JPS62167111U - - Google Patents
Info
- Publication number
- JPS62167111U JPS62167111U JP5465886U JP5465886U JPS62167111U JP S62167111 U JPS62167111 U JP S62167111U JP 5465886 U JP5465886 U JP 5465886U JP 5465886 U JP5465886 U JP 5465886U JP S62167111 U JPS62167111 U JP S62167111U
- Authority
- JP
- Japan
- Prior art keywords
- measuring device
- dimensional measuring
- attached
- part side
- fixed part
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Length Measuring Devices With Unspecified Measuring Means (AREA)
Description
第１図は本考案が適用される３次元測定装置の
正面図である。第２図は第１図における矢視図
である。第３図は第２図における矢視図である
。第４図は第３図における―線に沿つた断面
図である。
〔図面の主要部を表わす符号の説明〕、１……
３次元測定装置、５，７……摺動案内部、９……
メインキヤレツジ、１１，１３……摺動案内部材
、１５……Ｘ軸モータ、１９……セントラルキヤ
レツジ、２１……Ｙ軸モータ、２５……スピンド
ル、３１……Ｚ軸モータ、４１〜５１……エアパ
ツド。
FIG. 1 is a front view of a three-dimensional measuring device to which the present invention is applied. FIG. 2 is a view taken along the arrows in FIG. FIG. 3 is a view taken along the arrows in FIG. 2. FIG. 4 is a sectional view taken along the line - in FIG. 3. [Explanation of symbols representing main parts of drawings], 1...
Three-dimensional measuring device, 5, 7...Sliding guide section, 9...
Main carriage, 11, 13...Sliding guide member, 15...X-axis motor, 19...Central carriage, 21...Y-axis motor, 25...Spindle, 31...Z-axis motor, 41-51... ...Air pads.
Claims (1)
に対応した可動部側の面に適宜間隔をもつてエア
パツドを設け、前記摺動部の長手方向に沿つてリ
ニアモータの１次側あるいは２次側を固定部側あ
るいは可動部側の一方部に取付け、リニアモータ
の２次側あるいは１次側を他方部に取付けたこと
を特徴とする３次元測定装置の駆動装置。 Air pads are provided at appropriate intervals on the movable part side surface corresponding to the fixed part side surface of the sliding part of the three-dimensional measuring device, and the 1. A drive device for a three-dimensional measuring device, characterized in that a next side is attached to one of a fixed part side or a movable part side, and a secondary side or a primary side of a linear motor is attached to the other part.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5465886U JPS62167111U (en) | 1986-04-14 | 1986-04-14 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5465886U JPS62167111U (en) | 1986-04-14 | 1986-04-14 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62167111U true JPS62167111U (en) | 1987-10-23 |
Family
ID=30881848
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5465886U Pending JPS62167111U (en) | 1986-04-14 | 1986-04-14 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62167111U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2019035777A (en) * | 2015-01-30 | 2019-03-07 | 株式会社東京精密 | Three-dimensional coordinate measuring device |
-
1986
- 1986-04-14 JP JP5465886U patent/JPS62167111U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2019035777A (en) * | 2015-01-30 | 2019-03-07 | 株式会社東京精密 | Three-dimensional coordinate measuring device |