JPS62198710A - Three-dimensional measuring machine - Google Patents

Three-dimensional measuring machine

Info

Publication number
JPS62198710A
JPS62198710A JP4097486A JP4097486A JPS62198710A JP S62198710 A JPS62198710 A JP S62198710A JP 4097486 A JP4097486 A JP 4097486A JP 4097486 A JP4097486 A JP 4097486A JP S62198710 A JPS62198710 A JP S62198710A
Authority
JP
Japan
Prior art keywords
detecting
measurement
stationary
fitted
movable
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4097486A
Other languages
Japanese (ja)
Inventor
Kinji Takizawa
Koji Yoda
Eiichi Tsunoda
Original Assignee
Mitsutoyo Mfg Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsutoyo Mfg Corp filed Critical Mitsutoyo Mfg Corp
Priority to JP4097486A priority Critical patent/JPS62198710A/en
Publication of JPS62198710A publication Critical patent/JPS62198710A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To obtain a measuring machine which secure high-accuracy measurement while facilitating it handling and reducing its size by coupling a moving mechanism and a driving device with each other under a non-contact state.
CONSTITUTION: An object of measurement fitted to a mount table 1 and a detecting element 4 supported on the moving mechanism are moved in three dimensions and the quantity of relative movement displacement between the detecting element 4 and object of measurement is processed to measure the size, etc., of the body of measurement. This mechanism 3 consists of a fixed member 100 and movable structure 200 which is guided lengthwise movably and supports the detecting element 4. Then, a stationary body 41 is fitted to the member 100 lengthwise and movable body 42 corresponding to the stationary body 41 is fitted to the structure 200. Then, the linear motor 40 consisting of the stationary body 41 and movable body 42 is controlled by a linear motor driving device to move the object of measurement and detecting element 4 relatively. Thus, the motor movement of the detecting element 4 is performed under a non-contact state.
COPYRIGHT: (C)1987,JPO&Japio
JP4097486A 1986-02-26 1986-02-26 Three-dimensional measuring machine Pending JPS62198710A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4097486A JPS62198710A (en) 1986-02-26 1986-02-26 Three-dimensional measuring machine

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4097486A JPS62198710A (en) 1986-02-26 1986-02-26 Three-dimensional measuring machine

Publications (1)

Publication Number Publication Date
JPS62198710A true JPS62198710A (en) 1987-09-02

Family

ID=12595417

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4097486A Pending JPS62198710A (en) 1986-02-26 1986-02-26 Three-dimensional measuring machine

Country Status (1)

Country Link
JP (1) JPS62198710A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02140408U (en) * 1989-04-27 1990-11-26
JP2014206416A (en) * 2013-04-11 2014-10-30 株式会社東京精密 Measuring machine, and movable guide mechanism of the same
JP2019035777A (en) * 2015-01-30 2019-03-07 株式会社東京精密 Three-dimensional coordinate measuring device

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02140408U (en) * 1989-04-27 1990-11-26
JP2014206416A (en) * 2013-04-11 2014-10-30 株式会社東京精密 Measuring machine, and movable guide mechanism of the same
JP2019035777A (en) * 2015-01-30 2019-03-07 株式会社東京精密 Three-dimensional coordinate measuring device

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