JP2003114387A5

JP2003114387A5 -

Info

Publication number: JP2003114387A5
Application number: JP2001308754A
Authority: JP
Filing date: 2001-10-04
Publication date: 2005-08-18

Claims

A catadioptric optical system for forming an image of a first surface on a second surface,
A first optical system comprising at least one concave mirror and at least one optical path separating mirror, and forming an intermediate image of the first surface;
A second optical system that forms an image of the first surface on the second surface based on light from the intermediate image;
A pair of field mirrors having a concave mirror disposed in a space between the first surface and one of the concave mirrors for reflecting light to the second optical system. Refractive optical system.

A catadioptric optical system for forming an image of a first surface on a second surface,
A first lens group having a positive refractive power;
A second lens group disposed in an optical path between the first lens group and the second surface and having a negative refractive power;
A concave first mirror disposed in an optical path between the second lens group and the second surface;
A second mirror disposed in an optical path between the first mirror and the second surface and reflecting a light beam directed toward the first surface toward the second surface;
At least one pair of field mirrors disposed in an optical path between the second mirror and the second surface;
A third lens group disposed in the optical path between the field mirror pair and the second surface, including an aperture stop, and having a positive refractive power;
With
The field mirror pair has a concave mirror disposed in a space between the first surface and the first mirror and reflecting light toward the third lens group. Optical system.

3. The catadioptric optical system according to claim 1, wherein all of the optical members constituting the catadioptric optical system are arranged on a single optical axis.

4. The image according to claim 1, wherein the image is formed in a region off the optical axis on the second surface and on the first surface. The catadioptric optical system according to item.

The catadioptric optical system according to claim 1, wherein a reduced image of the first surface is formed on the second surface.

The catadioptric optical system according to any one of claims 1 to 5, wherein each of the mirrors constituting the field mirror pair has a planar or concave shape.

The catadioptric optical system according to any one of claims 1 to 6, wherein the refractive optical material is made of fluorite.

8. The reflection according to claim 1, wherein the image is formed in a region off the optical axis on the second surface and in a rectangular or arcuate region. Refractive optical system.

Catadioptric according to any one of claims 1 to 8 for projecting into the first image of the arranged predetermined pattern on the surface disposed on the second surface a photosensitive substrate projection exposure apparatus, characterized in that it comprises a system.

10. The projection exposure apparatus according to claim 9 , wherein the catadioptric optical system forms a rectangular or arcuate exposure region in a region off the optical axis on the second surface.

The projection exposure apparatus according to claim 9, further comprising means for moving the mask having the predetermined pattern and the photosensitive substrate synchronously.

An image of a predetermined pattern disposed on the first surface is transferred onto a photosensitive substrate disposed on the second surface via the catadioptric optical system according to any one of claims 1 to 8. A projection exposure method characterized by projecting.