JP2018066987A - Annular film formation method, annular film formation tool, and annular film formation mask - Google Patents

Abstract

PROBLEM TO BE SOLVED: To form an annular thin film on a film formation object.SOLUTION: Masks (21 to 24) having a magnetic material or a magnet at least partially are disposed on one face of film formation objects (11 to 14). At the same time, magnets or magnetic bodies (31 to 34) that act with the magnetic material or the magnet of the masks (21 to 24) are disposed in the vicinity of the other face of film formation objects (11 to 14) and the masks (21 to 24) are made to come in contact with the film formation objects (11 to 14). Under such a state, a film formation material is deposited on aside of a face where the masks (21 to 24) of the film formation objects (11 to 14) are provided.SELECTED DRAWING: Figure 1

Description

  The present invention relates to an annular film forming method and an annular film forming tool and an annular film forming mask.

  The lens of the imaging device is provided with a light shielding film outside the effective diameter in addition to the antireflection film provided within the effective diameter in order to prevent unnecessary light from entering and multiple reflection in the lens system.

  Such a light shielding film needs to be formed only on the outer side except for the central portion of the lens. If the lens has a large effective diameter and is expensive, a wet process in which the film material is applied manually is also possible. On the other hand, a small camera lens mounted on a portable device or the like has a small shape, so that it is difficult to apply by hand, resulting in high cost.

  Further, in the wet process, the film thickness controllability is poor, and a film thickness of 1 μm or more is required. For this reason, the surface shape of the resin lens changes due to the stress of the thickly deposited film, which adversely affects the captured image.

  For mass production at low cost, it is desirable to deposit the light-shielding film material with good film thickness controllability by a vacuum process in a state where it is shielded with a mask so that the light-shielding film material is not deposited within the effective diameter of the lens.

JP 2015-225102 A

  When forming a light-shielding film by a vacuum process, since the film-forming area of the light-shielding film is annular, conventionally, a bridge that bridges the outer peripheral side and inner peripheral side of the film-forming area is formed, and a mask on the inner peripheral side is formed. It was necessary to hold. In this case, in the conventional machining, the mask body, the bridge, and the outer peripheral portion can be formed only on the same plane, and even if the bridge width is made as narrow as possible, a light shielding film cannot be formed on the bridge portion. . On the other hand, by using 3D modeling, it is possible to deposit a film on the entire surface of the annular film-forming area by bringing the bridge from the lens and entraining the film-forming material. However, the influence of the shadow due to the bridge is unavoidable, and there is a limit to the formation of a uniform film. Further, since the shape of the mask including the bridge is complicated, there is a problem that both the manufacturing difficulty and the manufacturing cost of the mask are high and the productivity is low.

  An object of the present invention is to solve such problems and to provide an annular film forming method, an annular film forming tool, and an annular film forming mask capable of forming an annular thin film with a simple structure and high accuracy. To do.

  According to the first aspect of the present invention, in a method for forming an annular thin film on a film formation target, a mask having a magnetic material or a magnet at least partially is disposed on one surface of the film formation target. In addition, a magnet or a magnetic body acting on the magnet is disposed in the vicinity of the other surface of the film formation object to bring the mask into contact with the film formation object, and in this state, the film formation object An annular film forming method is provided, wherein a film forming material is deposited on one surface.

  According to the second aspect of the present invention, a mask disposed on one surface of a film formation target for forming an annular thin film, and a holder for holding the film formation target from the opposite side of the one surface The mask has a magnetic material or magnet in at least a part thereof, and the holder acts on the mask magnetic material or magnet to place the mask at a predetermined position on the film formation target. An annular film-forming tool is provided.

  The magnet or magnetic body provided in the holder preferably has a shape in which the magnetic force is concentrated at one point toward the film formation target. Specifically, the shape is spherical, rod-shaped, or at least the hemisphere on the film formation target side. It is desirable to be. In this case, it is desirable that the holder has a structure that holds the magnet or the magnetic body and the film formation target so that the center of the film formation target matches the point where the magnetic force of the magnet or magnetic body of the holder is concentrated. .

  A magnetic material or a magnet is disposed at least in the center of the mask.

  The mask may be provided with a magnetic material along at least one direction in a plane parallel to the film formation target surface of the film formation target. In this case, the holder is provided with two magnetic poles of N and S at intervals corresponding to the length of the magnetic material of the mask. The magnetic material provided on the mask is provided in a substantially circular shape in a plane parallel to the film formation target surface, and the distance between the two magnetic poles of the holder preferably corresponds to the diameter of the circle. Here, “substantially” means that it may be an ellipse or a polygon deviated from a perfect circle when practically acceptable.

  When the film formation target is made of resin, it is desirable that at least a part of the surface in contact with the film formation target is resin.

  The mask has a shape in which the peripheral portion is in close contact with the film formation target, and the mask is thinned toward the peripheral portion so that film formation can be performed even when the deposition direction of the film formation material is oblique to the film formation target. The taper shape is desirable. Alternatively, the entire mask may be formed flat.

  According to the third aspect of the present invention, it is a mask for forming an annular thin film on a film formation target, and acts with a magnet or a magnetic body provided on a holder that holds the film formation target. There is provided a mask for forming an annular thin film characterized by having a magnetic material or a magnet at least partially.

  According to the fourth aspect of the present invention, it is a mask for forming an annular thin film on a film formation target, and acts with two magnetic poles N and S provided on a holder for holding the film formation target. Thus, an annular thin film forming mask is provided in which the magnetic material is provided along at least one direction in a plane parallel to the film formation target surface of the film formation target.

  The present invention is particularly suitable for use in forming a light-shielding film on a resin lens, but is not limited thereto, and can be widely used in any field for forming an annular thin film.

  According to the present invention, a highly accurate annular thin film can be formed with a simple configuration. By using a resin lens as a film formation target and using a mask that has been optimized according to the shape of the lens surface, a light shielding film can be formed with high shape accuracy outside the effective diameter of the resin lens.

It is sectional drawing which shows the cyclic | annular film-forming tool which concerns on embodiment of this invention. It is sectional drawing which shows an example of a resin lens as an example of the film-forming target object. It is sectional drawing which shows another example of a resin lens. It is sectional drawing which shows the various examples of the mask used with respect to one surface of the resin lens of FIG. It is sectional drawing which shows the example of the mask used with respect to the other surface of the resin lens of FIG. It is sectional drawing which shows the various examples of the mask used with respect to one surface of the resin lens of FIG. It is sectional drawing which shows the various examples of the mask used with respect to the other surface of the resin lens of FIG. It is sectional drawing which shows another example of a mask. It is sectional drawing which shows another example of a mask. It is sectional drawing which shows another example of a mask. It is sectional drawing which shows the structural example of a film-form mask, and shows the example which provided the magnetic material only in the center of the mask. It is sectional drawing which shows another structural example of a film-form mask, and shows the example which provided the magnetic material in the mask whole surface. It is a modification of the embodiment shown in FIG. 1, and is a cross-sectional view showing an example using a magnet having a small diameter. It is a modification of embodiment shown in FIG. 1, and is sectional drawing which shows the example using a rod-shaped magnet. It is a modification of embodiment shown in FIG. 1, and is sectional drawing which shows the example using a cylindrical magnet with both ends spherical. It is sectional drawing which shows the modification of embodiment shown in FIG. 1, and shows the example which has arrange | positioned two magnetic poles of N and S in a holder. FIG. 17 is a cross-sectional view showing a further modification of the example shown in FIG. 16 and shows an example in which two magnetic poles of N and S are realized by one magnet. It is sectional drawing which shows the further modification of the example shown in FIG. 16, and shows the example using a flat thing as a mask. It is sectional drawing which shows the further modification of the example shown in FIG. 17, and shows the example using a flat thing as a mask.

  FIG. 1 is a sectional view showing an annular film forming tool according to an embodiment of the present invention. Here, a configuration for forming a light shielding film on the outside of the effective diameter of a resin lens of a small camera for portable devices will be described as an example.

  This annular film-forming tool includes masks 21 to 24 arranged on one surface of each of lenses 11 to 14 which are film formation objects on which an annular thin film is to be formed, and surfaces on which the masks 21 to 24 are arranged. And a holder 40 that holds the lenses 11 to 14 from the opposite side. Here, the masks 21 to 24 have magnetic materials or magnets at least in part thereof, and the holders 40 act on the magnetic materials or magnets of the masks 21 to 24 so that the masks 21 to 24 are formed. Magnets 31 to 34 are provided as magnets or magnetic bodies arranged at predetermined positions. The magnets 31 to 34 are fitted into holes provided on the side opposite to the lenses 11 to 14 of the holder 40 and are fixed by the cover 50.

  In this embodiment, the masks 21 to 24 are made of a magnetic material, for example, a plastic material in which a magnetic material is dispersed. Moreover, as this magnet 31-34, a spherical ball magnet is used in this embodiment. Since spherical magnets are used as the magnets 31 to 34, the magnetic flux density is increased at the center, and the distance from the masks 21 to 24 is increased and the magnetic force is weakened at the periphery. It can be made to correspond to the center position of 31-34. Even if the positions of the masks 21 to 24 that are in contact with the lenses 11 to 14 are shifted from the outside due to some force, the masks 21 to 24 are returned so that the centers thereof coincide with the centers of the magnets 31 to 34, and the positions are stably maintained. The

  Film formation is performed by a vacuum process. That is, the masks 21 to 24 are disposed on one surface of the lenses 11 to 14, and the magnets 31 to 34 are disposed in the vicinity of the other surface of the film formation target to contact the masks 21 to 24 with the lenses 11 to 14. In this state, a film forming material is deposited on the surface of the lenses 11 to 14 on the side where the masks 21 to 24 are arranged.

  In a practical vacuum process, a dome-shaped rotary holder is provided in a vacuum chamber, and a large number of annular film forming tools in the state shown in FIG. 1 are attached to the rotary holder. And the film-forming material is vapor-deposited from the vapor deposition source of the position shifted from the rotation center of the rotary holder. By rotating the rotary holder, the positional relationship of each film formation target (lenses 11 to 14) with the evaporation source changes, and the film formation target is evenly formed. At this time, the deposition direction of the film-forming material on the film-forming target changes, and there are few components that are vertically deposited. Therefore, each of the masks 21 to 24 has a shape in which the peripheral portion is in close contact with the lenses 11 to 14 so that the deposition can be performed even when the deposition direction of the deposition material is oblique to the deposition target. The taper shape is preferably thinner toward the periphery.

  FIG. 2 is a cross-sectional view illustrating an example of a film formation target, and FIG. 3 is a cross-sectional view illustrating another example. 2 and 3 both show the structure of the resin lens. In these drawings, the outer diameter of the lens including the portion held by the housing is represented by φ1, and the effective diameter is represented by φ2-1 and φ2-2. A light shielding film is applied outside the effective diameters φ2-1 and φ2-2. In the figure, for the sake of simplicity, the immediate outside of the effective diameters φ2-1 and φ2-2 is shown as a light shielding area, but in reality, the light shielding areas are provided a little away from the effective diameters φ2-1 and φ2-2. The outermost periphery of the lens is a portion hidden by the housing, and light shielding is unnecessary. The effective diameter, the inner diameter and the outer diameter of the light shielding area are generally different on both sides of the lens. Therefore, the diameters of the masks 21 to 24 need to be matched with the inner diameter of the light shielding area for each of the lenses 11 to 14.

  4 is a cross-sectional view showing various examples of a mask used for one surface of the resin lens of FIG. These examples are the same as those shown as the lens 11 and the mask 21 in FIG. FIG. 4A shows the mask as 21a, which is equivalent to the mask 21 of FIG. The mask 21 a has a convex shape in accordance with the concave surface of the lens 11, and the peripheral portion is in contact with the lens 11. In this example, a square portion is provided on the opposite side of the mask 21a from the lens 11. This is due to manufacturing and handling reasons and is not related to film formation itself. The same applies to the following examples. In the mask 21b shown in FIG. 4B, the side facing the lens 11 is flat. A mask 21c shown in FIG. 4C is provided with a convex portion at the center of the mask 21b. This convex portion concentrates the magnetic force from the magnet, and can increase the positioning accuracy. A mask 21d shown in FIG. 4D is provided with a protrusion at the periphery. A mask 21e shown in FIG. 4E is obtained by providing a convex portion similar to the mask 21c at the center of the mask 21d shown in FIG.

  FIG. 5 is a cross-sectional view showing an example of a mask used for the other surface of the resin lens of FIG. These examples are equivalent to or modifications of those shown as lens 12 and mask 22 in FIG. FIG. 5A shows the mask as 22a, which is equivalent to the mask 22 of FIG. The mask 22 a has a concave shape in accordance with the convex surface of the lens 12, and a peripheral portion has a shape in contact with the lens 12. The mask 22b shown in FIG. 5B has the same shape as the mask 21d, the surface facing the lens 12 is flat, and a protrusion is provided at the periphery.

  6 is a cross-sectional view showing various examples of masks used for one surface of the resin lens of FIG. These examples are the same as those shown as the lens 13 and the mask 23 in FIG. FIG. 6A shows the mask as 23a, which is equivalent to the mask 23 of FIG. The mask 23 a has a convex shape that matches the concave surface of the lens 13, and a peripheral portion is in contact with the lens 13. In the mask 23b shown in FIG. 6B, the side facing the lens 13 is flat. A mask 23c shown in FIG. 6C has a convex portion at the center of the mask 23b. The mask 23d shown in FIG. 6D is provided with a protrusion at the periphery. A mask 23e shown in FIG. 6E is obtained by providing a convex portion similar to the mask 23c at the center of the mask 23d shown in FIG.

  7 is a cross-sectional view showing various examples of masks used for the other surface of the resin lens of FIG. These examples are equivalent to or modifications of those shown as lens 14 and mask 24 in FIG. FIG. 7A shows the mask as 24a, which is equivalent to the mask 24 of FIG. The mask 24 a has a concave shape while the surface of the lens 14 is a flat surface, and a peripheral portion is in contact with the lens 14. A mask 24b shown in FIG. 7B has a convex portion provided at the center of the mask 24a. The mask 24c shown in FIG. 7C has a flat side facing the lens 13 like the masks 21b and 23b. As in the masks 22b and 23d, the mask 24d shown in FIG. 7D has a flat surface facing the lens 13 and is provided with a protrusion at the periphery. A mask 24e shown in FIG. 7E is provided with a convex portion at the center of the mask 24c, like the masks 21e and 23e.

  Any material may be used as the mask material described above as long as it is a magnetic material. For example, it is possible to use a resin lens-molded waste material mixed with a magnetic material and molded. When molding a lens, an extra part is inevitably generated. This can be reused as a mask material.

  In the above description, the entire mask is made of a magnetic material, but only a part of the mask may be made of a magnetic material. Moreover, it is also possible to use a combination of materials having different magnetic properties. For example, a magnetic material may be embedded in the center of a mask made of a nonmagnetic material, a magnetic material may be embedded in the center of the mask, and a magnetic material portion may be provided on the surface of the mask, particularly on the lens side. A magnetic material having different characteristics can be embedded in the mask made of magnetic material, or a magnetic material portion can be provided on the surface. Furthermore, a magnet can be embedded in a mask made of nonmagnetic material or magnetic material with a polarity attracting each other with the magnets 31 to 34, or a magnet can be provided on the surface with the same polarity. Furthermore, when at least a part of the mask is a magnet, a magnetic material can be used instead of the magnets 31 to 34.

  FIGS. 8 to 10 are cross-sectional views showing examples in which magnets are embedded in masks made of nonmagnetic material or magnetic material with polarities attracting magnets 31 to 34, respectively. FIG. 8 shows a configuration in which a rod-shaped magnet is provided at the center of the mask, FIG. 9 shows a configuration in which a magnet is provided not only in the center of the mask but also on the surface facing the film formation target, and FIG. The structure which provided the magnet only in the film-forming target side of the center of a mask is shown.

  A mask 25a shown in FIG. 8A has a flat surface facing a film formation target, a convex portion provided at the center thereof, and a rod-shaped magnet 201 embedded therein. Further, the mask 25b shown in FIG. 8B has a shape in which a peripheral portion protrudes, a convex portion is provided at the center, and a rod-shaped magnet 201 is embedded in the portion of the convex portion. In the figure, the film formation object side is shown as the S pole, but this is based on the assumption that the magnetic pole of the opposing magnet is the N pole. If the magnet side is the S pole, naturally the film formation object side of the magnet 201 is N pole.

  The mask 26a shown in FIG. 9A has the same shape as the mask 25a shown in FIG. 8A, but the magnet 202 is also provided on the surface facing the film formation target. A mask 26b shown in FIG. 9B has the same shape as the mask 25b shown in FIG. 8B, except that a magnet 202 is also provided on the surface facing the film formation target. .

  The mask 27a shown in FIG. 10A is different from the mask 25a shown in FIG. 8A in that the side facing the film formation target is flat and the magnet 203 is provided only on the surface portion of the surface. . The mask 27b illustrated in FIG. 10B is different from the mask 27a illustrated in FIG. 10A in that the side facing the film formation target is a concave surface.

  In each of the structures shown in FIGS. 8 to 10, a magnetic material different from the material of the mask body may be used instead of the magnets 201, 202, 203 regardless of whether the mask body is a magnetic material or a non-magnetic material. it can. By subjecting the lens-side surfaces of the masks 25a, 25b, 26a, 26b, and 27a to a surface treatment using a soft material such as a fluororesin, it is possible to prevent the surface of the film formation target from being damaged. In the embodiment, a resin is used as the nonmagnetic material, but the material may be appropriately selected.

  In the above description, an inverted conical mask has been described as an example, but the mask shape may be a flat film. Although it is “film-like”, it is assumed that there is a thickness capable of maintaining the shape as a mask. The mask is a consumable that can be used only once, so if it can be made of film, the cost can be reduced.

  FIG. 11 is a cross-sectional view showing a configuration example of a film-like mask, and shows an example in which a magnetic material is provided only at the center of the mask. A mask 28 </ b> A shown in FIG. 11A has a structure in which a magnetic material 281 is sandwiched between two nonmagnetic material films 282. The magnetic material 281 is disposed at the center of the nonmagnetic material film. By providing the magnetic material 281 only at the center of the nonmagnetic material film 282, the mask 28a can be fixed at a predetermined position and orientation. A mask 28b illustrated in FIG. 11B illustrates an example in which the nonmagnetic material film 282 on the side opposite to the film formation target side of the mask 28a illustrated in FIG. The lens-side nonmagnetic material film 282 can be prevented from scratching the surface of the film formation target even when a hard material is used as the magnetic material 181 by using, for example, a resin. .

  FIG. 12 is a cross-sectional view showing another configuration example of the film-like mask, and shows an example in which a magnetic material is provided on the entire surface of the mask. A mask 29 a shown in FIG. 12A has a structure in which a magnetic material 291 is sandwiched between two nonmagnetic material films 292. The magnetic material 291 is provided on the entire surface of the mask 29a. Compared to the example shown in FIG. 11, the positioning of the mask 28b with respect to the film formation target may be difficult, but the manufacturing becomes easy. A mask 29b illustrated in FIG. 12B illustrates an example in which the nonmagnetic material film 292 on the opposite side of the mask 29a illustrated in FIG. A mask 29c shown in FIG. 12C is entirely formed of a film-like magnetic material 291. It is desirable to use, for example, a resin for at least the film formation target side of the nonmagnetic material films 282 and 292. By using a resin, even when a hard material is used as the magnetic materials 281 and 291, it is possible to prevent the surface of the film formation target from being damaged. As the magnetic material 291 of the mask 29c shown in FIG. 12C, any material may be used as long as it does not damage the film formation target.

  FIG. 13 is a cross-sectional view showing a modification of the embodiment shown in FIG. 1, and shows only portions related to the lenses 11 and 12 in FIG. In this example, magnets 31 a and 32 a having a small diameter are used instead of the magnets 31 and 31. Although the magnetic force may be reduced, the accuracy of the center position is increased.

  FIG. 14 is a cross-sectional view showing a modification of the embodiment shown in FIG. 1, and shows an example using rod-like magnets 31b and 32b. By using the elongated magnets 31b and 32b, the center position accuracy can be increased while maintaining the magnetic force.

  FIG. 15 is a cross-sectional view showing a modification of the embodiment shown in FIG. 1, and shows an example using magnets 31c and 32c having both ends spherical on a cylinder, that is, medicinal capsules.

  For example, when magnets 25a, 26a, 27b, and 28b are provided on the mask as shown in FIGS. 8 to 10, or when magnets are used as the magnetic materials 281 and 291 shown in FIGS. Magnetic materials can also be used instead of ˜34, 31a˜31c, and 32a˜32c.

  FIG. 16 is a cross-sectional view showing a modification of the embodiment shown in FIG. 1, and shows an example in which two magnetic poles N and S are arranged in a holder. In this figure, the hatching of the holder portion is omitted for clarity.

  If there is one magnetic pole in the holder for each of the masks (here, only masks 21 and 22), depending on the magnetic force, the shape of the mask, and the weight of the mask, the mask will turn over and become a magnet. There is a possibility that the magnetic force concentrates on the edge portion of the mask or is in contact with the film formation target with the mask standing. Therefore, in the example shown in FIG. 16, magnets 311 and 312 and magnets 321 and 322 are used for the masks 21 and 22, respectively. In this case, the magnetic material is applied to the masks 21 and 22 in at least one direction in a plane parallel to the film formation target surface of the film formation target so as to act on the N and S magnetic poles provided on the holder. , Preferably in a substantially circular manner in its plane. The holder is provided with two magnetic poles of N and S by the magnets 311 and 312 for the mask 21 and two magnetic poles of N and S by the magnets 321 and 322 for the mask 22, respectively.

  The distance between the two magnetic poles preferably corresponds to the length of the magnetic material in the masks 21 and 22. For example, when the magnetic material is dispersed throughout the masks 21 and 22, it is desirable that the distance between the magnets 311 and 312 is equal to the diameter of the mask 21 and the distance between the magnets 321 and 322 is equal to the diameter of the mask 22. This is because the lines of magnetic force concentrate on the inner edges of the magnets 311 and 312 and the inner edges of the magnets 321 and 322, respectively, so that the masks 21 and 22 can be accurately placed at desired positions.

  However, practically, as described with reference to FIGS. 2 and 3, the diameter required for the masks 21 and 22 differs depending on the effective diameter of the lens that is the film formation target. For this reason, even when the same holder is used, masks having different diameters may be used as the masks 21 and 22. Even when the masks have different diameters, if the length or diameter of the magnetic material portion included in the mask is constant, the mask can always be disposed at an optimal position even if the magnetic pole spacing is fixed. However, in order to manufacture the mask at a low cost, it is desirable to disperse the magnetic material throughout the mask. In that case, the interval between the magnets is set in consideration of an allowable error range. It is considered that the mask can be disposed at an appropriate position when the magnet interval is smaller than the mask diameter, as compared with the case where the magnet spacing is larger.

  FIG. 17 is a sectional view showing a further modification of the example shown in FIG. 16 and showing an example in which two magnetic poles of N and S are realized by one magnet 313,323. The lengths of the magnets 313 and 323 (in the horizontal direction in the drawing) correspond to the diameters of the masks 21 and 22, respectively. Each of the magnets 313 and 323 may be a bar magnet that is long in the horizontal direction of the drawing, or may be a circular magnet having N and S at both ends in the plane, or a U-shaped magnet.

  18 and 19 are cross-sectional views showing further modifications of the examples shown in FIGS. 16 and 17, respectively. In these examples, instead of the inverted conical masks 21 and 22, masks 211 and 221 that are entirely flat are used. The masks 211 and 221 are made of metal plates, which are magnetic materials. However, the masks 211 and 221 may be formed by flatly molding the magnetic material, or by attaching a magnetic material to a resin film as shown in FIG. May be. Although a flat mask is used in the embodiment, a mask obtained by bending a magnetic material along the lens 12 may be used. The surfaces of the masks 211 and 221 that are in contact with the lens 12 are preferably resin surfaces, and the surface of the metal plate may be coated with resin.

  In the examples on the right side of FIGS. 18 and 19, in order to clarify that the mask 221 is flat, the end of the mask 221 is a lens that is convex in the direction of the mask 221. It is shown as floating from 12. By forming the mask 221 with a flexible material, the mask 221 can be bent along the shape of the lens 12 and can be brought into close contact with the lens 12.

  According to the embodiment described above, the entire annular film formation area can be exposed to the film formation source, so that there is an effect that a uniform light shielding film can be formed. Further, the light shielding film can be formed with high shape accuracy by accurately fixing and holding the mask at a desired position. Furthermore, since the structure does not have a bridge, it is possible to improve both the difficulty of manufacturing the mask and the manufacturing cost, thereby contributing to an improvement in productivity.

  In the above description, the case where the light shielding film is formed on the resin lens has been described as an example. However, the present invention can be similarly used to form other annular films.

11-14, lenses 21-24, 21a-21e, 22a, 22b, 23a-23e, 24a-24e, 25a, 25b, 26a, 26b, 27a, 27b, 28a, 28b, 29a-29c, 211, 221 mask 31 34, 25a, 26a, 27b, 28b, 31a, 32b, 31b, 32b, 31c, 32c, 311, 312, 321, 322, 313, 323 Magnet 40 Holder 50 Cover

Claims (14)

In an annular thin film forming method for forming an annular thin film on a film formation target,
A mask having a magnetic material or a magnet at least partially disposed on one surface of the film formation target, and a magnet or a magnetic body acting on the magnetic material or magnet in the vicinity of the other surface of the film formation target To place the mask in contact with the film formation target,
In this state, a film forming material is deposited on the one surface of the film forming object. A mask disposed on one surface of the object to be formed to form an annular thin film;
A holder for holding the film formation object from the opposite side of the one surface;
With
The mask has a magnetic material or magnet in at least a part thereof,
The annular film-forming tool, wherein the holder is provided with a magnet or a magnetic body that acts on the magnetic material or the magnet to place the mask at a predetermined position of the film-forming target. The annular film-forming tool according to claim 2,
The said magnet or a magnetic body is a shape where magnetic force concentrates on one point toward the said film-forming target object. The cyclic | annular film-forming tool characterized by the above-mentioned. The annular film-forming tool according to claim 3,
The annular film-forming tool, wherein the magnet or the magnetic body is spherical, rod-shaped, or has a hemispherical shape at least on the film-forming target side. The annular film-forming tool according to claim 2,
The holder has a structure for holding the magnet or the magnetic body and the film formation target so that the center of the film formation target and the point where the magnetic force of the magnet or magnetic body is concentrated coincide. An annular film forming tool. In the annular film-forming tool according to any one of claims 2 to 5,
The annular film forming tool, wherein the mask has a magnetic material or a magnet arranged at least in the center thereof. The annular film-forming tool according to claim 2,
In the mask, the magnetic material is provided along at least one direction in a plane parallel to the film formation target surface of the film formation target,
The annular film-forming tool, wherein two magnetic poles of N and S are provided on the holder at intervals corresponding to the length of the magnetic material of the mask. In the annular film-forming tool according to claim 7,
The magnetic material provided on the mask is provided in a substantially circular shape in the parallel plane,
The space between the two magnetic poles corresponds to the diameter of the circle. The annular film-forming tool according to any one of claims 2 to 8,
The annular film-formation tool characterized in that at least a part of the surface of the mask that contacts the film-formation target is a resin. In the annular film-forming tool according to any one of claims 2 to 9,
The mask has a shape in which the peripheral portion is in close contact with the film formation target, and the mask is formed on the peripheral portion so that film formation can be performed even when the deposition direction of the film formation material is oblique to the film formation target. An annular film forming tool characterized by having a tapered shape that becomes thinner toward the surface. In the annular film-forming tool according to any one of claims 2 to 9,
The annular film-forming tool, wherein the mask is entirely formed as a whole. The annular film-forming tool according to any one of claims 2 to 11,
The annular film forming tool, wherein the film formation target is a resin lens, and the mask is a resin mask for forming a light shielding film outside the effective diameter of the resin lens. A mask for forming an annular thin film on a film formation target,
A mask for forming an annular thin film, comprising at least a part of a magnetic material or a magnet so as to act on a magnet or a magnetic body provided on a holder for holding the film formation target. A mask for forming an annular thin film on a film formation target,
The magnetic material moves along at least one direction in a plane parallel to the film formation target surface of the film formation target so as to act on the two magnetic poles N and S provided on the holder that holds the film formation target. An annular thin film forming mask characterized by being provided.

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