087822 A5 JP2018087822 A5 JP 2018087822A5 JP 2018018410 A JP2018018410 A JP 2018018410A JP 2018018410 A JP2018018410 A JP 2018018410A JP 2018087822 A5 JP2018087822 A5 JP 2018087822A5
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JP
Japan
Prior art keywords
guide portion
surface plate
strut member
dimensional coordinate
coordinate measuring
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JP2018018410A
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Japanese (ja)
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JP6454952B2 (en
JP2018087822A (en
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Publication of JP2018087822A5 publication Critical patent/JP2018087822A5/ja
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Publication of JP6454952B2 publication Critical patent/JP6454952B2/en
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Claims (2)

上面に測定対象物を載置する定盤と、前記定盤を跨ぐように２つの支柱で支持された門型のＹキャリッジと、前記Ｙキャリッジから前記定盤側へ延びる測定プローブと、を備えた三次元座標測定装置において、
前記２つの支柱の一方の側にあり前記Ｙキャリッジを前記定盤に対してＹ軸方向に沿って移動させる駆動手段を備える第一の支柱部材と、前記第一の支柱部材に追従移動する第二の支柱部材を有し、
前記定盤の前記第一の支柱部材側には、前記Ｙ軸方向に平行なガイド部であって且つ前記定盤の一部からなるガイド部が形成され、
前記第一の支柱部材は、前記ガイド部の両側面であるガイド部側面と、前記ガイド部の上下面であるガイド部上下面と、を挟み込むことにより前記第一の支柱部材を前記定盤に支持させる上下両側面支持部を有する三次元座標測定装置。 A platen for placing the measured object on the upper surface, and Y carriage supported gantry with two posts so as to straddle the surface plate, and measuring probe before Symbol Y carriage extending in the platen side, and In the provided three-dimensional coordinate measuring device,
A first strut members Ru comprising a driving means for moving the Y carriage located on one side of the two posts along the Y-axis direction with respect to the surface plate, follow the movement to the first strut member Having a second strut member,
On the first column member side of the surface plate, a guide portion that is a guide portion parallel to the Y-axis direction and is formed of a part of the surface plate is formed,
The first strut member sandwiches the guide portion side surface, which is both side surfaces of the guide portion, and the guide portion upper and lower surfaces, which are upper and lower surfaces of the guide portion, so that the first strut member is placed on the surface plate. A three-dimensional coordinate measuring device having upper and lower side support portions to be supported . 前記ガイド部は、前記定盤の上面に溝入れして区分けされた前記定盤の前記第一の支柱部材側の一部分である請求項１に記載の三次元座標測定装置。2. The three-dimensional coordinate measuring apparatus according to claim 1, wherein the guide portion is a part of the surface plate on the first column member side that is divided into grooves on the upper surface of the surface plate.
JP2018018410A 2015-01-30 2018-02-05 3D coordinate measuring device Active JP6454952B2 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2015016243 2015-01-30
JP2015016243 2015-01-30

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP2016015852A Division JP6288477B2 (en) 2015-01-30 2016-01-29 3D coordinate measuring device

Related Child Applications (2)

Application Number Title Priority Date Filing Date
JP2018207342A Division JP2019035764A (en) 2015-01-30 2018-11-02 Three-dimensional coordinate measuring device
JP2018230748A Division JP2019035777A (en) 2015-01-30 2018-12-10 Three-dimensional coordinate measuring device

Publications (3)

Publication Number Publication Date
JP2018087822A JP2018087822A (en) 2018-06-07
JP2018087822A5 true JP2018087822A5 (en) 2018-10-18
JP6454952B2 JP6454952B2 (en) 2019-01-23

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ID=56686235

Family Applications (5)

Application Number Title Priority Date Filing Date
JP2016015852A Active JP6288477B2 (en) 2015-01-30 2016-01-29 3D coordinate measuring device
JP2018018410A Active JP6454952B2 (en) 2015-01-30 2018-02-05 3D coordinate measuring device
JP2018207342A Pending JP2019035764A (en) 2015-01-30 2018-11-02 Three-dimensional coordinate measuring device
JP2018230748A Pending JP2019035777A (en) 2015-01-30 2018-12-10 Three-dimensional coordinate measuring device
JP2019081046A Active JP6788208B2 (en) 2015-01-30 2019-04-22 3D coordinate measuring device

Family Applications Before (1)

Application Number Title Priority Date Filing Date
JP2016015852A Active JP6288477B2 (en) 2015-01-30 2016-01-29 3D coordinate measuring device

Family Applications After (3)

Application Number Title Priority Date Filing Date
JP2018207342A Pending JP2019035764A (en) 2015-01-30 2018-11-02 Three-dimensional coordinate measuring device
JP2018230748A Pending JP2019035777A (en) 2015-01-30 2018-12-10 Three-dimensional coordinate measuring device
JP2019081046A Active JP6788208B2 (en) 2015-01-30 2019-04-22 3D coordinate measuring device

Country Status (1)

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JP (5) JP6288477B2 (en)

Family Cites Families (19)

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JPS62167111U (en) * 1986-04-14 1987-10-23
JPS6435310A (en) * 1987-07-31 1989-02-06 Mitutoyo Corp Multidimensional measuring machine
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US4928396A (en) * 1989-03-07 1990-05-29 The Warner & Swasey Company Coordinate measuring machine with improved carriage drive system
JP2776427B2 (en) * 1992-05-14 1998-07-16 株式会社東京精密 Coordinate measuring machine
JPH07139936A (en) * 1993-11-15 1995-06-02 Tokyo Seimitsu Co Ltd Coordinate measuring apparatus
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JPH1026203A (en) * 1996-07-12 1998-01-27 Mitsutoyo Corp Friction drive mechanism
DE19821372A1 (en) * 1998-05-13 1999-11-18 Zeiss Carl Fa Coordinate measuring appliance including movable scanner and mechanism with drives across which scanner travels to scan workpiece and with control unit and memory
JP4722400B2 (en) * 2004-01-26 2011-07-13 株式会社ミツトヨ Guide rail support device, guide rail device, drive device and measuring machine
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JP2011135751A (en) * 2009-12-25 2011-07-07 Nikon Corp Drive device and measuring device
JP2012127851A (en) * 2010-12-16 2012-07-05 Nikon Corp Guide mechanism and three-dimensional measuring machine
JP2014056352A (en) * 2012-09-11 2014-03-27 Canon Inc Positioning device and measuring device
JP2014130091A (en) * 2012-12-28 2014-07-10 Canon Inc Measurement device and measurement method
JP2014238376A (en) * 2013-06-10 2014-12-18 キヤノン株式会社 Measuring device

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