JP2018079504A - Ultrasonic junction welding method and joint body - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an ultrasonic welding method which can avoid adhesion between an ultrasonic horn and a junction object material, suppress the deformation or the like of the ultrasonic horn, and reduce cost, and a joint body.SOLUTION: This method has a step of making a junction part of a first junction object material M1 face a junction part of a second junction object material M2 to be interposed between a first ultrasonic horn H1 and an anvil A1, a step of ultrasonically oscillating the first ultrasonic horn while being pressurized to form an agglutination core C on a boundary face 150 between the first junction object material face and a junction part of the second junction object material, a step of interposing the first junction object material and the second junction object material between a second ultrasonic horn H2 and the anvil in a state of temporary junction with the adhesion core, and a step of ultrasonically oscillating the second ultrasonic horn while being pressurized to perform permanent junction by enlarging a plastic fluid region 50 on the boundary face 150 between a junction part of the first junction object material and a junction part of the second junction object material.SELECTED DRAWING: Figure 2

Description

  The present invention relates to an ultrasonic bonding method and a bonded body.

  An ultrasonic bonding method is known as a bonding method for different materials.

  In the ultrasonic bonding method, ultrasonic vibration is applied to the stacked materials to be bonded, and one or both of the materials to be bonded are vibrated, and at that time, the frictional force generated between the materials to be bonded is caused to generate heat suddenly, thereby causing the members to be bonded. This is a joining method in which melting is performed locally.

  Specifically, the overlapped materials to be joined are sandwiched from above and below by an ultrasonic horn and an anvil, and the horn is reciprocated linearly by ultrasonic vibration while being pressed.

  As a result, impurities such as oxide film are removed by friction between the contact surfaces of the materials to be bonded, and the new surfaces of the bonding material come into contact with each other to form adhesion nuclei, and the bonding region expands from the adhesion nuclei. And solid phase bonded.

  By the way, in the ultrasonic bonding method, in order to efficiently transmit the vibration of the ultrasonic horn to the material to be bonded without causing slippage, a plurality of pyramidal projections or the like are provided on the pressure surface of the ultrasonic horn. An uneven portion is provided by forming it (see, for example, Patent Document 1).

JP 2014-213366 A

  However, in the conventional technology, for example, when the bonding material is made of aluminum (Al), Al is likely to adhere to the ultrasonic horn at the time of bonding. There was a possibility that the material to be adhered to the ultrasonic horn after bonding.

  In this way, when the material to be bonded is attached to the ultrasonic horn, it is necessary to use chemicals or the like to dissolve Al or the like, and there is a problem that the removal work is troublesome.

  Furthermore, it is necessary to prepare a spare ultrasonic horn in preparation for a case where a material to be bonded is attached to the ultrasonic horn, and there is a problem that the cost increases.

  The present invention has been made in view of the above circumstances, and an object of the present invention is to avoid the sticking between the ultrasonic horn and the material to be bonded, and to reduce the cost. Is to provide.

  In order to achieve the object, the ultrasonic bonding method according to claim 1, wherein a bonding portion of the first bonded material and a bonding portion of the second bonded material are opposed to each other, The step of sandwiching between the anvil and the first ultrasonic horn is pressurized and ultrasonically vibrated so that the interface between the bonded portion of the first bonded material and the bonded portion of the second bonded material is condensed. A step of forming nucleation, and a step of sandwiching the first material to be joined and the second material to be joined between the second ultrasonic horn and the anvil in a state of being temporarily joined by the adhesion nuclei. And ultrasonically vibrating the second ultrasonic horn while pressurizing the second ultrasonic horn to expand the plastic flow region at the interface between the bonded portion of the first bonded material and the bonded portion of the second bonded material. And a step of bonding.

  According to the ultrasonic bonding method of the first aspect, the first ultrasonic horn and the first bonded material or the second bonded material are in pressure contact only in the step of forming an adhesion nucleus at the interface. Therefore, sticking between the first ultrasonic horn and the first bonded material or the second bonded material can be effectively avoided. Therefore, the work of removing the material to be bonded attached to the ultrasonic horn as in the past becomes unnecessary, and it is necessary to prepare a spare ultrasonic horn in case the material to be bonded is attached to the ultrasonic horn. The cost can be reduced.

  Further, in a state of being temporarily bonded by the adhesion nucleus, the first bonded material and the second bonded material are sandwiched between the second ultrasonic horn and the anvil, and the second ultrasonic horn is pressurized. Since the plastic flow region is expanded at the interface between the bonded portion of the first bonded material and the bonded portion of the second bonded material by ultrasonic vibration, the bonding strength can be improved.

  In the ultrasonic bonding method according to a second aspect of the present invention, in the first aspect, the first ultrasonic horn has a plurality of pressurizing surfaces that are in contact with the first bonded material or the second bonded material. An uneven portion is formed.

  Thereby, the vibration of the first ultrasonic horn can be efficiently transmitted to the material to be joined without causing slippage, and the adhesion nucleus can be formed at the interface in a short time. Sticking between the ultrasonic horn and the first bonded material or the second bonded material can be effectively avoided.

  According to a third aspect of the present invention, in the ultrasonic bonding method according to the second aspect, the uneven portion is formed between a plurality of pyramidal or conical protrusions formed on the pressure surface and the protrusions. It consists of a valley part.

  Thereby, the concave and convex portions can be easily digged into the surface of the first ultrasonic horn and the first bonded material or the second bonded material, and adhesion nuclei are formed at the interface in a shorter time, Adhesion between the first ultrasonic horn and the first bonded material or the second bonded material can be avoided more effectively.

  According to a fourth aspect of the present invention, the ultrasonic bonding method according to the third aspect of the invention is characterized in that the direction of the tip of the protrusion is inclined in a predetermined direction.

  As a result, the uneven portion can be more securely bited into the surface of the first ultrasonic horn and the first or second material to be bonded, and an adhesion nucleus can be formed at the interface in a shorter time. The sticking between the first ultrasonic horn and the first bonded material or the second bonded material can be avoided more effectively.

  The ultrasonic bonding method according to claim 5 is the invention according to any one of claims 1 to 4, wherein the first bonded material or the second bonded material of the second ultrasonic horn The pressurizing surface in contact is configured such that a cross-sectional edge portion in a direction orthogonal to the vibration direction has a smooth curved portion.

  As a result, the second ultrasonic horn is pressurized and ultrasonically vibrated to enlarge the plastic flow region at the interface between the bonded portion of the first bonded material and the bonded portion of the second bonded material and perform the main bonding. In the process, it is possible to avoid a situation where the second ultrasonic horn and the first bonded material or the second bonded material stick.

  The ultrasonic bonding method according to a sixth aspect is the invention according to the fifth aspect, wherein the smooth curved portion is configured by a part of an arc or a part of an ellipse.

  Thereby, a smooth curve part can be formed comparatively easily and cost can be reduced.

  In the ultrasonic bonding method according to a seventh aspect, the first energy E1 applied to the first ultrasonic horn and the second energy are applied to the invention according to any one of the first to sixth aspects. The relationship with the second energy E2 applied to the ultrasonic horn is characterized by E1 <E2.

  Thereby, while applying relatively weak energy E1 to the first ultrasonic horn to more effectively avoid sticking between the first ultrasonic horn and the first bonded material or the second bonded material, By applying a large energy E2 with the second ultrasonic horn, the plastic flow region at the interface between the bonded portion of the first bonded material and the bonded portion of the second bonded material is more reliably expanded, and the bonding strength is increased. This can be further improved.

  The bonded body according to claim 8 is a bonded body bonded by the ultrasonic bonding method according to any one of claims 1 to 7, wherein the first bonded material or the second bonded material is bonded. On the surface of the bonding material, the portion where the first ultrasonic horn and the second ultrasonic horn are press-contacted is located on at least a part of the dot-shaped first indentation by the first ultrasonic horn. In addition, a linear second indentation formed by the second ultrasonic horn is formed so as to overlap.

  Thereby, the materials to be joined are adhered to each other by confirming by appearance whether or not the linear second indentation is formed on at least a part of the dot-like first indentation. It is possible to easily determine whether the state is temporarily joined by the nucleus or the state where the plastic flow region at the interface is enlarged and the state is finally joined.

  ADVANTAGE OF THE INVENTION According to this invention, the ultrasonic bonding method and bonded body which can avoid sticking with an ultrasonic horn and a to-be-joined material, and can reduce cost can be provided.

It is process drawing which shows the flow of the ultrasonic bonding process in the ultrasonic bonding method which concerns on this invention. It is typical explanatory drawing which shows the application order of the ultrasonic bonding machine to which the ultrasonic bonding method which concerns on this invention is applied. It is a schematic block diagram which shows schematic structure of the 1st ultrasonic bonding machine applied to the front | former stage process of the ultrasonic bonding method which concerns on this invention. It is sectional drawing (a)-(d) which shows the structural example of the 1st ultrasonic horn with which the 1st ultrasonic bonding machine applied to a front | former process is provided. It is a top view (a) and (b) which show the example of composition of the 1st ultrasonic horn with which the 1st ultrasonic bonding machine applied to the former process is provided. They are the side sectional view (a) and the AA line sectional view (b) which show the example of composition of the adhesion nucleus formed in the interface of the 1st joined material and the 2nd joined material in the former process. It is a schematic block diagram which shows schematic structure of the 2nd ultrasonic bonding machine applied to the latter process of the ultrasonic bonding method which concerns on this invention. It is a perspective view (a) and (b) which shows the example of composition of the 2nd ultrasonic horn with which the 2nd ultrasonic bonding machine applied to the latter process is provided. They are a side sectional view (a) and a BB line sectional view (b) which show the example of composition of the plastic flow field formed in the interface of the 1st joined material and the 2nd joined material in the latter process. Imaging diagrams (a) and (b) relating to the appearance of a comparative example of a joined body to which a general ultrasonic joining method is applied, and imaging views relating to the appearance of a joined body to which the ultrasonic joining method according to the present invention is applied (c) ).

  Hereinafter, the ultrasonic bonding method according to the present invention will be described with reference to FIGS.

(Overview of ultrasonic bonding process)
FIG. 1 is a process diagram showing a flow of an ultrasonic bonding process in the ultrasonic bonding method according to the present invention, and FIG. 2 shows an application order of ultrasonic bonding machines 1A and 1B to which the ultrasonic bonding method according to the present invention is applied. It is a schematic explanatory drawing shown.

  As shown in the process diagram of FIG. 1, the ultrasonic bonding process includes a pre-stage process (one-time process) including a first process S1 and a second process S2, a third process S3, and a fourth process S4. It is comprised by a back | latter stage process (double hitting process).

  First, as shown in FIGS. 1 and 2, in the first step S <b> 1 of the ultrasonic bonding method, the bonded portion of the first bonded material M <b> 1 composed of aluminum or the like and the second coated material also composed of aluminum or the like. The bonding part of the bonding material M2 is opposed to the first ultrasonic horn H1 and the anvil A1 included in the first ultrasonic bonding machine 1A and fixed. A configuration example of the first ultrasonic bonding machine 1A and the like will be described later.

  Next, in the second step S2 of the ultrasonic bonding method, the first ultrasonic horn H1 is ultrasonically vibrated in the direction D1 while being pressurized with the pressure F1, and the bonding portion of the first bonded material M1 and the second bonded material are bonded. An adhesion nucleus C is formed at the interface 150 with the joining portion of the material M2 (see FIG. 6). Thereby, the 1st to-be-joined material M1 and the 2nd to-be-joined material M2 will be in the state temporarily joined by the adhesion nucleus C. FIG.

  Next, as shown in FIGS. 1 and 2, in the third step S3 of the ultrasonic bonding method, the first bonded material M1 and the second bonded material M2 are temporarily bonded by the adhesion nucleus C. Is sandwiched and fixed between the second ultrasonic horn H2 and the anvil A1 provided in the second ultrasonic bonding machine 1B. A configuration example of the second ultrasonic bonding machine 1B and the like will be described later.

  Next, in the fourth step S4 of the ultrasonic bonding method, the second ultrasonic horn H2 is ultrasonically vibrated in the direction D1 while being pressurized with the pressure F2, and the bonded portion of the first bonded material M1 and the second bonded material are bonded. The plastic flow region 50 (see FIG. 9) is enlarged at the interface 150 between the joining portion of the material M2 and the main joining is performed to obtain a joined body 500 (see FIG. 10C).

  Details of the adhesion nucleus C, the plastic flow region 50, and the like will be described later.

  The relationship between the first energy E1 applied to the first ultrasonic horn H1 and the second energy E2 applied to the second ultrasonic horn H2 is E1 <E2.

  For example, the first energy E1 may be about 50J and the second energy E2 may be about 1200J. That is, the second energy E2 is preferably about 20 to 30 times the first energy E1.

  In the example shown in FIG. 2, the first material to be bonded M1 is on the upper side and the second material to be bonded M2 is on the lower side. However, the present invention is not limited to this. Good.

(About the first ultrasonic bonding machine)
With reference to FIGS. 3-6, the schematic structure etc. of the 1st ultrasonic bonding machine applied to the front | former process of the ultrasonic bonding method which concerns on this invention are demonstrated.

  Here, FIG. 3 is a schematic configuration diagram showing a schematic configuration of the first ultrasonic bonding machine 1A applied to the preceding step of the ultrasonic bonding method according to the present invention.

  A first ultrasonic bonding machine 1 </ b> A shown in FIG. 3 generally includes a power source 3, a vibrator 2, and an ultrasonic bonding machine main body 15.

  The power source 3 is an AC power source that drives the vibrator 2 that vibrates the first ultrasonic horn H <b> 1 included in the ultrasonic bonding machine main body 15.

  The ultrasonic bonding machine main body 15 includes a first ultrasonic horn H1 and an anvil A1.

  The first ultrasonic horn H1 is sandwiched between the first ultrasonic horn H1 and the anvil A1 in a state where the bonded portion of the first bonded material M1 and the bonded portion of the second bonded material M2 are opposed to each other. The ultrasonic vibration in the D1 direction generated by the vibrator 2 is propagated while applying pressure F1 to the interface 150 between the bonded portion of the first bonded material M1 and the bonded portion of the second bonded material M2. Nucleation C is formed (see FIG. 6).

  Thereby, the 1st to-be-joined material M1 and the 2nd to-be-joined material M2 will be in the state temporarily joined by the adhesion nucleus C. FIG.

(About the first ultrasonic horn)
Next, a configuration example of the first ultrasonic horn H1 will be described with reference to FIG. 4 and FIG.

  FIGS. 4A to 4D are cross-sectional views showing a configuration example of the first ultrasonic horns H1a to H1d included in the first ultrasonic bonding machine 1A, and FIGS. 5A and 5B are first views. It is a top view which shows the structural example of 1st ultrasonic horn H1a with which 1A of ultrasonic bonding machines 1A are provided.

  The first ultrasonic horn H1a according to the first configuration example shown in FIG. 4A and FIG. 5A has a plurality of pressure surfaces 60 in contact with the first bonded material M1 or the second bonded material M2. Concave and convex portions are formed.

  More specifically, the concavo-convex portion is formed between a plurality of (16 in the example shown in FIG. 5A) pyramidal or conical protrusions 10a formed on the pressing surface 60 and the protrusions 10a. It is comprised with the trough part 30a. Note that the tip of the protrusion 10a has a sharp shape.

  The first ultrasonic horn H1a is formed of an aluminum alloy, a titanium alloy, or the like according to the material of the first bonded material M1 and the second bonded material M2.

  Further, the direction (θ1) of the tip of the protrusion 10a of the first ultrasonic horn H1a is substantially perpendicular to the horizontal pressure surface 60.

  With such a configuration, the first ultrasonic horn H1a according to the first configuration example surely bites into the surface of the first material to be joined M1 to be pressed, and the ultrasonic vibration of the first ultrasonic horn H1a is the first. 1 Adhering nucleus C can be formed on the interface 150 in a short time by efficiently transmitting to the material to be joined M1 without slipping. Therefore, sticking between the first ultrasonic horn H1a and the first material to be joined M1 can be effectively avoided.

  In the first ultrasonic horn H1b according to the second configuration example shown in FIG. 4B and FIG. 5B, the concavo-convex portions are formed on the pressure surface 60 in a plurality (in the example shown in FIG. 5B). 16) pyramidal or conical projections 10b and valleys 30b formed between the projections 10b. In addition, the front-end | tip part of the projection part 10b is made into the chamfered shape.

  The first ultrasonic horn H1b is formed of an aluminum alloy, a titanium alloy, or the like according to the material of the first material to be bonded M1 and the second material to be bonded M2.

  Further, the direction (θ1) of the tip of the protrusion 10b of the first ultrasonic horn H1b is substantially perpendicular to the horizontal pressure surface 60.

  With such a configuration, the first ultrasonic horn H1b according to the second configuration example bites into the surface of the first material to be bonded M1 to be press-contacted, and the ultrasonic vibration of the first ultrasonic horn H1b is applied to the first ultrasonic horn H1b. It is possible to efficiently transmit the bonding material M1 to the bonding material M1 without causing slippage, and to form the adhesion nucleus C on the interface 150 in a short time. Therefore, sticking of the first ultrasonic horn H1b and the first material to be joined M1 can be effectively avoided.

  In the first ultrasonic horn H1c according to the third configuration example shown in FIG. 4C, the concavo-convex portion is formed between the plurality of pyramidal or conical protrusions 10c formed on the pressing surface 60 and the protrusions 10c. It is comprised with the trough part 30c formed. The tip of the protrusion 10c has a sharp shape, and the orientation (θ2) of the tip of each protrusion 10c has an angle of, for example, about 60 ° in the lower right direction with respect to the horizontal pressure surface 60. doing.

  The first ultrasonic horn H1c is formed of an aluminum alloy, a titanium alloy, or the like according to the material of the first material to be bonded M1 and the second material to be bonded M2.

  With such a configuration, the first ultrasonic horn H1c according to the first configuration example surely bites into the surface of the first material to be joined M1 to be pressed, and the ultrasonic vibration of the first ultrasonic horn H1c is the first. 1 Adhering nucleus C can be formed on the interface 150 in a short time by efficiently transmitting to the material to be joined M1 without slipping. Therefore, sticking of the first ultrasonic horn H1c and the first material to be joined M1 can be effectively avoided.

  In the first ultrasonic horn H1d according to the fourth configuration example shown in FIG. 4D, the concavo-convex portion has a plurality of pyramidal or conical protrusions 10d and 10e and a protrusion 10d formed on the pressing surface 60. 10d and the like, and the troughs 30d and 30e formed between 10e and the like.

  The tip portions of the protrusions 10d and 10e have a sharp shape, and the direction (θ3) of the tip of the protrusion 10d is, for example, about 60 ° in the lower right direction with respect to the horizontal pressure surface 60. The direction (θ4) of the tip of the protrusion 10e has an angle of about 60 °, for example, in the lower left direction with respect to the horizontal pressure surface 60.

  The first ultrasonic horn H1d is formed of an aluminum alloy, a titanium alloy, or the like according to the material of the first material to be bonded M1 and the second material to be bonded M2.

  With such a configuration, the first ultrasonic horn H1d according to the fourth configuration example surely bites into the surface of the first material to be joined M1 to be pressed, and the ultrasonic vibration of the first ultrasonic horn H1d is the first. 1 Adhering nucleus C can be formed on the interface 150 in a short time by efficiently transmitting to the material to be joined M1 without slipping. Therefore, sticking of the first ultrasonic horn H1d and the first material to be joined M1 can be effectively avoided.

  Further, according to the first ultrasonic horns H1a to H1d according to the first to fourth configuration examples, the work of removing the material to be bonded attached to the ultrasonic horn as in the prior art becomes unnecessary, and the ultrasonic horn H1a. It is not necessary to prepare a spare ultrasonic horn in preparation for a case where a material to be bonded is attached to ~ H1d, and the cost can be reduced.

  Here, with reference to FIG. 6, the structural example of the adhesion nucleus C formed of the 1st ultrasonic horn H1 (H1a-H1d) is demonstrated.

  FIG. 6A is a side cross-sectional view showing a configuration example of the adhesion nucleus C formed at the interface 150 between the first material to be bonded M1 and the second material to be bonded M2 in the previous step, and FIG. It is the AA sectional view taken on the line.

  As shown in FIG. 6B, the adhesion nucleus C formed at the interface 150 between the first material to be joined M1 and the second material to be joined M2 is shown in FIG. 5A or FIG. 5B, for example. Corresponding to the positions of the 16 vertical and horizontal pyramidal or conical protrusions 10a and 10b formed on the pressure surface 60 of the ultrasonic horns H1a and H1b, a total of 16 are formed vertically and horizontally.

  Of course, the number of adhesion nuclei C formed at the interface 150 can be increased or decreased by the number of protrusions 10a and the like of the first ultrasonic horn H1.

  Further, the size (capacity), depth (height), etc. of the adhesion nucleus C can be controlled by increasing / decreasing the amount of the first energy E1 applied to the first ultrasonic horn H1.

(About the second ultrasonic bonding machine)
With reference to FIG. 7, a schematic configuration of the second ultrasonic bonding machine 1B applied to the subsequent process of the ultrasonic bonding method according to the present invention will be briefly described.

  Since the entire configuration of the second ultrasonic bonding machine 1B is the same as that of the first ultrasonic bonding machine 1A, the same reference numerals are given and redundant description is omitted.

  The difference between the second ultrasonic bonding machine 1B and the first ultrasonic bonding machine 1A is that the ultrasonic bonding machine main body 15 includes a second ultrasonic horn H2 instead of the first ultrasonic horn H1. In the point.

  Then, in a state of being temporarily bonded by the adhesion nucleus C, the first bonded material M1 and the second bonded material M2 are sandwiched between the second ultrasonic horn H2 and the anvil A1, and the second ultrasonic wave The ultrasonic vibration in the direction D1 generated by the vibrator 2 is propagated while the horn H2 is pressurized with the pressure F2, and the interface 150 between the joining portion of the first joined material M1 and the joining portion of the second joined material M2 is propagated. , The material (Al or the like) constituting the first material to be joined M1 and the second material to be joined M2 is agitated by ultrasonic vibration to enlarge the plastic flow region (see FIG. 9) and perform the main joining.

  Thereby, the bonded body 500 (refer FIG.10 (c)) to which the ultrasonic bonding method which concerns on this invention is applied can be obtained.

(About the second ultrasonic horn)
Next, a configuration example of the second ultrasonic horn H2 will be described with reference to FIG.

  FIGS. 8A and 8B are perspective views illustrating a configuration example of the second ultrasonic horn H2 provided in the second ultrasonic bonding machine 1B applied to the subsequent process.

  The pressing surface 70 that contacts the first material to be bonded M1 of the second ultrasonic horn H2 is configured such that the cross-sectional edge in the direction orthogonal to the vibration direction D1 has a smooth curved portion 20.

  More specifically, the smooth curved portion 20 is configured by a part of an arc (for example, 200R) or a part of an ellipse.

  Here, in the 1st structural example shown to Fig.8 (a), it has one smooth curve part 20 extended in the longitudinal direction of the lower surface of 2nd ultrasonic horn H2a.

  In addition, the second configuration example shown in FIG. 8B has two smooth curved portions 20a and 20b extending in the longitudinal direction of the lower surface of the second ultrasonic horn H2b.

  In addition, it is not limited to the structural example shown to Fig.8 (a), (b), It is made to form the 3 or more smooth curve part extended in a longitudinal direction in the lower surface of the 2nd ultrasonic horn H2. Also good.

  FIG. 9A is a side sectional view showing a configuration example of the plastic flow region 50 formed at the interface 150 between the first material to be bonded M1 and the second material to be bonded M2 in the subsequent step, and FIG. FIG.

  As shown in FIG. 9B, a relatively wide plastic flow region 50a is formed substantially at the center of the interface 150 between the first material to be bonded M1 and the second material to be bonded M2.

  Or although illustration is abbreviate | omitted, it is estimated that the gradation-like plastic flow area | region 50 which becomes gradually thin toward the edge part from the center of the interface 150 may be formed.

  Thus, from the state temporarily bonded by the adhesion nucleus C, the second ultrasonic horn H2 is ultrasonically vibrated while being pressurized, and the bonded portion of the first bonded material M1 and the second bonded material M2 are bonded. Since the material (Al, etc.) constituting the first material to be joined M1 and the second material to be joined M2 is agitated by ultrasonic vibration at the interface 150 with the joining part, the plastic flow region 50 is expanded. Strength can be improved.

  In addition, since the pressing surface 70 of the second ultrasonic horn H1 has a curved portion 20 having a smooth cross-sectional edge in a direction orthogonal to the vibration direction D1, the plastic flow region 50 is enlarged at the interface 150 for main joining. In the process, it is possible to avoid a situation where the second ultrasonic horn H1 and the first material to be joined M1 stick.

  Further, since the smooth curved portion 20 can be constituted by a part of an arc or a part of an ellipse, it can be formed relatively easily and the cost can be reduced.

(Appearance characteristics of bonded body using ultrasonic bonding method)
With reference to FIG. 10, the external feature of the joined body which concerns on a comparative example, and the external feature of the joined body to which the ultrasonic bonding method which concerns on this invention is applied are demonstrated.

  FIGS. 10A and 10B are imaging diagrams according to the appearance of a comparative example of a joined body to which a general ultrasonic bonding method is applied, and FIG. 10C applies the ultrasonic bonding method according to the present invention. It is an image pick-up figure (c) concerning the appearance of a joined body.

  The comparative example shown in FIG. 10A uses the ultrasonic horn having a plurality of pyramidal or conical protrusions as shown in FIG. 4A, for example, and the first bonded material M1 and the second bonded material. An appearance of the first material to be joined M1 side when the material M2 is ultrasonically bonded once is shown.

  As can be seen from FIG. 10A, the dot-shaped indentation 200 of the ultrasonic horn having a plurality of pyramidal or conical protrusions remains on the surface of the first material to be joined M1.

  Further, in the comparative example shown in FIG. 10B, for example, an ultrasonic horn having one smooth curved portion extending in the longitudinal direction of the lower surface as shown in FIG. The appearance on the first material to be bonded M1 side when ultrasonic bonding of the second material to be bonded M2 is performed once is shown.

  As can be seen from FIG. 10B, a linear indentation 300 extending in the longitudinal direction of the first bonded material M1 remains on the surface of the first bonded material M1.

  On the other hand, FIG. 10C shows the appearance of a joined body 500 to which the ultrasonic joining method according to the present invention is applied.

  As can be seen from FIG. 10C, in the joined body 500 joined by the ultrasonic joining method according to the present invention, the first ultrasonic horn H1 and the second ultrasonic horn H1 are formed on the surface of the first material to be joined M1. At the portion where the ultrasonic horn H2 is pressed, the second linear horn H2 is formed on at least a part of the dot-shaped first indentation 200 formed by the first ultrasonic horn H1. The indentation 300 is formed to overlap.

  Accordingly, by confirming whether or not the linear second indentation 300 is formed on at least a part of the dot-shaped first indentation 200 by appearance, the materials to be joined M1 and M2 Whether the two are temporarily joined by the adhesion nucleus C that has undergone only the previous step (that is, the state shown in FIG. 10A) or until the subsequent step, the plastic flow region at the interface is expanded. It is possible to easily determine whether or not the main joining state is achieved.

  In addition, it is possible to distinguish from the state in which only the subsequent process is performed without passing through the previous process (that is, the state shown in FIG. 10B), and the two processes of the previous process → the subsequent process are not performed. It is possible to easily determine a bonding failure.

(Other)
When performing the ultrasonic bonding method according to the present invention, when performing ultrasonic bonding by the first ultrasonic horn H1 and ultrasonic bonding by the second ultrasonic horn H2, the first material M1 and the second material to be bonded are used. The bonding material M2 may be heated to a predetermined temperature.

  Further, the constituent material of the first material to be bonded M1 and the second material to be bonded M2 to which the ultrasonic bonding method according to the present invention is applied is not limited to Al, and Sn, Ag, Au, or the like may be used.

  In FIG. 2, the first-stage process is performed by the first ultrasonic bonding machine 1A including the first ultrasonic horn H1, and the second-stage process is performed by the second ultrasonic bonding machine 1B including the second ultrasonic horn H2. However, the present invention is not limited to this. For example, in the case of using an ultrasonic bonding machine in which the ultrasonic horn can be replaced, the first step is performed with the first ultrasonic horn H1, and then the first step is performed. It is also possible to replace the ultrasonic horn H2 with 2 and perform the subsequent process.

DESCRIPTION OF SYMBOLS 1A ... 1st ultrasonic bonding machine 1B ... 2nd ultrasonic bonding machine A1 ... Anvil H1 (H1a-H1d) ... 1st ultrasonic horn H2 (H2a, H2b) ... 2nd ultrasonic horn 2 ... Vibration Child 3 ... Power source 10 (10a to 10e) ... Projection 15 ... Ultrasonic bonding machine main body 20 ... Curve 50 (50a) ... Plastic flow region 150 ... Interface C ... Adhesion nucleus M1 ... First material to be joined M2 ... First 2 to-be-joined material 200 ... 1st impression 300 ... 2nd impression 500 ... joined body

Claims (8)

A step of facing the bonding portion of the first material to be bonded and the bonding portion of the second material to be bonded and sandwiching the first ultrasonic horn and the anvil;
A step of ultrasonically vibrating the first ultrasonic horn while pressurizing the first ultrasonic horn to form an adhesion nucleus at an interface between the bonding portion of the first bonded material and the bonding portion of the second bonded material;
A step of sandwiching the first material to be bonded and the second material to be bonded between the second ultrasonic horn and the anvil while being temporarily bonded by the adhesion nucleus;
The second ultrasonic horn is pressurized and ultrasonically vibrated to enlarge the plastic flow region at the interface between the joining portion of the first material to be joined and the joining portion of the second material to be joined. Process,
An ultrasonic bonding method characterized by comprising:   2. The ultrasonic wave according to claim 1, wherein the first ultrasonic horn has a plurality of concavo-convex portions formed on a pressure surface that contacts the first material to be bonded or the second material to be bonded. Joining method.   3. The supermarket according to claim 2, wherein the uneven portion includes a plurality of pyramidal or conical protrusions formed on the pressure surface and a trough formed between the protrusions. Sonic bonding method.   The ultrasonic bonding method according to claim 3, wherein the direction of the tip of the protrusion is inclined in a predetermined direction.   The pressing surface of the second ultrasonic horn that contacts the first material to be bonded or the second material to be bonded is configured such that a cross-sectional edge in a direction orthogonal to the vibration direction has a smooth curved portion. The ultrasonic bonding method according to any one of claims 1 to 4, wherein the ultrasonic bonding method is provided.   The ultrasonic joining method according to claim 5, wherein the smooth curved portion is configured by a part of an arc or a part of an ellipse.   The relationship between the first energy E1 applied to the first ultrasonic horn and the second energy E2 applied to the second ultrasonic horn is E1 <E2. The ultrasonic bonding method according to any one of claims 1 to 6. A joined body joined by the ultrasonic joining method according to any one of claims 1 to 7,
In the surface of the 1st to-be-joined material or the 2nd to-be-joined material, in the part where the 1st ultrasonic horn and the 2nd ultrasonic horn were press-contacted, the dot form by the 1st ultrasonic horn A joined body in which a linear second indentation by the second ultrasonic horn is formed on at least a part of the first indentation.