JP2018081201A5

JP2018081201A5 -

Info

Publication number: JP2018081201A5
Application number: JP2016223347A
Authority: JP
Filing date: 2016-11-16
Publication date: 2019-12-12
Anticipated expiration: 2036-11-16

Description

本発明の一側面によれば、光を反射する反射面および該反射面の反対側の裏面を有するミラーと、前記ミラーの前記裏面と対向する第１面と該第１面の反対側の第２面を有するベースと、前記ミラーと前記ベースとの間に設けられ前記裏面に力を加えて前記反射面を変形させるアクチュエータと、前記ミラーおよび前記ベースを収容するチャンバであって、前記ミラーより前記反射面側の位置に形成された給気口と、前記ベースより前記第２面側の位置に形成された排気口とを備えるチャンバと、前記ミラーの前記反射面側の気体を、前記排気口へ誘引する誘引部材とを有することを特徴とする光学装置が提供される。 According to one aspect of the present invention, a mirror having a reflecting surface for reflecting light and a back surface opposite to the reflecting surface, a first surface facing the back surface of the mirror, and a first surface opposite to the first surface. a base having two surfaces, an actuator for deforming the reflecting surface by applying a force to the back surface is provided between the mirror and the base, a chamber housing said mirror and said base, prior Symbol mirror and air supply ports which are more formed on the position of the reflecting surface, a chamber and a prior SL base than the second surface of the formed exhaust port position, the gas in the reflecting surface of the mirror, There is provided an optical device comprising an attracting member that attracts the exhaust port .

Claims

A mirror having a reflective surface for reflecting light and a back surface opposite to the reflective surface;
A base having a first surface facing the back surface of the mirror and a second surface opposite to the first surface;
An actuator provided between the mirror and the base to deform the reflecting surface by applying a force to the back surface;
Wherein a mirror and chambers for housing the base and the air supply port formed from the previous SL mirrors the position of the reflecting surface, a front SL base than is formed at a position of the second surface side exhaust port a chamber equipped with a,
An attracting member for attracting the gas on the reflecting surface side of the mirror to the exhaust port;
An optical device comprising:

The attraction member attracts gas between the back surface and the first surface of the mirror to the exhaust port in addition to gas on the reflection surface side of the mirror. The optical device described.

The attractant member, the optical device according to claim 2, characterized in that you are forming the the orifice.

The attracting member is
A partition that is disposed on the reflecting surface side of the mirror and partitions in a direction crossing an optical path of light incident on the reflecting surface of the mirror, and has an opening for allowing light incident on the reflecting surface of the mirror to pass therethrough. A formed partition;
A plurality of plates which are disposed respectively along the side surface of the base,
Including
The optical device according to claim 3 , wherein the orifice is formed by partially closing a gap between the mirror and the partition wall with the plurality of plates.

They are respectively coupled to the partition wall extending along the sides of the base, the optical device according to claim 4, further comprising a plurality of support members for supporting the base.

A plurality of plates each disposed along a side surface of the base;
In addition to the gas on the reflecting surface side of the mirror, a nozzle for attracting the gas between the back surface and the first surface of the mirror to the exhaust port;
The optical device according to claim 1, comprising:

The gas on the reflection surface side of the mirror and the gas between the back surface and the first surface of the mirror are attracted to the exhaust port by the Coanda effect. Optical device.

The optical device according to claim 6, wherein the nozzle is disposed between the chamber and the plate.

Each of the attracting members is a plurality of plates disposed along a side surface of the base,
The optical device according to claim 1, wherein the base is provided with a through-hole penetrating the first surface and the second surface.

A projection optical system that projects an image of a pattern on which a mask is formed onto a substrate,
A projection optical system, characterized in that it comprises an optical device according to any one of claims 1 to 9.

An exposure apparatus for exposing a substrate,
An exposure apparatus comprising the projection optical system according to claim 10 .

Exposing the substrate using the exposure apparatus according to claim 11 ;
Developing the substrate exposed in the step ,
An article manufacturing method comprising manufacturing an article from the developed substrate .